DE102007022093A1 - Piezoelektrisches Vielschichtbauelement - Google Patents
Piezoelektrisches Vielschichtbauelement Download PDFInfo
- Publication number
- DE102007022093A1 DE102007022093A1 DE102007022093A DE102007022093A DE102007022093A1 DE 102007022093 A1 DE102007022093 A1 DE 102007022093A1 DE 102007022093 A DE102007022093 A DE 102007022093A DE 102007022093 A DE102007022093 A DE 102007022093A DE 102007022093 A1 DE102007022093 A1 DE 102007022093A1
- Authority
- DE
- Germany
- Prior art keywords
- layers
- multilayer component
- piezoelectric multilayer
- different
- adjacent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005245 sintering Methods 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 33
- 239000000919 ceramic Substances 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 7
- 239000002019 doping agent Substances 0.000 claims description 6
- 238000001354 calcination Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 description 28
- 238000000034 method Methods 0.000 description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- GSJVCJPEZMDJIW-UHFFFAOYSA-N copper;silver Chemical compound [Cu+2].[Ag+] GSJVCJPEZMDJIW-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Fuel-Injection Apparatus (AREA)
- Compositions Of Oxide Ceramics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007022093A DE102007022093A1 (de) | 2007-05-11 | 2007-05-11 | Piezoelektrisches Vielschichtbauelement |
| CN2008800156671A CN101730944B (zh) | 2007-05-11 | 2008-05-09 | 压电多层器件 |
| JP2010506954A JP5666901B2 (ja) | 2007-05-11 | 2008-05-09 | 圧電積層素子 |
| PCT/EP2008/055783 WO2008138906A1 (de) | 2007-05-11 | 2008-05-09 | Piezoelektrisches vielschichtbauelement |
| EP08759507A EP2147469B1 (de) | 2007-05-11 | 2008-05-09 | Piezoelektrisches vielschichtbauelement |
| US12/615,579 US7960899B2 (en) | 2007-05-11 | 2009-11-10 | Piezoelectric multilayer component with stresses running perpendicular to stacking direction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007022093A DE102007022093A1 (de) | 2007-05-11 | 2007-05-11 | Piezoelektrisches Vielschichtbauelement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102007022093A1 true DE102007022093A1 (de) | 2008-11-13 |
Family
ID=39761031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102007022093A Withdrawn DE102007022093A1 (de) | 2007-05-11 | 2007-05-11 | Piezoelektrisches Vielschichtbauelement |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7960899B2 (https=) |
| EP (1) | EP2147469B1 (https=) |
| JP (1) | JP5666901B2 (https=) |
| CN (1) | CN101730944B (https=) |
| DE (1) | DE102007022093A1 (https=) |
| WO (1) | WO2008138906A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010005906A1 (de) * | 2010-01-27 | 2011-07-28 | Epcos Ag, 81669 | Piezoelektrisches Bauelement |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009043220A1 (de) * | 2009-05-29 | 2010-12-02 | Epcos Ag | Piezoelektrisches Bauelement |
| WO2015025642A1 (ja) * | 2013-08-21 | 2015-02-26 | 株式会社村田製作所 | 電気化学素子用セラミック基体及びその製造方法並びに燃料電池及び燃料電池スタック |
| JP7087489B2 (ja) * | 2018-03-14 | 2022-06-21 | 株式会社リコー | ヘッド用振動板部材、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19732513C2 (de) * | 1997-07-29 | 2002-04-11 | Eurocopter Deutschland | Verfahren zur Herstellung einer Verbundstruktur |
| EP1263060A2 (de) * | 2001-05-11 | 2002-12-04 | Drei-S-Werk Präzisionswerkzeuge GmbH & Co. Fertigungs-KG | Verfahren zur Herstellung eines flachen mehrschichtigen Bauelementes sowie entsprechendes Bauelement |
| US6512323B2 (en) * | 2000-03-22 | 2003-01-28 | Caterpillar Inc. | Piezoelectric actuator device |
| GB2392550A (en) * | 2002-08-27 | 2004-03-03 | Kyocera Corp | Laminated piezoelectric element |
| DE102004031404A1 (de) | 2004-06-29 | 2006-02-02 | Siemens Ag | Piezoelektrisches Bauteil mit Sollbruchstelle und elektrischem Anschlusselement, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils |
| US7070674B2 (en) * | 2002-12-20 | 2006-07-04 | Caterpillar | Method of manufacturing a multi-layered piezoelectric actuator |
| WO2006097522A1 (en) * | 2005-03-18 | 2006-09-21 | Bae Systems Plc | An actuator |
| WO2007138346A1 (en) * | 2006-05-27 | 2007-12-06 | Bae Systems Plc | A bonding tool and method |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4202467B2 (ja) * | 1998-07-10 | 2008-12-24 | セイコーエプソン株式会社 | アクチュエータ装置及びインクジェット式記録ヘッド並びにインクジェット式記録装置 |
| DE19928185B4 (de) * | 1999-06-19 | 2006-05-24 | Robert Bosch Gmbh | Piezoaktor |
| JP3642026B2 (ja) * | 2001-01-12 | 2005-04-27 | 株式会社村田製作所 | 加速度センサおよびその製造方法 |
| DE10201641A1 (de) * | 2002-01-17 | 2003-08-07 | Epcos Ag | Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung |
| DE10234787C1 (de) | 2002-06-07 | 2003-10-30 | Pi Ceramic Gmbh Keramische Tec | Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material |
| DE10237589A1 (de) * | 2002-08-16 | 2004-02-26 | Robert Bosch Gmbh | Piezoaktor |
| US7067965B2 (en) * | 2002-09-18 | 2006-06-27 | Tdk Corporation | Piezoelectric porcelain composition, piezoelectric device, and methods of making thereof |
| DE10307825A1 (de) | 2003-02-24 | 2004-09-09 | Epcos Ag | Elektrisches Vielschichtbauelement und Schichtstapel |
| JP4381760B2 (ja) * | 2003-09-22 | 2009-12-09 | 独立行政法人科学技術振興機構 | 可撓性セラミックス製品及びその製造方法 |
| DE102005015112B4 (de) * | 2005-04-01 | 2007-05-24 | Siemens Ag | Monolithisches piezoelektrisches Bauteil mit mechanischer Entkopplungsschicht, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils |
| DE102005052686A1 (de) * | 2005-07-26 | 2007-02-15 | Siemens Ag | Piezoaktor und Verfahren zur Herstellung desselben |
| JP4901165B2 (ja) * | 2005-09-20 | 2012-03-21 | 京セラ株式会社 | 積層圧電体 |
| EP1970975B1 (en) * | 2007-03-14 | 2011-07-20 | Delphi Technologies Holding S.à.r.l. | Reducing stress gradients within piezoelectric actuators |
| JP5029692B2 (ja) * | 2007-10-16 | 2012-09-19 | 株式会社村田製作所 | 圧電ポンプ |
| DE102009043220A1 (de) * | 2009-05-29 | 2010-12-02 | Epcos Ag | Piezoelektrisches Bauelement |
-
2007
- 2007-05-11 DE DE102007022093A patent/DE102007022093A1/de not_active Withdrawn
-
2008
- 2008-05-09 JP JP2010506954A patent/JP5666901B2/ja not_active Expired - Fee Related
- 2008-05-09 CN CN2008800156671A patent/CN101730944B/zh not_active Expired - Fee Related
- 2008-05-09 WO PCT/EP2008/055783 patent/WO2008138906A1/de not_active Ceased
- 2008-05-09 EP EP08759507A patent/EP2147469B1/de not_active Not-in-force
-
2009
- 2009-11-10 US US12/615,579 patent/US7960899B2/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19732513C2 (de) * | 1997-07-29 | 2002-04-11 | Eurocopter Deutschland | Verfahren zur Herstellung einer Verbundstruktur |
| US6512323B2 (en) * | 2000-03-22 | 2003-01-28 | Caterpillar Inc. | Piezoelectric actuator device |
| EP1263060A2 (de) * | 2001-05-11 | 2002-12-04 | Drei-S-Werk Präzisionswerkzeuge GmbH & Co. Fertigungs-KG | Verfahren zur Herstellung eines flachen mehrschichtigen Bauelementes sowie entsprechendes Bauelement |
| GB2392550A (en) * | 2002-08-27 | 2004-03-03 | Kyocera Corp | Laminated piezoelectric element |
| US7070674B2 (en) * | 2002-12-20 | 2006-07-04 | Caterpillar | Method of manufacturing a multi-layered piezoelectric actuator |
| DE102004031404A1 (de) | 2004-06-29 | 2006-02-02 | Siemens Ag | Piezoelektrisches Bauteil mit Sollbruchstelle und elektrischem Anschlusselement, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils |
| WO2006097522A1 (en) * | 2005-03-18 | 2006-09-21 | Bae Systems Plc | An actuator |
| WO2007138346A1 (en) * | 2006-05-27 | 2007-12-06 | Bae Systems Plc | A bonding tool and method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010005906A1 (de) * | 2010-01-27 | 2011-07-28 | Epcos Ag, 81669 | Piezoelektrisches Bauelement |
| WO2011092205A1 (de) * | 2010-01-27 | 2011-08-04 | Epcos Ag | Piezoelektrisches bauelement |
| CN102714273A (zh) * | 2010-01-27 | 2012-10-03 | 埃普科斯股份有限公司 | 压电元件 |
| JP2013518422A (ja) * | 2010-01-27 | 2013-05-20 | エプコス アクチエンゲゼルシャフト | 圧電素子 |
| CN102714273B (zh) * | 2010-01-27 | 2015-01-28 | 埃普科斯股份有限公司 | 压电元件 |
| US9209382B2 (en) | 2010-01-27 | 2015-12-08 | Epcos Ag | Piezoelectric component |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2147469B1 (de) | 2012-10-03 |
| US7960899B2 (en) | 2011-06-14 |
| CN101730944B (zh) | 2013-07-17 |
| CN101730944A (zh) | 2010-06-09 |
| US20100109488A1 (en) | 2010-05-06 |
| JP2010527143A (ja) | 2010-08-05 |
| JP5666901B2 (ja) | 2015-02-12 |
| EP2147469A1 (de) | 2010-01-27 |
| WO2008138906A1 (de) | 2008-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| R120 | Application withdrawn or ip right abandoned |
Effective date: 20130816 |