CS215874B1 - Apparatus for positioning semiconductor discs - Google Patents
Apparatus for positioning semiconductor discs Download PDFInfo
- Publication number
- CS215874B1 CS215874B1 CS575875A CS575875A CS215874B1 CS 215874 B1 CS215874 B1 CS 215874B1 CS 575875 A CS575875 A CS 575875A CS 575875 A CS575875 A CS 575875A CS 215874 B1 CS215874 B1 CS 215874B1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- semiconductor
- sensors
- roller
- worktable
- chord
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 32
- 230000033001 locomotion Effects 0.000 claims abstract description 7
- 238000005096 rolling process Methods 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- HEFNNWSXXWATRW-UHFFFAOYSA-N Ibuprofen Chemical compound CC(C)CC1=CC=C(C(C)C(O)=O)C=C1 HEFNNWSXXWATRW-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Attitude Control For Articles On Conveyors (AREA)
- Control Of Conveyors (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18068774A DD114172A1 (2) | 1974-08-23 | 1974-08-23 | |
| DD18068674A DD114173A1 (2) | 1974-08-23 | 1974-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS215874B1 true CS215874B1 (en) | 1982-09-15 |
Family
ID=25747533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS575875A CS215874B1 (en) | 1974-08-23 | 1975-08-22 | Apparatus for positioning semiconductor discs |
Country Status (4)
| Country | Link |
|---|---|
| CS (1) | CS215874B1 (2) |
| DE (1) | DE2533661A1 (2) |
| FR (1) | FR2282669A1 (2) |
| GB (1) | GB1510715A (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108033239A (zh) * | 2018-01-11 | 2018-05-15 | 浙江大学 | 一种用于圆柱形零件传送的排列装置 |
-
1975
- 1975-07-28 DE DE19752533661 patent/DE2533661A1/de not_active Withdrawn
- 1975-08-21 GB GB3470875A patent/GB1510715A/en not_active Expired
- 1975-08-21 FR FR7525930A patent/FR2282669A1/fr active Granted
- 1975-08-22 CS CS575875A patent/CS215874B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1510715A (en) | 1978-05-17 |
| DE2533661A1 (de) | 1976-03-04 |
| FR2282669B3 (2) | 1978-04-07 |
| FR2282669A1 (fr) | 1976-03-19 |
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