CN101487906B - Production method of electric tuning microcurrent-control zoom lens array chip - Google Patents
Production method of electric tuning microcurrent-control zoom lens array chip Download PDFInfo
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- CN101487906B CN101487906B CN2009100244594A CN200910024459A CN101487906B CN 101487906 B CN101487906 B CN 101487906B CN 2009100244594 A CN2009100244594 A CN 2009100244594A CN 200910024459 A CN200910024459 A CN 200910024459A CN 101487906 B CN101487906 B CN 101487906B
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Abstract
A method for manufacturing an electric tuning micro-fluidic zoom lens array chip relates to a micromation and integration manufacturing method of a novel electric tuning micro-fluidic zoom lens arraychip; and a tubular object is stacked and heated to pull and form an inner core with the lens array sandwich structure of 'upper cover plate (1)-inner core (3)-low cover plate (2)'. The main steps include: 1) stacking an inner core tubular object; 2) pulling the array inner core; 3) manufacturing an electrode; 4) encapsulating a lens medium. In the invention, the micro-fluidic technology and the modern optical technology are combined, and an electric tuning micro-fluidic technology zoom lens array chip is designed, thus having important technical value. The invention has the advantages of simple structure and easy manufacturing, is convenient for micromation and is suitable for integration.
Description
Technical field
Patent of the present invention relates to a kind of electric-tuning micro-fluidic zoom lens array chip structure and principle of work thereof of novelty, belongs to the technical field of photoelectronic imaging, photoelectric sensing and optical information processing device.
Background technology
Micro-fluidic optical is a significant new technology, it combines modern microflow control technique and low-light electronic technology, develop a class and can change, have the optical integrated device and the system of structural rearrangement and adaptive adjustment capability, will have important application prospects in fields such as sensing, communication, information processings according to external environment.
Microlens array is a kind of two-dimentional integrated device, can realize the integrated of optical element, promote the development of micro-optic device, waveguide device, optical integrated device, this device has in optical communication, photoimaging, optical storage, light demonstration, optical processing and other many fields very widely to be used, as the light interconnect devices, image multiple transform and identification, the optical passive component array etc. that utilize microlens array to make, received the concern of researcher and business circles always.The microlens array of practicability all is the device of fixed focal length at present, because the lens of fixed focal length lack modulability, influence the performance of device and limited its range of application, be worth and application prospect so the variable microlens array of development focal length has important techniques, caused people's great interest.
The zoom lenticule can change the luminous flux and the visual field performance of micro-optical systems, has good handling and adaptability, can be applicable to systems such as the interconnection of optical switch and light, three-dimensional light storage, static digital camera and medical science endoscope.But existing research and application concentrate on the simple lens zoom technology, the miniature liquid zoom lens [6-7] of the FluidFocus of relatively more typical as Dutch Philips company issue and the issue of French Varioptic company, the zoom of these lens be utilize electric-control method by changing liquid interfacial curvature so that focus.This technology has adopted the lens subassembly of flowing liquid as zoom, and present relatively mechanical zoom mode will have a lot of advantage parts.But these utilize the mini-focal liquid lens structure complexity of electric-control method, be difficult to adopt traditional technology to make microlens array, therefore the development of researcher's the micro-fluidic lens arra of concentrating on the hydrostatic control zoom at present, the lens arra of the Hans Zappe seminar based semiconductor micro-processing technology development of for example German Freiburg university, people such as the Berkeley branch school Nikolas Chronis of California, USA university are based on the micro-fluidic lens arra of soft lithographic (softlithography) fabrication techniques etc.
As mentioned above, external more at present to the research of tunable microlens array, but only limit to pressure-controlled array device, the rarely found report of electric-controlled type array device.Domestic variable focus microlens array does not appear in the newspapers.This patent combines microflow control technique with Modern Optics Technology, designed a kind of method for making of automatically controlled micro-fluidic zoom lens array chip, have important techniques and be worth, will be widely used in optical imagery, photoelectric sensing and optical information processing field.
The basic functional principle of the single liquid zoom lens of Philips company issue is as follows: lens material is made up of two kinds of different immiscible liquids of refractive index, a kind of is electric conductivity aqueous solution (high index of refraction), another kind is a non-conductive property oil (low-refraction), and two kinds of liquid are added in the transparent short cylinder of upper and lower surface.Because cylinder side wall has carried out the hydrophobicity processing, therefore two kinds of liquid surfaces can form stable curved surface, play the effect of lens.When the electric field that applies with hydrophobicity treated side orthogonal, the interfacial tension between conductivity water solution and the sidewall reduces because of the effect of the wet effect (Electrowetting) of electricity, thereby changes the shape of two kinds of liquid surfaces, finally causes the variation of the focal length of lens.The liquid lens structure of Varioptic company similarly.The liquid zoom lens structure more complicated of its said structure is difficult to carry out on this basis the integrated of microlens array.
Summary of the invention
Technical matters: the objective of the invention is to propose a kind of electric-tuning micro-fluidic zoom lens array chip method for making of novelty, solve the integrated manufacture method problem of micro-fluidic automatically controlled tuning zoom lens array.
Technical scheme: the inner core of electric-tuning micro-fluidic zoom lens array chip of the present invention is between upper cover plate and lower cover slip, and formation has sandwich sandwich structure; Inner core is the conduction schistose texture with cylindric via-hole array; Space between upper cover plate and lower cover slip and the cylindric through hole forms lens cavity, is used for the storage of liquids lens material; Constitute lens medium by two kinds of immiscible liquid, have different refractive indexes, be respectively electric conductor and insulator; Curved interface between two kinds of liquid plays lensing, changes the shape of curved interface to regulate the focal length of lens by the wet effect of electricity.Conductive core is as an electrode, and another electrode then is the transparency conducting layer that is plated on the lower cover slip.The inner core all surfaces is coated with insulation course and hydrophobic layer.
The method for making of electric-tuning micro-fluidic zoom lens array chip of the present invention is to adopt tubular articles accumulation and heating to draw the integrated making of the inner core that constitutes upper cover plate+inner core+lower cover slip sandwich lens arra sandwich structure, and its key step comprises:
1) accumulation of inner core tubular articles: two kinds of thin-walled tubular articles--quartz glass capillary is piled into rounded projections arranged or quadrangular array shape to choose size in 3: 1～2.5: 1 by external diameter, wherein bassoon is as lens cavity, tubule (9) play a supportive role and the filled conductive material serve as electrode, wherein the boss ratio example of bassoon be chosen for 10: 1～5: 1;
2) drawing of array inner core: the tubulose deposit is fixed, sent in the high temperature tower stove heating and slowly draw and make bassoon and tubule scaled down to required micro-dimension, cooling back transverse cuts becomes the sheet and the polishing of millimeter thickness;
3) electrode is made: utilize capillarity filled conductive material and seal as an electrode conducting resinl peripheral hardware one insulating coating with conducting resinl in gap between the bassoon and the tubule; The tube wall of bassoon micron dimension size is the insulation course of inner core as dielectric layer, and the tube wall inboard is coated with the last layer hydrophobic layer, and another electrode is located on the transparency conducting layer of lower cover slip, can realize the lenticule of array is carried out the addressing electric control;
4) lens medium encapsulation: with the lower surface and the lower cover slip gummed of inner core, be that insulating oil (5) and conductivity water solution fully mix and pours in the bassoon, get upper cover plate and inner core and glue together, leave standstill and treat the abundant layering of profit more than 48 hours with the liquid lens material.
The insulation course of inner core directly is pulled to micron dimension by insulating material thin-walled kapillary and forms; As space between the pipe of inner core conductive layer and little intraluminal filled conductive material can be conductivity water solution or favorable conductive and easy packing material.
Described lens cavity size arrives greatly under the situation of millimeter magnitude, is directly piled up by the capillary thing to be bonded, and the conductive layer of inner core is generated by vacuum evaporation or sputtering method by surfaces externally and internally; The size tube adopts metal material, and wherein tubule is solid little rod or saves tubule.
When the lenticule of array was carried out the addressing electric control, the ITO conductive layer that its control circuit can etching conductive glass formed.
Beneficial effect: according to above narration as can be known, the present invention has following characteristics:
The present invention combines microflow control technique with Modern Optics Technology, designed a kind of electric-tuning micro-fluidic zoom lens array chip, has important techniques and is worth.That the design's method for making has is simple in structure, make easily, be beneficial to microminiaturization, be suitable for integrated advantage.
The innovation part is:
1) drawing method of novel micro-fluidic lens arra can make the lens unit of micro-fluidic array accomplish the micron dimension size;
2) Xin Ying micro-fluidic lens method for manufacturing insulation layer has been simplified manufacturing process, has avoided the coating of complicated insulation course to make;
3) Xin Ying inner core method for making its electrode directly is filled into gap between lens cavity by capillary action with conductive material, and method for making is very convenient;
4) Du Te lens medium material Canning Technique has guaranteed the homogeneity of the conduction/insulating material of each lens.
Description of drawings
Fig. 1 is micro-fluidic lens arra chip structure and principle of work synoptic diagram.Fig. 1 (a) synoptic diagram when not powering up, Fig. 1 (b) synoptic diagram when powering up.Upper cover plate 1, lower cover slip 2, inner core 3, conductive fluid 4, dielectric fluid 5, transparency conducting layer 6, hydrophobic layer 7, insulation course 8 are arranged among the figure.
Fig. 2 is a lenticule inner core cellular construction cross sectional representation.Big kapillary 9, little kapillary 10 are arranged among the figure.Be distributed with six little kapillaries around each big kapillary.
Fig. 3 is a lenticule inner core cellular construction cross sectional representation.Big kapillary 9, little kapillary 10 are arranged among the figure.Be distributed with 12 little kapillaries around each big kapillary.
Fig. 4 is a kind of circular array chip structure cross-sectional view.Big kapillary 9, little kapillary 10 are arranged among the figure, and big or small intercapillary space 11.Elementary cell is made up of big kapillary+six a little kapillary.
Fig. 5 is a kind of square array chip structure cross-sectional view.Big kapillary 9, little kapillary 10 are arranged among the figure, and big or small intercapillary space 11.Elementary cell is made up of big kapillary+six a little kapillary.
Fig. 6 is another kind of square array chip structure cross-sectional view.Big kapillary 9, little kapillary 10, big or small intercapillary space 11 are arranged among the figure, and other filling materials 12.Elementary cell is made up of big kapillary+12 a little kapillary.
Embodiment
The present invention proposes a kind of electric-tuning micro-fluidic zoom lens array chip and makes new method, and its essential characteristic is to adopt tubular articles accumulation and heating to draw the integrated making of the sandwich lens arra sandwich structure inner core that constitutes " upper cover plate+inner core+lower cover slip ".
1) accumulation of inner core tubular articles: two kinds of thin-walled tubular articles--quartz glass capillary is piled into rounded projections arranged or quadrangular array shape to choose size in 3: 1～2.5: 1 by external diameter, wherein bassoon 10 is as lens cavity, tubule 9 play a supportive role and the filled conductive material serve as electrode, wherein the boss ratio example of bassoon be chosen for 10: 1～5: 1;
2) drawing of array inner core: the tubulose deposit is fixed, sent in the high temperature tower stove heating and slowly draw and make bassoon 10 and tubule 9 scaled down to required micro-dimension, cooling back transverse cuts becomes the sheet and the polishing of millimeter thickness;
3) electrode is made: utilize capillarity filled conductive materials and seal as an electrode conducting resinl peripheral hardware one insulating coating with conducting resinl in gap between the bassoon 11 and the tubule 9; The tube wall of bassoon micron dimension size is the insulation course 8 of inner core 3 as dielectric layer, and the tube wall inboard is coated with last layer hydrophobic layer 7, and another electrode is located on the transparency conducting layer 6 of lower cover slip 2, can realize the lenticule of array is carried out the addressing electric control;
4) lens medium encapsulation: with the lower surface and lower cover slip 2 gummeds of inner core, be that insulating oil 5 and conductivity water solution 4 fully mix and pours in the bassoon 10, get upper cover plate 1 and glue together, leave standstill and treat the abundant layering of profit more than 48 hours with inner core with the liquid lens material.
Specific embodiment 1: lens unit adopts big kapillary+six a little capillary pipe structure shown in Figure 2.Chip array adopts circular arrangement shown in Figure 4.Choose two kinds of quartz glass capillaries of size by a certain percentage and be piled into Fig. 4 and arrange shape, wherein bassoon is as lens cavity, and tubule plays a supportive role and the filled conductive material serves as electrode.Bassoon inner and outer diameter size can get 0.9 and 1.0mm, and tubule inner and outer diameter size is respectively 1/3rd of bassoon.The tubulose deposit is fixed, filled with little kapillary in the big gap at edge.Send in the high temperature tower stove heating and slowly draw and make bassoon inside and outside wall scaled down to required micro-dimension, for example the macropore outside dimension is at 100 microns.Cooling back transverse cuts become certain thickness for example 1mm sheet and polish standby.Utilize capillarity filled conductive material in the gap between the bassoon and the tubule to seal end face as an electrode such as conductivity water solution or dag and with conducting resinl, conducting resinl is coated with an insulating coating outward.The pipe thickness of bassoon this moment has reached micron dimension, can be used as dielectric layer (being the lens cavity inner insulating layer), and the tube wall inboard is coated with the last layer hydrophobic layer.Cover plate adopts commercial ito glass.Another electrode is located on the transparency conducting layer ITO of cover plate.The one side of inner core is glued together with lower cover slip, and the liquid lens medium is that insulating oil and conductivity water solution are selected bromododecane (density 1.0399, refractive index 1.4583) for use, and conductive fluid adopts and is configured to the common salt aqueous solution that density equates with it, to remove the influence of gravity.Two kinds of liquid are fully mixed pour in the macropore, get upper cover plate and inner core gummed, leave standstill and treat more than 48 hours that profit fully separates layering.Its control circuit forms by the ITO conductive layer of etching conductive glass.
Specific embodiment 2: lens unit adopts big kapillary+12 a little capillary pipe structure shown in Figure 3.Chip array adopts square arrangement or other arbitrary shapes shown in Figure 6.Around bassoon, arrange 12 tubules and in addition other propping materials make bassoon stressed more even when high temperature draws, more difficult distortion and subsiding, the size of lens unit can be done forr a short time.
Specific embodiment 3: lens unit adopts big kapillary+six a little capillary pipe structure shown in Figure 2.Chip array adopts square arrangement shown in Figure 5.For the lens unit of large-size, little kapillary can adopt metal material or solid glass material.
Specific embodiment 4: under larger-size situation, the inner and outer diameter of for example big capillary quartz glass tube gets 0.7 and 0.8mm respectively.Big or small quartz capillary is piled into above arbitrary structures, need not draw and directly be bonded chip by conducting resinl, the all surfaces of chip generates the Parylene of 3 micron thickness as insulation course with Vacuum Coating method, hydrophobic layer adopts the polytetrafluoroethylene polymer material, and (english abbreviation is PTFE, the trade (brand) name Teflon
, Teflon@AF) coating realizes.
Specific embodiment 5: under larger-size situation, big or small tube all can adopt metal material, and wherein tubule can be solid little rod, even can save tubule and directly piled up by bassoon and be bonded.
Claims (4)
1. the method for making of an electric-tuning micro-fluidic zoom lens array chip, it is characterized in that adopting tubular articles accumulation and heating to draw the integrated making of the inner core that constitutes upper cover plate+inner core+lower cover slip sandwich lens arra sandwich structure, its key step comprises:
1) accumulation of inner core tubular articles: chose two kinds of thin-walled tubular articles-quartz glass capillaries of size in 3: 1～2.5: 1 by external diameter and be piled into rounded projections arranged or quadrangular array shape, wherein bassoon (10) is as lens cavity, tubule (9) play a supportive role and the filled conductive material serve as electrode, wherein the boss ratio example of bassoon be chosen for 10: 1～5: 1;
2) drawing of array inner core: the tubulose deposit is fixed, sent in the high temperature tower stove heating and slowly draw and make bassoon (10) and tubule (9) scaled down to required micro-dimension, cooling back transverse cuts becomes the sheet of millimeter thickness and polishes;
3) electrode is made: utilize capillarity to seal as an electrode conducting resinl peripheral hardware one insulating coating toward the gap between the bassoon (11) and the interior filled conductive material of tubule (9) and with conducting resinl; The tube wall of bassoon micron dimension size is the insulation course (8) of inner core (3) as dielectric layer, and the tube wall inboard is coated with last layer hydrophobic layer (7), and another electrode is located on the transparency conducting layer (6) of lower cover slip (2), and the lenticule of array is carried out the addressing electric control;
4) lens medium encapsulation: with the lower surface and lower cover slip (2) gummed of inner core, with the liquid lens material is that insulating oil (5) and conductivity water solution (4) fully mix and pours in the bassoon (10), get upper cover plate (1) and inner core gummed, leave standstill and treat the abundant layering of profit more than 48 hours.
2. electric-tuning micro-fluidic according to claim 1 is handed over the method for making of focus lens array chip, and the insulation course that it is characterized in that inner core (3) directly is pulled to micron dimension by insulating material thin-walled kapillary and forms; As space between the pipe of inner core (3) conductive layer and little intraluminal filled conductive material is favorable conductive and easy packing material.
3. the method for making of electric-tuning micro-fluidic zoom lens array chip according to claim 1, when it is characterized in that described lens cavity size arrives the millimeter magnitude greatly, directly be bonded by the accumulation of capillary thing, the conductive layer of inner core is generated by vacuum evaporation or sputtering method by surfaces externally and internally; The size tube adopts metal material, and wherein tubule is solid little rod or saves tubule.
4. the method for making of electric-tuning micro-fluidic zoom lens array chip according to claim 1, when it is characterized in that lenticule to array carries out the addressing electric control, its control circuit forms by the ITO conductive layer of etching conductive glass.
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| CN102092674B (en) * | 2011-01-05 | 2012-07-25 | 东南大学 | Method for preparing micro-electrode array |
| CN105093260B (en) * | 2015-09-22 | 2018-08-28 | 北京师范大学 | Rectangular multiple capillary X-ray regulation and control device and preparation method thereof |
| CN107855142A (en) * | 2017-11-01 | 2018-03-30 | 深圳市第二人民医院 | A kind of detection chip and detection device based on microflow control technique |
| CN108519668A (en) * | 2018-05-23 | 2018-09-11 | 京东方科技集团股份有限公司 | A kind of display processing method of lens, display device and display device |
| CN114859443B (en) * | 2022-04-24 | 2024-02-06 | 武汉大学 | Liquid adjustable micro-lens array based on acoustic and micro-fluidic technology |
| CN116899643B (en) * | 2023-09-08 | 2023-11-21 | 微纳动力(北京)科技有限责任公司 | Microfluidic device for electro-optical operation |
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