DD260367B5 - Rohrreaktor fuer Halbleiterprozesse - Google Patents
Rohrreaktor fuer HalbleiterprozesseInfo
- Publication number
- DD260367B5 DD260367B5 DD30235087A DD30235087A DD260367B5 DD 260367 B5 DD260367 B5 DD 260367B5 DD 30235087 A DD30235087 A DD 30235087A DD 30235087 A DD30235087 A DD 30235087A DD 260367 B5 DD260367 B5 DD 260367B5
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- tubular reactor
- semiconductor processes
- semiconductor
- processes
- reactor
- Prior art date
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P80/00—Climate change mitigation technologies for sector-wide applications
- Y02P80/30—Reducing waste in manufacturing processes; Calculations of released waste quantities
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD30235087A DD260367B5 (de) | 1987-05-04 | 1987-05-04 | Rohrreaktor fuer Halbleiterprozesse |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD30235087A DD260367B5 (de) | 1987-05-04 | 1987-05-04 | Rohrreaktor fuer Halbleiterprozesse |
Publications (2)
Publication Number | Publication Date |
---|---|
DD260367A1 DD260367A1 (de) | 1988-09-21 |
DD260367B5 true DD260367B5 (de) | 1994-12-01 |
Family
ID=5588662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD30235087A DD260367B5 (de) | 1987-05-04 | 1987-05-04 | Rohrreaktor fuer Halbleiterprozesse |
Country Status (1)
Country | Link |
---|---|
DD (1) | DD260367B5 (de) |
-
1987
- 1987-05-04 DD DD30235087A patent/DD260367B5/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DD260367A1 (de) | 1988-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR880701461A (ko) | 반도체 소자 제조공정 | |
DE3682236D1 (de) | Trommelstruktur fuer halbleiter epitaxiereaktor. | |
DE3767362D1 (de) | Wafer-traeger fuer halbleiterbauteilerzeugung. | |
DE3582496D1 (de) | Reaktorvorrichtung fuer halbleiterwaffelbehandlung. | |
KR850006779A (ko) | 반도체 장치 | |
DE3874469D1 (de) | Messverfahren fuer halbleiteranordnung. | |
ES2021656B3 (es) | Portabrocas | |
KR860004470A (ko) | 반도체 장치 | |
KR880701017A (ko) | 반도체 장치 | |
ES2019676B3 (es) | Mandril de sujeccion | |
KR880700459A (ko) | 반도체 장치 제조 공정 | |
KR890005864A (ko) | 반도체 장치 | |
KR890004438A (ko) | 반도체 장치 | |
DE3854807T2 (de) | Strom-Spannungswandler | |
DD260367B5 (de) | Rohrreaktor fuer Halbleiterprozesse | |
KR880701456A (ko) | 반도체 소자 | |
IT219636Z2 (it) | Struttura portante per veicoli | |
DK230888D0 (da) | Anordning for konventionelle traedoerers | |
KR860005449A (ko) | 반도체장치 | |
KR860005452A (ko) | 반도체장치 | |
KR880003791U (ko) | 반도체장치 | |
KR880009372U (ko) | 세미기 | |
IT8767245A0 (it) | Dispositivo semiconduttore | |
IT1211605B (it) | Dispositivo di innesto particolarmente per autoveicoli | |
KR870017011U (ko) | 방열기용 방열관 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RPI | Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act) | ||
B5 | Patent specification, 2nd publ. accord. to extension act | ||
ENJ | Ceased due to non-payment of renewal fee |