AU2001241427A1 - Height scanning interferometer for determining the absolute position and surfaceprofile of an object with respect to datum - Google Patents

Height scanning interferometer for determining the absolute position and surfaceprofile of an object with respect to datum

Info

Publication number
AU2001241427A1
AU2001241427A1 AU2001241427A AU4142701A AU2001241427A1 AU 2001241427 A1 AU2001241427 A1 AU 2001241427A1 AU 2001241427 A AU2001241427 A AU 2001241427A AU 4142701 A AU4142701 A AU 4142701A AU 2001241427 A1 AU2001241427 A1 AU 2001241427A1
Authority
AU
Australia
Prior art keywords
surfaceprofile
datum
determining
respect
absolute position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001241427A
Inventor
Xavier Colonna De Lega
Peter De Groot
Leslie L. Deck
James W. Kramer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of AU2001241427A1 publication Critical patent/AU2001241427A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
AU2001241427A 2000-05-19 2001-01-25 Height scanning interferometer for determining the absolute position and surfaceprofile of an object with respect to datum Abandoned AU2001241427A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US20573600P 2000-05-19 2000-05-19
US60205736 2000-05-19
PCT/US2001/002470 WO2001090685A2 (en) 2000-05-19 2001-01-25 Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum

Publications (1)

Publication Number Publication Date
AU2001241427A1 true AU2001241427A1 (en) 2001-12-03

Family

ID=22763431

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001241427A Abandoned AU2001241427A1 (en) 2000-05-19 2001-01-25 Height scanning interferometer for determining the absolute position and surfaceprofile of an object with respect to datum

Country Status (4)

Country Link
JP (1) JP4597467B2 (en)
AU (1) AU2001241427A1 (en)
DE (1) DE10196214B4 (en)
WO (1) WO2001090685A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006519993A (en) 2003-03-06 2006-08-31 ザイゴ　コーポレーション Profiling complex surface structures using scanning interferometry
JP4203831B2 (en) * 2006-11-30 2009-01-07 独立行政法人産業技術総合研究所 Precision measurement method for group refractive index of optical materials
EP2327956B1 (en) * 2009-11-20 2014-01-22 Mitutoyo Corporation Method and apparatus for determining the height of a number of spatial positions on a sample
KR101622538B1 (en) * 2013-05-20 2016-05-19 주식회사 고영테크놀러지 Shape measurement apparatus using frequency scanning interferometer
CN108917641B (en) * 2018-05-15 2020-08-04 广东工业大学 Laser wave number synthesis-based sample piece internal contour detection method and system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042949A (en) * 1989-03-17 1991-08-27 Greenberg Jeffrey S Optical profiler for films and substrates
US5218424A (en) * 1991-03-19 1993-06-08 Zygo Corporation Flying height and topography measuring interferometer
US5173746A (en) * 1991-05-21 1992-12-22 Wyko Corporation Method for rapid, accurate measurement of step heights between dissimilar materials
WO1993024805A1 (en) * 1992-06-03 1993-12-09 Zygo Corporation Interferometric method and apparatus to measure surface topography
US5390023A (en) * 1992-06-03 1995-02-14 Zygo Corporation Interferometric method and apparatus to measure surface topography
US5398113A (en) * 1993-02-08 1995-03-14 Zygo Corporation Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms
US5471303A (en) * 1994-04-29 1995-11-28 Wyko Corporation Combination of white-light scanning and phase-shifting interferometry for surface profile measurements
US5555471A (en) * 1995-05-24 1996-09-10 Wyko Corporation Method for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometry
US5602643A (en) * 1996-02-07 1997-02-11 Wyko Corporation Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface
JP2000121317A (en) * 1998-10-12 2000-04-28 Hitachi Electronics Eng Co Ltd Interference phase detecting system for optical interferometer

Also Published As

Publication number Publication date
DE10196214T1 (en) 2003-05-15
JP2003534540A (en) 2003-11-18
WO2001090685A2 (en) 2001-11-29
DE10196214B4 (en) 2010-01-28
JP4597467B2 (en) 2010-12-15
WO2001090685A3 (en) 2002-03-28

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