CS254230B1 - Ultrasonic emitter, especially for a particularly clean environment - Google Patents
Ultrasonic emitter, especially for a particularly clean environment Download PDFInfo
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- CS254230B1 CS254230B1 CS862208A CS220886A CS254230B1 CS 254230 B1 CS254230 B1 CS 254230B1 CS 862208 A CS862208 A CS 862208A CS 220886 A CS220886 A CS 220886A CS 254230 B1 CS254230 B1 CS 254230B1
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Abstract
Podstata riešenia spočívá v tom, že kovová membrána s prstencom je uložená v ochraninom plášti z plastickej hmoty, ktorý je tvořený přenosovou membránou. Medzi kovovou membránou a přenosovou membránou je vytvořená prenosovo-akustická a chladiaca komora.The essence of the solution lies in the fact that the metal membrane with the ring is placed in a protective plastic casing, which is formed by a transmission membrane. A transmission-acoustic and cooling chamber is formed between the metal membrane and the transmission membrane.
Description
Vynález sa týká riešenia ultrazvukového žiariča, najma pre zvlášť čisté prostredie.The invention relates to an ultrasonic radiator solution, in particular for a particularly clean environment.
Pri spracovávaní základného materiálu ako je křemík, germánium a podobné potřebného pre výrobu například tranzistorov, integrovaných obvodov, diod sa vyžadujú vysoké nároky na čistotu povrchov tohoto materiálu. Zvlášť pri nanášaní různých vrstiev na povrch tohoto materiálu nesmú byť přítomné molekulárně, iónové, ani atomárně znečistenia. V poslednej době sa odstránenie týchto nečistot sa používá ultrazvuková energie, ktorá sa do pracovnej kvapaliny pre čistenie vyzařuje pomocou ultrazvukového meniča. Ultrazvukový měnič, aby neznečišťoval pracovně prostredie, je opatřený ochrannou vrstvou hmoty, ktorá neznečišťuje prostredie.When processing a base material such as silicon, germanium and the like needed to produce, for example, transistors, integrated circuits, diodes, high surface cleanliness requirements are required. Particularly when applying different layers to the surface of this material, molecular, ionic or atomic contamination must not be present. Recently, the removal of these impurities has been using ultrasonic energy, which is emitted into the working liquid for cleaning by means of an ultrasonic transducer. In order not to contaminate the working environment, the ultrasonic transducer is provided with a protective layer of non-polluting material.
Nevýhodou tejto vrstvy je jej veTmi malá životnost, sposobená hlavně rozdielnou jej rozťažnosťou a ultrazvukového meniča. Ďalšou nevýhodou tu je problém vhodnej izolácie prívodov elektrickej energie. Ďalšou nevýhodou tohoto žiariča je, že pri poškodení ochrannej vrstvy dochádza k znehodnoteniu pracovnej kvapaliny a celého zariadenia.The disadvantage of this layer is its very low lifetime, caused mainly by its different extensibility and ultrasonic transducer. A further disadvantage here is the problem of suitably insulating the power supply. A further disadvantage of this radiator is that in the case of damage to the protective layer, the working fluid and the entire device are destroyed.
Vyššie uvedené nevýhody odstraňuje a technický problém rieši ultrazvukový žiarič, najma pre zvlášť čisté prostredie pódia vynálezu, ktorého podstata spočívá v tom, že kovová membrána s prstencom je uložená v ochrannom plášti z plastickej hmoty a je s ním spojená prostrednictvom závitového spoja. Oproti kovověj membráně je kovový plášť tvořený přenosovou membránou. Medzi kovovou a přenosovou membránou je vytvořená prenosovo-akustická a chladiaca komora spojená s privádzacím a odvádzacím kanálom, ktoré sú vytvořené v prstenci.The above-mentioned disadvantages are overcome and the technical problem is solved by an ultrasonic radiator, in particular for a particularly clean environment according to the invention, which consists in that the metal membrane with the ring is embedded in a protective plastic sheath and connected to it by a threaded connection. In contrast to the metal membrane, the metal sheath is formed by a transfer membrane. A transmission-acoustic and cooling chamber is formed between the metal and the transfer diaphragm and is connected to the inlet and outlet ducts which are formed in the ring.
Podstatou vynálezu je aj to, že ochranný plášť je oproti prstenců z vonkajšej strany privádzacieho a odvádzacieho kanála a oproti stene pracovnej vane nad vonkajším obvodom upevňovacích skrutiek opatřený tesniacimi výstupkami.It is also an object of the invention that the protective jacket is provided with sealing projections against the rings on the outside of the inlet and outlet ducts and against the wall of the workbench above the outer periphery of the fixing screws.
Ultrazvukovým žiaričom najmá pre zvlášť čisté prostredie pódia vynálezu ša docieli absolútna čistota pracovného prostredia, vysoká prevádzková životnost pri vysokej elektroakustickej účinnosti.Ultrasonic emitters for particularly clean environments according to the invention will achieve absolute cleanliness of the working environment, high operating life and high electroacoustic efficiency.
Na pripojenom výkrese je znázorněné příkladné riešenie ultrazvukového žiariča pre zvlášť čisté prostredie, kde je nakreslený v řeze.The attached drawing shows an exemplary ultrasonic radiator solution for a particularly clean environment where it is drawn in section.
Ultrazvukový žiarič ipre zvlášť čisté prostredie pozostáva z kovověj membrány 2 po obvode opatrenej prstencom 3. Na vnútornej straně kovověj membrány 2 je přilepený piezoelektrický měnič 1. Prstenec 3 kovověj membrány 2 je na vonkajšom povrchu opatřený závitom. V prstenci 3 je vytvořený privádzací kanál 8 a odvádzací kanál 9 prenosovo-chladiacej kvapaliny 14. Kovová membrána 2 s prstencom 3 je uložená v ochrannom plášti 12 prostrednictvom závitového spoja 10.The ultrasonic radiator for a particularly clean environment consists of a metal diaphragm 2 circumferentially provided with a ring 3. A piezo transducer 1 is adhered to the inside of the metal diaphragm 1. The ring 3 of the metal diaphragm 2 is threaded on the outer surface. A supply channel 8 and a discharge channel 9 of the transfer-cooling liquid 14 are formed in the ring 3. The metal membrane 2 with the ring 3 is embedded in the protective sheath 12 via a threaded connection 10.
Ochranný iplášť 12 je vytvořený z teflonu. Oproti kovověj membráně 2 je ochranný plášť 12 tvořený přenosovou membránou 13. Medzi kovovou mebránou 2 a přenosovou membránou 13 je vytvořená prenosovo-chladiaca komora 4, ktorá je naplněná prenosovo-chladiacou kvapalinou 14. Ultrazvukový žiarič je prostrednictvom upevňovacích skrutiek 5 a príruby 11 uchytený na pracovnej váni 6. Ochranný plášť 12 je oproti prstenců 3 z vonkajšej strany privádzacieho a odvádzacieho kanála 8, 9 a oproti stene pracovnej vane 6 nad vonkajším obvodom upevňovacích skrutiek 5 opatřený tesniacimi výstupkami 7.The protective jacket 12 is made of Teflon. In contrast to the metal diaphragm 2, the protective sheath 12 is formed by a transmission membrane 13. Between the metal diaphragm 2 and the transmission diaphragm 13 is formed a transmission-cooling chamber 4 which is filled with transmission-cooling liquid 14. The ultrasonic radiator is fastened to the screws. The protective sheath 12 is provided with sealing projections 7 opposite the rings 3 from the outside of the inlet and outlet channels 8, 9 and against the wall of the working tray 6 above the outer periphery of the fastening screws 5.
Po připojení ultrazvukového žiariča na zdroj ultrazvukovéj energie (na obr. nezakreslené) sa táto prostrednictvom piezoelektrického meniča 1 vyzařuje cez kovovú mebránu 2 prenosovo-chladiacu kvapalinu 14 a prenosovú membránu 13 do pracovnej kvapaliny v pracovnej váni 6.After the ultrasonic radiator has been connected to an ultrasonic energy source (not shown in the figure), it is radiated by means of the piezoelectric transducer 1 through the metal diaphragm 2 of the transfer-cooling liquid 14 and the transfer membrane 13 into the working liquid in the working vessel 6.
Ultrazvukový žiarič podfa vynálezu je možné využívat v mikroelektronike, biologii, medicíně a v dalších oboroch, kde sa vyžaduje zvlášť vysoká čistota vykonávaných technologií.The ultrasonic radiator of the present invention can be used in microelectronics, biology, medicine and other fields where particularly high purity of the technology is required.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS862208A CS254230B1 (en) | 1986-03-28 | 1986-03-28 | Ultrasonic emitter, especially for a particularly clean environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS862208A CS254230B1 (en) | 1986-03-28 | 1986-03-28 | Ultrasonic emitter, especially for a particularly clean environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CS220886A1 CS220886A1 (en) | 1987-05-14 |
| CS254230B1 true CS254230B1 (en) | 1988-01-15 |
Family
ID=5358547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS862208A CS254230B1 (en) | 1986-03-28 | 1986-03-28 | Ultrasonic emitter, especially for a particularly clean environment |
Country Status (1)
| Country | Link |
|---|---|
| CS (1) | CS254230B1 (en) |
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1986
- 1986-03-28 CS CS862208A patent/CS254230B1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS220886A1 (en) | 1987-05-14 |
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