WO1997028476A1

WO1997028476A1 - Waveguide type optical switch

Info

Publication number: WO1997028476A1
Application number: PCT/JP1996/000184
Authority: WO
Inventors: Masaya Horino; Kazutaka Sato; Takeshi Harada; Satomitsu Imai; Teruhisa Akashi
Original assignee: Hitachi, Ltd.
Priority date: 1996-01-31
Filing date: 1996-01-31
Publication date: 1997-08-07
Also published as: JP3527744B2

Abstract

An object of the present invention is to provide a waveguide type optical switch that can be driven with a low voltage which is less than ten volts and which has a small insertion loss, the waveguide type optical switch comprising a plurality of cantilevers formed on a substrate which are parallel to each other and connected together via a connecting member, an optical waveguide formed on at least one of the cantilevers and a plurality of optical waveguides fixed such that they confront the optical waveguide on the cantilever. The switch further comprises a film-like permanent magnet formed on either the cantilever connecting member or the substrate, and a film-like electromagnet formed on the other of the two.

Description

明

Waveguide type optical switch

Technical field

The present invention relates to a waveguide-type optical switch used in the field of optical communication, and more particularly to a small-sized waveguide-type optical switch suitable for remote FB operation.

Background art

In order to spread optical communications more widely, in addition to improving the performance and cost of optical fibers and light emitting and receiving elements, various optical circuit components such as optical branching / coupling circuits, optical multiplexing / demultiplexing circuits, optical switches, etc. Development is essential. In particular, optical switches are expected to play an important role in the near future in order to switch single-turn optical fibers according to demand and to secure detours in case of line failure. As the form of the optical switch, (1) a bulk type, (2) an optical fiber one-excitation type, and (3) an optical waveguide type have been conventionally proposed. The bulk type is assembled using a movable prism lens as a component, and has the advantage of being relatively independent of wavelength and having relatively low loss. In addition, the movable optical fiber type employs a system in which the optical fiber itself is moved by a small actuator to select an optical fiber of an output destination, and has an advantage of relatively low loss. However, these types of optical switches have not been widely used because of the problems that the assembly and adjustment process is complicated, unsuitable for mass production, and expensive.

The optical waveguide type is based on an optical waveguide on a flat substrate and uses photolithography and microfabrication technology to produce a so-called integrated optical switch as a large-scale S. Expected. An optical switch disclosed in Japanese Patent Publication No. 6-148536 is an example of this type of optical waveguide switch. This switch cuts the optical path by moving the optical waveguide formed on the cantilever using electrostatic force. IX It is a 2 light switch.

The conventional optical switch described above has the following problems. In other words, Aji: Since the power is high, the driving voltage is as high as several tens of volts or more, and it has a single cantilever structure. There is a problem that the waveguide rotates at the same time as the translation, so that the light emitting surface and the incident surface of the waveguide are not parallel to each other, and the insertion loss increases.

An object of the present invention is to solve such a problem, and an object of the present invention is to provide a low-cost optical waveguide switch which can be driven at a low voltage of 10 volts or less and has a small insertion loss.

Disclosure of the invention

In order to achieve the above object, an optical waveguide switch of the present invention includes a plurality of cantilever beams parallel to each other and fastened by a connecting member on a silicon substrate, and at least one cantilever beam. The formed first optical waveguide and the plurality of cantilever beams facing the first optical waveguide deform on the cantilever beam in a first direction or a second direction opposite to the first direction. A plurality of second optical waveguides formed on a substrate, which optically mate with the first optical waveguide, and switch boat moving means for deforming the cantilever beam; The beam is deformed to cut the optical path.

Further, the optical switch of the present invention comprises a plurality of cantilever beams parallel to each other and connected by a linking member on a silicon substrate, and a first optical waveguide formed on at least one cantilever beam. Opposing the first optical waveguide, the plurality of cantilevers being deformed in a first direction or a second direction opposite to the first optical waveguide, and A plurality of second optical waveguides formed on the substrate that are optically coupled to each other; a switch driving means for deforming the cantilever; and an optical path cutting on the connecting member of the cantilever. At the point where the front K speed contact member comes in contact * And a layer which has been formed.

Further, in the optical switch of the present invention, the material of the layer protruding from the substrate in the shape of an eave is glass, preferably quartz glass.

Further, the optical switch of the present invention has a thickness of the slaughter that protrudes from the substrate in an eaves-like shape from 10 micrometer to 100 micrometer, preferably from 20 micrometer to 80 micrometer, more preferably It should be 30 micrometer or more and 60 micrometer or less. In the optical switch of the present invention, the members between the second optical waveguides facing the interface at which the optical path of the substrate is cut off are recessed in the direction of light transmission.

The optical switch of the present invention is formed by forming an electromagnetic actuator composed of a permanent magnet, a coil, and a magnetic material on a cantilever connecting member and a substrate. Further, in the optical switch of the present invention, the connecting member, the permanent magnet, the coil, and the magnetic body of the cantilever are formed on the base side of the beam with respect to the longitudinal center of the cantilever.

Further, in the optical switch of the present invention, the cantilever connecting member, the permanent magnet, the coil, and the magnetic body are formed closer to the base of the beam than the longitudinal center of the cantilever. The bell member is formed on the tip end side of the cantilever rather than the center in the longitudinal direction of the cantilever.

Further, the optical switch of the present invention is precisely positioned at a position opposite to the side surface of the cantilever of the M between the interface where the optical path cutting of the substrate is performed and the linking member of the cantilever. This is to tt the member.

In the optical switch according to the present invention, the right of the cantilever is set to be 15 to 60 μm, preferably 25 to 40 μm.

Also, the optical switch of the present invention provides an optical switch on The waveguide array pitch is made larger than the optical waveguide array pitch at the interface where the optical path cutting is performed.

In the optical switch according to the present invention, a plurality of cantilever beams that are parallel to each other and that are connected by the connecting member move the leading end of the connected beams in parallel with the optical path switching operation. Has functions. Therefore, the optical waveguide formed on the cantilever also moves in parallel with the optical path switching operation. By this parallel movement of the optical waveguide, it becomes possible to select and switch the optical waveguide on the output side.

Further, according to the present invention, when the optical path cutting is performed on the connecting member of the optical waveguide and on the substrate at the position where the connecting member comes into contact with the connecting member when the optical path cutting is performed, the eaves-shaped protruding board is used for the optical path switching operation. As a result, the optical waveguides on the exit side and the incident side come into contact with each other and can be accurately fitted.

By using glass as the material of the layers that protrude from the substrate in an eaves-like manner, cracking and chipping can be prevented when they come into contact with each other due to the optical path switching operation. Furthermore, by using quartz glass, the difference in linear expansion coefficient from the silicon substrate can be reduced, and processing can be performed easily.

Further, in the present invention, the thickness of the layers protruding from the substrate in an eaves shape is set to 10 μm or more and 100 μm or less, so that the layers are damaged when they come into contact with each other along with the operation of cutting the optical path. No processing is easy. More desirably, when the thickness is in the range of 20 to 80 micrometer, the reliability at the time of repeated corrosion is improved, and the processing accuracy is also improved. Is improved. More preferably, by setting the length to 30 micrometers or more and 60 micrometers or less, it is possible to sufficiently withstand the external load, and to improve the processing accuracy and shorten the processing time. .

According to the present invention, there is provided an optical waveguide facing an interface on which optical path cutting is performed on a substrate. Since the members of M are recessed in the direction of light transmission, a machining allowance can be provided at the tip of the movable-side optical waveguide, and precision machining of the movable-side optical waveguide can be easily performed. In addition, by setting the gap between the fixed-side and movable-side optical waveguides W at the optical path switching interface to a negative value, the optical waveguides are brought into physical contact with each other, and the optical path cut due to reflection, scattering, etc. Light loss can be minimized.

In the present invention, since a magnetic force is generated between the permanent magnet formed on the linking member of the cantilever and the substrate and the coil and the magnetic body, the cantilever is deformed by utilizing the magnetic force. The optical waveguide formed on the cantilever can be switched.

Further, in the present invention, the width of the cantilever is 15 micrometer or more and 60 micrometer or less, preferably 25 micrometer or more and 40 micrometer or less. Since the cantilever can be bent with a ton of force, the optical path can be cut by using an electromagnetic actuator manufactured by a thin process. In the present invention, the linking member, the permanent magnet, the coil and the magnetic body of the cantilever are formed at a position S closer to the base side than the longitudinal center of the cantilever where the input-side optical waveguide is formed. Therefore, the tip of the cantilever can bend in the longitudinal direction of the beam, and when the switch is not in operation and the beam is not deformed, the optical waveguide ends on the fixed side and the active side ¾ W clearance W When the value of is negative, the leading ports of the optical waveguide can be brought into contact with each other.

In the present invention, the cantilever connecting member, the permanent magnet, the coil, and the magnetic body are formed closer to the base of the beam than the longitudinal center of the cantilever, and the cantilever connecting member is further cantilevered. Since the tip of the cantilever is bent in the longitudinal direction of the beam because it is formed on the S side of the beam rather than the center of the beam in the longitudinal direction, the optical path is cut off. Negative gap between optical waveguides In this case, not only can the tip SS of the optical waveguide be brought into contact with each other, but also the tip port of the optical waveguide can move while maintaining the parallel state. Can be prevented from increasing insertion loss due to the fact that they do not become parallel to each other.

Furthermore, in the present invention, the member precisely positioned on the substrate at the position S opposing the side surface of the movable optical waveguide between the interface where the optical path cutting is performed and the connecting member of the cantilever beam is a continuous member. Since the displacement of the beam preceding the bending member is restricted, even if the cantilever is bent, the optical waveguides can be aligned with high accuracy, and the pitch of the optical waveguide E at the contact surface between the optical switch and the outside can be reduced. Since the pitch is larger than the pitch of the optical waveguides E at the interface where the optical path is switched, connection of an optical transmission medium such as an optical fiber for extracting light from the optical switch becomes easy.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a perspective view of one embodiment of a waveguide type two-circuit 1 × 2 optical switch according to the present invention.

FIG. 2 is a top view of one embodiment of a waveguide type two-circuit 1 × 2 optical switch according to the present invention.

FIG. 3 is a top view showing the structure of a thin film electromagnet of a waveguide type two-circuit 1 × 2 optical switch according to the present invention.

FIG. 4 is a cross-sectional view of a thin film magnet of a waveguide type two-circuit 1 × 2 optical switch according to the present invention.

FIG. 5 is a top view of another embodiment according to the present invention.

FIG. 6 is a perspective view of another embodiment of the waveguide type two-circuit 1 × 2 optical switch according to the present invention.

FIG. 7 is a cross-sectional view of the waveguide type two-circuit 1 × 2 optical switch shown in FIG. C

FIG. 8 is a top view of another embodiment according to the present invention.

FIG. 9 is an explanatory diagram showing the operation of the switch shown in FIG.

FIG. 10 is a top view of an embodiment of an optical switch array comprising eight circuits 1 × 2 optical switches according to the present invention.

FIG. 11 is a top view of an embodiment of an optical switch comprising three two-circuit 1 × 2 optical switches according to the present invention.

FIG. 12 is an explanatory diagram showing the operation of the optical switch tree shown in FIG. 11. FIG. 13 is a structural diagram of an optical communication device using a two-circuit 1 × 2 optical switch according to the present invention.

FIG. 14 is a cross-sectional view of a packaged two-circuit 1 × 2 optical switch according to the present invention.

FIG. 15 is a diagram of a bypass switch using a two-circuit 1 × 2 optical switch according to the present invention.

FIG. 16 is a block diagram of a switch for connecting an inspection device in an optical communication network using a bypass switch having two circuits 1 × 2 optical switches according to the present invention. FIG. 17 is a block diagram of an interconnect between devices using an optical switch according to the present invention.

FIG. 18 is a * construction of an optical communication connection path disconnection device tt using an optical switch according to the present invention.

FIG. 19 is an explanatory view showing a manufacturing process of a two-circuit 1 × 2 optical switch according to the present invention.

FIG. 20 is a schematic diagram for explaining the deformation when a force is applied to the tip of the cantilever and the parallel plate panel.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view of one embodiment of a waveguide type two-circuit 1 × 2 optical switch according to the present invention. 1 is an optical fiber, 2 is a movable optical waveguide, 3 is a silicon substrate, 4 is a magnetic film, 5 is a coil electrode, 7 is a thin film electromagnet, 8 is an optical fiber, 9 is a fixed optical waveguide, 1 1 Is a connecting member, and 12 is a cantilever. Light input from the optical fiber 11 is transmitted to the movable optical waveguide 2 formed on the cantilever 12. The cantilever beam 12 is connected at its tip by a connecting member 11, and can be displaced in the plane of the silicon substrate 3 while keeping parallel to each other. A magnetic material extension 4 is formed on the link member 11. Further, on the silicon substrate 3 of rain K of the magnetic film 4, a magnetic film, a permanent magnet, and a thin film << magnet 7 composed of a thin film << magnet are formed. Electric power is supplied to the thin electromagnet 7 from a power source (not shown) via the coil electrode 5. 《Pressure can be set in the range of 3 volts to 10 volts. By changing the direction of the current flowing through the thin electromagnets 7a and 7b, the magnitude of the force acting on the thin magnets 7a and 7b and the magnetic film 4 is reversed, and the speed change material 1 By changing the moving direction of 1 and changing the deformation direction of the connected beam 12, it is possible to switch the fixed-side optical waveguide 9 to which the movable-side optical waveguide 2 narrows. In the embodiment in honor of the present specification, the optical switch is driven by an actuator composed of a combination of a permanent magnet, a coil and a magnetic material. The actuator is a combination of a magnetic material on the cantilever and a movable permanent magnet placed outside the optical switch, an actuator using the swift power, and an actuator using the piezo effect. Alternatively, there is an actuator that utilizes deformation of a shape memory alloy or bimetal due to a temperature change, and can be used as long as it can generate a force necessary for switching an optical switch. FIG. 2 is a top view of one embodiment of a waveguide type two-circuit 1 × 2 optical switch according to the present invention. The figure shows a state before passing through the optical switch.

2a and 2b are movable-side optical waveguides, 5a and 7a are movable-side optical waveguides 2a-side coil implants and thin-film electromagnets, and 5b and 7b are movable-side optical waveguides 2b-side coil electrodes, respectively. 9a, 9b, 9c and 9d are fixed-side optical waveguides, and 10 is a depression. A recess 10 is provided at the tip of the movable optical waveguides 2 a and 2 b as a processing allowance, and the movable optical waveguides 2 a and 2 b and the cantilever beam 1 2 can be precisely machined. . When an electric current is applied to the thin magnet 7a in a direction to strongly attract the magnetic film 4, and an electric current is applied to the thin-film electromagnet 7b in the direction to attract the magnetic film 4 weakly (hereinafter referred to as A direction). The movable beam 12 is displaced as shown in the fracture 1 2 1, and the movable optical waveguide 2 a is connected to the fixed optical waveguide 9 a and the movable optical waveguide 2 b is connected to the fixed optical waveguide 9 c. .

Here, when the direction of the current flowing through the thin film electromagnets 7a and 7b is reversed (hereinafter referred to as the B direction), the magnitude relationship of the electromagnetic force generated between the thin film electromagnets 7a and 7b and the magnetic film 4 becomes The cantilever 1 2 is displaced as shown by the fracture 1 2 2, and the movable optical waveguide 2 a becomes the fixed optical waveguide 9 b, and the movable optical waveguide 2 b becomes the fixed optical waveguide 9 d Is squeezed.

As a result, it is possible to realize an optical path. Since the ends of the cantilever 12 and the movable optical waveguides 2a and 2b are fastened by the connecting member 11, the movable optical waveguides 2a and 2b ahead of the connecting member 11 are provided. Moves in parallel with the switching operation of the optical path due to the principle of a parallel leaf spring.

Here, the deformation operation of the parallel panel will be described with reference to FIG. FIG. 20 (a) is a diagram for explaining the state of deformation when a force is applied to the tip of the cantilever. 1 110 is a cantilever. When a force F is applied to the tip of the cantilever 1 1 0, the cantilever 1 1 0 bends in the direction of the force F, and the point B moves to the point B '. You. The angle S between the tangent CD passing through the point B 'and the line GH indicating the position S of the fixed part of the cantilever 1 110 is 90. Smaller than That is, the tip of the cantilever 110 rotates by bending.

FIG. 20 (b) is a diagram for explaining a deformation state when a force is applied to the tip of the parallel leaf spring. 1 1 1 is a parallel leaf spring. The ends of the parallel leaf springs 1 1 1 are connected by connecting members 1 2. When a force F is applied to the link member 1 1 2, the parallel leaf spring 1 11 bends in the direction of the force F, and the points B 1 and B 2 move to the points B 1 ′ and B 2 ′. At this time, the angle between the tangent C 1 D 1 passing through the point SS B 1 ′ and the line GH is 90. Is kept. Therefore, it can be seen that the tip of the parallel leaf spring 1 1 1 does not rotate even if bending occurs.

Therefore, the tip of the optical waveguide formed on the parallel panel of the optical switch shown in FIG. 2 moves in parallel. Also, after cutting off the current flowing through the ft electromagnets 7a and 7b, the permanent magnets in the thin film electromagnets 7a or 7b attract the magnetic material 4 and the cantilever 12 is in the initial position ft. Since there is no return, the attenuation of light depending on the inclination of the optical axis at the interface when the optical path is cut can be reduced. This makes it possible to realize a self-holding optical switch with small light attenuation.

FIG. 3 is a view showing a structure of a thin film electromagnet used for a waveguide type two-circuit 1 × 2 optical switch according to the present invention.

20 is a sales thin film coil, 21 is a magnetic material made of Fe—Ni, 22 is a magnetic film made of e—Ni, 23 is a magnetic film made of Fe—Ni, 24 is a fixed-side optical waveguide, 25 is a movable-side optical waveguide, 26 is a magnetic material made of Fe—Ni, 27 is a Ne—Fe—B permanent magnet, and 28 is a movable-side light guide. It is a member of the wave path o

When a current is applied to the thin-film coil 20 with A + and B 1, the magnetic flux formed by the thin-film coil 20 and the magnetic material IR 21 causes a permanent magnet in the magnetic material K 22. The magnetic film 23 formed on the linking member 28 is strongly attracted by the magnetic flux of 27, and the connecting member 28 moves in the direction of the arrow C to the magnetic films 22 and 23. Adsorbed.

When a current is applied to the thin-film coil 20 with A being 1 and B being +, the magnetic flux formed by the thin-film coil 20 and the magnetic material 腠 21 becomes the same as the magnetic flux of the permanent magnet 27 in the magnetic film 22. The force of attracting the magnetic film 23 formed on the connecting member 28 is weakened by the cancellation, and the connecting member 28 is separated from the magnetic films 22 and 23 by the elasticity of the movable side beam 25.

In the present invention, as shown in FIG. 2, a thin film electromagnet is formed on the side surface of the connecting member to provide an effective attraction to the magnetic film 23 on the connecting member 28. .

Further, in the thin film electromagnet shown in FIG. 3, even if the current flowing through the thin film coil 20 after the connecting member 28 is attracted to the magnetic films 22 and 23 is set to 0, the magnetic flux of the permanent magnet 27 is Since the magnetic film 23 passes through the closed magnetic circuit formed by the magnetic materials 22, 23, and 26, the magnetic film 23 continues to exert a strong attraction force. As a result, even if the current flowing through the thin film coil 20 is set to 0, the speed adjusting member is attracted to the magnetic materials 22 and 23 to be squeezed, and the light cutting state is maintained.

Further, the width of the cantilever of the waveguide type two-circuit 1 × 2 optical switch according to the present invention is 15 μm or more and 60 μm or less, preferably 25 μm or more and 40 μm or less. Since the cantilever can be bent with a force of 50 micronewtons to 1 milliton, the voltage supplied to the electromagnetic actuator manufactured by the thin film process is in the range of 3 to 10 volts. It can be driven with the set value of, and can cut the optical path.

FIG. 4 is a view showing a cross-sectional structure of a thin-film coil portion in a thin-film electromagnet used for a waveguide type two-circuit 1 × 2 optical switch according to the present invention. 20 a is the lower side of the thin-film coil made of 钢, 20 b is the upper layer of the thin-film coil, 1, 71, 73 and 75 are insulating layers made of polyimide, and 21 is Fe—N i , A through-hole formed in the insulating layer made of polyimide 73, a through-hole formed in the insulating layer 71 made of polyimide, and 3 a silicon It is a substrate.

On the silicon substrate 3, a lower layer 20a of a copper thin-film coil is formed, on which an insulating layer 73 made of polyimide is formed, and a through hole 76 is formed, followed by firing. Next, a magnetic film 72 made of Fe—Ni is formed by vapor deposition or sputtering. Further, a polyimide insulating layer 73 is formed thereon, and a through hole 77 is formed, followed by firing. A line 20b on the upper side of the thin film coil made of copper is formed thereon, and an insulating layer 75 made of polyimide is further formed and fired. The lower wire 20 a of the thin film coil and the upper wire 20 b of the thin copper coil are connected through through holes 76 and 77, and a magnetic material made of Fe—Ni is used. A coil having 2 as a core is formed.

Although copper is used in this embodiment as a material for the thin film coil, any conductive material such as aluminum, nickel, or gold can be used.

FIG. 5 is a top view of another embodiment according to the present invention. Reference numeral 15 denotes a fixed-side optical waveguide. The arrangement pitch of the fixed-side optical waveguides 15 at the connection surface between the optical switch and the outside is made larger than the arrangement pitch of the fixed-side optical waveguides 15 at the interface where optical path switching is performed. Intimate contact becomes easier.

FIG. 6 is a perspective view of another embodiment of the waveguide type two-circuit 1 × 2 optical switch according to the present invention. Reference numeral 18 denotes a quartz glass layer. It has a structure in which a quartz glass layer 18 having a thickness of 40 micrometer is provided on a silicon substrate 3. The quartz glass layer 18 formed on the link member 14 is thin when cutting the optical path. By contacting the quartz glass layer 18 formed below the electromagnet 7, the movable optical waveguide 2 and the fixed optical waveguide 9 can be precisely aligned.

FIG. 7 is a cross-sectional view of the waveguide type two-circuit 1 × 2 optical switch shown in FIG. When the quartz glass layers 18 are in contact with each other, the movable optical waveguide 2 is aligned with high precision, and highly efficient optical connection can be realized. FIG. 8 is a top view of another embodiment according to the present invention. 12a and 12b are movable optical waveguides, 13a, 13b and 13c are precisely positioned members, and 14 is a connecting member. The members 13a, 13b, and 13c are integrally formed with the silicon substrate 3.

FIG. 9 is an explanatory diagram showing the operation of the switch shown in FIG. Reference numeral 17 denotes the M clearance RI between the movable optical waveguide and the fixed optical waveguide at the light switching interface. The initial state shown in FIG. 9 (a) shows a state in which no current is applied to the optical switch shown in FIG. The communication shown in Fig. 9 (b)! ! The state shows a state where a current is applied to the optical switch shown in FIG. The power-off state shown in FIG. 9 (c) shows a state where the current applied to the optical switch shown in FIG. 8 is cut off. In the energized state, the movable optical waveguides 12a and 12b are curved as shown in the figure by the action of magnetic force. Even in this case, since the displacement of the tip of the movable-side optical waveguides 12a and 12b is restricted by the members 13a and 13b, the tip of the movable-side optical waveguide does not deviate from the connection with the fixed-side optical waveguide. Absent. Further, since the movable optical waveguides 12a and 12b are curved, a larger gap 17 occurs between the movable optical waveguide and the fixed optical waveguide than when there is no curvature. The movable-side optical waveguide is made longer by the width of the gap 17 in advance.

After the optical path switching operation is performed, the current flowing through the thin electromagnet 7 is cut.If the flow is cut, the degree of curvature of the movable optical waveguide is reduced, the WH of Ml 7 is reduced, and the movable optical waveguide 12a and 1 2 b and fixed-side optical waveguides 9 a and 9 c The contact surfaces can be physically contacted. Since the thin-film electromagnet 7 and the magnetic film 4 are attracted even after cutting the current flowing through the thin-film electromagnet 7, the cantilever beams 12a and 12b do not return to the initial position.

As a result, it is possible to perform good optical aperture stop with less reflection and disturbance at the aperture stop interface due to the contact between the waveguides. If the current flows in the opposite direction, the movable optical waveguides 12a and 12b and the fixed optical waveguides 9b and 9d physically come into contact with each other in the same manner. It is possible to achieve a good optical connection with a small insertion loss, and to realize a self-holding optical cutoff with a small insertion loss.

FIG. 10 is a top view of an embodiment of an optical switch array composed of eight circuits 1 × 2 optical switches according to the present invention. 12a, 12b, 12c, 12d, 12e, 12ί, 12g and 12h are cantilever, 2a, 2b, 2c, 2d, 2e , 2 i, 2 g and 2 h are movable optical waveguides, 10 a, 10 b, 10 c, 10 d, 10 e, 10 ί, 10 g and 10 h are hollow, 1 6a, 16b, 16c, 16d, 16e, 16i, 16g, 16h, 16i, 16j, 16k, 161, 16m , 16 n, 16 o and 16 p are fixed-side optical waveguides.

Cantilever beams 1 2a, 1 2b, 1 2c, 1 2d, 1 2e, 1 2f, 1 2 g and 1 2h are fast-coupled by connecting member 11 and kept parallel to each other Each time it can be displaced in the plane of the substrate. The movable side optical waveguides 2a, 2b, 2c, 2d, 2e, 2f, 2g and 2h are recessed into the SB as machining allowances 10a, 10b, 10c, 10 Since d, 10e, 10f, 10g, and 10h are provided, the movable optical waveguide and cantilever tip can be precisely machined. A film-shaped magnetic film 4 is formed on the link member 11. A thin JR electromagnet 7 is formed on the silicon substrate 3 on both sides of the magnetic lining 4. Power is supplied to the thin magnet 7 from a power source (not shown) via the coil magnet 5. To change the direction of the current flowing through the thin electromagnet 7 Thus, the magnitude relationship of the electromagnetic force generated between the thin film electromagnets 7a and 7b and the magnetic film 4 is reversed, and the movable optical waveguides 2a, 2b, 2c, 2d, 2e, 2 f, 2 g and 2 h are connected to the fixed-side optical waveguide 16 a, 16 b, 16 c, 16 d, 16 e, 16 f, 16 g, 16 h, 16 i, 16 j, 16 k, 16 1, 16 m, 16 n, 16 o and 16 p can be cut and sized. Even after the current flowing through the thin-film electromagnets 7a and 7b is cut off, the permanent magnets in the thin-film electromagnets 7a and 7b attract the magnetic film 4 by the action of the permanent magnets, and the cantilever 12a, 12b, 1 2c, 12d, 12e, 12f, 12g and 12h do not return to their initial positions. By forming the optical switches in parallel on the same substrate in this way, a small, self-holding optical switch array can be realized.

FIG. 11 is a top view of an embodiment of an optical switch array comprising eight 1 × 2 optical switches according to the present invention. 30 is an input of two systems A and B «I waveguide, 31 is a first optical switch, 32 is an optical waveguide connecting between optical switches, 33 is a second optical switch, 3 4 Is the third optical switch, 35 is the output optical waveguide of the second optical switch consisting of four systems of AO, AI, A2 and A3, and 36 is four systems of B0, B1, B2 and B3 This is the output side optical waveguide of the third optical switch composed of.

As shown in the figure, the output optical waveguide of the first optical switch is connected to the input optical waveguides of the second optical switch and the third optical switch. An optical switch can be realized.

The 12th time is an explanatory view showing the operation of the optical switch shown in FIG. In the figure, the state is 0 when the switch is connected to the left side in the light propagation direction, and the state is when the switch is narrowed to the right side in the light propagation direction. I think it is 1. As shown in the figure, if the state of the second optical switch and the state of the third optical switch are the same, the state of the first optical switch is the same as that of the first optical switch. With the combination of the above concepts, the inputs A and B can be output at the same position, and a two-circuit 1 × 4 optical switch can be realized.

FIG. 13 is a block diagram of an optical signal transmission device S using a two-circuit 1 × 2 optical switch according to the present invention. In the optical communication network, the optical fiber is duplicated with system 0 and system 1 to ensure the reliability of the communication network. The audio signal can be electrically switched between system 0 and system 1. However, since the video signal is input as an optical signal, system 0 and system 1 can be switched by an optical switch. In this way, when a failure occurs in one optical fiber, communication can be narrowed down using the other optical fiber.

40 is an optical switch, 41 is a voice electric signal, 42 is an optical / optical signal converter, 43 is an optical information transmission section, 44 is a 0-system optical fiber, and 45 is a 1-system optical fiber. , 46 is an output connector, 47 is an optical switch controller, 48 is a video signal input connector, 49 is an audio signal input connector, 50 is a video signal input, 51 Is an audio electric signal input.

The audio electrical signal input 50 and the video optical signal input 51 are input to the optical information transmitting section 43, and the video optical signal input is routed by the optical switch of the present invention, and the electrical / optical signal converter 4 2 The converted optical signal is output to the 0 and 1 system optical fibers. The optical switch 40 is arranged on at least one of the input and the WJ of the electric / optical signal converter 42 or between the output divider 46 and the / the optical / optical signal converter 42.

By using the optical switch of the present invention, a data transmission unit for optical communication that can be produced at low cost and can be driven at low voltage can be realized. This data transmission unit has a small transmission loss and can be driven with a low voltage, so it can be used as an optical communication device for personal computers and portable information terminals.

FIG. 14 is a sectional view of a packaged optical switch. 5 5 is a cover, 5 6 is a thin R electromagnet, 5 7 is quartz glass, 5 8 is a magnetic film, 5 9 Is a power supply for a thin film electromagnet, 60 is an electrode pin, 61 is a silicon substrate, 62 is a movable side optical waveguide formed on a beam, 63 is a connecting member, 64 is a substrate, and 65 is a thin film. Power line for electromagnet. Since the optical switch is hermetically sealed using the cover 55 and the substrate 6, it is possible to prevent entry of foreign matter and moisture in the air that cause malfunction and corrosion and deterioration that cause malfunction. , A highly reliable optical switch can be configured.

FIG. 15 shows an embodiment in which the optical switch according to the present invention is applied to a bypass switch. Reference numeral 83 denotes a fiber optic cable for passing light, and reference numeral 87 denotes an optical fiber cable for return light. By changing the bonding destination of the optical signal, it is possible to switch between passing the optical signal and returning the optical signal through the optical fiber cable for return light 87.

FIG. 16 shows an embodiment in which the optical switch according to the present invention is applied to an optical communication network. 80 is an optical communication line, 81 is an optical connector, 82 is an optical switch unit using the optical switch of the present invention, 83 is a fiber cable for passing light, 84 is an inspection device, 85 and 86. Is a propagation path of an optical signal, and 87 is an optical fiber cable for return light.

When the contact A of the optical switch is closed, the optical signal can return to the optical communication circuit 80 by the transmission path 85 passing through the quick-connect optical fiber. At the time of periodic inspection of the optical communication network, the contact B of the optical switch is closed. Since the optical signal is transmitted from the connector B to the inspection device through the propagation path 86 via an optical fiber cable, various analyzes, so-called *, can be performed.

FIG. 17 shows an embodiment in which the optical switch according to the present invention is applied to an interconnect of the device WI. 100 is an optical bus inside the device, 81 is an optical connector, 82a and 82b are optical switch units, 101 is an optical fiber cable for external equipment, and 102 is external equipment. Reference numerals 85 and 86 denote optical signal propagation paths, and 87 denotes an optical fiber cable for return light. Equipment at 100 ft is an information communication device, a computer, a telephone, an information terminal, a circuit or device for transmitting information using light, or an integrated circuit or device of the circuit or device and a combination thereof. When the contact A of the optical switch is closed, the optical signal can return to the optical path 100 inside the computer by the propagation path 85 through the connecting optical fiber. When connecting an external device, close the contact B of the optical switch. The optical signal can reach the external device 102 from the connector 1B via the optical fiber cable 101 for connecting the external device. According to the present invention, it is possible to realize an interconnect of a device for transmitting information using inexpensive and highly reliable light. It is possible to realize an inexpensive and highly reliable interconnect that can be driven by a low voltage and can be used for information communication devices and computers, especially small-sized information terminals, telephones, and portable information communication terminals.

FIG. 18 shows an embodiment of a connection path switching device for optical communication according to the present invention.

Reference numeral 120 denotes an optical switch or an optical switch array of the present invention, and 121 denotes an optical switch tree of the present invention or an optical switch tree formed by the optical switch array 122, 122, and 124 are optical communication networks. Optical fiber-to-cable. The optical signal input from the cable of 122 can switch the connection path to the optical fibers 123, 124 to be screwed by the optical switch or the optical switch tree by the optical switch. The connection path is arranged so that it can be selected by the combination of the optical switch and the optical switch array 120. In this way, a part 1 2 3 of the optical fiber at the reciprocal destination is connected to another path disconnecting device «, and a part 1 24 of another optical fiber is connected to the further * optical path disconnecting device. Alternatively, the drawing path is distributed so as to spread to the photoelectric conversion device β. In addition, if a part of the toll line is disconnected due to a failure or the like, it will be returned so that it can be connected to another shoe path. An optical switch, an optical switch array or an optical switch array having a small input loss according to the present invention is connected in series or in parallel. By using the optical switch tree configured as described above, it is possible to realize a communication path switching device such as a main integrated controller or a cross-connect for highly integrated and highly reliable optical communication. Furthermore, since the switching operation is automated and the various driving voltages are low, it is possible to realize a communication screw connection device which can be operated with low maintenance. Therefore, the reliability of the entire communication network can be improved.

FIG. 19 is a diagram schematically showing a manufacturing process of the optical switch according to the present invention. 18a is the lower quartz glass layer with a thickness of 25 micrometer, 18b is the upper quartz glass layer with a thickness of 25 micrometer, 90 is the core of the optical waveguide, 91 is the citric, and 9 2 is the The groove, 93 is a hole.

First, a lower quartz glass layer 18a having a thickness of 25 micrometers is formed on a silicon substrate 3. Next, an optical waveguide core 90 and an upper quartz glass layer 18b having a thickness of 25 micrometers are formed. Next, grooves 91 are formed in the quartz glass layers 18a and 18b by selective dry etching. Next, a groove 92 is formed in the silicon substrate 3 by S-selective dry etching using the quartz glass layers 丄 8 & and 18 b as a mask. Next, through-hole etching is performed from the silicon substrate side by wet etching to obtain a through hole. The side surfaces of the grooves 92 formed in the silicon substrate 3 by selective dry etching do not protrude beyond the quartz glass layers 18a and 18b due to the side etching. Therefore, accurate alignment can be achieved without obstructing the sleeves of the quartz glass layers 18a and 18b used for alignment.

According to the present embodiment, there is an effect that a self-holding type optical switch with small attenuation of light depending on the inclination of the optical axis at the optical path switching interface can be realized.

Claims

The scope of the claims

1. An optical switch that has a cantilever-shaped movable member, forms an optical waveguide on the movable member, and deforms the movable member to switch an optical path of an input optical signal.

A plurality of cantilevers parallel to each other and connected by a link member on the silicon substrate;

A first optical waveguide formed on at least one cantilever, and the plurality of cantilevers facing the first optical waveguide, wherein the plurality of cantilevers have a second direction in a first direction or a direction opposite thereto. A plurality of second optical waveguides formed on the substrate, which are deformed in the direction of and optically coupled to the first optical waveguide on the cantilever; and a switch driving means for deforming the cantilever. With

A waveguide type optical switch characterized in that the cantilever is deformed to cut off an optical path.

2. An optical switch is formed on a cantilever-shaped movable member, and the movable member is deformed to switch an optical path of an input optical signal.

A first optical waveguide formed on at least one cantilever, and the plurality of cantilevers facing the first optical waveguide, wherein the plurality of cantilevers have a second direction in a first direction or a direction opposite thereto. A plurality of second optical waveguides formed on the substrate, which are deformed in the direction of and optically coupled to the first optical waveguide on the cantilever; and a switch driving means for deforming the cantilever. ,

B that protrudes in an eaves-like manner from the substrate on a side of the connection member of the cantilever and the substrate at a position where the connecting member contacts when the optical path cutting is performed.

The optical path is switched by deforming the cantilever by the switch K moving means. A waveguide type optical switch characterized by performing the following.

3. The waveguide-type optical switch according to claim 2, wherein a thickness of a layer protruding from the substrate in an eaves-like shape is set to 10 μm or more and 100 μm or less.

4. The waveguide type optical switch according to claim 2, wherein the material of the layer protruding from the substrate in an eaves shape is glass.

5. The member between the second optical waveguides facing the interface where the optical path switching of the substrate is performed is recessed from each other in the direction in which light is transmitted. Item 15. A waveguide type optical switch according to any one of the items [1] to [10].

6. The switch driving means includes:

A permanent magnet is formed on one of the connecting member of the cantilever and the substrate, and a coil and a magnetic body are formed on the other,

6. The switch driving means for deforming a cantilever beam by utilizing a magnetic force generated between a permanent magnet, a coil, and a magnetic body, according to any one of claims 1 to 5, 2. The waveguide type optical switch according to item 1.

7. A permanent magnet is formed on one of the linking member of the cantilever and the substrate, and a coil and a magnetic body are formed on the other,

7. The waveguide type optical switch according to claim 6, wherein these are formed closer to the base of the beam than to the center in the longitudinal direction of the cantilever.

8. The cantilever connecting member, permanent magnet, coil and magnetic body The cantilever is formed closer to the base of the beam than the center in the longitudinal direction, and another connecting member of the cantilever is formed closer to the tip of the beam than the center of the cantilever in the longitudinal direction. 7. The waveguide type optical switch according to claim 6, wherein:

9. A precisely positioned member is disposed on the substrate at a position S opposite to the side surface of the cantilever between the interface where the optical path of the first optical waveguide is switched and the connecting member of the cantilever. 9. The waveguide type optical switch according to claim 1, wherein the optical switch is configured to be a child.

10. The waveguide type optical switch according to any one of items 1 to 9, wherein the width of the cantilever is not less than 15 micrometers and not more than 60 micrometers. .

11. The claim 1 to claim 1, wherein the pitch of the optical waveguide array at the contact surface between the optical switch and the outside is made larger than the pitch of the optical waveguide array at the interface where optical path switching is performed. The waveguide type optical switch according to any one of items 0.

12. A waveguide in which the waveguide type optical switch described in any one of claims 1 to 11 is joined to a plurality of parallel or series or a combination of parallel and series on a substrate. Type light switch.

13. A waveguide-type optical switch characterized in that the waveguide-type optical switch according to any one of claims 1 to 12 is housed in an airtight container having a Genes.

1. A waveguide type optical switch according to any one of claims 1 to 13;

A control device for controlling the operation of the waveguide type optical switch;

An optical signal connector focused on the first optical waveguide of the waveguide optical switch;

An optical communication device comprising: a plurality of optical signal connectors connected to the second optical waveguide of the waveguide optical switch. 15. The waveguide-type optical switch according to any one of claims 1 to 13, wherein the first cantilever beam is deformed in one of the deformation directions. An optical switch, wherein the second optical waveguides optically coupled to the optical waveguides are connected and narrowed. 16. The waveguide-type optical switch according to any one of claims 1 to 13, wherein the first optical waveguide is connected to an optical communication line,

When the cantilever is deformed in one of the deformation directions, the second optical waveguides optically coupled to each other are narrowed down,

An optical switch for optical communication network inspection, wherein the second optical waveguide, which is optically connected when deformed in the other deformation direction, is brought into contact with a predetermined inspection device.

17. The first optical waveguide of the waveguide optical switch according to any one of claims 1 to 13, wherein the first optical waveguide is connected to a device 11 for transmitting optical information; The second optical waveguides that are optically coupled when deformed in one of the deformation directions are brought into contact with each other, An optical communication interconnect characterized in that the second optical waveguide optically connected when deformed in the other deformation direction is connected to a connector that is connected to a device different from the device S. .

18. The waveguide type optical switch according to claim 12, wherein the first and second optical waveguides that are not connected to other optical waveguides include a plurality of optical communication optical fibers. An optical communication network connection path switching device which is connected to a cable and switches the connection path of an optical communication line by a combination of a switching operation and a switching operation of the front IB waveguide type optical switch.

19. The process of manufacturing an optical switch in which a silicon substrate is selectively dry-etched using the etched quartz glass layer as a mask, and then the silicon substrate is processed by jet etching from the opposite side to obtain a through structure.