DE102008042917A1 - Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik - Google Patents

Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik Download PDF

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Publication number
DE102008042917A1
DE102008042917A1 DE200810042917 DE102008042917A DE102008042917A1 DE 102008042917 A1 DE102008042917 A1 DE 102008042917A1 DE 200810042917 DE200810042917 DE 200810042917 DE 102008042917 A DE102008042917 A DE 102008042917A DE 102008042917 A1 DE102008042917 A1 DE 102008042917A1
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Germany
Prior art keywords
imaging optics
plane
mirrors
imaging
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE200810042917
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German (de)
English (en)
Inventor
Hans-Jürgen Dr. Mann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
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Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to DE200810042917 priority Critical patent/DE102008042917A1/de
Publication of DE102008042917A1 publication Critical patent/DE102008042917A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0652—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE200810042917 2007-10-26 2008-10-16 Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik Withdrawn DE102008042917A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE200810042917 DE102008042917A1 (de) 2007-10-26 2008-10-16 Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007051670.5 2007-10-26
DE102007051670 2007-10-26
DE200810042917 DE102008042917A1 (de) 2007-10-26 2008-10-16 Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik

Publications (1)

Publication Number Publication Date
DE102008042917A1 true DE102008042917A1 (de) 2009-04-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE200810042917 Withdrawn DE102008042917A1 (de) 2007-10-26 2008-10-16 Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik

Country Status (8)

Country Link
US (3) US8576376B2 (https=)
EP (2) EP2203787B1 (https=)
JP (1) JP5337159B2 (https=)
KR (2) KR101592136B1 (https=)
CN (2) CN101836164B (https=)
DE (1) DE102008042917A1 (https=)
TW (1) TWI391704B (https=)
WO (1) WO2009052932A1 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009046685A1 (de) * 2009-11-13 2011-05-26 Carl Zeiss Smt Gmbh Abbildende Optik
WO2011073039A2 (en) 2009-12-14 2011-06-23 Carl Zeiss Smt Gmbh Imaging optics
WO2013174686A1 (en) * 2012-05-25 2013-11-28 Carl Zeiss Smt Gmbh Imaging optical system and projection exposure installation
US9625827B2 (en) 2014-11-21 2017-04-18 Carl Zeiss Smt Gmbh Imaging optical unit for EUV projection lithography
WO2017080926A1 (de) * 2015-11-09 2017-05-18 Carl Zeiss Smt Gmbh Abbildende optik zur abbildung eines objektfeldes in ein bildfeld sowie projektionsbelichtungsanlage mit einer derartigen abbildenden optik

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101542272B1 (ko) 2007-10-26 2015-08-06 칼 짜이스 에스엠티 게엠베하 결상 광학 시스템 및 이러한 유형의 결상 광학 시스템을 구비하는 마이크로리소그래피용 투영 노광 장치
DE102007051671A1 (de) 2007-10-26 2009-05-07 Carl Zeiss Smt Ag Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik
EP2203787B1 (en) 2007-10-26 2014-05-14 Carl Zeiss SMT GmbH Imaging optical system and projection exposure installation for micro-lithography with an imaging optical system of this type
DE102010001336B3 (de) 2010-01-28 2011-07-28 Carl Zeiss SMT GmbH, 73447 Anordnung und Verfahren zur Charakterisierung der Polarisationseigenschaften eines optischen Systems
CN103038690B (zh) 2010-07-30 2016-08-03 卡尔蔡司Smt有限责任公司 成像光学系统以及具有该类型成像光学系统的用于微光刻的投射曝光设备
DE102010039745A1 (de) * 2010-08-25 2012-03-01 Carl Zeiss Smt Gmbh Abbildende Optik
DE102010043498A1 (de) * 2010-11-05 2012-05-10 Carl Zeiss Smt Gmbh Projektionsobjektiv einer für EUV ausgelegten mikrolithographischen Projektionsbelichtungsanlage, sowie Verfahren zum optischen Justieren eines Projektionsobjektives
DE102011076752A1 (de) 2011-05-31 2012-12-06 Carl Zeiss Smt Gmbh Abbildende Optik
US9448343B2 (en) * 2013-03-15 2016-09-20 Kla-Tencor Corporation Segmented mirror apparatus for imaging and method of using the same
CN108152940B (zh) * 2016-12-05 2021-04-27 佳能株式会社 反射折射光学系统、照明光学系统、曝光装置
DE102017215664A1 (de) 2017-09-06 2019-03-07 Carl Zeiss Smt Gmbh Optisches System für eine Projektionsbelichtungsanlage
US10533823B1 (en) * 2018-10-27 2020-01-14 Lewis Smith Tension gun for firing arrows
JP2022096461A (ja) * 2020-12-17 2022-06-29 キヤノン株式会社 光学系及び面分光装置
DE102024203605A1 (de) * 2024-04-18 2025-10-23 Carl Zeiss Smt Gmbh Abbildende Optik für die Projektionslithographie

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WO2006069725A1 (de) 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges objektiv mit obskurierter pupille
US20060232867A1 (en) 2004-12-23 2006-10-19 Hans-Jurgen Mann Catoptric objectives and systems using catoptric objectives
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EP2203787B1 (en) * 2007-10-26 2014-05-14 Carl Zeiss SMT GmbH Imaging optical system and projection exposure installation for micro-lithography with an imaging optical system of this type
DE102007051671A1 (de) * 2007-10-26 2009-05-07 Carl Zeiss Smt Ag Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9201226B2 (en) 2009-11-13 2015-12-01 Carl Zeiss Smt Gmbh Imaging optics
DE102009046685A1 (de) * 2009-11-13 2011-05-26 Carl Zeiss Smt Gmbh Abbildende Optik
CN102754009B (zh) * 2009-12-14 2016-02-17 卡尔蔡司Smt有限责任公司 成像光学部件
CN102754009A (zh) * 2009-12-14 2012-10-24 卡尔蔡司Smt有限责任公司 成像光学部件
WO2011073039A3 (en) * 2009-12-14 2011-09-29 Carl Zeiss Smt Gmbh Imaging optics
WO2011073039A2 (en) 2009-12-14 2011-06-23 Carl Zeiss Smt Gmbh Imaging optics
WO2013174686A1 (en) * 2012-05-25 2013-11-28 Carl Zeiss Smt Gmbh Imaging optical system and projection exposure installation
US10139734B2 (en) 2012-05-25 2018-11-27 Carl Zeiss Smt Gmbh Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit
US9625827B2 (en) 2014-11-21 2017-04-18 Carl Zeiss Smt Gmbh Imaging optical unit for EUV projection lithography
US9835953B2 (en) 2014-11-21 2017-12-05 Carl Zeiss Smt Gmbh Imaging optical unit for EUV projection lithography
US10191386B2 (en) 2014-11-21 2019-01-29 Carl Zeiss Smt Gmbh Imaging optical unit for EUV projection lithography
WO2017080926A1 (de) * 2015-11-09 2017-05-18 Carl Zeiss Smt Gmbh Abbildende optik zur abbildung eines objektfeldes in ein bildfeld sowie projektionsbelichtungsanlage mit einer derartigen abbildenden optik
CN108351499A (zh) * 2015-11-09 2018-07-31 卡尔蔡司Smt有限责任公司 将物场成像到像场中的成像光学单元以及包括这样的成像光学单元的投射曝光设备
US10254653B2 (en) 2015-11-09 2019-04-09 Carl Zeiss Smt Gmbh Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit
CN108351499B (zh) * 2015-11-09 2021-04-09 卡尔蔡司Smt有限责任公司 将物场成像到像场中的成像光学单元以及包括这样的成像光学单元的投射曝光设备

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Publication number Publication date
CN101836164A (zh) 2010-09-15
TW200921145A (en) 2009-05-16
JP5337159B2 (ja) 2013-11-06
US20160004165A1 (en) 2016-01-07
KR101592136B1 (ko) 2016-02-04
WO2009052932A1 (en) 2009-04-30
EP2203787A1 (en) 2010-07-07
EP2533104B1 (en) 2016-05-11
EP2203787B1 (en) 2014-05-14
CN102819197A (zh) 2012-12-12
CN102819197B (zh) 2016-06-22
TWI391704B (zh) 2013-04-01
US20100231885A1 (en) 2010-09-16
JP2011502347A (ja) 2011-01-20
KR101515663B1 (ko) 2015-04-27
US20140036246A1 (en) 2014-02-06
CN101836164B (zh) 2013-03-13
US9152056B2 (en) 2015-10-06
US8576376B2 (en) 2013-11-05
KR20150006019A (ko) 2015-01-15
KR20100102586A (ko) 2010-09-24
EP2533104A1 (en) 2012-12-12

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