FR2660444B1 - INTEGRATED MULTI - CHANNEL OPTICAL SWITCHING SYSTEM AND SWITCHING MANUFACTURING METHOD. - Google Patents

INTEGRATED MULTI - CHANNEL OPTICAL SWITCHING SYSTEM AND SWITCHING MANUFACTURING METHOD.

Info

Publication number
FR2660444B1
FR2660444B1 FR9003902A FR9003902A FR2660444B1 FR 2660444 B1 FR2660444 B1 FR 2660444B1 FR 9003902 A FR9003902 A FR 9003902A FR 9003902 A FR9003902 A FR 9003902A FR 2660444 B1 FR2660444 B1 FR 2660444B1
Authority
FR
France
Prior art keywords
switching
manufacturing
channel optical
integrated multi
switching system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9003902A
Other languages
French (fr)
Other versions
FR2660444A1 (en
Inventor
Valette Serge
Danel Jean Sebastien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9003902A priority Critical patent/FR2660444B1/en
Priority to US07/669,452 priority patent/US5078514A/en
Priority to CA002038812A priority patent/CA2038812A1/en
Priority to EP91400812A priority patent/EP0451018B1/en
Priority to DE69126232T priority patent/DE69126232T2/en
Priority to JP3063490A priority patent/JP2955041B2/en
Publication of FR2660444A1 publication Critical patent/FR2660444A1/en
Application granted granted Critical
Publication of FR2660444B1 publication Critical patent/FR2660444B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
FR9003902A 1990-03-27 1990-03-27 INTEGRATED MULTI - CHANNEL OPTICAL SWITCHING SYSTEM AND SWITCHING MANUFACTURING METHOD. Expired - Lifetime FR2660444B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR9003902A FR2660444B1 (en) 1990-03-27 1990-03-27 INTEGRATED MULTI - CHANNEL OPTICAL SWITCHING SYSTEM AND SWITCHING MANUFACTURING METHOD.
US07/669,452 US5078514A (en) 1990-03-27 1991-03-14 Switch and system for switching integrated optical multichannels and switch production method
CA002038812A CA2038812A1 (en) 1990-03-27 1991-03-21 Switch and system for switching integrated optical multichannels and switch production method
EP91400812A EP0451018B1 (en) 1990-03-27 1991-03-26 Switch and integrated multi-path optical switching system and manufacturing method for switch
DE69126232T DE69126232T2 (en) 1990-03-27 1991-03-26 Switches and integrated optical multi-way switching system and manufacturing process for switches
JP3063490A JP2955041B2 (en) 1990-03-27 1991-03-27 Switch and system for switching integrated optical multi-channel and method of manufacturing the switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9003902A FR2660444B1 (en) 1990-03-27 1990-03-27 INTEGRATED MULTI - CHANNEL OPTICAL SWITCHING SYSTEM AND SWITCHING MANUFACTURING METHOD.

Publications (2)

Publication Number Publication Date
FR2660444A1 FR2660444A1 (en) 1991-10-04
FR2660444B1 true FR2660444B1 (en) 1992-10-16

Family

ID=9395166

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9003902A Expired - Lifetime FR2660444B1 (en) 1990-03-27 1990-03-27 INTEGRATED MULTI - CHANNEL OPTICAL SWITCHING SYSTEM AND SWITCHING MANUFACTURING METHOD.

Country Status (6)

Country Link
US (1) US5078514A (en)
EP (1) EP0451018B1 (en)
JP (1) JP2955041B2 (en)
CA (1) CA2038812A1 (en)
DE (1) DE69126232T2 (en)
FR (1) FR2660444B1 (en)

Families Citing this family (35)

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US6990264B2 (en) * 2000-09-19 2006-01-24 Telkamp Arthur R 1×N or N×1 optical switch having a plurality of movable light guiding microstructures
FR2726905B1 (en) * 1994-11-10 1996-12-06 Commissariat Energie Atomique DEVICE FOR COMPENSATING DEFORMATIONS OF A PART OF AN OPTOMECHANICAL OR MICROMECHANICAL SYSTEM
FR2729232A1 (en) * 1995-01-10 1996-07-12 Commissariat Energie Atomique OPTICAL DEVICE FOR OPTOMECHANICAL APPLICATION
DE19612673C1 (en) 1996-03-29 1997-10-02 Siemens Ag Method of making a waveguide beam converter
FR2748578B1 (en) * 1996-05-10 1998-05-29 Commissariat Energie Atomique OPTOMECHANICAL DEVICE AND APPLICATION TO SENSORS IN INTEGRATED OPTICS
US5757991A (en) * 1996-10-09 1998-05-26 Harman; Murray R. Optical fiber switch with a deformable structure
JPH10227986A (en) * 1997-02-17 1998-08-25 Hitachi Ltd Optical switch and its manufacture, and optical communication equipment using optical switch
FR2766920B1 (en) * 1997-07-31 1999-08-27 Commissariat Energie Atomique MICROMONOCHROMATOR AND METHOD FOR THE PRODUCTION THEREOF
US6360032B1 (en) 2000-02-18 2002-03-19 John G. Berger Two beam optical switch and attenuator and method of use
WO2001077742A2 (en) 2000-04-12 2001-10-18 Lightwave Microsystems Corporation Micro-mechanical waveguide optical devices
US20020102061A1 (en) * 2000-08-09 2002-08-01 Robert Lang Planar waveguide optical switch and method of producing same
US6807331B2 (en) * 2000-09-19 2004-10-19 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
FR2815423B1 (en) * 2000-10-17 2003-10-31 Opsitech Optical System Chip METHOD AND DEVICE FOR TRANSMITTING AN OPTICAL WAVE IN AN OPTICAL GUIDING STRUCTURE
FR2820831B1 (en) * 2001-02-12 2004-05-28 Opsitech Optical System Chip DEVICE FOR TRANSMITTING AN OPTICAL OR LIGHT WAVE WITH A MOBILE PART
US6697552B2 (en) 2001-02-23 2004-02-24 Lightwave Microsystems Corporation Dendritic taper for an integrated optical wavelength router
FR2823860B1 (en) * 2001-04-23 2003-07-04 Commissariat Energie Atomique OPTICAL MULTIVOY SWITCH
JP2003050364A (en) * 2001-06-01 2003-02-21 Hitachi Metals Ltd Optical switch and optical switch assembly
JP2004004649A (en) * 2002-03-28 2004-01-08 Ntt Electornics Corp Optical device
CA2436392C (en) * 2002-08-05 2011-02-01 Luminos Industries Ltd. Moving fiber optical switch
US6947624B2 (en) 2003-03-19 2005-09-20 Xerox Corporation MEMS optical latching switch
US6968100B2 (en) * 2003-03-19 2005-11-22 Xerox Corporation MEMS waveguide shuttle optical latching switch
US7796847B2 (en) * 2003-03-19 2010-09-14 Xerox Corporation Electrical stimuli of MEMS devices
US6904191B2 (en) * 2003-03-19 2005-06-07 Xerox Corporation MXN cantilever beam optical waveguide switch
JP4076917B2 (en) * 2003-06-27 2008-04-16 富士通株式会社 Optical wavelength switch having planar optical circuit structure
US6999647B2 (en) * 2004-05-25 2006-02-14 Honeywell International Inc. Fast pivot mechanism
US6980727B1 (en) 2004-12-13 2005-12-27 Xerox Corporation Methodology for a MEMS variable optical attenuator
US7242825B2 (en) * 2004-12-13 2007-07-10 Xerox Corporation Cantilever beam MEMS variable optical attenuator
EP1825307A1 (en) * 2004-12-15 2007-08-29 Pirelli & C. S.p.A. An opto-mechanical switching system
JP2010529504A (en) * 2007-06-08 2010-08-26 リサーチ・トライアングル・インスティチュート Light switch
WO2011099962A1 (en) * 2010-02-10 2011-08-18 Fmc Technologies Inc. Subsea optical switch
US8265433B2 (en) * 2010-04-14 2012-09-11 Oracle America, Inc. Low-power, broadband optical switch
US9482862B2 (en) 2013-07-26 2016-11-01 Neophotonics Corporation Adjustable grid tracking transmitters and receivers
EP3077860A4 (en) * 2013-12-03 2017-08-02 Intel Corporation Monolithic physically displaceable optical waveguides
US10564358B2 (en) * 2017-05-30 2020-02-18 Valorbec Societe En Commandite Micromechanically actuated deformable optical beam steering for wavelength tunable optical sources, filters and detectors
DE102020209122A1 (en) * 2020-07-21 2022-01-27 Robert Bosch Gesellschaft mit beschränkter Haftung Manufacturing method for a micro-opto-electromechanical component and corresponding micro-opto-electromechanical component

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3649837A (en) * 1967-07-13 1972-03-14 Kurt Lehovec Diffractive image-forming means integrated into semiconducting devices
US3665218A (en) * 1970-10-30 1972-05-23 Bell Telephone Labor Inc Control circuit for insulated gate field effect transistors
US4488780A (en) * 1981-12-07 1984-12-18 Rockwell International Corporation Method of producing a color change in a chemically coupled color-changing display
US4456337A (en) * 1981-12-07 1984-06-26 Rockwell International Corporation Chemically coupled color-changing display
JPS62141507A (en) * 1985-12-16 1987-06-25 Matsushita Electric Ind Co Ltd Optical integrated circuit and its production
GB8707854D0 (en) * 1987-04-02 1987-05-07 British Telecomm Radiation deflector assembly

Also Published As

Publication number Publication date
FR2660444A1 (en) 1991-10-04
US5078514A (en) 1992-01-07
DE69126232T2 (en) 1997-12-11
EP0451018A1 (en) 1991-10-09
JP2955041B2 (en) 1999-10-04
DE69126232D1 (en) 1997-07-03
CA2038812A1 (en) 1991-09-28
JPH06222402A (en) 1994-08-12
EP0451018B1 (en) 1997-05-28

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20071130