DD283755A7 - Praezisions-widerstands-duennschicht - Google Patents

Praezisions-widerstands-duennschicht Download PDF

Info

Publication number
DD283755A7
DD283755A7 DD32203888A DD32203888A DD283755A7 DD 283755 A7 DD283755 A7 DD 283755A7 DD 32203888 A DD32203888 A DD 32203888A DD 32203888 A DD32203888 A DD 32203888A DD 283755 A7 DD283755 A7 DD 283755A7
Authority
DD
German Democratic Republic
Prior art keywords
layer
hydrogen
precision
precision resistance
resistance
Prior art date
Application number
DD32203888A
Other languages
German (de)
English (en)
Inventor
Gerhard Sobe
Hartmut Schreiber
Guenter Weise
Armin Heinrich
Hartmut Vinzelberg
Winfried Brueckner
Lutz Bierbrauer
Albrecht Mueller
Ullrich Heisig
Christian Neelmeiger
Volker Riede
Original Assignee
Akademie Der Wissenschaften Der Ddr,Dd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akademie Der Wissenschaften Der Ddr,Dd filed Critical Akademie Der Wissenschaften Der Ddr,Dd
Priority to DD32203888A priority Critical patent/DD283755A7/de
Priority to DK582989A priority patent/DK582989A/da
Priority to EP19890121543 priority patent/EP0370478A3/de
Priority to FI895533A priority patent/FI895533A0/fi
Publication of DD283755A7 publication Critical patent/DD283755A7/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
DD32203888A 1988-11-22 1988-11-22 Praezisions-widerstands-duennschicht DD283755A7 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DD32203888A DD283755A7 (de) 1988-11-22 1988-11-22 Praezisions-widerstands-duennschicht
DK582989A DK582989A (da) 1988-11-22 1989-11-20 Praecisionsmodstand i form af en tyndfilm
EP19890121543 EP0370478A3 (de) 1988-11-22 1989-11-21 Präzisions-Widerstands-Dünnschicht
FI895533A FI895533A0 (fi) 1988-11-22 1989-11-21 Precisionsmotstaondstunnskikt.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD32203888A DD283755A7 (de) 1988-11-22 1988-11-22 Praezisions-widerstands-duennschicht

Publications (1)

Publication Number Publication Date
DD283755A7 true DD283755A7 (de) 1990-10-24

Family

ID=5604132

Family Applications (1)

Application Number Title Priority Date Filing Date
DD32203888A DD283755A7 (de) 1988-11-22 1988-11-22 Praezisions-widerstands-duennschicht

Country Status (4)

Country Link
EP (1) EP0370478A3 (da)
DD (1) DD283755A7 (da)
DK (1) DK582989A (da)
FI (1) FI895533A0 (da)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5221639A (en) * 1991-10-20 1993-06-22 Motorola, Inc. Method of fabricating resistive conductive patterns on aluminum nitride substrates
DE59605278D1 (de) * 1995-03-09 2000-06-29 Philips Corp Intellectual Pty Elektrisches Widerstandsbauelement mit CrSi-Widerstandsschicht

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3498832A (en) * 1967-03-16 1970-03-03 Motorola Inc Material and method for producing cermet resistors
DD158725A3 (de) * 1980-02-21 1983-02-02 Joachim Sonntag Praezisions-widerstandsschicht
DD230106B5 (de) * 1984-12-20 1994-09-22 Dresden Ev Inst Festkoerper Praezisionswiderstandsschicht fuer den Mittel- und Hochohmbereich

Also Published As

Publication number Publication date
DK582989A (da) 1990-05-23
FI895533A0 (fi) 1989-11-21
DK582989D0 (da) 1989-11-20
EP0370478A2 (de) 1990-05-30
EP0370478A3 (de) 1991-05-08

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Legal Events

Date Code Title Description
NPI Change in the person, name or address of the patentee (addendum to changes before extension act)
RPI Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act)
RPI Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act)
ENJ Ceased due to non-payment of renewal fee