CN103576241B - Light-blocking type micro-electro-mechanical variable optical attenuator - Google Patents
Light-blocking type micro-electro-mechanical variable optical attenuator Download PDFInfo
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- CN103576241B CN103576241B CN201310510617.3A CN201310510617A CN103576241B CN 103576241 B CN103576241 B CN 103576241B CN 201310510617 A CN201310510617 A CN 201310510617A CN 103576241 B CN103576241 B CN 103576241B
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Abstract
The invention discloses a light-blocking type micro-machine electrical variable optical attenuator which comprises input optical fibers, output optical fibers, a fixing light-shielding board, a movable MEMS appliance, a magnetic field generating device and a drive circuit. A light-permeable hole is formed in the center of the fixing light-shielding board, the drive circuit and the lower surface of the fixing light-shielding board can be bonded with the upper surface of the movable MEMS appliance in an aligned mode, a movable light-shielding board is arranged in the center of the movable MEMS appliance, the magnetic field generating device is of a central hollowing structure, and the center of the movable MEMS appliance, the center of the movable MEMS appliance, the center of the magnetic field generating device and the center of the light-permeable hole are arranged in the same axis. Light is input through the input optical fibers, passes through the light-permeable hole of the fixing light-shielding board, generates controllable light attenuation through the movable MEMS appliance, and is output by the output optical fibers. The magnetic field generating device interacts with currents passing through the movable MEMS appliance, so that lorentz force is generated, and the movable light-shielding board is driven to move. The amount of light attenuation of the light-blocking type micro-machine electrical variable optical attenuator is continuous and adjustable.
Description
Technical field
The present invention relates to field of photoelectric technology, particularly relate to a kind of variable optical attenuator, this variable optical attenuator can be used for making the light intensity be input to wherein produce controlled decay.
Background technology
Along with the growth at full speed of message volume, the variation of form of service, all-optical network has become the development trend of present communication network.One of key issue that the practical needs of optical-fiber network solve is that the power between each wavelength channel is unbalanced, and many occasions need the power reducing light signal.
Optical attenuator (Optical Attenuator, OA) be that one can under external drive (machinery, electric power, magnetic force etc.) effect, realize the change of optical element motion or optical states, thus change the transfer efficiency of light, reach the device that Output optical power is decayed relative to input optical power.Optical attenuator, as a kind of important passive light power regulator part, can produce controlled decay in optical-fiber network, realize that the gain of light is smooth well with other device matching, dynamic gain equalization and through-put power balanced.
Optical attenuator can be divided into fixed optical attenuator and variable optical attenuator (Variable OpticalAttenuator, VOA) two kinds of forms.Current fixed optical attenuator price is lower, in order to balance luminous energy, but can not regulate due to damping capacity, can not realize the Dynamic controlling to signal; Relatively, variable optical attenuator comparatively has an advantage in development, and damping capacity can change, can initiatively accurate balance luminous power, and realize process in real time to signal, be the emphasis of research at present, following development comparatively attracts attention.VOA can be used for optical communication line, the assessment of system, research, the aspect such as adjustment and correction, and in optical communication network, especially in wavelength-division multiplex (WDM) system, VOA has a wide range of applications.
For meeting the demand of optical communication better, VOA is just integrated towards height, miniaturization, low cost future development.At present, VOA has the manufacturing technology of number of different types, mainly contains the forms such as adjustable mechanical formula technology, magneto-optic technology, liquid crystal technology, acoustooptic technique, thermo-optical technology, Planar waveguide technology, MEMS technology.Device volume based on MEMS is little, performance good, be easy to realize array, low in energy consumption, adapt to the needs of market development completely.Adopt the VOA that MEMS technology makes, except the comprehensive optical property of maintenance conventional art VOA, also have that attenuation range is large, volume is little, be easy to that hyperchannel is integrated, fast response time, cost performance advantages of higher, be considered to one of desirable device of satisfied following all-optical communication network.But also there are some technical matterss in existing MEMS VOA: as large in driving voltage, poor linearity, reliability etc., also have with a certain distance from practical application.
Summary of the invention
For solving the aforementioned problems in the prior, the invention provides a kind of MEMS variable optical attenuator (VOA) based on Electromagnetic Drive, to realize, structure is simple, cost is low, reliability is high, have the variable optical attenuator of actual application value.
For achieving the above object, the invention provides a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator, it comprises: input-output optical fiber, fixing shadow shield, movable MEMS devices, magnetic field generation device and driving circuit; Fixing shadow shield center has light hole, the lower surface of driving circuit and fixing shadow shield aims at bonding with the upper surface of movable MEMS devices, movable MEMS devices center has motion shadow shield, blank structure centered by magnetic field generation device, and the center of movable MEMS devices 6 and magnetic field generation device 8 and light hole 2 be centrally located at same axis; Wherein, light inputs from input optical fibre, after the light hole by fixing shadow shield, then produces after controlled optical attenuation through movable MEMS devices, is exported by output optical fibre; Described magnetic field generation device provides the axial magnetic field parallel with light beam, produces Lorentz force with the Interaction Law of Electric Current by movable MEMS devices, drives described motion shadow shield to produce motion.
As can be seen from technique scheme, the present invention has following beneficial effect:
Light-barrier type micro-electro-mechanvariable variable optical attenuator provided by the invention, in free space attenuate light signal, corresponding Wavelength Dependent Loss, polarization dependent loss and insertion loss etc. all will lower than other methods, good in optical property.Avoid reflective structure simultaneously and need the problems such as complicated optical fiber align, attenuation range is large, and dynamic perfromance is good, can be widely used in optical communication network.
Light-barrier type micro-electro-mechanvariable variable optical attenuator provided by the invention, with the electromagnetic drive mode based on Lorentz force, both can provide larger driving force, not have hysteresis effect again, achieve low-voltage driving and fast response, meet well optical communication network fast, the requirement of the development of low-power consumption.
Light-barrier type micro-electro-mechanvariable variable optical attenuator provided by the invention, utilize microelectronic technique processing and fabricating, structure is simple, by the mode adopting fixing shadow shield to combine with movable MEMS devices, effectively control the area of light beam, reduce device size, can realize integrated with cmos device, basis is provided for photoelectricity is integrated.
Accompanying drawing explanation
Fig. 1 is the structural representation of light-barrier type micro-electro-mechanvariable variable optical attenuator in the present invention;
Fig. 2 (a) ~ Fig. 2 (c) is the attenuating figure of light-barrier type micro-electro-mechanvariable variable optical attenuator in the present invention;
Fig. 3 (a) ~ Fig. 3 (b) is the structural representation of movable MEMS devices in the present invention;
Fig. 4 is movable light shield plate motion principle figure under Lorentz force drives in the present invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
Fig. 1 shows the structural representation of light-barrier type micro-electro-mechanvariable variable optical attenuator disclosed by the invention.As shown in Figure 1, described variable optical attenuator comprises input optical fibre 1, output optical fibre 10, fixing shadow shield 3, driving circuit 4, movable MEMS devices 6, magnetic field generation device 8, movable light shield plate 9.Wherein, fixing shadow shield 3 is respectively substrates of different with movable MEMS devices 6 and adopts microelectromechanical processes processing and fabricating to form.Fixing shadow shield 3 can use silicon chip, glass sheet or other material to make, surface is coated with reflective membrane, the reflective membrane on surface can be the membraneous material that gold, aluminium etc. have reflective function, fixing shadow shield 3 center has light hole 2, to open the size of unthreaded hole 2 relevant with the size of light beam, for phenomenons such as limited spot size and diffraction.Driving circuit 4 provides controlled driving power for device.The lower surface of described driving circuit 4 and fixing shadow shield 3 aims at bonding by the first bonded layer 5 with the upper surface of movable MEMS devices 6; The upper surface of magnetic field generation device 8 and the lower surface of movable MEMS devices 6 are bonded mutually by the second bonded layer 7.The center of described movable MEMS devices 6 is motion shadow shield 9, reveals empty loop configuration centered by magnetic field generation device 8, and being centrally located on same axis of the center of movable MEMS devices 6 and magnetic field generation device 8 and light hole 2.Output optical fibre port one 0 is relative with input optical fibre port one, fixing shadow shield 3 and movable MEMS devices 6 are between input, output optical fibre, and light is inputted by input optical fibre, first by the light hole 2 of fixing shadow shield 3, produce after controlled optical attenuation through movable MEMS devices 6 again, exported by output optical fibre.Magnetic field generation device 8 can provide the axial magnetic field parallel with light beam, with the Interaction Law of Electric Current by movable MEMS devices 6 structure, produces Lorentz force, provides driving, motion shadow shield 9 is moved, as shown in Figure 4.If the light hole 2 of fixing shadow shield 3 does not block by the motion shadow shield 9 of movable MEMS devices 6, after light beam emits from input optical fibre, can output optical fibre be entered through Free propagation, realize light signal and export, form complete light-path; If light hole 2 blocks by motion shadow shield 9 completely, then light beam can not enter output optical fibre, and light signal is by complete attenuation; If light hole 2 part is blocked by motion shadow shield 9, then beam section enters output optical fibre, by the movement position of Lorentz force controlled motion shadow shield 9, the size that light hole 2 passive movement shadow shield 9 blocks can be controlled, the intensity of the light signal entering output optical fibre can be controlled, thus controlled optical attenuation can be produced.The intensity of light signal is directly proportional to clear field; Clear field is directly proportional to the displacement size of motion shadow shield 9; For elastic construction, the displacement size of motion shadow shield 9 is directly proportional to the size of Lorentz force; And the size of Lorentz force is directly proportional to drive current.Therefore, based on the light decrement of the power-actuated variable optical attenuator of Lorentz and drive current linear, can linear continuous control be realized.
Fig. 2 (a)-Fig. 2 (c) shows the structural representation of three kinds of embodiment of light-barrier type micro-electro-mechanvariable variable optical attenuator in the present invention.As shown in Fig. 2 (a)-Fig. 2 (c), the surface of fixing shadow shield 3 is coated with reflective membrane, and has light hole 2, and the reflective membrane on surface can be the membraneous material that gold, aluminium etc. have reflective function, and light can only pass through from light hole; If the light hole 2 of fixing shadow shield 3 does not block (as Suo Shi Fig. 2 (c)) by the motion shadow shield 9 of movable MEMS devices 6, after light beam emits from input optical fibre, can output optical fibre be entered through Free propagation, realize light signal and export, form complete light-path; If light hole 2 blocks (as Suo Shi Fig. 2 (a)) by motion shadow shield 9 completely, then light beam can not enter output optical fibre, and light signal is by complete attenuation; If light hole 2 part is blocked (as Suo Shi Fig. 2 (b)) by motion shadow shield 9, then beam section enters output optical fibre, the size of light hole 2 area is blocked by controlled motion shadow shield 9, the intensity of the light signal entering output optical fibre can be controlled, thus controlled optical attenuation can be produced.
Light-barrier type micro-electro-mechanvariable variable optical attenuator adopts Lorentz force to drive, and magnetic field generation device 8 is the permanent magnet of annular, in order to provide axial magnetic field.
Fig. 3 (a)-3 (b) shows the structural representation of movable MEMS devices in the present invention.As shown in Fig. 3 (a), movable MEMS devices 6 adopts silicon wafer to manufacture, is made up of folded beam, with motion shadow shield 9 in the middle of this folded beam.As shown in Fig. 3 (b), movable MEMS devices 6 is made up of straight beam, with motion shadow shield 9 in the middle of this straight beam.Beam has elasticity, in MEMS structure, play spring.
Fig. 4 shows movable light shield plate motion principle figure under Lorentz force drives in the present invention.As shown in Figure 4, in longitudinal magnetic field, when passing through the electric current of steady on beam, electric current and magnetic field interaction produce horizontal Lorentz force.The Lorentz force produced drives and makes girder construction produce deformation, and motion shadow shield 9 moves, and motion shadow shield 9 is changed with the relative position of light hole 2, realizes the control to the light signal strength entering output optical fibre.
After the beam generation deformation of described movable MEMS devices 6, because the elasticity of structure can produce elastic-restoring force, the size of elastic force is directly proportional to the displacement of structure.During Stability Analysis of Structures, elastic force is equal with Lorentz force.And Lorentz force size is directly proportional to drive current, therefore can be carried out the displacement of control structure by the size controlling electric current, and then control light decrement.Under stable magnetic field, the Lorentz force that electric current produces accurately can determine the displacement of motion shadow shield 9, uses the electric current of continuous variable can obtain the light decrement of continuous variable.Because elastic force is directly proportional to the displacement of structure, Lorentz force is directly proportional to electric current, and under the condition therefore determined in magnetic field and structure, the displacement of structure is directly proportional to drive current, and electric current can be utilized to realize Linear Control to optical attenuator.
Because the size of light beam in optical fiber is general very little, usually between several microns to tens microns, between input optical fibre and output optical fibre the light hole 2 of fixed barriers 3 both ensure that light beam normal through, again limit the diffraction of light, make the facula area of light beam on movable MEMS devices 6 position very little.Realize light completely by the switching of state between complete attenuation, motion shadow shield 9 needs the distance of movement to equal the size of hot spot, thus the displacement required for structure is also several microns to tens microns, and the drive current of device just may be limited to the magnitude of several milliamperes to tens milliamperes.
The Lorentz force produced due to electric current and magnetic field interaction does not have hysteresis effect, and MEMS can rapid movement, and therefore variable optical attenuator can realize the quick switching between different conditions.
In such scheme, the light hole 2 of described fixing shadow shield 3 can be according to specific needs with the relativeness of motion shadow shield 9 initial position when not adding drive current, by when fixing shadow shield and movable MEMS devices are installed, the aligned position of the fixing shadow shield 3 of adjustment and movable MEMS devices (6) simply, both can be set to the state that light hole 2 covers or exposes completely by motion shadow shield 9 completely, also can be set to the state that part covers.Structure and energy difficulty can not be increased in, and the power consumption of attenuator can be reduced.
In such scheme, described magnetic field generation device 8 for being the hollow device that can produce relatively uniform axial magnetic field in the middle of the electromagnet of energization solenoid formation or other, can also can realize same effect.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a light-barrier type micro-electro-mechanvariable variable optical attenuator, it comprises: input-output optical fiber, fixing shadow shield, movable MEMS devices, magnetic field generation device and driving circuit; Fixing shadow shield center has light hole, the lower surface of driving circuit and fixing shadow shield aims at bonding with the upper surface of movable MEMS devices, movable MEMS devices center has motion shadow shield, blank structure centered by magnetic field generation device, the lower surface of its upper surface and movable MEMS devices bonds mutually, and the center of movable MEMS devices and magnetic field generation device and light hole be centrally located at same axis;
Wherein, light inputs from input optical fibre, after the light hole by fixing shadow shield, then produces after controlled optical attenuation through movable MEMS devices, is exported by output optical fibre; Described magnetic field generation device provides the axial magnetic field parallel with light beam, produces Lorentz force with the Interaction Law of Electric Current by movable MEMS devices, drives described motion shadow shield to produce motion.
2. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 1, it is characterized in that: described fixing shadow shield and movable MEMS devices are between input optical fibre and output optical fibre, described output optical fibre port is relative with input optical fibre port, and they be centrally located on same axis; Light beam can enter output optical fibre through Free propagation after launching from input optical fibre, realizes light signal and exports, form complete light-path; By controlling the relation between the motion shadow shield of movable MEMS devices and the light hole of fixing shadow shield, can the light signal power entering output optical fibre be controlled, realizing controllable light decay.
3. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 1, is characterized in that: described fixing shadow shield is silicon chip or glass sheet, and surface is coated with reflective membrane; The reflective membrane on surface is the membraneous material with reflective function; The size of described light hole is relevant with the size of light beam.
4. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 1, is characterized in that: described movable MEMS devices is made up of the girder construction of centre with motion shadow shield, described girder construction is can by the elastic construction of electric current.
5. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 4, is characterized in that: described girder construction is folded beam structure or straight beam structure.
6. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 1, it is characterized in that: described variable optical attenuator adopts Lorentz force to drive, by driving circuit for described movable MEMS devices provides the electric current of steady, the magnetic field interaction that electric current and described magnetic field generation device produce produces Lorentz force, the Lorentz force brought into motion shadow shield motion produced, realizes optical attenuation; Can the position of controlled motion shadow shield by the size controlling electric current, thus realize the control to light decrement; Displacement and the drive current of motion shadow shield are linear, can realize the Linear Control to light decrement.
7. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 1, is characterized in that: the light hole of described fixing shadow shield adjusts according to specific needs with the relativeness of motion shadow shield initial position when not adding drive current.
8. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 7, is characterized in that: the initial position of described motion shadow shield and light hole is that motion shadow shield covers light hole completely, exposes light hole or part covers light hole completely.
9. a kind of light-barrier type micro-electro-mechanvariable variable optical attenuator as claimed in claim 1, is characterized in that: described magnetic field generation device is the permanent magnet of annular or the electromagnet of energization solenoid formation.
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| CN201310510617.3A CN103576241B (en) | 2013-10-25 | 2013-10-25 | Light-blocking type micro-electro-mechanical variable optical attenuator |
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| CN103576241B true CN103576241B (en) | 2015-06-10 |
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| US20020009256A1 (en) * | 1999-07-20 | 2002-01-24 | Memlink Ltd. | Variable optical attenuator and beam splitter |
| CN1131454C (en) * | 2000-12-19 | 2003-12-17 | 上海交通大学 | Electromagnetically driven micromechanical variable light attenuator |
| KR100473491B1 (en) * | 2002-03-05 | 2005-03-08 | 삼성전기주식회사 | Variable optical attenuator and Method thereof |
| CN1186670C (en) * | 2002-09-05 | 2005-01-26 | 上海交通大学 | Electromagnetic drive dislocation micromechanical variable light attenuator |
| KR100501195B1 (en) * | 2003-06-25 | 2005-07-18 | 삼성전기주식회사 | MEMS Variable Optical Attenuator Having A Moving Optical Waveguide and Method of Driving The Moving Optical Waveguide |
| CN1238759C (en) * | 2004-01-15 | 2006-01-25 | 浙江大学 | Digital high speed adjustable optical attenuator |
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