DE102009059260B4 - Versetzungssensor - Google Patents

Versetzungssensor Download PDF

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Publication number
DE102009059260B4
DE102009059260B4 DE102009059260A DE102009059260A DE102009059260B4 DE 102009059260 B4 DE102009059260 B4 DE 102009059260B4 DE 102009059260 A DE102009059260 A DE 102009059260A DE 102009059260 A DE102009059260 A DE 102009059260A DE 102009059260 B4 DE102009059260 B4 DE 102009059260B4
Authority
DE
Germany
Prior art keywords
light
unit
objective lens
opening
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102009059260A
Other languages
German (de)
English (en)
Other versions
DE102009059260A1 (de
Inventor
Takahiro Suga
Hiroaki Takimasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Publication of DE102009059260A1 publication Critical patent/DE102009059260A1/de
Application granted granted Critical
Publication of DE102009059260B4 publication Critical patent/DE102009059260B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0242—Control or determination of height or angle information of sensors or receivers; Goniophotometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0448—Adjustable, e.g. focussing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
DE102009059260A 2008-12-26 2009-12-22 Versetzungssensor Expired - Fee Related DE102009059260B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-332707 2008-12-26
JP2008332707A JP2010151745A (ja) 2008-12-26 2008-12-26 変位センサ

Publications (2)

Publication Number Publication Date
DE102009059260A1 DE102009059260A1 (de) 2010-09-23
DE102009059260B4 true DE102009059260B4 (de) 2012-10-04

Family

ID=42311491

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009059260A Expired - Fee Related DE102009059260B4 (de) 2008-12-26 2009-12-22 Versetzungssensor

Country Status (3)

Country Link
US (1) US8107088B2 (enExample)
JP (1) JP2010151745A (enExample)
DE (1) DE102009059260B4 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103134437B (zh) * 2011-11-29 2016-06-15 英业达股份有限公司 测试治具及测试方法
WO2013096660A1 (en) * 2011-12-23 2013-06-27 Rudolph Technologies, Inc. On-axis focus sensor and method
WO2016088203A1 (ja) * 2014-12-02 2016-06-09 三菱電機株式会社 変位センサ、変位検出装置及び変位検出方法
CN105066875B (zh) * 2015-07-20 2017-09-15 天津大学 一种具有柔性薄膜微波应变pin二极管阵列的检测器
US10600174B2 (en) * 2015-12-29 2020-03-24 Test Research, Inc. Optical inspection apparatus
KR102618813B1 (ko) * 2016-01-27 2023-12-27 삼성전자주식회사 공정 챔버 모니터링 장치
US10574852B2 (en) * 2018-01-12 2020-02-25 Seiko Epson Corporation Imaging optical mechanism, reading module, and image reading apparatus
DE102018126009B4 (de) * 2018-10-19 2022-05-19 Leica Microsystems Cms Gmbh Verfahren und Mikroskop zur Bestimmung der Dicke eines Deck- oder Tragglases
JP6986235B2 (ja) 2018-12-20 2021-12-22 オムロン株式会社 共焦点センサ
CN116689952A (zh) * 2023-06-30 2023-09-05 深圳市圭华智能科技有限公司 用于激光精密加工的同轴对焦系统及安装方法、对焦方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07113617A (ja) * 1993-10-14 1995-05-02 Keyence Corp 変位計及び変位測定方法、厚み計
JPH0926545A (ja) * 1995-07-13 1997-01-28 Yokogawa Electric Corp 共焦点光スキャナ
JP2002213914A (ja) * 2001-01-11 2002-07-31 Korea Advanced Inst Of Sci Technol 共焦点原理の単位変位センサを用いた超精密変位測定器及び多様な変位測定方法
JP2007121122A (ja) * 2005-10-28 2007-05-17 Omron Corp 変位センサ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105415A (ja) * 1984-10-29 1986-05-23 Mitsubishi Electric Corp 距離計測装置
JPH0861939A (ja) * 1994-08-19 1996-03-08 Nikon Corp 基板ホルダの表面状態測定方法及び装置
JPH09127420A (ja) * 1995-11-02 1997-05-16 Takaoka Electric Mfg Co Ltd 共焦点走査顕微鏡の走査装置
JP4115624B2 (ja) * 1999-04-27 2008-07-09 オリンパス株式会社 ３次元形状測定装置
JP2001021330A (ja) * 1999-07-12 2001-01-26 Totsuka Tadao 共焦点装置のスリット円盤、共焦点装置および共焦点装置の画像測定方法
JP2001091844A (ja) * 1999-09-22 2001-04-06 Olympus Optical Co Ltd 共焦点走査型顕微鏡
JP2002213814A (ja) 2001-01-15 2002-07-31 Noritz Corp 風呂システムの制御方法及びこの制御方法を実施する風呂釜装置
JP2003337008A (ja) * 2002-05-21 2003-11-28 Canon Inc 変位計
JP2004286608A (ja) * 2003-03-24 2004-10-14 Olympus Corp 共焦点高さ測定装置
JP2005195539A (ja) * 2004-01-09 2005-07-21 Nikon Corp 光学測定装置
JP4213599B2 (ja) * 2004-01-28 2009-01-21 株式会社東芝 光学式計測方法および装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07113617A (ja) * 1993-10-14 1995-05-02 Keyence Corp 変位計及び変位測定方法、厚み計
JPH0926545A (ja) * 1995-07-13 1997-01-28 Yokogawa Electric Corp 共焦点光スキャナ
JP2002213914A (ja) * 2001-01-11 2002-07-31 Korea Advanced Inst Of Sci Technol 共焦点原理の単位変位センサを用いた超精密変位測定器及び多様な変位測定方法
DE10132844A1 (de) * 2001-01-11 2002-08-01 Korea Advanced Inst Sci & Tech Hochpräzise Verschiebungsmessvorrichtung und hochpräzises Verschiebungsmessverfahren unter Verwendung einer auf der konfokalen Theorie basierenden Verschiebungssensoreinheit
JP2007121122A (ja) * 2005-10-28 2007-05-17 Omron Corp 変位センサ

Also Published As

Publication number Publication date
JP2010151745A (ja) 2010-07-08
DE102009059260A1 (de) 2010-09-23
US20100171955A1 (en) 2010-07-08
US8107088B2 (en) 2012-01-31

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Legal Events

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OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R082 Change of representative

Representative=s name: KILIAN KILIAN & PARTNER, DE

Representative=s name: KILIAN KILIAN & PARTNER MBB PATENTANWAELTE, DE

R020 Patent grant now final

Effective date: 20130105

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee