EP0859260A3 - Optical switch, method of manufacturing same, and optical communication equipment using same - Google Patents

Optical switch, method of manufacturing same, and optical communication equipment using same Download PDF

Info

Publication number
EP0859260A3
EP0859260A3 EP98102437A EP98102437A EP0859260A3 EP 0859260 A3 EP0859260 A3 EP 0859260A3 EP 98102437 A EP98102437 A EP 98102437A EP 98102437 A EP98102437 A EP 98102437A EP 0859260 A3 EP0859260 A3 EP 0859260A3
Authority
EP
European Patent Office
Prior art keywords
cantilever beams
silica glass
optical
same
soft magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98102437A
Other languages
German (de)
French (fr)
Other versions
EP0859260A2 (en
Inventor
Masaya Horino
Kazutaka Sato
Teruhisa Akashi
Masaru Muranishi
Norifumi Komatsu
Dai Kobayashi
Hiroaki Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Hitachi Ltd
Original Assignee
Hitachi Cable Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd, Hitachi Ltd filed Critical Hitachi Cable Ltd
Publication of EP0859260A2 publication Critical patent/EP0859260A2/en
Publication of EP0859260A3 publication Critical patent/EP0859260A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Abstract

An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate (15), a separation layer (14) formed on the silica glass substrate, a plurality of cantilever beams (3a and 3b) formed in parallel to one another on the separation layer and connected at their tip ends to a connection member (4), at least one silica glass optical waveguide core (2) formed on the cantilever beams, a plurality of optical waveguide (10) fixed in opposition to the silica glass optical waveguide core, a cover for covering the cantilever beams, and a switch drive unit for bending the cantilever beams. The switch drive unit comprises electromagnetic actuators, which comprise soft magnetic bodies (5) formed on the connection member (4) for the cantilever beams and on the substrate, soft magnetic yokes (12a through 12d) formed of a soft magnetic body, permanent magnets (8a and 8b), and wire coils (6a through 6d).
EP98102437A 1997-02-17 1998-02-12 Optical switch, method of manufacturing same, and optical communication equipment using same Withdrawn EP0859260A3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9031723A JPH10227986A (en) 1997-02-17 1997-02-17 Optical switch and its manufacture, and optical communication equipment using optical switch
JP3172397 1997-02-17
JP31723/97 1997-02-17

Publications (2)

Publication Number Publication Date
EP0859260A2 EP0859260A2 (en) 1998-08-19
EP0859260A3 true EP0859260A3 (en) 2000-12-20

Family

ID=12338975

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98102437A Withdrawn EP0859260A3 (en) 1997-02-17 1998-02-12 Optical switch, method of manufacturing same, and optical communication equipment using same

Country Status (5)

Country Link
US (2) US6219472B1 (en)
EP (1) EP0859260A3 (en)
JP (1) JPH10227986A (en)
CN (1) CN1191984A (en)
CA (1) CA2228781C (en)

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US6990264B2 (en) 2000-09-19 2006-01-24 Telkamp Arthur R 1×N or N×1 optical switch having a plurality of movable light guiding microstructures
JPH10227986A (en) * 1997-02-17 1998-08-25 Hitachi Ltd Optical switch and its manufacture, and optical communication equipment using optical switch
US6498870B1 (en) 1998-04-20 2002-12-24 Omm, Inc. Micromachined optomechanical switches
JP3062881B2 (en) 1998-05-12 2000-07-12 株式会社日立製作所 Light switch
US6407835B1 (en) * 1999-03-05 2002-06-18 Agilent Technologies, Inc. Single site for healing dual optical rings
US6453083B1 (en) 1999-05-28 2002-09-17 Anis Husain Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
US6445841B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
US6449406B1 (en) 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6445840B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
US6238805B1 (en) * 1999-10-08 2001-05-29 Agilent Technologies, Inc. Low-stress interface between materials having different coefficients of expansion and method for fabricating same
US7388186B2 (en) * 1999-10-28 2008-06-17 Hrl Laboratories, Llc Optically controlled MEMS devices
US6310339B1 (en) * 1999-10-28 2001-10-30 Hrl Laboratories, Llc Optically controlled MEM switches
DE10000483C1 (en) * 2000-01-07 2001-08-23 Inst Mikrotechnik Mainz Gmbh Fiber optic switching element
US7085445B2 (en) * 2000-08-04 2006-08-01 Seungug Koh Micro-opto-electro-mechanical waveguide switches
US6647170B2 (en) * 2000-09-19 2003-11-11 Newport Opticom, Inc. Optical switching system that uses movable microstructures to switch optical signals in three dimensions
US6807331B2 (en) * 2000-09-19 2004-10-19 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
US6567574B1 (en) 2000-10-06 2003-05-20 Omm, Inc. Modular three-dimensional optical switch
FR2816716B1 (en) * 2000-11-10 2003-10-31 Opsitech Optical System Chip DEVICE FOR TRANSMITTING AN OPTICAL WAVE IN A STRUCTURE PROVIDED WITH AN OPTICAL FIBER AND METHOD FOR THE PRODUCTION THEREOF
EP1360531A4 (en) * 2001-01-12 2005-12-28 Constellation Labs Devices and methods for switching transmission of light from one fiber to another
FR2820831B1 (en) * 2001-02-12 2004-05-28 Opsitech Optical System Chip DEVICE FOR TRANSMITTING AN OPTICAL OR LIGHT WAVE WITH A MOBILE PART
US7003188B2 (en) 2001-04-17 2006-02-21 Ying Wen Hsu Low loss optical switching system
US6374010B1 (en) * 2001-06-08 2002-04-16 Wellgain Optical Communication Ltd. Optical switch
US20030012545A1 (en) * 2001-07-05 2003-01-16 Bellman Robert A. Broad-band variable optical attenuator
KR100630617B1 (en) * 2001-08-10 2006-10-02 닛뽄 고쿠 덴시 고교 가부시키가이샤 Optical switch
US6658179B2 (en) * 2001-11-08 2003-12-02 Xerox Corporation Monolithic reconfigurable optical multiplexer systems and methods
US20040057654A1 (en) * 2002-01-04 2004-03-25 David Baasch Devices and methods for switching transmission of light from one fiber to another
US7006722B2 (en) * 2002-03-28 2006-02-28 Ntt Electronics Corporation Waveguide type optical device and position detecting method
JP2004004649A (en) * 2002-03-28 2004-01-08 Ntt Electornics Corp Optical device
WO2004079410A1 (en) * 2003-01-06 2004-09-16 Polychromix Corporation Diffraction grating having high throughput effiency
US6904191B2 (en) * 2003-03-19 2005-06-07 Xerox Corporation MXN cantilever beam optical waveguide switch
US7062130B2 (en) 2003-05-01 2006-06-13 Arthur Telkamp Low-loss optical waveguide crossovers using an out-of-plane waveguide
JP4076917B2 (en) * 2003-06-27 2008-04-16 富士通株式会社 Optical wavelength switch having planar optical circuit structure
KR100626650B1 (en) 2003-12-27 2006-09-25 한국전자통신연구원 Sliding type conductor metal waveguide switch for microwave
DE102004011022B4 (en) * 2004-03-04 2009-04-09 Siemens Ag Optical switch with optical transmission path
US7116855B2 (en) * 2004-06-30 2006-10-03 Xerox Corporation Optical shuttle system and method used in an optical switch
US7642628B2 (en) * 2005-01-11 2010-01-05 Rosemount Inc. MEMS packaging with improved reaction to temperature changes
CN1333278C (en) * 2005-07-07 2007-08-22 上海交通大学 Active miniature fibre-optical connector
US8936404B2 (en) * 2006-05-09 2015-01-20 Alcatel Lucent Method, apparatus and system for self-aligning components, sub-assemblies and assemblies
CN101510486B (en) * 2009-03-24 2011-01-05 中北大学 Micro actuation switch
WO2013073081A1 (en) * 2011-11-14 2013-05-23 パナソニック株式会社 Communication device to perform medium detection by using near-field wireless communication, external medium, and external medium communication system
CN103185962B (en) * 2013-03-12 2016-01-20 南京邮电大学 The wet piston type photoswitch of a kind of electricity
WO2014150544A1 (en) * 2013-03-15 2014-09-25 Tyco Electronics Corporation Passive optical through switches
JP6349606B2 (en) * 2013-10-09 2018-07-04 株式会社不二レーベル Scratch label and method for producing scratch label
US10310196B2 (en) 2013-12-03 2019-06-04 Intel Corporation Monolithic physically displaceable optical waveguides
MX343770B (en) * 2014-04-01 2016-11-09 Univ Nac Autónoma De México Dynamic optical switch.
CN107589491B (en) * 2016-07-08 2019-10-11 上海大学 Buoyancy-type fiber switch

Citations (6)

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Publication number Priority date Publication date Assignee Title
JPS5922002A (en) * 1982-07-28 1984-02-04 Toshiba Corp Optical switch
EP0476241A2 (en) * 1990-09-18 1992-03-25 Richard Hirschmann GmbH & Co. Fibre-optic switch
JPH06148536A (en) * 1992-11-05 1994-05-27 Sumitomo Electric Ind Ltd Optical switch and manufacture thereof
EP0712004A1 (en) * 1994-11-10 1996-05-15 Commissariat A L'energie Atomique Device for compensating deformation in an element of an optomechanical or micromechanical system
WO1997028476A1 (en) * 1996-01-31 1997-08-07 Hitachi, Ltd. Waveguide type optical switch
JPH10161046A (en) * 1996-12-02 1998-06-19 Hitachi Ltd Optical waveguide type optical switch and its producing method

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JPH10227986A (en) * 1997-02-17 1998-08-25 Hitachi Ltd Optical switch and its manufacture, and optical communication equipment using optical switch

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JPS5922002A (en) * 1982-07-28 1984-02-04 Toshiba Corp Optical switch
EP0476241A2 (en) * 1990-09-18 1992-03-25 Richard Hirschmann GmbH & Co. Fibre-optic switch
JPH06148536A (en) * 1992-11-05 1994-05-27 Sumitomo Electric Ind Ltd Optical switch and manufacture thereof
EP0712004A1 (en) * 1994-11-10 1996-05-15 Commissariat A L'energie Atomique Device for compensating deformation in an element of an optomechanical or micromechanical system
WO1997028476A1 (en) * 1996-01-31 1997-08-07 Hitachi, Ltd. Waveguide type optical switch
JPH10161046A (en) * 1996-12-02 1998-06-19 Hitachi Ltd Optical waveguide type optical switch and its producing method

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Also Published As

Publication number Publication date
CA2228781A1 (en) 1998-08-17
CA2228781C (en) 2001-10-02
JPH10227986A (en) 1998-08-25
US6219472B1 (en) 2001-04-17
US6487330B2 (en) 2002-11-26
US20010017957A1 (en) 2001-08-30
CN1191984A (en) 1998-09-02
EP0859260A2 (en) 1998-08-19

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