DE10081572T1 - Kugelschrittlehre - Google Patents

Kugelschrittlehre

Info

Publication number
DE10081572T1
DE10081572T1 DE10081572T DE10081572T DE10081572T1 DE 10081572 T1 DE10081572 T1 DE 10081572T1 DE 10081572 T DE10081572 T DE 10081572T DE 10081572 T DE10081572 T DE 10081572T DE 10081572 T1 DE10081572 T1 DE 10081572T1
Authority
DE
Germany
Prior art keywords
step gauge
bullet
bullet step
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE10081572T
Other languages
English (en)
Other versions
DE10081572B4 (de
Inventor
Toshiyuki Takatsuji
Sonko Osawa
Tomizo Kurosawa
Hironori Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Publication of DE10081572T1 publication Critical patent/DE10081572T1/de
Application granted granted Critical
Publication of DE10081572B4 publication Critical patent/DE10081572B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00—Measuring instruments characterised by the selection of material therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/30—Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
DE10081572T 1999-06-18 2000-03-30 Interferometrische Schritteinrichtung zum Messen eines Abstands zwischen Kugeln einer Kugelschrittlehre und Verfahren hierfür Expired - Fee Related DE10081572B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11/172290 1999-06-18
JP17229099A JP3210963B2 (ja) 1999-06-18 1999-06-18 ボールステップゲージ
PCT/JP2000/002021 WO2000079216A1 (fr) 1999-06-18 2000-03-30 Calibre à rangée de billes

Publications (2)

Publication Number Publication Date
DE10081572T1 true DE10081572T1 (de) 2001-10-04
DE10081572B4 DE10081572B4 (de) 2006-05-11

Family

ID=15939197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10081572T Expired - Fee Related DE10081572B4 (de) 1999-06-18 2000-03-30 Interferometrische Schritteinrichtung zum Messen eines Abstands zwischen Kugeln einer Kugelschrittlehre und Verfahren hierfür

Country Status (4)

Country Link
US (1) US6493957B1 (de)
JP (1) JP3210963B2 (de)
DE (1) DE10081572B4 (de)
WO (1) WO2000079216A1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10023604A1 (de) * 2000-05-15 2001-11-29 Schott Glas Eindimensionales Kalibriernormal
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
DE60318396T2 (de) * 2002-02-14 2008-05-21 Faro Technologies, Inc., Lake Mary Tragbare koordinatenmessmaschine mit gelenkarm
US6973734B2 (en) * 2002-02-14 2005-12-13 Faro Technologies, Inc. Method for providing sensory feedback to the operator of a portable measurement machine
USRE42082E1 (en) * 2002-02-14 2011-02-01 Faro Technologies, Inc. Method and apparatus for improving measurement accuracy of a portable coordinate measurement machine
US7073271B2 (en) * 2002-02-14 2006-07-11 Faro Technologies Inc. Portable coordinate measurement machine
US6957496B2 (en) * 2002-02-14 2005-10-25 Faro Technologies, Inc. Method for improving measurement accuracy of a portable coordinate measurement machine
JP3837503B2 (ja) * 2002-05-09 2006-10-25 独立行政法人産業技術総合研究所 ３次元座標評価ゲージ
DE10320272A1 (de) * 2002-05-28 2004-02-12 Heidelberger Druckmaschinen Ag Vorrichtung zum Herstellen einer Druckform
JP2005103720A (ja) * 2003-09-30 2005-04-21 Okuma Corp 測定装置及び測定方法
US20050230605A1 (en) * 2004-04-20 2005-10-20 Hamid Pishdadian Method of measuring using a binary optical sensor
DE102006014509A1 (de) * 2006-03-22 2007-09-27 Carl Zeiss Industrielle Messtechnik Gmbh Prüfkörper und Verfahren zum Einmessen eines Koordinatenmessgerätes
JP5317077B2 (ja) * 2006-11-30 2013-10-16 地方独立行政法人 岩手県工業技術センター ボールディメンジョンゲージ装置
JP4863006B2 (ja) * 2006-12-28 2012-01-25 パルステック工業株式会社 ３次元形状測定方法
JP4931867B2 (ja) * 2008-06-27 2012-05-16 黒田精工株式会社 可変端度器
DE102009045515B3 (de) * 2009-10-09 2011-03-03 Dreier Lasermesstechnik Gmbh Vorrichtung zur Überprüfung der Genauigkeit von Werkzeugmaschinen und Messeinrichtungen
ES2369802B1 (es) * 2010-05-07 2012-06-26 Universidad De Vigo Patrón dimensional para sistemas láser escáner y fotogramétricos.
JP5837360B2 (ja) * 2010-10-27 2015-12-24 株式会社浅沼技研 ３次元測定機検証用長尺ゲージ
US8826719B2 (en) * 2010-12-16 2014-09-09 Hexagon Metrology, Inc. Machine calibration artifact
DE102011012981B3 (de) * 2011-03-03 2012-02-16 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Hybridkalottennormal und Verfahren zum Herstellen eines Hybridkalottennormals
FR2997180B1 (fr) * 2012-10-24 2015-01-16 Commissariat Energie Atomique Etalon metrologique bidimensionnel
ES2490940B1 (es) * 2013-03-04 2015-05-29 Universidad De Oviedo Método y patrón de características geométricas para calibración y verificación de la medición con brazos articulados de medir por coordenadas
JP6238703B2 (ja) * 2013-11-29 2017-11-29 株式会社ミツトヨ 真直度校正方法及びその装置
CN104729386A (zh) * 2013-12-20 2015-06-24 桂林安一量具有限公司 高稳定性简易步距规及其工艺方法
CN103791791B (zh) * 2014-03-06 2016-08-31 苏州卓尔测量技术有限公司 一种新型步距规及其组装方法
US9021853B1 (en) * 2014-05-27 2015-05-05 Micro Surface Engineering, Inc. Dimensionally stable long, calibration device
CN104634255A (zh) * 2014-12-12 2015-05-20 中国航空工业集团公司北京长城计量测试技术研究所 一种用于步距规测量的非接触式测量装置
US10088304B2 (en) * 2015-02-12 2018-10-02 Ocean Industries, LLC Composite carrier and automated thickness measurement and calibration system and method
CN106679525B (zh) * 2017-03-07 2022-04-26 甘太喜 一种高稳定性步距规及其制备方法
JP2023010002A (ja) * 2021-07-08 2023-01-20 オークマ株式会社 工作機械の誤差同定方法、誤差同定プログラム、工作機械

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3219713C1 (de) * 1982-05-26 1983-05-19 Daimler-Benz Ag, 7000 Stuttgart Zinnenfoermiges Stufenendmass
JPS62201301A (ja) * 1986-02-28 1987-09-05 Tomohiko Akuta レ−ザ−干渉測長機
US4884889A (en) * 1987-11-19 1989-12-05 Brown & Sharpe Manufacturing Company Calibration system for coordinate measuring machine
DE58903515D1 (de) * 1988-10-03 1993-03-25 Zeiss Carl Fa Pruefkoerper fuer koordinatenmessgeraete.
DE3930223A1 (de) * 1989-09-11 1991-03-14 Wild Leitz Messtechnik Pruefkoerper fuer koordinatenmessgeraete aus stabsegmenten
US5432622A (en) * 1992-05-29 1995-07-11 Johnston; Gregory E. High-resolution scanning apparatus
GB9401692D0 (en) * 1994-01-28 1994-03-23 Renishaw Plc Performing measurement or calibration on positioning machines
DE19507805A1 (de) * 1995-03-06 1996-09-12 Eugen Dr Ing Trapet Prüfkörper für Koordinatenmeßgeräte und Werkzeugmaschinen
DE19644712A1 (de) * 1996-10-28 1998-05-07 Eugen Dr Trapet Kugelquader
JPH10141904A (ja) * 1996-11-09 1998-05-29 Nikon Corp 測定子校正装置及び測定子校正方法
JPH10300452A (ja) * 1997-04-22 1998-11-13 Komatsu Ltd 半導体パッケージ計測系の検査装置、方法及び較正用治具
DE29722450U1 (de) * 1997-12-19 1998-03-26 Leitz-Brown & Sharpe Meßtechnik GmbH, 35578 Wetzlar Vorrichtung zur Überprüfung der geometrischen Genauigkeit eines Koordinatenmeßgerätes
US6226092B1 (en) * 1999-05-27 2001-05-01 Zygo Corporation Full-field geometrically desensitized interferometer using refractive optics

Also Published As

Publication number Publication date
US6493957B1 (en) 2002-12-17
JP2001004358A (ja) 2001-01-12
JP3210963B2 (ja) 2001-09-25
DE10081572B4 (de) 2006-05-11
WO2000079216A1 (fr) 2000-12-28

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20111001