DE10054653A1 - Verfahren und Vorrichtung zum Beschichten von Hohlkörper - Google Patents

Verfahren und Vorrichtung zum Beschichten von Hohlkörper

Info

Publication number
DE10054653A1
DE10054653A1 DE2000154653 DE10054653A DE10054653A1 DE 10054653 A1 DE10054653 A1 DE 10054653A1 DE 2000154653 DE2000154653 DE 2000154653 DE 10054653 A DE10054653 A DE 10054653A DE 10054653 A1 DE10054653 A1 DE 10054653A1
Authority
DE
Germany
Prior art keywords
hollow body
plasma
interior
electromagnetic radiation
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2000154653
Other languages
German (de)
English (en)
Inventor
Reiner Dahlmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vereinigung zur Foerderung des Instituts fuer Kunststoffverarbeitung in Industrie und Handwerk an Der Rhein
Original Assignee
Vereinigung zur Foerderung des Instituts fuer Kunststoffverarbeitung in Industrie und Handwerk an Der Rhein
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vereinigung zur Foerderung des Instituts fuer Kunststoffverarbeitung in Industrie und Handwerk an Der Rhein filed Critical Vereinigung zur Foerderung des Instituts fuer Kunststoffverarbeitung in Industrie und Handwerk an Der Rhein
Priority to DE2000154653 priority Critical patent/DE10054653A1/de
Priority to AU2002216000A priority patent/AU2002216000A1/en
Priority to PCT/EP2001/012689 priority patent/WO2002036850A2/fr
Publication of DE10054653A1 publication Critical patent/DE10054653A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12Chemical modification
    • C08J7/123Treatment by wave energy or particle radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2367/00Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
    • C08J2367/02Polyesters derived from dicarboxylic acids and dihydroxy compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Polymers & Plastics (AREA)
  • Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
DE2000154653 2000-11-03 2000-11-03 Verfahren und Vorrichtung zum Beschichten von Hohlkörper Withdrawn DE10054653A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE2000154653 DE10054653A1 (de) 2000-11-03 2000-11-03 Verfahren und Vorrichtung zum Beschichten von Hohlkörper
AU2002216000A AU2002216000A1 (en) 2000-11-03 2001-11-02 Method and device for coating hollow bodies
PCT/EP2001/012689 WO2002036850A2 (fr) 2000-11-03 2001-11-02 Procede et dispositif de revetement de corps creux

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2000154653 DE10054653A1 (de) 2000-11-03 2000-11-03 Verfahren und Vorrichtung zum Beschichten von Hohlkörper

Publications (1)

Publication Number Publication Date
DE10054653A1 true DE10054653A1 (de) 2002-05-08

Family

ID=7662108

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2000154653 Withdrawn DE10054653A1 (de) 2000-11-03 2000-11-03 Verfahren und Vorrichtung zum Beschichten von Hohlkörper

Country Status (3)

Country Link
AU (1) AU2002216000A1 (fr)
DE (1) DE10054653A1 (fr)
WO (1) WO2002036850A2 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10224395A1 (de) * 2002-05-24 2003-12-04 Sig Technology Ltd Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10253513A1 (de) * 2002-11-16 2004-06-03 Schott Glas Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
WO2006029743A1 (fr) * 2004-09-15 2006-03-23 Schott Ag Procede et dispositif pour deposer un revetement transparent electroconducteur sur un substrat
CN100469943C (zh) * 2002-05-24 2009-03-18 肖特股份公司 用于工件处理的装置和方法
DE102011104730A1 (de) * 2011-06-16 2012-12-20 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
EP2626446A1 (fr) * 2012-02-09 2013-08-14 Krones AG Lance d'alimentation et revêtement assisté par plasma avec couplage à haute fréquence

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005040266A1 (de) 2005-08-24 2007-03-01 Schott Ag Verfahren und Vorrichtung zur innenseitigen Plasmabehandlung von Hohlkörpern

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241177A (ja) * 1987-03-27 1988-10-06 Canon Inc マイクロ波プラズマcvd装置
US5223308A (en) * 1991-10-18 1993-06-29 Energy Conversion Devices, Inc. Low temperature plasma enhanced CVD process within tubular members
US5221354A (en) * 1991-11-04 1993-06-22 General Electric Company Apparatus and method for gas phase coating of hollow articles
US5308649A (en) * 1992-06-26 1994-05-03 Polar Materials, Inc. Methods for externally treating a container with application of internal bias gas
JP2788412B2 (ja) * 1994-08-11 1998-08-20 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
JP2000510910A (ja) * 1996-05-22 2000-08-22 テトラ ラバル ホールディングス アンド ファイナンス エス アー 容器の内面を処理する方法及び装置
FR2776540B1 (fr) * 1998-03-27 2000-06-02 Sidel Sa Recipient en matiere a effet barriere et procede et appareil pour sa fabrication
FR2799994B1 (fr) * 1999-10-25 2002-06-07 Sidel Sa Dispositif pour le traitement d'un recipient a l'aide d'un plasma a basse pression comportant un circuit de vide perfectionne

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10224395A1 (de) * 2002-05-24 2003-12-04 Sig Technology Ltd Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
CN100469943C (zh) * 2002-05-24 2009-03-18 肖特股份公司 用于工件处理的装置和方法
DE10253513A1 (de) * 2002-11-16 2004-06-03 Schott Glas Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
DE10253513B4 (de) * 2002-11-16 2005-12-15 Schott Ag Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
WO2006029743A1 (fr) * 2004-09-15 2006-03-23 Schott Ag Procede et dispositif pour deposer un revetement transparent electroconducteur sur un substrat
DE102011104730A1 (de) * 2011-06-16 2012-12-20 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
US9688438B2 (en) 2011-06-16 2017-06-27 Khs Corpoplast Gmbh Method for the plasma treatment of workpieces and workpiece with a gas barrier layer
EP2626446A1 (fr) * 2012-02-09 2013-08-14 Krones AG Lance d'alimentation et revêtement assisté par plasma avec couplage à haute fréquence

Also Published As

Publication number Publication date
WO2002036850A2 (fr) 2002-05-10
AU2002216000A1 (en) 2002-05-15
WO2002036850A3 (fr) 2002-07-18

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8141 Disposal/no request for examination