DD260367B5 - Tubular reactor for semiconductor processes - Google Patents

Tubular reactor for semiconductor processes

Info

Publication number
DD260367B5
DD260367B5 DD30235087A DD30235087A DD260367B5 DD 260367 B5 DD260367 B5 DD 260367B5 DD 30235087 A DD30235087 A DD 30235087A DD 30235087 A DD30235087 A DD 30235087A DD 260367 B5 DD260367 B5 DD 260367B5
Authority
DD
German Democratic Republic
Prior art keywords
tubular reactor
semiconductor processes
semiconductor
processes
reactor
Prior art date
Application number
DD30235087A
Other languages
German (de)
Other versions
DD260367A1 (en
Inventor
Thomas Rauh
Wolfgang Wiechmann
Allhard Haenig
Werner Karrasch
Bernd Weinberg
Original Assignee
Halbleiter Elektronik Frankfur
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Halbleiter Elektronik Frankfur filed Critical Halbleiter Elektronik Frankfur
Priority to DD30235087A priority Critical patent/DD260367B5/en
Publication of DD260367A1 publication Critical patent/DD260367A1/en
Publication of DD260367B5 publication Critical patent/DD260367B5/en

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/30—Reducing waste in manufacturing processes; Calculations of released waste quantities
DD30235087A 1987-05-04 1987-05-04 Tubular reactor for semiconductor processes DD260367B5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD30235087A DD260367B5 (en) 1987-05-04 1987-05-04 Tubular reactor for semiconductor processes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD30235087A DD260367B5 (en) 1987-05-04 1987-05-04 Tubular reactor for semiconductor processes

Publications (2)

Publication Number Publication Date
DD260367A1 DD260367A1 (en) 1988-09-21
DD260367B5 true DD260367B5 (en) 1994-12-01

Family

ID=5588662

Family Applications (1)

Application Number Title Priority Date Filing Date
DD30235087A DD260367B5 (en) 1987-05-04 1987-05-04 Tubular reactor for semiconductor processes

Country Status (1)

Country Link
DD (1) DD260367B5 (en)

Also Published As

Publication number Publication date
DD260367A1 (en) 1988-09-21

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Legal Events

Date Code Title Description
RPI Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act)
B5 Patent specification, 2nd publ. accord. to extension act
ENJ Ceased due to non-payment of renewal fee