DD297701B5 - Verfahren zum messen von laengen - Google Patents
Verfahren zum messen von laengen Download PDFInfo
- Publication number
- DD297701B5 DD297701B5 DD90343882A DD34388290A DD297701B5 DD 297701 B5 DD297701 B5 DD 297701B5 DD 90343882 A DD90343882 A DD 90343882A DD 34388290 A DD34388290 A DD 34388290A DD 297701 B5 DD297701 B5 DD 297701B5
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- track
- reference marks
- graduation
- determined
- value
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000011156 evaluation Methods 0.000 claims description 16
- 238000012937 correction Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD90343882A DD297701B5 (de) | 1990-09-07 | 1990-09-07 | Verfahren zum messen von laengen |
DE59102437T DE59102437D1 (de) | 1990-09-07 | 1991-09-04 | Verfahren zum messen von längen. |
EP91915497A EP0500860B1 (fr) | 1990-09-07 | 1991-09-04 | Procede de mesure de longueurs |
AT91915497T ATE109558T1 (de) | 1990-09-07 | 1991-09-04 | Verfahren zum messen von längen. |
PCT/EP1991/001676 WO1992004601A1 (fr) | 1990-09-07 | 1991-09-04 | Procede de mesure de longueurs |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD90343882A DD297701B5 (de) | 1990-09-07 | 1990-09-07 | Verfahren zum messen von laengen |
Publications (2)
Publication Number | Publication Date |
---|---|
DD297701A5 DD297701A5 (de) | 1992-01-16 |
DD297701B5 true DD297701B5 (de) | 1993-09-23 |
Family
ID=5620404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD90343882A DD297701B5 (de) | 1990-09-07 | 1990-09-07 | Verfahren zum messen von laengen |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0500860B1 (fr) |
AT (1) | ATE109558T1 (fr) |
DD (1) | DD297701B5 (fr) |
DE (1) | DE59102437D1 (fr) |
WO (1) | WO1992004601A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08178700A (ja) † | 1994-12-22 | 1996-07-12 | Topcon Corp | インクリメンタルエンコーダ |
CN101451824B (zh) * | 2007-11-30 | 2010-11-10 | 鸿富锦精密工业(深圳)有限公司 | 光栅尺计数控制系统及方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH365231A (fr) * | 1959-03-06 | 1962-10-31 | Genevoise Instr Physique | Convertisseur analogique numérique |
CH444508A (de) * | 1966-07-23 | 1967-09-30 | Kern & Co Ag | Automatische Registriereinrichtung an einem Präzisionswinkel- oder -längenmessinstrument |
US3982106A (en) * | 1973-05-14 | 1976-09-21 | Contraves Ag | System for measuring the longitudinal or angular displacement of a movable component |
US4463259A (en) * | 1982-03-12 | 1984-07-31 | Webster Peter John | Method and apparatus for measuring the displacement of a radiation-restrictive mark, as in a surveying instrument |
AT390674B (de) * | 1989-02-07 | 1990-06-11 | Rsf Elektronik Gmbh | Inkrementales messsystem |
-
1990
- 1990-09-07 DD DD90343882A patent/DD297701B5/de not_active IP Right Cessation
-
1991
- 1991-09-04 DE DE59102437T patent/DE59102437D1/de not_active Expired - Fee Related
- 1991-09-04 EP EP91915497A patent/EP0500860B1/fr not_active Expired - Lifetime
- 1991-09-04 AT AT91915497T patent/ATE109558T1/de not_active IP Right Cessation
- 1991-09-04 WO PCT/EP1991/001676 patent/WO1992004601A1/fr active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE59102437D1 (de) | 1994-09-08 |
DD297701A5 (de) | 1992-01-16 |
WO1992004601A1 (fr) | 1992-03-19 |
EP0500860B1 (fr) | 1994-08-03 |
ATE109558T1 (de) | 1994-08-15 |
EP0500860A1 (fr) | 1992-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B5 | Patent specification, 2nd publ. accord. to extension act | ||
ENJ | Ceased due to non-payment of renewal fee |