CN100516935C - Method for making electric-tuning micro-fluidic zoom lens array chip - Google Patents
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Abstract
The electric harmonic micro flow control focal changeable lens matrix chip uses mechanical machining or soft photo-etching, coating, sealing with sandwich structure of dual micro flow network '' top cover+ conductivity inner core + bottom cover''. The integration manufacturing process mainly includes inner core making, surface treatment, chip synthesis and liquid sealing. In the process of inner core making, its surface is coated with insulating layer and water aloof layer with the former preventing the contact of the inner core with bottom cover electrode and conductive solution, the later bending the ridges of two liquids into curving phases naturally for the benefit of chip sealing.
Description
Technical field
The present invention relates to a kind of integrated method for making of electric-tuning micro-fluidic zoom lens array chip of novelty, belong to photoimaging and optical information processing device and semiconductor integrated technology field.
Background technology
Micro-fluidic optical is a significant new technology, it combines modern microflow control technique and low-light electronic technology, develop a class and can change, have the optical integrated device and the system of structural rearrangement and adaptive adjustment capability, will have important application prospects [1] in fields such as sensing, communication, information processings according to external environment.
Microlens array is a kind of two-dimentional integrated device, can realize the integrated of optical element, promote the development of micro-optic device, waveguide device, optical integrated device, this device has in optical communication, photoimaging, optical storage, light demonstration, optical processing and other many fields very widely to be used, as the light interconnect devices, image multiple transform and identification, the optical passive component array etc. that utilize microlens array to make, received the concern of researcher and business circles always.The microlens array of practicability all is the device of fixed focal length at present, because the lens of fixed focal length lack modulability, influence the performance of device and limited its range of application, be worth and application prospect so the variable microlens array of development focal length has important techniques, caused people's great interest [2-5].
The zoom lenticule can change the luminous flux and the visual field performance of micro-optical systems, has good handling and adaptability, can be applicable to systems such as the interconnection of optical switch and light, three-dimensional light storage, static digital camera and medical science endoscope.But existing research and application concentrate on the simple lens zoom technology, the miniature liquid zoom lens [6-7] of the FluidFocus of relatively more typical as Dutch Philips company issue and the issue of French Varioptic company, the zoom of these lens be utilize electric-control method by changing liquid interfacial curvature so that focus.This technology has adopted the lens subassembly of flowing liquid as zoom, and present relatively mechanical zoom mode will have a lot of advantage parts.But these utilize the mini-focal liquid lens structure complexity of electric-control method, be difficult to adopt traditional technology to make microlens array, therefore the development of researcher's the micro-fluidic lens arra of concentrating on the hydrostatic control zoom at present, the lens arra of the Hans Zappe seminar based semiconductor micro-processing technology development of for example German Freiburg university, people such as the Berkeley branch school Nikolas Chronis of California, USA university are based on the micro-fluidic lens arra [2] of soft lithographic (soft lithography) fabrication techniques, etc.
As mentioned above, external more at present to the research of tunable microlens array, but only limit to pressure-controlled array device [2-5], the electric-controlled type array device does not appear in the newspapers.Domestic variable focus microlens array does not appear in the newspapers.This patent combines microflow control technique with Modern Optics Technology, designed a kind of automatically controlled micro-fluidic zoom lens array chip, has important techniques and is worth, and will be widely used at optical imagery and optical information processing field.
The basic functional principle of the single liquid zoom lens of Philips company issue is as follows: lens material is made up of two kinds of different immiscible liquids of refractive index, a kind of is electric conductivity aqueous solution (high index of refraction), another kind is a non-conductive property oil (low-refraction), and two kinds of liquid are added in the transparent short cylinder of upper and lower surface.Because cylinder side wall has carried out the hydrophobicity processing, therefore two kinds of liquid surfaces can form stable curved surface, play the effect of lens.When the electric field that applies with hydrophobicity treated side orthogonal, the interfacial tension between conductivity water solution and the sidewall reduces because of the effect of the wet effect (Electrowetting) of electricity, thereby changes the shape of two kinds of liquid surfaces, finally causes the variation of the focal length of lens.The liquid lens structure of Varioptic company similarly.The liquid zoom lens structure more complicated of its said structure is difficult to carry out on this basis the integrated of microlens array.
List of references:
[1]Demetri?Psaltis，Stephen?R.Quake2?&?Changhuei?Yang，Developingoptofluidic?technology?through?the?fusion?of?microfluidics?and?optics，Nature，Vol.442，No.27，(2006)381-386
[2]T.Krupenkin，S.Yang，and?P.Mach，Tunable?liquid?microlens，Appl.Phys.Lett.Vol.82，(2003)316-318.
[3]Armin?Werber?and?Hans?Zappe，Tunable?microfluidic?microlenses，Applied?Optics，Vol.44，No.16，(2005)3238-3245.
[4]Nikolas?Chronis，Gang?L.Liu，Ki-Hun?Jeong，and?Luke?P.Lee，Tunableliquid-filled?microlens?array?integrated?with?microfluidic?network，Optics?Express，Vol.11，No.19，(2003)2370-2378.
[5]Ki-Hun?Jeong，Gang?L.Liu，Nikolas?Chroni?s?and?Luke?P.Lee，Tunablemicrodoublet?lens?array，Optics?Express，Vol.12，No.11，(2004)2494-2500.
[6]S.Kuiper?and，B.H.W?Hendriks，Variable?focus?liquid?lens?for?miniaturecameras，Appl.Phys.Lett.，Vol.85，No.7，(2004)1128-1130.
[7]
http://www.varioptic.com/en/technology.php
Summary of the invention
Technical matters: the objective of the invention is to propose a kind of method for making of electric-tuning micro-fluidic zoom lens array chip, solve the integrated manufacture method problem of micro-fluidic zoom lens array, realize chip functions.
Technical scheme:
1. ultimate principle and chip structure:
The basic structure of micro-fluidic lens arra chip of the present invention as shown in Figure 1, it is the sandwich sandwich structure of " transparent upper cover sheet+conductive core+transparent lower cover slip ".Adopt conductive material to make inner core, inner core such as Fig. 2 are the flat boards with cylindric via-hole array, dull and stereotyped two sides is the network of runner and the liquid storage tank of prefabricated spill respectively, each circular hole is connected to each other by network of runner at upper and lower surface respectively, and upper and lower laminar flow road network is respectively applied for and is communicated with two kinds of different liquid.Upper cover plate scribbles hydrophobic layer, is coated with transparency conducting layer on the lower cover slip, and the formation of the space between circular hole lens cavity, is used to store two kinds of different immiscible liquids of refractive index, is respectively the non-conductive oil of high index of refraction conductivity water solution and low-refraction.Be coated with insulating layer coating in core surface, avoid inner core to contact with conductivity water solution with the lower cover slip electrode.To carrying out hydrophobic treatments in the mirror chamber, make two kinds of liquid boundaries form flexure plane naturally.After adding voltage between inner core and the ITO conductive layer, the interfacial tension between conductivity water solution and the sidewall reduces because of the effect of the wet effect of electricity, thereby changes the shape of two kinds of liquid surfaces, realizes the tuning of the focal length of lens.
Inner core and cover plate combination back forms inner mirror chamber array that interconnects and network of runner array chip up and down, and its total arrangement as shown in Figure 3.The lenticule zone can be made different spread patterns as required, and upper and lower fluid layer network links to each other with two liquid storage tanks respectively, and liquid storage tank links to each other with the outside by the cover plate perforate, and the while is as the gateway of perfusion fluid.Electrode can be drawn from the edge easily by inner core and ITO conductive layer.Double-layer channel is one of characteristics of this chip structure, and this design helps liquid and pours into and encapsulate.
2, integrated chip method for making:
The method for making of electric-tuning micro-fluidic zoom lens array chip is: order adopts soft lithographic, plated film, involution to realize comprising the integrated making of sandwich sandwich structure of " upper cover plate+conductive core+lower cover slip " of double-deck fluid channel network, and its key step comprises:
1.) the making of conductive core: the method that adopts soft lithographic, by photoetching Mold Making, conductive silicon rubber spin coating, cure and demold process, making is only had one side to be carved with the conductive core of having of fluid channel network of cylindric via cavities array, two conducting plates are not carved with the shiny surface butt joint of fluid channel network, make between two shiny surfaces by being heating and curing bonding takes place, form conductive core;
2.) surface treatment: surface treatment is divided into core surface to be handled and cover plate surface treatment two parts, and core surface adopts growth method to generate the SiO of one deck 500nm on inner core
2Insulation course, and obtain hydrophobic layer by dipping hydrophobing agent; Equally, the upper cover plate surface is carried out the surface hydrophobicity processing by the coated with hydrophobic agent and is obtained hydrophobic layer, and the lower cover slip surface is then adopted spraying method to carry out the conductive layer plated film and obtained transparency conducting layer;
3.) chip is synthetic: and will splice with inner core behind the upper and lower cover plate surface spin coating bonding agent, it is fixing to send into the drying baker baking again;
4.) liquid encapsulation: the lithium chloride with conductive fluid injects liquid storage tank of lower floor earlier, be full of lower flow channel and another lower floor's liquid storage tank by the pressure effect, benzyl siloxane with dielectric fluid injects the liquid storage tank in upper strata again, be full of upper runner and another upper strata liquid storage tank by capillary action, be in appropriate location in the mirror chamber by regulating two kinds of liquid surfaces of upper and lower fluid layer pressure official post; Use the adhesive closure stream socket at last.
When conductive core is made, under larger-size situation, select for use metal plate pass through machining or excimer laser mark technology dull and stereotyped upper and lower surface respectively cutting form the fluid channel network, machine drill or laser boring processing lenticule chamber.The stainless steel surfaces passivating method is adopted in the conductive core surface treatment, to eliminate by the metal surface burr that machining or excimer laser mark produce, obtain very high surface smoothness, utilize the different modes of spin coating, dipping or spraying again, on stainless steel surfaces, prepare evenly, fine and close, flawless and to have thickness be that the ceramic coat of 5 μ m is as insulation course, by spraying and dry technology, at core surface coating last layer hydrophobic layer.
Beneficial effect: according to above narration as can be known, the present invention has following characteristics:
The present invention combines soft lithography with the micro element process for treating surface, designed a kind of integrated method for making of electric-tuning micro-fluidic zoom lens array chip, has important techniques and is worth.This electric-tuning micro-fluidic lens arra integrated chip that adopts patent of the present invention to make will be widely used in the micro-optic field.The micro-fluidic device integrated manufacturing method of this patent have realize simple, operability is high, reliability is high and repeatable advantages of higher.
The innovation part is:
(1) the Du Te integrated manufacturing technology of micro-fluidic lens arra chip;
(2) adopt soft lithography or metal machining method to realize having the inner core of double-layer channel;
(3) by inner core and cover plate surface treatment, utilize the wet effect of electricity, realize electric tuning variable lens focal length.
Description of drawings
Fig. 1 is structure of the present invention and principle of work synoptic diagram.(a) synoptic diagram when not powering up, (b) synoptic diagram when powering up.Upper cover plate 1, lower cover slip 2, conductive core 3, conductive fluid 4, dielectric fluid 5, transparency conducting layer 6, hydrophobic layer 7, insulation course 8, network of runner 9 are arranged among the figure.
Fig. 2 is a lenticule core arrangement synoptic diagram.Network of runner 9, lenticule chamber 10 are arranged among the figure, store the liquid storage tank 11 of two kinds of fluids up and down.
Embodiment
The present invention proposes a kind of electric-tuning micro-fluidic zoom lens array chip, and its structure adopts the sandwich sandwich structure of " upper cover plate+inner core+lower cover slip ".Inner core is the conducting plate with cylindric via-hole array, and each circular hole is connected to each other by network of runner at upper and lower surface respectively.Space between cover plate and the circular hole forms lens cavity, is used to store two kinds of different immiscible liquids of refractive index.Conductive core adopts the metallic aluminium flat board to be made by laser drilling in the specific embodiment of the invention 1, and this is because metallic aluminium is easy to processing, and can be used as an electrode; Another electrode is the ITO conductive layer that adopts the vacuum coating method preparation.Cover plate adopts the high performance thin glass sheet (cover glass of a kind of biochemical test special use of producing as VWR Scientific company.Model: WEST Chester, PA19380), this slide toughness is fine, the transmittance height; Insulation course adopts growth method to generate the SiO of one deck 500nm on inner core
2, hydrophobic treatments can realize by coating hydrophobic material FOTs (fluorine-containing trichlorosilane).Conductive fluid adopts lithium chloride (LiCl) aqueous solution, and dielectric fluid adopts benzyl siloxane (phenylmethylsiloxanes).
The method for making of lens arra integrated chip of the present invention mainly is divided into inner core making, surface treatment, chip is synthetic and four basic processes of liquid encapsulation:
1) inner core is made: core arrangement roughly as shown in Figure 2.Inner core adopts conductive material, and this is one of characteristics of the design, has consequently simplified the structure and the manufacture craft of chip.
Under larger-size situation, can select for use metal plate to make by Machining Technology.For example, the line number of lens arra according to actual needs and columns, distribution of design runner and cylindrical hole size, position, at the surface working chute, cylindrical cavity is processed in machine drill or laser boring by machine cut.
Under the less situation of size, can select for use conductive silicon rubber to make by soft lithography, key step comprises: photoetching Mold Making, silicon rubber spin coating, cure and demold etc.
Photoetching Mold Making: adopt traditional photoetching method, require the design runner to distribute and cylindrical cavity size, position, make mask according to lens arra; At the silicon chip spin coating photoresist of crossing through pre-clean processes (as SU-8); Through overexposure and development, the graph transfer printing on the mask to silicon chip, is formed positive die sinking tool.
The silicon rubber spin coating: in the fluidised form rubber monomer, add crosslinking chemical, standby through taking out behind the hydro-extractor high speed rotating.Template is adsorbed on the tray surface of sol evenning machine, at the template surface ready fluidised form silicon rubber that instils.Start sol evenning machine and make rubber monomer coat template surface, form certain thickness film.
Cure and demold: with spin coating the polymeric molds of rubber monomer put into drying box, precuring is about 40 minutes under 80 ℃ of temperature.After the silastic surface of precuring covers the sandwich layer glass sheet, continue to solidify more than 2 hours, make cover glass and silastic-layer produce bonding.Behind cover glass and the silastic-layer bonding, polymeric molds is peeled off.
2) surface treatment: comprise core surface processing and cover plate surface treatment.Core surface is handled and comprised: insulation course applies, hydrophobic treatments.Insulation course can adopt polymeric material, and hydrophobic treatments can realize by the coating hydrophobic material.The cover plate surface treatment comprises that upper cover plate hydrophobic treatments, lower cover slip conductive layer are coated with, stream socket boring.Cover plate adopts the high tenacity cover glass, and the ITO conductive layer adopts the vacuum coating method preparation.Lower cover slip also can adopt commercial electro-conductive glass.
3) chip is synthetic: cover plate and inner core are bonded into as Fig. 2, individual chips shown in Figure 4 by suitable insulation glue or surface-active-treatment method.
4) liquid encapsulation: earlier conductivity water solution is injected liquid storage tank of lower floor, be full of lower flow channel and another lower floor's liquid storage tank by the pressure effect; Again insulating oil solution is injected the liquid storage tank in upper strata, be full of upper runner and another upper strata liquid storage tank by capillary action.Be in appropriate location in the mirror chamber by regulating two kinds of liquid surfaces of upper and lower fluid layer pressure official post; Last sealing fluid gateway.
As specific embodiments of the invention 2, micro-fluidic zoom lens array chip adopts the sandwich sandwich structure of " upper cover plate+inner core+lower cover slip " equally.Inner core is the conducting plate with cylindric via-hole array, and each circular hole is connected to each other by network of runner at upper and lower surface respectively.Space between cover plate and the circular hole forms lens cavity, is used to store two kinds of different immiscible liquids of refractive index.Its conductive core adopts conductive silicon rubber, and this is because conductive silicon rubber is easy to moulding, can be bonding well by bonding agent and transparent substrate, and form one, and can be used as an electrode; Another electrode adopts the ITO conductive layer.Substrate still adopts high performance cover glass.Insulation course and hydrophobic layer can be merged into one deck employing polytetrafluoroethylene polymer material, and (english abbreviation is PTFE, the trade (brand) name Teflon
Teflon@AF) coating realizes, this is because the Teflon is that a kind of insulator has good hydrophobicity again.Conductive fluid can adopt the bigger common salt aqueous solution of surface tension, and dielectric fluid adopts the big relatively castor oil of surface tension.
Claims (3)
1, a kind of method for making of electric-tuning micro-fluidic zoom lens array chip, it is characterized in that order adopts soft lithographic, plated film, involution to realize comprising the integrated making of sandwich sandwich structure of " upper cover plate (1)+conductive core (3)+lower cover slip (2) " of double-deck fluid channel network, its key step comprises:
1.) the making of conductive core: the method that adopts soft lithographic, by photoetching Mold Making, conductive silicon rubber spin coating, cure and demold process, making is only had one side to be carved with the conductive core that has cylindric via cavities array (3) of fluid channel network (9), two conducting plates are not carved with the shiny surface butt joint of fluid channel network (9), make between two shiny surfaces by being heating and curing bonding takes place, form conductive core (3);
2.) surface treatment: surface treatment is divided into core surface to be handled and cover plate surface treatment two parts, and core surface adopts growth method to generate the SiO of one deck 500nm on inner core
2Insulation course (8), and obtain hydrophobic layer (7) by dipping hydrophobing agent; Equally, upper cover plate (1) surface is carried out the surface hydrophobicity processing by the coated with hydrophobic agent and is obtained hydrophobic layer (7), and lower cover slip (2) surface is then adopted spraying method to carry out the conductive layer plated film and obtained transparency conducting layer (6);
3.) chip is synthetic: and will splice with inner core behind the upper and lower cover plate surface spin coating bonding agent, it is fixing to send into the drying baker baking again;
4.) liquid encapsulation: the lithium chloride with conductive fluid (4) injects liquid storage tank of lower floor earlier, be full of lower flow channel and another lower floor's liquid storage tank by the pressure effect, benzyl siloxane with dielectric fluid (5) injects the liquid storage tank in upper strata again, be full of upper runner and another upper strata liquid storage tank by capillary action, be in appropriate location in the mirror chamber by regulating two kinds of liquid surfaces of upper and lower fluid layer pressure official post; Use the adhesive closure stream socket at last.
2, the method for making of electric-tuning micro-fluidic zoom lens array chip according to claim 1, when it is characterized in that conductive core (3) is made, under larger-size situation, select for use metal plate pass through machining or excimer laser mark technology dull and stereotyped upper and lower surface respectively cutting form fluid channel network (9), machine drill or laser boring processing lenticule chamber (10).
3, the method for making of electric-tuning micro-fluidic zoom lens array chip according to claim 1 and 2, it is characterized in that conductive core (3) surface treatment employing stainless steel surfaces passivating method, to eliminate by the metal surface burr that machining or excimer laser mark produce, obtain very high surface smoothness, utilize spin coating again, the different modes of dipping or spraying, on stainless steel surfaces, prepare evenly, fine and close, flawless and to have thickness be that the ceramic coat of 5 μ m is as insulation course (8), by spraying and dry technology, at core surface coating last layer hydrophobic layer (7).
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| CNB2006101612763A CN100516935C (en) | 2006-12-19 | 2006-12-19 | Method for making electric-tuning micro-fluidic zoom lens array chip |
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| CN102103220A (en) * | 2011-02-28 | 2011-06-22 | 南京邮电大学 | Varifocal lens of micro-fluid control liquid based on ionic liquid |
| CN102129099A (en) * | 2011-04-15 | 2011-07-20 | 南京邮电大学 | Handheld variable optical attenuator |
| CN103424790B (en) * | 2013-08-14 | 2016-01-06 | 东南大学 | A kind of liquid lens and preparation method thereof |
| CN106773308A (en) * | 2017-01-03 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of display panel and its manufacture method, display device |
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