DE10011872A1 - Reflexions-Messteilung und Verfahren zur Herstellung derselben - Google Patents
Reflexions-Messteilung und Verfahren zur Herstellung derselbenInfo
- Publication number
- DE10011872A1 DE10011872A1 DE10011872A DE10011872A DE10011872A1 DE 10011872 A1 DE10011872 A1 DE 10011872A1 DE 10011872 A DE10011872 A DE 10011872A DE 10011872 A DE10011872 A DE 10011872A DE 10011872 A1 DE10011872 A1 DE 10011872A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- sub
- partial
- reflection
- carrier substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 239000006096 absorbing agent Substances 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 39
- 239000000463 material Substances 0.000 claims description 24
- 229920002120 photoresistant polymer Polymers 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 235000013405 beer Nutrition 0.000 claims 1
- 239000004922 lacquer Substances 0.000 claims 1
- 238000002310 reflectometry Methods 0.000 description 8
- 238000011109 contamination Methods 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910021569 Manganese fluoride Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- CTNMMTCXUUFYAP-UHFFFAOYSA-L difluoromanganese Chemical compound F[Mn]F CTNMMTCXUUFYAP-UHFFFAOYSA-L 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Elements Other Than Lenses (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10011872A DE10011872A1 (de) | 2000-03-10 | 2000-03-10 | Reflexions-Messteilung und Verfahren zur Herstellung derselben |
| JP2001046694A JP4545966B2 (ja) | 2000-03-10 | 2001-02-22 | 反射測定目盛およびこの測定目盛の製造方法 |
| EP01104953A EP1132719B1 (de) | 2000-03-10 | 2001-03-01 | Reflexions-Messteilung |
| DE50106355T DE50106355D1 (de) | 2000-03-10 | 2001-03-01 | Reflexions-Messteilung |
| US09/801,449 US6671092B2 (en) | 2000-03-10 | 2001-03-08 | Reflective measuring scale graduation and method for its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10011872A DE10011872A1 (de) | 2000-03-10 | 2000-03-10 | Reflexions-Messteilung und Verfahren zur Herstellung derselben |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10011872A1 true DE10011872A1 (de) | 2001-09-27 |
Family
ID=7634333
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10011872A Withdrawn DE10011872A1 (de) | 2000-03-10 | 2000-03-10 | Reflexions-Messteilung und Verfahren zur Herstellung derselben |
| DE50106355T Expired - Lifetime DE50106355D1 (de) | 2000-03-10 | 2001-03-01 | Reflexions-Messteilung |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE50106355T Expired - Lifetime DE50106355D1 (de) | 2000-03-10 | 2001-03-01 | Reflexions-Messteilung |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6671092B2 (https=) |
| EP (1) | EP1132719B1 (https=) |
| JP (1) | JP4545966B2 (https=) |
| DE (2) | DE10011872A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10328873B4 (de) * | 2002-06-27 | 2014-01-30 | Harmonic Drive Systems Inc. | Codierer vom Projektionstyp |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10150099A1 (de) * | 2001-10-11 | 2003-04-17 | Heidenhain Gmbh Dr Johannes | Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung |
| US20040035012A1 (en) * | 2002-08-26 | 2004-02-26 | Moehnke Stephanie J. | Measuring device having symbols viewable in multiple orientations |
| US7256938B2 (en) * | 2004-03-17 | 2007-08-14 | General Atomics | Method for making large scale multilayer dielectric diffraction gratings on thick substrates using reactive ion etching |
| US7321467B2 (en) * | 2005-05-26 | 2008-01-22 | Macronix International Co., Ltd. | Anti-reflection coating layer and design method thereof |
| JP4828612B2 (ja) * | 2007-06-01 | 2011-11-30 | 株式会社ミツトヨ | 反射型エンコーダ、そのスケール、及び、スケールの製造方法 |
| AT509101B1 (de) * | 2009-11-18 | 2011-10-15 | Victor Vasiloiu | Induktive messeinrichtung für längen- und winkelerfassung |
| WO2012079239A1 (zh) * | 2010-12-16 | 2012-06-21 | 苏州苏大维格光电科技股份有限公司 | 一种彩色滤光片 |
| US10317254B2 (en) * | 2014-03-27 | 2019-06-11 | Ams Sensors Singapore Pte. Ltd. | Optical encoder system |
| JP7140495B2 (ja) * | 2017-12-28 | 2022-09-21 | 株式会社ミツトヨ | スケールおよびその製造方法 |
| JP2021131312A (ja) * | 2020-02-20 | 2021-09-09 | 株式会社ミツトヨ | スケール |
| EP4707746A2 (en) * | 2020-03-31 | 2026-03-11 | Dai Nippon Printing Co., Ltd. | Reflection-type optical encoder scale and reflection-type optical encoder |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1279944B (de) * | 1965-09-15 | 1968-10-10 | Wenczler & Heidenhain | Messteilung |
| US4374612A (en) | 1980-07-25 | 1983-02-22 | Canon Kabushiki Kaisha | Mark indicating device for optical apparatus |
| US4286871A (en) * | 1980-08-11 | 1981-09-01 | Keuffel & Esser Company | Photogrammetric measuring system |
| JPS5875004A (ja) * | 1981-10-30 | 1983-05-06 | Mitsutoyo Mfg Co Ltd | 光電式変位検出装置の反射型スケ−ルの製造方法 |
| JPS60118912U (ja) | 1984-01-18 | 1985-08-12 | アルプス電気株式会社 | 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル |
| JPS60161523A (ja) * | 1984-02-02 | 1985-08-23 | Mitsutoyo Mfg Co Ltd | 三次元測定機 |
| JPS60217361A (ja) * | 1984-04-13 | 1985-10-30 | Alps Electric Co Ltd | 光反射式コ−ド板 |
| JPS6145923A (ja) * | 1984-08-10 | 1986-03-06 | Aronshiya:Kk | 反射式ロ−タリ−エンコ−ダ−用回転デイスクの製作方法 |
| IT1245008B (it) * | 1991-01-25 | 1994-09-13 | Lamsweerde Edoardo Van | Elemento graduato per lettura ottica a riflessione e procedimento per la sua fabbricazione |
| JPH0933221A (ja) * | 1995-07-21 | 1997-02-07 | Mitsutoyo Corp | 測長スケール |
| DE59507969D1 (de) * | 1995-11-11 | 2000-04-13 | Heidenhain Gmbh Dr Johannes | Auflicht-Phasengitter |
| US6027815A (en) | 1996-11-06 | 2000-02-22 | Taiwan Semiconductor Manufacturing Company | Non-absorbing anti-reflective coated (ARC) reticle using thin dielectric films and method of forming reticle |
-
2000
- 2000-03-10 DE DE10011872A patent/DE10011872A1/de not_active Withdrawn
-
2001
- 2001-02-22 JP JP2001046694A patent/JP4545966B2/ja not_active Expired - Fee Related
- 2001-03-01 DE DE50106355T patent/DE50106355D1/de not_active Expired - Lifetime
- 2001-03-01 EP EP01104953A patent/EP1132719B1/de not_active Expired - Lifetime
- 2001-03-08 US US09/801,449 patent/US6671092B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10328873B4 (de) * | 2002-06-27 | 2014-01-30 | Harmonic Drive Systems Inc. | Codierer vom Projektionstyp |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1132719B1 (de) | 2005-06-01 |
| US20010021485A1 (en) | 2001-09-13 |
| EP1132719A1 (de) | 2001-09-12 |
| JP2001296146A (ja) | 2001-10-26 |
| US6671092B2 (en) | 2003-12-30 |
| DE50106355D1 (de) | 2005-07-07 |
| JP4545966B2 (ja) | 2010-09-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OR8 | Request for search as to paragraph 43 lit. 1 sentence 1 patent law | ||
| 8105 | Search report available | ||
| 8141 | Disposal/no request for examination |