DE102004007999A1 - Piezoelektrischer Aktuator - Google Patents
Piezoelektrischer Aktuator Download PDFInfo
- Publication number
- DE102004007999A1 DE102004007999A1 DE200410007999 DE102004007999A DE102004007999A1 DE 102004007999 A1 DE102004007999 A1 DE 102004007999A1 DE 200410007999 DE200410007999 DE 200410007999 DE 102004007999 A DE102004007999 A DE 102004007999A DE 102004007999 A1 DE102004007999 A1 DE 102004007999A1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- unit
- ceramic layers
- units
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 255
- 230000005684 electric field Effects 0.000 claims description 57
- 238000006073 displacement reaction Methods 0.000 claims description 37
- 239000011347 resin Substances 0.000 claims description 24
- 229920005989 resin Polymers 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 14
- 230000003139 buffering effect Effects 0.000 claims description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 19
- 239000011230 binding agent Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- 230000001151 other effect Effects 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 235000021395 porridge Nutrition 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
Landscapes
- Fuel-Injection Apparatus (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003041689 | 2003-02-19 | ||
| JP2003-41689 | 2003-02-19 | ||
| JP2003431827A JP2004274029A (ja) | 2003-02-19 | 2003-12-26 | 圧電アクチュエータ |
| JP2003-431827 | 2003-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102004007999A1 true DE102004007999A1 (de) | 2004-09-23 |
Family
ID=32911407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE200410007999 Withdrawn DE102004007999A1 (de) | 2003-02-19 | 2004-02-18 | Piezoelektrischer Aktuator |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2004274029A (ja) |
| DE (1) | DE102004007999A1 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007009908A1 (de) * | 2005-07-18 | 2007-01-25 | Siemens Aktiengesellschaft | Piezoaktor |
| WO2008092932A1 (de) * | 2007-02-02 | 2008-08-07 | Epcos Ag | Vielschichtbauelement sowie verfahren zur herstellung eines vielschichtbauelements |
| EP2149921A3 (de) * | 2008-07-28 | 2013-07-10 | Robert Bosch GmbH | Piezoaktor mit passiven Bereichen am Kopf und/oder am Fuss |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006286302A (ja) * | 2005-03-31 | 2006-10-19 | Ulvac Japan Ltd | 電圧発生ユニット、電圧発生装置及びこれを備えた荷電粒子加速器 |
| US20080203853A1 (en) * | 2005-07-26 | 2008-08-28 | Carsten Schuh | Method For Producing a Monolithic Piezo Actuator With Stack Elements, Monilithic Piezo Actuator With Stack Elements, and Use of the Piezo Actuator |
| JP5526786B2 (ja) * | 2008-02-12 | 2014-06-18 | コニカミノルタ株式会社 | 振動型駆動装置の製造方法 |
| KR101841840B1 (ko) * | 2016-07-27 | 2018-03-26 | 한국세라믹기술원 | 적층형 압전 소자 |
-
2003
- 2003-12-26 JP JP2003431827A patent/JP2004274029A/ja not_active Withdrawn
-
2004
- 2004-02-18 DE DE200410007999 patent/DE102004007999A1/de not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007009908A1 (de) * | 2005-07-18 | 2007-01-25 | Siemens Aktiengesellschaft | Piezoaktor |
| WO2008092932A1 (de) * | 2007-02-02 | 2008-08-07 | Epcos Ag | Vielschichtbauelement sowie verfahren zur herstellung eines vielschichtbauelements |
| US9728706B2 (en) | 2007-02-02 | 2017-08-08 | Epcos Ag | Method for producing a multilayer element |
| EP2149921A3 (de) * | 2008-07-28 | 2013-07-10 | Robert Bosch GmbH | Piezoaktor mit passiven Bereichen am Kopf und/oder am Fuss |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004274029A (ja) | 2004-09-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |