CN103185962B - The wet piston type photoswitch of a kind of electricity - Google Patents
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- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The wet piston type photoswitch of electricity adopts upper cover plate (1), planar waveguide substrate (2), electricity wet piston inner core (3), lower cover (4) structure.Wherein, planar waveguide substrate (2) is arranged netted waveguiding structure (6), waveguide crossover node place is provided with the micro-sap cavity of waveguide node (7) of triangle or other shape; The electricity of planar waveguide substrate (2) the below piston inner core (3) that wets has that coniform or other shape electricity is wet to be driven through hole (8) and be provided with the flat board of control circuit (9), and its surface is provided with conductive layer, insulation course and hydrophobic layer; Lower cover (4) is provided with the pressure equilibrium hole (11) of protruding post (10) and band elastic membrane, forms elasticity liquid box, for storing conductive fluid (12) and index-matching fluid (13) with the electricity piston inner core (3) that wets after viscose glue (17) glues together; Upper cover plate is provided with the micro-sap cavity of waveguide node (7), electricity wet drive through hole (8) one to one air pocket (5) to provide air chamber and air pressure.
Description
Technical field
The present invention relates to a kind of electric-controlled piston type optical switch construction and principle of work thereof of novelty, belong to the technical field of optical communication.
Background technology
The photochemical development trend of network of the Optical Communication Market of China will continue to extend to user side, and the universal just matter of time of FTTH, the epoch of All-Optical Communication Network arrive.Along with the continuous growth of optical communication bandwidth demand, future optical networks not only needs to support jumbo transmission, also needs to promote exchange capacity, and all-optical switching technique is the key point that a nearly step promotes exchange capacity, is the development trend of following all-optical network.In all optical network, Optical Add Drop Multiplexer device (OADM) and optical cross connect (OXC) are indispensable apparatus for network node, and jumbo light path adjustable device--all-optical switch is then the core devices in these equipment.With regard to current photoswitch current situation, its main Types has microelectromechanical systems (MEMS) switch and waveguide switch.Mems switch technical maturity, has achieved the switch arrays of large port number.But MEMS utilizes moving-member to realize the conversion of light between different port, all unsatisfactory in reliability and switching speed, size of devices.Waveguide type light opens the light switching speed soon, and compact conformation will be the developing direction of following photoswitch.In the research of speed-sensitive switch, although the rate theory of many waveguide type electrooptical switchinges can reach ns magnitude, but the device of the ns switching speed of actual fabrication reports few, because traditional electrooptical switching utilizes electrooptical effect, namely produce the respective change of Refractive Index of Material by applying an electric field, thus light intensity in the air, position phase and the direction of propagation can be controlled easily.But electrooptical effect is the nonlinear optical effect utilizing crystal, and its control voltage is higher, corresponding making material that this voltage needs be reduced and the requirement of processing technology higher.As for the photoswitch application in OADM, then the expansion of major requirement optical switch matrix scale and the reduction of cost, relatively low to the requirement of switching speed.Following research mainly concentrates on the waveguide switch matrix of development Large Copacity, high performance-price ratio.
Light path of future generation can one of conditioning technology be exactly liquid optical device.Photoswitch in traditional liquid light path adjustable device comprises thermo-capillary optical switch, thermo-optic effect photoswitch, liquid crystal optical switch, liquid grating photoswitch etc.Agilent company in conjunction with thermal inkjet-printing and silicon planar optical waveguide two kinds of technology, the two-dimentional optical cross connect system developed; It is by the silicon waveguide of many intersections and form through the raceway groove of point of crossing, fills specific index-matching fluid in raceway groove; Under default condition, incident light can along waveguide without exchange transmission; When a swap is required, a temperature-sensitive silicon chip can produce a bubble in waveguide point of crossing place in a liquid, and the light signal total reflection in incident waveguide to output waveguide, is realized the selection of light path, conversion by bubble; Agilent bubble photoswitch has the characteristic of Millisecond exchange velocity, polarization insensitive, low crosstalk, High Extinction Ratio, and through updating, 32 × 32 array of photoswitch have reached commercialization requirement; This technical difficulty is enclosing liquid at present, also have necessarily operation under saturated vapor pressure (that is the temperature keeping gas and liquid condition to coexist in closed loop border and pressure condition), and the bubble of this technology produces, and necessary thermal inkjet-printing technology is domestic there is no intellecture property.
Thermo-optical switch matrix based on silicon-dioxide-substrate has the advantages such as low in energy consumption, capacity is large, but silicon dioxide is by the restriction of its thermo-optical coeffecient size, cannot realize speed-sensitive switch.Liquid grating photoswitch is by control voltage, and make Bragg grating generation and disappearance method control light reflection or the transmission of specific wavelength, its shortcoming is the switching that only can realize Single wavelength.The technology of liquid crystal optical switch causes incident light polarized state to change based on liquid crystal under electric field action, and the change implementation space of some light beam being carried out to polarized state exchanges.In order to make device insensitive to polarization, just must introduce some polarization difference, this makes this technology more complicated.
Automatically controlled microfluid based on effects such as EWOD has high switch speed (~ ms), without polarization impact, good handling and adaptability, alternatively optical element can be applicable to the system such as photoswitch and light network, three-dimensional mangement, photoscanning, optical radar.Existing EWOD investigation and application mainly concentrates on liquid lens varifocal imaging technology, the miniature liquid zoom lens that the relatively more typical FluidFocus as the issue of Dutch Philips company and French Varioptic company issue, the zoom of these lens utilizes mechanical device electric-control method by changing the interfacial curvature of liquid and then focusing.This automatically controlled liquid technology has now achieved ripe development, but the light path adjustable device being applied to optical communication field relates to seldom, domestic micro-fluidic array of photoswitch and the adjustable optical attenuator device being only limitted to Nanjing Univ. of Posts and Telecommunications's " micro-fluidic optical Technical Research Center ".
Existing patent disclosed in ZL200910145198.1 based on the two dimension electro-optical switch array device of microflow control technique, comprise the waveguide of air container, liquid storage container, matrix form arrangement, all there is the micro-container filling liquid each point of crossing, and each micro-container all has the corresponding electricity controller that wets to wet drive unit with the electricity that selectivity powers up.The shortcoming first of this device installs the processing technology that waveguide, electrode and container just require very accurately and complexity is loaded down with trivial details on substrate simultaneously, and volume is not little yet; Second, its drive unit and light splitting part are integrated in one piece, limit the selection (necessarily requiring transparent material) of conductive layer, insulation course, hydrophobic layer, through the multiple reflections of conductive layer, insulation course, hydrophobic layer when simultaneously light path enters this light splitting part, cause the strong attenuation of light; 3rd, the shared air container of photoswitch node that this device is all, accurately can not locate and initialization for each micro-fluid column position; 4th, this device liquid storage tank and air container communicate and easily cause the liquid of liquid storage tank flow into air container in a large number and make component failure.
Not enough for above-mentioned device, the array of photoswitch device that the electrowetting that this patent devises a kind of novelty controls, improve that complex devices structure makes cost of manufacture, production technology reduces further innovatively, there is important technological value and economic worth, will be widely used at optical communication field.
Summary of the invention
The object of the invention is to propose a kind of piston type array of photoswitch structure driven based on electrowetting, solve the automatically controlled tuning problem of array of photoswitch.
technical scheme:this device has four layers of distribution, adopts the structure of upper cover plate, planar waveguide substrate, the wet piston inner core of electricity, lower cover; Planar substrates (containing waveguide and array thereof) and electricity wet piston inner core between upper and lower cover plates, are formed and have gas-liquid acting in conjunction in the double-deck sandwich structure of light path adjustable node and array.Wherein upper cover plate is provided with air pocket, for electricity wet drive photoswitch node air chamber is provided; Central flat substrate, except micro-sap cavity, also has the waveguiding structure that Two-step ion-exchanging or soft lithographic make; The electricity of the lower floor piston inner core that wets is then that the electricity adopting variable liquid lens production process to realize wets drives structure, controls power and is produced by this layer; The lower cover of bottom is together with protruding post, after viscose glue glues together, elasticity liquid box is formed with conductive core, to wet piston liquid material for store electricity--two kinds of immiscible liquid, lower cover leaves pressure equilibrium hole, covers communicate with air or other air pressure pulpit with elastic membrane; The wet piston of electricity is wet by electricity and drives through hole jointly to form together with the corresponding micro-sap cavity of waveguide node, the upper cover plate air pocket arranged with it, the wet driving inside through hole of electricity is all provided with conductive layer and corresponding insulation course, hydrophobic layer is provided with the inner side of liquid comes into contact, conductive layer is as the first electrode and be connected with external circuit by the circuit being arranged on the wet piston inner core of electricity, and the second electrode and public electrode are conductive fluid.When voltage apply to coordinate with when removing elastic membrane recessed/projection controls the electric reciprocating motion of the pistons that wets then; Micro-fluid column sequence under electricity wets and air pressure double action drives controls the presence or absence of waveguide node micro-sap cavity place bubble, and bubble by the light signal total reflection in incident waveguide to output waveguide, can realize the selection of light path, conversion.
Cover plate can make of any material, only need arrange groove as air pocket with the micro-sap cavity relevant position of waveguide node; Planar substrates, after waveguiding structure preparation, also only need arrange triangle or other shape micro through-hole as micro-sap cavity, so not high to its material requirements at its point of crossing place; Control inner core because of adopt liquid variable lens manufacture craft complete (but size is little, because utilizing capillary effect), cost is also very low.Four-layer structure separately makes, and effectively reduces difficulty of processing and improves yield rate, also having no special requirements simultaneously, save production cost to material.Four-layer structure is after bonding and fluid injection, and encapsulate, when the external world does not apply voltage, two kinds of liquid are in opposing seal state in sap cavity, can keep transfixion.
The main body of the wet piston inner core of electricity is the flat board of the capillary through holes (electricity is wet drives through hole) with coniform, cylindric or other analogous shape, and the upper and lower surface of through hole connects waveguide-based base plate and elasticity liquid box respectively; Through hole and the micro-sap cavity of waveguide node and upper cover plate air pocket one_to_one corresponding, hydrophobic treatments can be made in hole and reduce the matching fluid resistance of motion, its the first half has deposited index-matching fluid (being generally oil), the latter half and elasticity liquid box store the conducting liquid immiscible with above-mentioned index-matching fluid jointly as public electrode, form the wet drives structure of electricity.
The wet driving inside through hole of electricity is having conductive film layer place to arrange corresponding insulation course, is provided with hydrophobic layer is convenient to liquid flow and improves surface tension characteristics with the outermost layer of liquid comes into contact; Control core upper surface control electrode to be connected with hole conductive rete, conducting liquid is as public electrode.Because through hole is the kapillary that internal layer is provided with hydrophobic layer,
Under the effect of natural surface tension force, in hole, liquid has downward movement tendency, changes by electrowetting conducting liquid to coordinate lower cover pressure equilibrium hole elastic membrane with hydrophobic layer interfacial surface tension, can move upward by liquid in drive hole.The gas be simultaneously sealed in the upper cover plate air pocket corresponding with the micro-sap cavity of waveguide node is compressed, and pressure increases, and also produces certain obstruction, thus reach the effect of " self-locking " in motion process to the motion of matching fluid.Along with execute alive with or without, the motion of whole matching fluid will be the process of " piston " effect.
Drive in via cavities because electricity is wet and carried out hydrophobic treatments, the effect of capillary surface tension force forces down effect to intracavity liquid, as Fig. 3, waveguide point of crossing 1 place is all filled by bubble, the light of light path A is by time herein, light enters optically thinner medium from optically denser medium, is entered light path B, complete " breaking " to light path D by bubble total reflection; Apply voltage between control electrode and public electrode after, surface tension between conducting liquid and via cavities sidewall reduces because of the effect of electrowetting, in via cavities, liquid level rises, driving index-matching fluid moves upward, matching fluid is filled completely in the micro-sap cavity in waveguide point of crossing 2, because matching fluid is selected consistent with waveguide index, the light total transmissivity of light path B, the choosing completed light path C " is led to ".
During design, in order to reduce temperature sensitivity as far as possible, need the volume of carefully design air pocket and initial gas pressure to expect to offset with the heat expansion effect of gas, liquid.
Beneficial effect of the present invention is:
Liquid variable lens manufacturing technology combines with Modern optical communication technology by the present invention, devises a kind of piston type array of photoswitch structure based on electrowetting of novelty, has very important technological value.The light shutter device of the present invention's design has the advantages such as structure is simple, yield rate is done, with low cost.
1) traditional variable liquid lens manufacturing techniques and light shutter device combine with technique are got up, open the new approaches of Design and manufacture optic communication device.
2) this technology utilizes electrowetting to change surface tension of liquid and indirectly to drive on light path node fluid column position in micro-container, wet electricity drive unit and waveguide node hierarchical design, simplify the transmitance improving light while waveguide node makes, significantly improve the optical property of whole device, liquid is in opposing seal state in sap cavity simultaneously, under device mobile status, also can keep transfixion.
3) control inner core and waveguide network two parts are separately made the mode then bonded, simplify production technology, improve yield rate.
4) setting of elasticity liquid box can use external pressure/pressure conditioning equipment to exert one's influence to micro-fluid column position, makes the control device of micro-fluid column position abundanter.
Accompanying drawing explanation
Fig. 1 is array of photoswitch hierarchy key diagram.
Fig. 2 is optical switch construction cut-open view.
Fig. 3 is for array of photoswitch active side view of the present invention and corresponding plan view.When in figure, waveguide node micro-sap cavity liquid level position is higher (in figure with point fill) light from node transmission mistake, (fill) light when liquid level is lower in figure without point and pass through from node total reflection.
Upper cover plate 1, planar waveguide substrate 2, the wet piston inner core 3 of electricity, lower cover 4, air pocket 5, netted waveguiding structure 6, the micro-sap cavity of waveguide node 7, the wet pressure equilibrium hole 11 driving through hole 8, control circuit 9, protruding post 10, band elastic membrane of electricity is had in figure; Conductive fluid 12, index-matching fluid 13, conductive layer 14, corresponding insulation course 15, hydrophobic layer 16, viscose glue 17.
Embodiment
This device has four layers of distribution, and adopt the structure of upper cover plate, planar waveguide substrate, the wet piston inner core of electricity, lower cover, four-layer structure separately makes and then assembles.
embodiment one
Upper cover plate to adopt and is easy to do cave, and thermal expansion factor is little, and can the material of large-scale production be made, preferably heat insulation duroplasts, forms by mold injection.Waveguide plate adopts and is easy to make smooth triangle through hole material, is preferably material same with upper cover plate and is formed by mold injection, and netted waveguiding structure adopts ultraviolet photoresist to make.Inside the wet piston inner core main body of electricity all can comprise that electricity is wet and drives through hole with ABS the first day of the lunar month material moldings formed therefrom, surface, plated metal conductive layer forms, then prepares control electrode and circuit by etch at upper surface; Whole conductive layer outer wrap one layer insulating, is preferably the Parylene adopting Vacuum Coating method to generate 3 micron thickness; Adopt Teflon coating to realize with the hydrophobic layer of liquid contact surface.Lower cover select heatpiston's injection moulding to be formed and reserve one comparatively large through-hole cover it with elastic membrane.Resin viscose glue is utilized to glue together above-mentioned four layers.
Conducting liquid uses even can select deionized water to the low solution of plastics corrosivity, but may have freezing problem when low temperature uses.Freezing point can be reduced with the salt solusion of high concentration.Matching fluid selects a kind of consistent with ducting layer refractive index, immiscible with conducting liquid index-matching oil.For preventing temperature on the impact of this device, the position that can arrange matching fluid is slightly lower than ducting layer.
During concrete enforcement, as shown in Figure 3, inject conducting liquid and matching fluid, matching fluid height is consistent with ducting layer or slightly higher, and waveguide inner light beam can be allowed like this to be all transmitted through waveguide node; When applying voltage between public electrode and through hole electrode, micro-internal tank surface tension is changed to reduce liquid-column height by electrowetting, former matching fluid position is filled by gas, when light beam enters the micro-sap cavity of waveguide Nodes in waveguide, light enters optically thinner medium from optically denser medium, when incident angle meets total reflection condition, light beam all can be reflected through point of crossing.Thus realize total reflection and the total transmissivity of light beam, and then realize "ON" and the "Off" action of light.
embodiment two
Make to inject liquid arrival assigned address because the micro-sap cavity of waveguide node is very little comparatively difficult, upper cover plate air pocket can be made the aperture of band elastic membrane, pressure regulator is added outside the elastic membrane of upper and lower cover plates, make fluid column in micropore be anchored in assigned address by external pressurized like this, can be used as simultaneously temperature variation too large time zero regulate servicing unit.In particular cases, waveguide substrate and the netted waveguide array on it can make by integrated injection moulding, can save matching fluid simultaneously.
Claims (2)
1. electricity wets a piston type photoswitch, comprises planar waveguide substrate (2), it is characterized in that: the structure also comprising upper cover plate (1), the wet piston inner core (3) of electricity, lower cover (4); Planar waveguide substrate (2) and electricity wet piston inner core (3) between upper and lower cover plates, form double-deck sandwich structure; Wherein, planar waveguide substrate (2) is arranged netted waveguiding structure (6), waveguide crossover node place is provided with the micro-sap cavity of waveguide node (7); The electricity of planar waveguide substrate (2) the below piston inner core (3) that wets is provided with the wet flat board driving through hole (8) and control circuit (9) of the electricity that communicates with the micro-sap cavity of waveguide node (7), for photoswitch node control provides driving force, wet through hole (8) another side that drives of electricity is communicated with elasticity liquid box; Upper cover plate (1) is provided with the air pocket (5) corresponding with the micro-sap cavity of waveguide node (7); The micro-sap cavity of waveguide node (7) is triangle or polygon; The wet through hole (8) that drives of electricity is conical or cylindric; The air pocket (5) that upper cover plate (1) is arranged wets with the micro-sap cavity of waveguide node (7), electricity and drives through hole (8) one_to_one corresponding; The electricity of the described photoswitch piston that wets is made up of together with the corresponding micro-sap cavity of waveguide node (7), the upper cover plate air pocket (5) arranged with it jointly the wet through hole (8) that drives of electricity, wet through hole (8) inner side that drives of electricity is all provided with conductive layer (14) and corresponding insulation course (15), hydrophobic layer (16) is provided with the inner side of liquid comes into contact, conductive layer (14) is as the first electrode and be connected with external circuit by the circuit being arranged on the wet piston inner core (3) of electricity, and the second electrode and public electrode are conductive fluid (12); The wet main body of piston inner core of the electricity of described photoswitch is the flat board with coniform, columned capillary through holes, and the upper and lower surface of through hole connects waveguide-based base plate and elasticity liquid box respectively; Through hole and the micro-sap cavity of waveguide node and upper cover plate air pocket one_to_one corresponding, make hydrophobic treatments in hole and reduce the matching fluid resistance of motion, its the first half has deposited index-matching fluid, the latter half and elasticity liquid box store the conducting liquid immiscible with above-mentioned index-matching fluid jointly as public electrode, form the wet drives structure of electricity.
2. the wet piston type photoswitch of a kind of electricity according to claim 1, is characterized in that: elasticity liquid box is made up of after viscose glue (17) glues together the lower cover (4) being provided with protruding post (10) and the electricity piston inner core (3) that wets; Lower cover (4) is provided with the pressure equilibrium hole (11) covered by elastic membrane; Two kinds of immiscible, liquid conduction fluids (12) with different surfaces tension force and the wet piston actuated medium of index-matching fluid (13) composition electricity.
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| CN201310077419.2A CN103185962B (en) | 2013-03-12 | 2013-03-12 | The wet piston type photoswitch of a kind of electricity |
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| CN103454729B (en) * | 2013-09-12 | 2016-01-20 | 电子科技大学 | A kind of spaceborne space optical switch and implementation method |
| CN104391353A (en) * | 2014-11-21 | 2015-03-04 | 广西智通节能环保科技有限公司 | Novel optical switch device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6219472B1 (en) * | 1997-02-17 | 2001-04-17 | Hitachi, Ltd. | Optical switch, method of manufacturing same, and optical communication equipment using the same |
| CN1395122A (en) * | 2002-07-02 | 2003-02-05 | 浙江大学 | Multichannel extendible micromechanical optical switch array |
| CN101187717A (en) * | 2007-12-07 | 2008-05-28 | 南京邮电大学 | Micro-fluidic array optical switch chip |
| CN101799573A (en) * | 2009-10-13 | 2010-08-11 | 南京邮电大学 | Two dimension electro-optical switch array device based on microfluidic technology |
| CN203101726U (en) * | 2013-03-12 | 2013-07-31 | 南京邮电大学 | Electro-wetting piston type optical switch |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007096687A1 (en) * | 2006-02-27 | 2007-08-30 | Nokia Corporation | Diffraction gratings with tunable efficiency |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6219472B1 (en) * | 1997-02-17 | 2001-04-17 | Hitachi, Ltd. | Optical switch, method of manufacturing same, and optical communication equipment using the same |
| CN1395122A (en) * | 2002-07-02 | 2003-02-05 | 浙江大学 | Multichannel extendible micromechanical optical switch array |
| CN101187717A (en) * | 2007-12-07 | 2008-05-28 | 南京邮电大学 | Micro-fluidic array optical switch chip |
| CN101799573A (en) * | 2009-10-13 | 2010-08-11 | 南京邮电大学 | Two dimension electro-optical switch array device based on microfluidic technology |
| CN203101726U (en) * | 2013-03-12 | 2013-07-31 | 南京邮电大学 | Electro-wetting piston type optical switch |
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