DE10196214T1 - Höhenabtast-Interferometer zum Bestimmen der Absolutposition und des Oberflächenprofils eines Objekts im Hinblick auf ein Datum - Google Patents
Höhenabtast-Interferometer zum Bestimmen der Absolutposition und des Oberflächenprofils eines Objekts im Hinblick auf ein DatumInfo
- Publication number
- DE10196214T1 DE10196214T1 DE10196214T DE10196214T DE10196214T1 DE 10196214 T1 DE10196214 T1 DE 10196214T1 DE 10196214 T DE10196214 T DE 10196214T DE 10196214 T DE10196214 T DE 10196214T DE 10196214 T1 DE10196214 T1 DE 10196214T1
- Authority
- DE
- Germany
- Prior art keywords
- date
- height
- determining
- respect
- absolute position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20573600P | 2000-05-19 | 2000-05-19 | |
US60/205,736 | 2000-05-19 | ||
PCT/US2001/002470 WO2001090685A2 (en) | 2000-05-19 | 2001-01-25 | Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum |
Publications (2)
Publication Number | Publication Date |
---|---|
DE10196214T1 true DE10196214T1 (de) | 2003-05-15 |
DE10196214B4 DE10196214B4 (de) | 2010-01-28 |
Family
ID=22763431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10196214T Expired - Lifetime DE10196214B4 (de) | 2000-05-19 | 2001-01-25 | Höhenabtast-Interferometer zum Bestimmen der Absolutposition und des Oberflächenprofils eines Objekts im Hinblick auf ein Datum |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4597467B2 (de) |
AU (1) | AU2001241427A1 (de) |
DE (1) | DE10196214B4 (de) |
WO (1) | WO2001090685A2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004079295A2 (en) | 2003-03-06 | 2004-09-16 | Zygo Corporation | Profiling complex surface structures using scanning interferometry |
JP4203831B2 (ja) * | 2006-11-30 | 2009-01-07 | 独立行政法人産業技術総合研究所 | 光学材料の群屈折率精密計測方法 |
EP2327956B1 (de) * | 2009-11-20 | 2014-01-22 | Mitutoyo Corporation | Verfahren und Vorrichtung zur Höhenbestimmung bei einer Reihe von räumlichen Positionen auf einer Probe |
KR101622538B1 (ko) * | 2013-05-20 | 2016-05-19 | 주식회사 고영테크놀러지 | 주파수 주사 간섭계를 이용한 형상 측정장치 |
CN108917641B (zh) * | 2018-05-15 | 2020-08-04 | 广东工业大学 | 基于激光器波数合成的样件内部轮廓检测方法及系统 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5042949A (en) * | 1989-03-17 | 1991-08-27 | Greenberg Jeffrey S | Optical profiler for films and substrates |
US5218424A (en) * | 1991-03-19 | 1993-06-08 | Zygo Corporation | Flying height and topography measuring interferometer |
US5173746A (en) * | 1991-05-21 | 1992-12-22 | Wyko Corporation | Method for rapid, accurate measurement of step heights between dissimilar materials |
WO1993024805A1 (en) * | 1992-06-03 | 1993-12-09 | Zygo Corporation | Interferometric method and apparatus to measure surface topography |
US5390023A (en) * | 1992-06-03 | 1995-02-14 | Zygo Corporation | Interferometric method and apparatus to measure surface topography |
US5398113A (en) * | 1993-02-08 | 1995-03-14 | Zygo Corporation | Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms |
US5471303A (en) * | 1994-04-29 | 1995-11-28 | Wyko Corporation | Combination of white-light scanning and phase-shifting interferometry for surface profile measurements |
US5555471A (en) * | 1995-05-24 | 1996-09-10 | Wyko Corporation | Method for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometry |
US5602643A (en) * | 1996-02-07 | 1997-02-11 | Wyko Corporation | Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface |
JP2000121317A (ja) * | 1998-10-12 | 2000-04-28 | Hitachi Electronics Eng Co Ltd | 光干渉計の干渉位相検出方式 |
-
2001
- 2001-01-25 DE DE10196214T patent/DE10196214B4/de not_active Expired - Lifetime
- 2001-01-25 WO PCT/US2001/002470 patent/WO2001090685A2/en active Application Filing
- 2001-01-25 AU AU2001241427A patent/AU2001241427A1/en not_active Abandoned
- 2001-01-25 JP JP2001586411A patent/JP4597467B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2003534540A (ja) | 2003-11-18 |
JP4597467B2 (ja) | 2010-12-15 |
WO2001090685A3 (en) | 2002-03-28 |
DE10196214B4 (de) | 2010-01-28 |
WO2001090685A2 (en) | 2001-11-29 |
AU2001241427A1 (en) | 2001-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8128 | New person/name/address of the agent |
Representative=s name: EPPING HERMANN FISCHER, PATENTANWALTSGESELLSCHAFT |
|
8110 | Request for examination paragraph 44 | ||
8381 | Inventor (new situation) |
Inventor name: GROOT, PETER DE, MIDDLETOWN, CONN., US Inventor name: COLONNA DE LEGA, XAVIER, MIDDLETOWN, CONN., US Inventor name: DECK, LESLIE L., MIDDLETOWN, CONN., US Inventor name: KRAMER, JAMES W., WATERFORD, CONN., US |
|
8364 | No opposition during term of opposition | ||
R071 | Expiry of right |