CS265332B1 - The supersonic generator,esp.for high pure environmet and great power - Google Patents
The supersonic generator,esp.for high pure environmet and great power Download PDFInfo
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- CS265332B1 CS265332B1 CS877969A CS796987A CS265332B1 CS 265332 B1 CS265332 B1 CS 265332B1 CS 877969 A CS877969 A CS 877969A CS 796987 A CS796987 A CS 796987A CS 265332 B1 CS265332 B1 CS 265332B1
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- Czechoslovakia
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- environmet
- esp
- supersonic generator
- high pure
- great power
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- 239000002184 metal Substances 0.000 claims abstract description 9
- 230000007797 corrosion Effects 0.000 claims abstract description 8
- 238000005260 corrosion Methods 0.000 claims abstract description 8
- 239000011241 protective layer Substances 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 abstract description 3
- 230000001681 protective effect Effects 0.000 abstract description 2
- 239000012530 fluid Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Podstata riešenia spočívá v tom, že kovová membrána a jej závitový spoj je chráněný ochrannou protikoróznou vrstvou, pričom ultrazvukový žiarič je kompaktně spojený so stěnou pracovněj nádoby prostredníctvom výstupku dosadajúceho po obvode na ochranné protikoróznu vrstvu.The essence of the solution is that the metal membrane and its threaded joint is protected by a corrosion protection layer wherein the ultrasonic emitter is compact connected to the wall of the working container through the protrusion abutting perimeter on a protective corrosion layer.
Description
Vynález sa týká ultrazvukového žiariča najmS pre zvlášť čisté prostredie a velké výkony.The invention relates to an ultrasonic radiator, in particular for a particularly clean environment and high power.
Pri spracovaní základného materiálu ako je germánium, křemík pri výrobě polovodičových prvkov sa vyžadujú vysoké nároky na čistotu povrchov tohoto materiálu. Zvlášt pri nanášaní róznych vrstiev na povrch tohoto materiálu nesmú byť přítomné molekulárně, atomárně ani iónové znečistenia. V poslednom období na odstránenie týchto nečistót sa s úspechom používá ultrazvuková energia vyžarovaná do pracovnej kvapaliny pomocou ultrazvukového meniča. Ultrazvukový piezokeramický měnič, aby neznečišťoval pracovně prostredie je opatřený ochrannou vrstvou hmoty, ktorá neznečišťuje pracovně prostredie. Nevýhodou tohoto rešenia je, že pri nanášaní ochrannéj vrstvy na piezokeramický měnič, dochádza k jeho degradácii, hlavně teplom, takže piezokeramický měnič třeba znovu polarizovat, pričom zasa prichádza často k poškodeniu ochrannej vrstvy vplyvom rozdielnej tepelnej rozťažnosti piezokeramického meniča a oohrannej vrstvy. Iné riešenia využívajú přenos ultrazvukovéj energie z piezokeramického meniča do pracovného prostredia cez pracovnú komůrku naplnenú přenosovou kvapalinou. Nevýhodou tohoto riešenia je poměrně nízká prenášaná výkonová úroveň.When processing a base material such as germanium, silicon in the manufacture of semiconductor elements, high demands are made on the surface cleanliness of the material. Particularly when applying different layers to the surface of this material, no molecular, atomic or ionic contamination must be present. Recently, ultrasonic energy emitted into the working fluid by an ultrasonic transducer has been successfully used to remove these impurities. The ultrasonic piezoceramic transducer is designed to prevent contamination of the working environment and is provided with a protective layer of material that does not contaminate the working environment. The disadvantage of this solution is that when the protective layer is applied to the piezoceramic transducer, it is degraded, mainly by heat, so that the piezoceramic transducer needs to be polarized again, often resulting in damage to the protective layer due to different thermal expansion of the piezoceramic transducer and protective layer. Other solutions utilize the transfer of ultrasonic energy from a piezoceramic transducer to the working environment through a working chamber filled with transfer fluid. The disadvantage of this solution is the relatively low transmitted power level.
Vyššie uvedené nevýhody odstraňuje a technický problém rieši ultrazvukový žiarič najma pre zvlášt čisté prostredie a velké výkony podlá vynálezu, ktorého podstata spočívá v tom, že kovová membrána je na vnútornej vyžarovacej straně opatřená ochrannou poritikoróznou vrstvou. Ultrazvukový žiarič je kompaktně spojený so stěnou pracovnej nádoby prostredníctvom výstupku dosadajúceho po obvode na ochrannú protikoróznu vrstvu.The above-mentioned disadvantages are avoided and the technical problem is solved by an ultrasonic radiator, in particular for a particularly clean environment and high power according to the invention, which is based on the fact that the metal membrane is provided with a protective poriticorrosion layer on the inner radiation side. The ultrasonic radiator is compactly connected to the working vessel wall by means of a protrusion abutting on the periphery on the corrosion protection layer.
Ultrazvukovým žiaričom najmS pre zvlášt čisé prostredie a velké výkony sa zamedzí akémukolvek znečistovaniu pracovného prostredia v pracovnej váni z kovověj membrány alebo zo závitového spoja. Dosiahne sa ním vysoká životnost aj pri vysokých výkonoch pri vysokej elektroakustickej účinnosti.Ultrasonic emitters, especially for particularly clean environments and high power, will avoid any contamination of the working environment in the working vessel from a metal diaphragm or from a threaded joint. It achieves high lifetime even at high power and high electroacoustic efficiency.
Na pripojenom výkrese je znázorněné příkladné riešenie ultrazvukového žiariča pre zvlášť čisté prostredie a velké výkony, kde je nakreslený v řeze.The attached drawing shows an exemplary ultrasonic radiator solution for a particularly clean environment and high power, where it is drawn in section.
Ultrazvukový žiarič pre zvlášť čisté prostredie a velké výkony pozostáva z kovověj membrány 2 P° obvode opatrenej prstencom jí. Na kovověj membráně 3 je z vonkajšej strany přilepený piezokeramický měnič 2· Vnútorná strana kovověj membrány 2 js opatřená ochrannou protikoróznou vrstvou 6. Do steny pracovnej nádoby 2 je ultrazvukový žiarič 2 uchytený závitovým spojom 2 tak, že ochrana protikorózna vrstva 6 dosedá pevne po obvode na výstupok 7. vytvořený v stene pracovnej nádoby 2» čím sa zabráni přístupu pracovnej kvapaliny na závitový spoj 4..The ultrasonic radiator for a particularly clean environment and high power consists of a metal diaphragm 2 P ° circumferentially equipped with an annular ring. A piezoceramic transducer 2 is glued to the metal diaphragm 3 from outside. The inner side of the metal diaphragm 2 is provided with a corrosion protective layer 6. In the working vessel wall 2 an ultrasonic radiator 2 is secured by a threaded joint 2 so that the corrosion protection layer 6 rests firmly a projection 7 formed in the wall of the working vessel 2, thereby preventing the working fluid from reaching the threaded connection 4.
Po připojení ultrazvukového žiariča-2 na zdroj ultrazvukovej energie, na obr. nezakreslené sa táto vyzařuje prostredníctvom piezokeramického meniča 5 cez kovovú membránu 2 a ochrannú protikoróznu vrstvu 2 do pracovnej kvapaliny v pracovnej nádobě 2.After connecting the ultrasonic radiator-2 to the ultrasonic energy source, FIG. not shown, it is emitted via a piezoceramic transducer 5 through a metal membrane 2 and a corrosion protective layer 2 into the working fluid in the working vessel 2.
Ultrazvukový žiarič podlá vynálezu je výhodné využívat v mikroelektronike, biologii, medicíně a v dalších oboroch, kde sa vyžaduje zvlášť vysoká čistota vykonávaných technológi.The ultrasonic radiator of the present invention is advantageous for use in microelectronics, biology, medicine and other fields where particularly high purity of the technology is required.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS877969A CS265332B1 (en) | 1987-11-06 | 1987-11-06 | The supersonic generator,esp.for high pure environmet and great power |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS877969A CS265332B1 (en) | 1987-11-06 | 1987-11-06 | The supersonic generator,esp.for high pure environmet and great power |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CS796987A1 CS796987A1 (en) | 1989-01-12 |
| CS265332B1 true CS265332B1 (en) | 1989-10-13 |
Family
ID=5429726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS877969A CS265332B1 (en) | 1987-11-06 | 1987-11-06 | The supersonic generator,esp.for high pure environmet and great power |
Country Status (1)
| Country | Link |
|---|---|
| CS (1) | CS265332B1 (en) |
-
1987
- 1987-11-06 CS CS877969A patent/CS265332B1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS796987A1 (en) | 1989-01-12 |
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