DE102008041943A1 - Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung - Google Patents

Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung Download PDF

Info

Publication number
DE102008041943A1
DE102008041943A1 DE102008041943A DE102008041943A DE102008041943A1 DE 102008041943 A1 DE102008041943 A1 DE 102008041943A1 DE 102008041943 A DE102008041943 A DE 102008041943A DE 102008041943 A DE102008041943 A DE 102008041943A DE 102008041943 A1 DE102008041943 A1 DE 102008041943A1
Authority
DE
Germany
Prior art keywords
substrate
sensor arrangement
cavern
membrane
connection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102008041943A
Other languages
German (de)
English (en)
Inventor
Frank Klopf
Arno Stoetzler
Juergen Kober
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102008041943A priority Critical patent/DE102008041943A1/de
Priority to US12/555,587 priority patent/US8375796B2/en
Priority to FR0956090A priority patent/FR2935794B1/fr
Priority to JP2009206599A priority patent/JP5713547B2/ja
Publication of DE102008041943A1 publication Critical patent/DE102008041943A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE102008041943A 2008-09-10 2008-09-10 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung Withdrawn DE102008041943A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102008041943A DE102008041943A1 (de) 2008-09-10 2008-09-10 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung
US12/555,587 US8375796B2 (en) 2008-09-10 2009-09-08 Sensor assemblage and method for manufacturing a sensor assemblage
FR0956090A FR2935794B1 (fr) 2008-09-10 2009-09-08 Dispositif de capteur et procede de fabrication
JP2009206599A JP5713547B2 (ja) 2008-09-10 2009-09-08 センサ装置及びセンサ装置を製造するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008041943A DE102008041943A1 (de) 2008-09-10 2008-09-10 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung

Publications (1)

Publication Number Publication Date
DE102008041943A1 true DE102008041943A1 (de) 2010-03-11

Family

ID=41650625

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102008041943A Withdrawn DE102008041943A1 (de) 2008-09-10 2008-09-10 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung

Country Status (4)

Country Link
US (1) US8375796B2 (https=)
JP (1) JP5713547B2 (https=)
DE (1) DE102008041943A1 (https=)
FR (1) FR2935794B1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140057501A1 (en) * 2012-08-27 2014-02-27 GM Global Technology Operations LLC Electrical-mechanical fastening device for motor vehicles
DE102016225652A1 (de) 2016-12-20 2018-06-21 Piezocryst Advanced Sensorics Gmbh Verfahren zur Herstellung eines Sensorgehäuses für einen Kraft- oder Drucksensor sowie Sensorgehäuse, Kraft- oder Drucksensor und Verwendung einer additiven Fertigungsvorrichtung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027365A1 (de) 2005-06-14 2006-12-21 Robert Bosch Gmbh Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583081Y2 (ja) * 1978-02-09 1983-01-19 富士電機株式会社 拡散形半導体圧力センサ
US4222277A (en) * 1979-08-13 1980-09-16 Kulite Semiconductor Products, Inc. Media compatible pressure transducer
GB9321398D0 (en) * 1993-10-16 1993-12-08 Lucas Ind Plc Differential pressure transducer
DE10260105A1 (de) * 2002-12-19 2004-07-01 Robert Bosch Gmbh Drucksensor
US7055392B2 (en) * 2003-07-04 2006-06-06 Robert Bosch Gmbh Micromechanical pressure sensor
DE102004006201B4 (de) * 2004-02-09 2011-12-08 Robert Bosch Gmbh Drucksensor mit Siliziumchip auf einer Stahlmembran
JP2005233953A (ja) * 2004-02-17 2005-09-02 Robert Bosch Gmbh マイクロメカニカル式の高圧センサを製造するための方法及びマクロメカニカル式の圧力センサ
JP2006047190A (ja) * 2004-08-06 2006-02-16 Denso Corp 圧力センサ
DE102009002004A1 (de) * 2009-03-31 2010-10-07 Robert Bosch Gmbh Sensoranordnung zum Erfassen von hohen Drücken
US8074521B2 (en) * 2009-11-09 2011-12-13 Kulite Semiconductor Products, Inc. Enhanced static-dynamic pressure transducer suitable for use in gas turbines and other compressor applications

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027365A1 (de) 2005-06-14 2006-12-21 Robert Bosch Gmbh Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung

Also Published As

Publication number Publication date
US8375796B2 (en) 2013-02-19
US20100058873A1 (en) 2010-03-11
FR2935794A1 (fr) 2010-03-12
JP5713547B2 (ja) 2015-05-07
JP2010117346A (ja) 2010-05-27
FR2935794B1 (fr) 2019-07-05

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee