WO2000052835A3 - Opto-mechanical valve and valve array for fiber-optic communication - Google Patents

Opto-mechanical valve and valve array for fiber-optic communication Download PDF

Info

Publication number
WO2000052835A3
WO2000052835A3 PCT/US2000/003354 US0003354W WO0052835A3 WO 2000052835 A3 WO2000052835 A3 WO 2000052835A3 US 0003354 W US0003354 W US 0003354W WO 0052835 A3 WO0052835 A3 WO 0052835A3
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
substrate
switch
valve
opto
Prior art date
Application number
PCT/US2000/003354
Other languages
French (fr)
Other versions
WO2000052835A2 (en
Inventor
Roberto Igal Chertkow
Original Assignee
Memlink Ltd
Friedman Mark M
Roberto Igal Chertkow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd, Friedman Mark M, Roberto Igal Chertkow filed Critical Memlink Ltd
Priority to IL14306200A priority Critical patent/IL143062A0/en
Priority to AU28768/00A priority patent/AU2876800A/en
Priority to CA002377377A priority patent/CA2377377A1/en
Priority to EP00907240A priority patent/EP1151335A2/en
Priority to US09/619,014 priority patent/US6658177B1/en
Priority to US09/619,013 priority patent/US6535663B1/en
Publication of WO2000052835A2 publication Critical patent/WO2000052835A2/en
Publication of WO2000052835A3 publication Critical patent/WO2000052835A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

A microelectromechanical system (MEMS) optical switch is introduced which includes a mirror (1) constructed on a substrate (2). The mirror (1) is movable parallel to the surface of the substrate (2) and either allows an input ray incident at an oblique angle, preferably 45°, to the mirror surface to pass undisturbed through a transparent part (49) of a substrate (2) or reflects the ray to an alternate output. Three embodiments of the switch are shown. The first includes a variation on a comb-drive designed to produce larger forces than usual by using an envelope-like electrode into which the mirror (1) is drawn. Larger forces can be obtained by designing the electrode edges to have a long perimeter line, such as in a fractal form. A second implementation supports a mirror (1) on flexible beams which are attracted or repelled by electrostatically charging curved electrodes thereby actuating the mirror. In a third implementation, a magnetic field around the switch induces lateral forces when electric current flows in conductive supporting beams to cause switching.
PCT/US2000/003354 1999-02-11 2000-02-10 Opto-mechanical valve and valve array for fiber-optic communication WO2000052835A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IL14306200A IL143062A0 (en) 1999-02-11 2000-02-10 Opto-mechanical valve and valve array for fiber-optic communication
AU28768/00A AU2876800A (en) 1999-02-11 2000-02-10 Opto-mechanical valve and valve array for fiber-optic communication
CA002377377A CA2377377A1 (en) 1999-02-11 2000-02-10 Opto-mechanical valve and valve array for fiber-optic communication
EP00907240A EP1151335A2 (en) 1999-02-11 2000-02-10 Opto-mechanical valve and valve array for fiber-optic communication
US09/619,014 US6658177B1 (en) 1999-12-13 2000-07-19 Switching device and method of fabricating the same
US09/619,013 US6535663B1 (en) 1999-07-20 2000-07-19 Microelectromechanical device with moving element

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11962599P 1999-02-11 1999-02-11
US60/119,625 1999-02-11
US12386599P 1999-03-11 1999-03-11
US60/123,865 1999-03-11

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US09/619,013 Continuation-In-Part US6535663B1 (en) 1999-07-20 2000-07-19 Microelectromechanical device with moving element
US09/619,014 Continuation-In-Part US6658177B1 (en) 1999-12-13 2000-07-19 Switching device and method of fabricating the same

Publications (2)

Publication Number Publication Date
WO2000052835A2 WO2000052835A2 (en) 2000-09-08
WO2000052835A3 true WO2000052835A3 (en) 2000-12-21

Family

ID=26817523

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/003354 WO2000052835A2 (en) 1999-02-11 2000-02-10 Opto-mechanical valve and valve array for fiber-optic communication

Country Status (5)

Country Link
EP (1) EP1151335A2 (en)
AU (1) AU2876800A (en)
CA (1) CA2377377A1 (en)
IL (1) IL143062A0 (en)
WO (1) WO2000052835A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6516109B2 (en) 2000-05-30 2003-02-04 Siwave, Inc. Low insertion loss non-blocking optical switch

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020009256A1 (en) * 1999-07-20 2002-01-24 Memlink Ltd. Variable optical attenuator and beam splitter
CA2300780C (en) 2000-03-15 2007-08-07 Nortel Networks Corporation Integrated photonic switch
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
JP4023584B2 (en) * 2001-03-02 2007-12-19 富士通株式会社 Light switch
DE10333196A1 (en) * 2003-07-22 2005-03-03 Monty Knopp Data storage method with MEMS-switch filters, involves storing and compressing binary discrete information items into common wavelength of electromagnetic spectrum
US7263245B2 (en) 2005-03-14 2007-08-28 The Boeing Company Method and apparatus for optically powering and multiplexing distributed fiber optic sensors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6031946A (en) * 1998-04-16 2000-02-29 Lucent Technologies Inc. Moving mirror switch

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6031946A (en) * 1998-04-16 2000-02-29 Lucent Technologies Inc. Moving mirror switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6516109B2 (en) 2000-05-30 2003-02-04 Siwave, Inc. Low insertion loss non-blocking optical switch

Also Published As

Publication number Publication date
WO2000052835A2 (en) 2000-09-08
AU2876800A (en) 2000-09-21
IL143062A0 (en) 2002-04-21
CA2377377A1 (en) 2000-09-08
EP1151335A2 (en) 2001-11-07

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