AU2001246957A1 - Method for vibration measurement and interferometer - Google Patents

Method for vibration measurement and interferometer

Info

Publication number
AU2001246957A1
AU2001246957A1 AU2001246957A AU4695701A AU2001246957A1 AU 2001246957 A1 AU2001246957 A1 AU 2001246957A1 AU 2001246957 A AU2001246957 A AU 2001246957A AU 4695701 A AU4695701 A AU 4695701A AU 2001246957 A1 AU2001246957 A1 AU 2001246957A1
Authority
AU
Australia
Prior art keywords
interferometer
vibration measurement
vibration
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001246957A
Inventor
Eiolf Vikhagen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optonor AS
Original Assignee
Optonor AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optonor AS filed Critical Optonor AS
Publication of AU2001246957A1 publication Critical patent/AU2001246957A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
AU2001246957A 2000-03-24 2001-03-22 Method for vibration measurement and interferometer Abandoned AU2001246957A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NO20001539A NO314323B1 (en) 2000-03-24 2000-03-24 Method and interferometer for measuring microscopic vibration
NO20001539 2000-03-24
PCT/NO2001/000125 WO2001073373A1 (en) 2000-03-24 2001-03-22 Method for vibration measurement and interferometer

Publications (1)

Publication Number Publication Date
AU2001246957A1 true AU2001246957A1 (en) 2001-10-08

Family

ID=19910928

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001246957A Abandoned AU2001246957A1 (en) 2000-03-24 2001-03-22 Method for vibration measurement and interferometer

Country Status (6)

Country Link
US (1) US6970251B2 (en)
EP (1) EP1266186A1 (en)
JP (1) JP2003529063A (en)
AU (1) AU2001246957A1 (en)
NO (1) NO314323B1 (en)
WO (1) WO2001073373A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6827247B1 (en) 1999-12-08 2004-12-07 Asm Technology Singapore Pte Ltd. Apparatus for detecting the oscillation amplitude of an oscillating object
JP2005526261A (en) * 2002-05-15 2005-09-02 グラクソ　グループ　リミテッド Microelectromechanical system and method for measuring temperature and moisture profiles in pharmaceutical packaging
US7123363B2 (en) * 2003-01-03 2006-10-17 Rose-Hulman Institute Of Technology Speckle pattern analysis method and system
FR2915077B1 (en) * 2007-04-19 2010-09-10 Inst Radioprot Et De Surete Nu DEVICE FOR ASSISTING THE DIAGNOSIS AND PROGNOSIS OF PHYSIOPATHOLOGICAL MODIFICATIONS OF TISSUES.
CN103765277B (en) * 2011-09-09 2016-11-09 文塔纳医疗系统公司 Use the focusing of error signal and imaging system and technology
US9052331B2 (en) 2012-08-31 2015-06-09 Dantec Dynamics A/S Optical velocimetry systems and methods for determining the velocity of a body using fringes generated by a spatial light modulator
NO334730B1 (en) * 2012-12-05 2014-05-19 Optonor As Procedure for vibration measurement and interferometer
EP3180646B1 (en) * 2014-08-13 2020-04-01 Daniel Summer Gareau Line-scanning, sample-scanning, multimodal confocal microscope
CN104457581B (en) * 2014-08-28 2017-03-22 深圳奥比中光科技有限公司 Overall Z-axis displacement measuring system
GB2544727A (en) * 2015-11-16 2017-05-31 Optonor As Optical interferometry
JP6805930B2 (en) * 2017-03-29 2020-12-23 株式会社島津製作所 Vibration measuring device
JP7099545B2 (en) * 2018-12-20 2022-07-12 株式会社島津製作所 Defect inspection equipment and defect inspection method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9118294D0 (en) 1991-08-24 1991-10-09 Sira Ltd White light interferometry
JPH08114412A (en) 1994-10-18 1996-05-07 Toshio Honda Vibrationproof type interferometer
US5827971A (en) * 1996-05-31 1998-10-27 Lockheed Martin Idaho Technologies Company Optical vibration detection spectral analysis assembly and method for detecting vibration in an object of interest
WO1998038476A1 (en) 1997-02-26 1998-09-03 Lockheed Martin Idaho Technologies Company Imaging photorefractive optical vibration measurement method and device
US6175411B1 (en) 1998-02-25 2001-01-16 Bechtel Bwxt Idaho, Llc Apparatus and method for measuring and imaging traveling waves
FR2780794B1 (en) * 1998-07-06 2007-09-28 Centre Nat Rech Scient DYNAMIC HOLOGRAPHIC VELOCIMETER FOR MEASURING VIBRATIONS
WO2000014477A1 (en) 1998-09-09 2000-03-16 Lockheed Martin Idaho Technologies Company Method and apparatus for assessing material properties of sheet-like materials
US6587212B1 (en) * 2000-10-31 2003-07-01 Agere Systems Inc. Method and apparatus for studying vibrational modes of an electro-acoustic device

Also Published As

Publication number Publication date
US6970251B2 (en) 2005-11-29
US20030037616A1 (en) 2003-02-27
NO20001539D0 (en) 2000-03-24
EP1266186A1 (en) 2002-12-18
WO2001073373A1 (en) 2001-10-04
JP2003529063A (en) 2003-09-30
NO20001539L (en) 2001-09-25
NO314323B1 (en) 2003-03-03

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