CN2585251Y - Electric adjustable optical attenuator - Google Patents
Electric adjustable optical attenuator Download PDFInfo
- Publication number
- CN2585251Y CN2585251Y CN 02288433 CN02288433U CN2585251Y CN 2585251 Y CN2585251 Y CN 2585251Y CN 02288433 CN02288433 CN 02288433 CN 02288433 U CN02288433 U CN 02288433U CN 2585251 Y CN2585251 Y CN 2585251Y
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- platinum electrode
- titanium platinum
- cavity
- input
- optical attenuator
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- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The utility model relates to an electric adjustable optical attenuator belonging to the technical field of microelectronics machines and optical communication devices. In the utility model, an electric adjustable optical attenuator chip 12 is composed of a high doping silicon substrate 6, a silicon dioxide supporting arm 5, a silicon nitride film 4, a titanium platinum electrode 3, a titanium platinum electrode 18 and a cavity 8; a movable optical window reflecting film 9 suspended above the cavity 8 is composed of a silicon nitride film 4; an input and output simple module double-optical fiber 1 and an input and output simple module double-optical fiber 10 are fixed above the electricity adjustable attenuator chip 12 after being connected with a collimating lens 2 by adhesives 11. Homogeneous light is inputted from the input and output simple module double-optical fiber 1; when voltage added on the titanium platinum electrode 3 and the titanium platinum electrode 18 is continuously increased form 0 volt to 24 volts, reflected light outputted from the input and output simple module double-optical fiber 10 is continuously attenuated from 3 db to 30 db. The utility model has the advantages of short response time, small size, easy fabrication, low cost and low driving voltage.
Description
Technical field
The utility model relates to a kind of electric adjustable optical attenuator, belongs to microelectron-mechanical and optical communication device technical field.
Background technology
Adjustable optical attenuator (Variable Optical Attenuator is called for short VOA) is a kind of core devices in the modern broadband light net.In wavelength-division multiplex optical fiber optical-fiber network (WDM FiberOptical Networks), be used for adjusting the power of each channel signal.The dynamic range that can also be used for long Distance Transmission of analog optical fiber or detected transmission system simultaneously.Traditional opto-mechanical VOA attenuation range wide (＞50db), but volume is big, response time long (～1 second), power consumption are big, so limited its application prospect.The report of relevant in recent years micromechanics adjustable optical attenuator is extremely many, wherein mainly utilizes the deflection of catoptron and makes in the majority that the luminous power that reflexes to output optical fibre changes, and this VOA has realized that volume is little, but the response time (Millisecond) awaits to improve.As according to IEEE, in September, 1998, people such as B.Barber developed a kind of micromechanics optical attenuator with static driven, and its principle is to rely on the displacement of catoptron to realize optical attenuation, and disadvantage has been this structural limitations its response time.Chinese patent 00127939.4 report one Electromagnetically driven micromechanical variable light attenuator, this attenuator adopts light barrier and Electromagnetic Drive loop construction, and its shortcoming is that the response time is long, reaches Millisecond.
Summary of the invention
The utility model aims to provide the electric adjustable optical attenuator that a kind of driving voltage is low, attenuation range is wide and the response time is short.The utility model adopts following structure to realize above-mentioned purpose.
Existing accompanying drawings structure of the present utility model.A kind of electric adjustable optical attenuator, it is characterized in that, comprise the two optical fiber 1 and 10 of input and output single mode, collimation lens 2, titanium platinum electrode 3 and 18, silicon nitride film 4, silicon dioxide support arm 5, heavily doped silicon substrate 6, cavitation attack pit 7, cavity 8, optical window reflectance coating 9, bonding agent 11, quartzy pedestal 13, extraction electrode 14, fixed cover 15, shell 16, quartzy pipe box 17, deposit silicon dioxide support arm 5 on the heavily doped silicon substrate 6, the central authorities of silicon dioxide support arm 5 are cavitys 8, the silicon nitride film 4 of cavity 8 tops constitutes optical window reflectance coating 9, the optical window reflectance coating 9 outer titanium platinum electrodes 3 that are with, optical window reflectance coating 9 and titanium platinum electrode 3 constitute the movable film that is suspended in cavity 8 tops, equally distributed cavitation attack pit 7 is arranged on titanium platinum electrode 3 and the silicon nitride film 4, titanium platinum electrode 18 and heavily doped silicon substrate 6 are electrically connected, heavily doped silicon substrate 6, silicon dioxide support arm 5, silicon nitride film 4, titanium platinum electrode 3 and 18, cavity 8 and cavitation attack pit 7 constitute electric adjustable optical attenuator chip 12, electricity adjustable optical attenuator chip 12 is bonded on the quartzy pedestal 13, two extraction electrodes 14 are electrically connected for 18 one-tenth with the titanium platinum electrode with titanium platinum electrode 3 respectively, after the two optical fiber 1 of input and output single mode and 10 join by bonding agent 11 and collimation lens 2, be encapsulated in the quartzy pipe box 17 quartzy pipe box 17 and interior collimation lens 2 thereof, the two optical fiber 1 of input and output single mode and 10 and quartzy pedestal 13 and on electric adjustable optical attenuator chip 12, extraction electrode 14 is by fixed cover 15 integrated being encapsulated in the shell 16.
Principle of work.The power supply feedback is added between two extraction electrodes 14, and movable film makes the thickness of cavity 8 change under the electrostatic attraction effect.Monochromatic light converges to optical window reflectance coating 9 from two optical fiber 1 inputs of input and output single mode through collimation lens 2, and reflected light enters the two optical fiber 10 of input and output single mode, and from two optical fiber 10 outputs of input and output single mode.When supply voltage increased continuously to 24V from 0 volt, the thickness of cavity 8 was gradually reduced to 1/2 λ (λ is a lambda1-wavelength) from 3/4 λ, and the reflectivity of optical window reflectance coating 9 is changed, and has realized the continuous decay of reflected light from 3db to 30db.
Compare with background technology, the utility model has following outstanding effect:
1. the response time lacks, only 6 microseconds.
2. volume is little, is easy to make, and production cost is low.
3. driving voltage is low, is 24V.
Description of drawings
Fig. 1 is the microscopically surface structure synoptic diagram of the related electric adjustable optical attenuator chip 12 of the utility model.Fig. 2 is the related electric adjustable optical attenuator cross-sectional view of the utility model.Fig. 3 is the structural representation of the related integrated encapsulation of electric adjustable optical attenuator of the utility model.Among three figure, 1 and 10 is the two optical fiber of input and output monofilm, the 2nd, and collimation lens, 3 and 18 is titanium platinum electrodes, the 4th, and silicon nitride film, the 5th, silicon dioxide support arm, the 6th, heavily doped silicon substrate, the 7th, cavitation attack pit, the 8th, cavity, the 9th, optical window reflectance coating, the 11st, bonding agent, the 12nd, optical attenuator chip, the 13rd, quartzy pedestal, the 14th, extraction electrode, the 15th, fixed cover, the 16th, shell, the 17th, quartzy pipe box.
Embodiment
Embodiment.
A kind of electric adjustable optical attenuator with said structure, it is characterized in that, suspend the diameter of movable film between 300 μ m～500 μ m, the diameter of optical window reflectance coating 9 is between 100 μ m～150 μ m, the diameter of cavitation attack pit 7 is 8 μ m, the diameter of cavity 8 and highly be respectively 400 μ m and 1 μ m, the diameter and the focal length of collimation lens 2 are 1mm, and collimation lens 2 is 0.5mm with the distance of electric adjustable optical attenuator chip 12.
Claims (2)
1. electric adjustable optical attenuator, it is characterized in that, comprise the two optical fiber (1) of input and output single mode and (10), collimation lens (2), titanium platinum electrode (3) and (18), silicon nitride film (4), silicon dioxide support arm (5), heavily doped silicon substrate (6), cavitation attack pit (7), cavity (8), optical window reflectance coating (9), bonding agent (11), quartzy pedestal (13), extraction electrode (14), fixed cover (15), shell (16), quartzy pipe box (17), deposit silicon dioxide support arm (5) on the heavily doped silicon substrate (6), the central authorities of silicon dioxide support arm (5) are cavity (8), the silicon nitride film (4) of cavity (8) top constitutes optical window reflectance coating (9), the outer titanium platinum electrode (3) that is with of optical window reflectance coating (9), optical window reflectance coating (9) and titanium platinum electrode (3) constitute the movable film that is suspended in cavity (8) top, on titanium platinum electrode (3) and the silicon nitride film (4) equally distributed cavitation attack pit (7) is arranged, titanium platinum electrode (18) and heavily doped silicon substrate (6) are electrically connected, heavily doped silicon substrate (6), silicon dioxide support arm (5), silicon nitride film (4), titanium platinum electrode (3) and (18), cavity (8) and cavitation attack pit (7) constitute electric adjustable optical attenuator chip (12), electricity adjustable optical attenuator chip (12) is bonded on the quartzy pedestal (13), two extraction electrodes (14) become to be electrically connected with titanium platinum electrode (18) with titanium platinum electrode (3) respectively, after the two optical fiber (1) of input and output single mode and (10) join by bonding agent (11) and collimation lens (2), be encapsulated in the quartzy pipe box (17) quartzy pipe box (17) and interior collimation lens (2) thereof, the two optical fiber (1) of input and output single mode and (10) and quartzy pedestal (13) and on electric adjustable optical attenuator chip (12), extraction electrode (14) is encapsulated in the shell (16) by fixed cover (15) is integrated.
2. a kind of electric adjustable optical attenuator according to claim 1, it is characterized in that, suspend the diameter of movable film between 300 μ m～500 μ m, the diameter of optical window reflectance coating (9) is between 100 μ m～150 μ m, the diameter of cavitation attack pit (7) is 8 μ m, the diameter of cavity (8) and highly be respectively 400 μ m and 1 μ m, the diameter and the focal length of collimation lens (2) are 1mm, and collimation lens (2) is 0.5mm with the distance of electric adjustable optical attenuator chip (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02288433 CN2585251Y (en) | 2002-12-17 | 2002-12-17 | Electric adjustable optical attenuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02288433 CN2585251Y (en) | 2002-12-17 | 2002-12-17 | Electric adjustable optical attenuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2585251Y true CN2585251Y (en) | 2003-11-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02288433 Expired - Fee Related CN2585251Y (en) | 2002-12-17 | 2002-12-17 | Electric adjustable optical attenuator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2585251Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1321054C (en) * | 2004-07-06 | 2007-06-13 | 华东师范大学 | Preparation method of silicon-based micro mechanical photomodulator chip |
| CN100397115C (en) * | 2004-03-22 | 2008-06-25 | 三星电机株式会社 | Cantilever-type PLC optical attenuator and manufacturing method thereof |
| CN105223687A (en) * | 2015-11-10 | 2016-01-06 | 成都新锐鑫光通信技术有限公司 | A kind of have the long adjustable optic fibre attenuator regulating length |
| CN107505702A (en) * | 2017-09-06 | 2017-12-22 | 四川梓冠光电科技有限公司 | A kind of micro electronmechanical type adjustable optical attenuator |
-
2002
- 2002-12-17 CN CN 02288433 patent/CN2585251Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100397115C (en) * | 2004-03-22 | 2008-06-25 | 三星电机株式会社 | Cantilever-type PLC optical attenuator and manufacturing method thereof |
| CN1321054C (en) * | 2004-07-06 | 2007-06-13 | 华东师范大学 | Preparation method of silicon-based micro mechanical photomodulator chip |
| CN105223687A (en) * | 2015-11-10 | 2016-01-06 | 成都新锐鑫光通信技术有限公司 | A kind of have the long adjustable optic fibre attenuator regulating length |
| CN105223687B (en) * | 2015-11-10 | 2017-09-26 | 成都新锐鑫光通信技术有限公司 | A kind of adjustable optic fibre attenuator with long adjustment length |
| CN107505702A (en) * | 2017-09-06 | 2017-12-22 | 四川梓冠光电科技有限公司 | A kind of micro electronmechanical type adjustable optical attenuator |
| CN107505702B (en) * | 2017-09-06 | 2020-01-03 | 四川梓冠光电科技有限公司 | Micro-electromechanical variable optical attenuator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |