CN102129125B - Stacked dual-shaft micro lens array driver based on MEMS (Micro Electronic Mechanical System) technology and use thereof - Google Patents
Stacked dual-shaft micro lens array driver based on MEMS (Micro Electronic Mechanical System) technology and use thereof Download PDFInfo
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- CN102129125B CN102129125B CN201110003994.9A CN201110003994A CN102129125B CN 102129125 B CN102129125 B CN 102129125B CN 201110003994 A CN201110003994 A CN 201110003994A CN 102129125 B CN102129125 B CN 102129125B
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Abstract
The invention provides a stacked dual-shaft micro lens array driver 17 based on an MEMS (Micro Electronic Mechanical System) technology, wherein the stacked dual-shaft micro lens array driver 17 is formed in a manner that a single stacked dual-shaft micro lens array driver 16 is arranged by array. The single dual-shaft micro lens array driver 16 consists of three independent parts of a lower electrode structure 13, a middle electrode structure 14 and an upper electrode structure 15, wherein the three independent parts consist of the following structures of: a bent cantilever 1, a torsion cantilever 2, a torsion cantilever 3, a step lower electrode 4, a limiting plane 5 of an X-axis rotation direction base lens face, a lead wire anchor point 6 of the step lower electrode, the X-axis rotation direction base lens face 7, a limiting convex point 8 of the X-axis rotation direction base lens face, a supporting anchor point 9 of an Y-axis rotation direction base lens face, the Y-axis rotation direction base lens face 10, a limiting convex point 11 of the Y-axis rotation direction base lens face and an electrode lead wire anchor point 12 of the Y-axis rotation direction base lens face.
Description
Technical field
The present invention relates to a kind of two axle micro mirror array activation configurations and its application.More precisely, the present invention relates to one
Plant based on the stack two axle micro mirror driver of MEMS technology and its micro mirror array driver of composition, this micro mirror array drive simultaneously
Dynamic device can be applicable to wavelength-selective switches, belongs to optoelectronic communication devices field.
Background technology
The fast development of Internet and optical communication technique makes optical communication network that basic change to occur.Network expands rapidly
Exhibition is the extensive optical communication network including wide area network, Metropolitan Area Network (MAN) and access network.Optical transfer network transmits from Large Copacity broadband and changes
For providing service end to end to connect, and dynamic, quick wavelength assignment is realized using optical switched technology, final light networking
Full light ASON becomes Main Trends of The Development.Transparent wavelength exchanges, and without optical-electrical-optical (OEO) conversion, will break through " electricity
Sub- bottleneck ", greatly reduces the cost of ASON.Reconfigurable optical add/drop multiplexer (ROADM, Reconfigured
Optical Add-Drop Multiplexer) be core the most in intelligent optical network system functional module, its Main Function
It is that the wavelength resource in network system is dynamically configured, dispatches and manages.ROADM so far experienced three functions
Become increasingly complex, powerful developmental stage, define the ROADM of three generations.
First generation ROADM is made up of discrete wavelength division multiplexer, photoswitch and demultiplexer.Its volume is larger, is only suitable to
Select the less application scenarios of wavelength, as shown in Figure 1.
Second filial generation ROADM is made up of beam splitter, tunable filter, wavelength blocker and wave multiplexer.Its structure is simple, volume
Little, be capable of single wavelength up and down and wavelength band (multiple wavelength) upper and lower, but management is complex, is not suitable for
Looped network, and each optical port can only go up next wavelength.As shown in Figure 2.
Third generation ROADM is wavelength-selective switches (WSS, Wavelength Selective Switch).In principle by
Multiple wavelength division multiplexers, multiple photoswitch and a demultiplexer composition, it is possible to achieve any one wavelength (or multiple wavelength
Combination in any) it is routed to any one port (or multiple port) from any one port (or multiple port) in any order.
As shown in Figure 3.This makes ROADM system be provided with extremely strong flexible networking ability, and WSS itself also has upgrading propagation energy simultaneously
Power, is that networking brings greater flexibility.
The existing technical scheme of wavelength-selective switches mainly uses diffraction grating+microelectromechanical systems (MEMS) micro mirror battle array
Row, planar optical waveguide device (PLC)+MEMS micromirror array, diffraction grating+liquid crystal array and completely single chip integrated PLC skill
Art is realizing.Existing no matter any technology, is required for being provided simultaneously with multiple wavelength division multiplexers, multiple photoswitch and a solution
Multiplexer.In fact, with the constantly ripe of MEMS technology technology and development and application, based on diffraction grating+MEMS micromirror array
WSS be gradually applied in optical-fiber network, and fast-developing become the commercially most WSS product of consumption at present.And
WSS based on diffraction grating+MEMS micromirror array also experienced from an axle MEMS micromirror array to two axle MEMS micromirror array
Evolution.
Existing two axle MEMS micromirror array structures can be divided mainly into double frame construction and two axle Comb drives.Double frames
Two axle micro mirror arrays of frame structure, such as document ([1] Dennis S et al., " CrystallineSilicon Tilting
Mirrors for Optical Cross-Connect Switches”Journal of Microelectromechanical
System.Vol.12, NO.5,2003 [2] Gokde.D etal., " Design and fabrication of two-axis
Micromachined steelscanners " J.Mi cromech.Mi croeng.VOL.19,2009) shown in, it adopts one
The vertical double frame construction in individual interior outer rotary shaft direction constitutes the driver of two axle micro mirrors.In its Literature [1], scheme is using quiet
Electric drive, its minute surface dutycycle cannot be improved due to its structure.And document [2] is though adopt Electromagnetic Drive, device volume is big,
And the dutycycle of array structure minute surface is low.
And two axle Comb drives such as document ([3] Kim M et al., " High fill-factormicromirror
array using a self-aligned vertical comb drive actuatorwith two rotational
axes”J.Micromech.Microeng.19.2009；[4] TsaiJ et al., " Two-axis MEMS scanners
With radial vertical combdriveactuators-design, theoretical analysis, and
fabrication″J.Opt.A：Pure Appl.Opt.10.2008；[5] Tsai J et al., " Design,
Fabrication, and Characterization of a High Fill-Factor, Large Scan-Angle, Two-
AxisScanner Array Driven by a Leverage Mechanism″Journal
OfMicroelectromechanical system, Vol.15, NO.5,2006) wherein, document [3] adopts lower comb structure quiet
Electric drive mode although can be larger its minute surface dutycycle of raising, but the electric isolution between lower comb and lead are very multiple
Miscellaneous, result in the reduction of minute surface dutycycle simultaneously again.And for two axle Comb drives, typically adopt surface micromachined
Comb drive under fabrication techniques, in drive, minute surface carries out two axle rotations, shown in its structure such as document [4] and document [5].Should
Although kind of a structure can also realize very high minute surface dutycycle, due to using surface micromachined fabrication techniques, its minute surface
Of low quality, and minute surface size is restricted, complex manufacturing technology simultaneously, the requirement to processing technology is very high, and there is also one
Fixed limitation.Therefore in order to realize two axle micro mirror array drivers of high duty ratio, lower design and its system of device simultaneously
Make difficulty.
According to a kind of upper described, novel stack two axle micro mirror array driver based on MEMS technology of present invention plan proposition
To overcome the defect of prior art presence and to enumerate its application in wavelength-selective switches.
Content of the invention
It is an object of the invention to provide a kind of driver of the stack two axle micro mirror array based on MEMS technology, simultaneously
Using this stack two axle micro mirror array driver, make wavelength-selective switches device.
It is by single stack two that the present invention proposes a kind of stack two axle micro mirror array driver based on MEMS technology
The arrangement of axle micro mirror drive arrayization forms.Single stack two axle micro mirror driver is made up of the part of 3 standalone features,
I.e. bottom electrode, target and Top electrode three part are constituted.
Bottom electrode mechanism in single stack two axle micro mirror array driver is by step bottom electrode, X-axis rotation side
The lead anchor point of the spacing plane of basad minute surface and step bottom electrode is constituted, described single stack two axle micro mirror driver
Step lower electrode arrangement, its overall lower electrode arrangement driving as applied voltage, namely constitute stack two axle micro mirror and drive
First independent sector of dynamic device, spacing plane is connected with described step bottom electrode and bottom electrode lead anchor point respectively.
Intermediate electrode structure in single stack two axle micro mirror array driver is by described bending cantilever beam, X
The spacing salient point of rotational axis direction substrate minute surface and X-axis rotation direction substrate minute surface is constituted, and described single stack two axle is micro-
The micro-mirror structure of the X-axis rotation direction of mirror driver, its overall intermediate electrode structure driving as applying medium voltage, namely
Constitute second independent sector of stack two axle micro mirror driver.
Upper electrode arrangement in single stack two axle micro mirror array driver is to be hanged by left handed twist cantilever beam, right torsion
Mirror support anchor point in arm beam, the upper minute surface of Y-axis rotation direction, Y-axis rotation direction, the limit convex of minute surface in Y-axis rotation direction
In point, Y-axis rotation direction, the contact conductor anchor point of minute surface is constituted, and the Y-axis of described single stack two axle micro mirror driver turns
The micro-mirror structure in dynamic direction, its overall upper electrode arrangement driving as applied voltage, namely constitute the drive of stack two axle micro mirror
3rd independent sector of dynamic device.
Wherein in second independent sector, the micro-mirror structure of X-axis rotation direction can also be produced micro- using other
The non-single cantilever beam structure that minute surface X-direction is reversed.In the 3rd independent sector, the micro-mirror structure of Y-axis rotation direction can also
The mirror surface structure of Y-axis rotation can be produced using other, such as both sides are to support anchor point, middle is cantilever beam structure.
Using lower electrode arrangement and intermediate electrode structure, may be constructed the axle micro mirror driver knot in X-axis rotation direction
Structure.Prevented using the spacing salient point of X-axis rotation direction substrate minute surface and the spacing plane of X-axis rotation direction substrate minute surface simultaneously
One axle micro-mirror structure of X-axis rotation direction is destroyed due to the device architecture that adhesive effect leads to.
Upper electrode arrangement may be constructed the axle micro mirror activation configuration in Y-axis rotation direction.Wherein left handed twist cantilever beam,
Right torsional cantilever beam is arranged in mirror support anchor point both sides in Y-axis rotation direction, plays the upper minute surface supporting Y-axis rotation direction,
And produce the effect of elastic recovery torsional moment.Prevent Y-axis from rotating using the spacing salient point of minute surface in Y-axis rotation direction simultaneously
The one axle micro-mirror structure in direction is destroyed due to the device architecture that adhesive effect leads to.Mirror electrode lead anchor in Y-axis rotation direction
Point connects as the anchor leg of whole upper electrode arrangement, and does not affect minute surface in movable Y-axis rotation direction.
Using the bonding techniques in MEMS, lower electrode arrangement, intermediate electrode structure and upper electrode arrangement are being bonded in order
When together, wherein upper electrode arrangement is stacked above above intermediate electrode structure, and three structures cooperatively constitute single heap
Stacked two axle micro mirror driver is it is possible to form stack two axle micro mirror array driver after array arrangement.By controlling
Driving relationship between lower electrode arrangement and intermediate electrode structure is so that X-axis rotation direction substrate minute surface realizes X-direction
Rotate.And pass through to control the driving relationship between upper electrode arrangement and intermediate electrode structure, so that mirror in Y-axis rotation direction
Face is realized Y direction and is rotated.Both co- controllings just can realize the heap that X-axis aspect minute surface rotates and Y direction minute surface rotates
Stacked two axle micro mirror driver.
A kind of stack two axle micro mirror array driver based on MEMS technology proposed by the present invention is in wavelength-selective switches
In application, be by stack two axle micro mirror array driver, Wavelength division multiplexer/demultiplexer and corresponding light path design structure
Become.The DWDM optical signal of input carries out signal decomposition by Wavelength division multiplexer/demultiplexer after, simultaneously by light path by different passages
Optical signal project in different micromirror, different wavelength are controlled by the selection of stack two axle micro mirror array driver
Export and constitute wavelength-selective switches device.
The invention provides a kind of structure of novel stack two axle micro mirror array driver, it is not coaxial using two
To micro mirror driver be stacked using MEMS bonding techniques and collectively form two axle micro mirror array drivers.With respect to existing
Two axle micro mirror array technical schemes have structure simple, it is possible to achieve the high duty ratio of minute surface requires.This programme is using quiet simultaneously
Electric precision actuation, it is possible to achieve the precision of micromirror rotational angle is controlled, realizes two axial micromirror rotating requires.Simultaneously
Can realize making wavelength-selective switches using stack two axle micro mirror array driver proposed by the present invention.
Brief description
Fig. 1 is first generation ROADM technical scheme schematic diagram；
Fig. 2 is second filial generation ROADM technical scheme schematic diagram；
Fig. 3 is third generation ROADM technical scheme schematic diagram；
Fig. 4 (a) is proposed by the present invention using single stack two axle micro mirror driver composition stack two axle micro mirror battle array
Row driver schematic diagram；B () is single stack two axle micro mirror activation configuration assembling schematic diagram proposed by the present invention；
Fig. 5 is an axle micro mirror driver schematic diagram of x-axis rotation direction in single stack two axle micro mirror driver；
Fig. 6 is an axle micro mirror driver schematic diagram of Y-axis rotation direction in single stack two axle micro mirror driver；
Fig. 7 is single stack two axle micro mirror activation configuration schematic diagram proposed by the present invention；
Fig. 8 is single stack two axle micro mirror activation configuration details Fig. 1 proposed by the present invention；
Fig. 9 is single stack two axle micro mirror activation configuration details Fig. 2 proposed by the present invention；
Figure 10 is single stack two axle micro mirror activation configuration details Fig. 3 proposed by the present invention；
Figure 11 is the principle that utilization stack two axle micro mirror array driver proposed by the present invention constitutes wavelength-selective switches
Figure；
Figure 12 is the composition that utilization stack two axle micro mirror array driver proposed by the present invention constitutes wavelength-selective switches
Schematic diagram.
In figure：Bending cantilever beam 1, left handed twist cantilever beam 2, right torsional cantilever beam 3, step bottom electrode 4, X-axis rotation direction
The spacing plane 5 of substrate minute surface, the lead anchor point 6 of step bottom electrode, X-axis rotation direction substrate minute surface 7, X-axis rotation direction base
Minute surface 10 in mirror support anchor point 9 in the spacing salient point 8 of bottom minute surface, Y-axis rotation direction, Y-axis rotation direction, Y-axis rotation direction
The contact conductor anchor point 12 of minute surface, lower electrode arrangement 13, upper electrode arrangement in the spacing salient point 11 of upper minute surface, Y-axis rotation direction
14, upper electrode arrangement 15, single stack two axle micro mirror driver 16, stack two axle micro mirror array driver 17, wavelength-division is multiple
With/demultiplexer 18, light path 19.
Specific embodiment
Further illustrate the substantive distinguishing features of the present invention below in conjunction with the accompanying drawings and significantly improve.
Stack two axle micro mirror array driver based on MEMS technology proposed by the present invention is micro- by single stack two axle
Mirror driver 16 carries out array arrangement and obtains stack two axle micro mirror array driver 17, such as shown in Fig. 4 (a).Single stacking
Formula two axle micro mirror driver is by lower electrode arrangement 13, and intermediate electrode structure 14 and upper electrode arrangement 15 three bonding are constituted, such as
Shown in Fig. 4 (b).
It is by the spacing plane of step bottom electrode 4, X-axis rotation direction substrate minute surface in single two axle micro mirror array drivers
5 and the lead anchor point 6 of step bottom electrode constitute the step lower electrode arrangement of single stack two axle micro mirror driver, it is overall
The lower electrode arrangement 13 driving as applied voltage.
Spacing salient point 8 structure by bending cantilever beam 1, X-axis rotation direction substrate minute surface 7 and X-axis rotation direction substrate minute surface
Become the micro-mirror structure of the X-axis rotation direction of single stack two axle micro mirror driver, its entirety drives as applied voltage
Intermediate electrode structure 14.
It is bonded using lower electrode arrangement 13 and intermediate electrode structure 14, may be constructed the axle micro mirror in X-axis rotation direction
Activation configuration.As shown in Figure 5.
By mirror support anchor in minute surface 9 in torsional cantilever beam 2, torsional cantilever beam 3, Y-axis rotation direction, Y-axis rotation direction
Point 10, in the spacing salient point 11 of minute surface in Y-axis rotation direction, Y-axis rotation direction, the contact conductor anchor point 12 of minute surface constitutes list
The micro-mirror structure of the Y-axis rotation direction of individual stack two axle micro mirror driver, its overall Top electrode driving as applied voltage
Structure 15, as shown in Figure 6.
Its single stack two axle micro mirror driver be by：Bending cantilever beam 1, left handed twist cantilever beam 2, right torsional cantilever beam
3rd, step bottom electrode 4, the spacing plane 5 of X-axis rotation direction substrate minute surface, the lead anchor point 6 of step bottom electrode, X-axis rotation side
Mirror support anchor point 9 in basad minute surface 7, the spacing salient point 8 of X-axis rotation direction substrate minute surface, Y-axis rotation direction, Y-axis rotates
Minute surface 10 on direction, the contact conductor anchor point 12 of minute surface in the spacing salient point 11 of minute surface in Y-axis rotation direction, Y-axis rotation direction
Constitute, as shown in Figure 7.
Using the bonding techniques in MEMS by overall lower electrode arrangement 13, overall intermediate electrode structure 14 and overall Top electrode
Structure 15 is good in order and is combined, and wherein overall upper electrode arrangement 15 is stacked on overall intermediate electrode structure 14.Using whole
The lower electrode arrangement 13 of body and overall upper electrode arrangement 14, may be constructed the axle micro mirror driver knot in X-axis rotation direction
Structure.Overall upper electrode arrangement 15 may be constructed the axle micro mirror activation configuration in Y-axis rotation direction.Three structures are together altogether
Constitute single stack two axle micro mirror driver together, and carry out formation stack two axle micro mirror array driving after array arrangement
Device, its partial enlarged drawing such as Fig. 8, shown in Fig. 9, Figure 10.
The present invention proposes a kind of stack two axle micro mirror array driver based on MEMS technology and its selects to open in wavelength
The application in the Central Shanxi Plain is made up of stack two axle micro mirror array driver 16, Wavelength division multiplexer/demultiplexer 18 and light path 19.It is constituted
Schematic diagram is as shown in figure 11.Its specific embodiment can be as shown in figure 12：Optical signal input is through it as wavelength-division multiplex/demultiplex
After grating with device 18, then it is transmitted in micro mirror array driver 17 after the light path 19 that optical lens components are constituted focuses on,
By controlling the windup-degree of micro mirror, the incident optical signal of reflection exports estimated output channel after light path 19 and grating 18
Complete wavelength-selective switches function.
Claims (5)
1. a kind of stack two axle micro mirror array driver based on MEMS technology is it is characterised in that described stack two axle is micro-
Lens array driver is to be formed by the arrangement of single stack two axle micro mirror drive arrayization, and single stack two axle micro mirror drives
Device is to be bonded successively by the part of lower electrode arrangement, intermediate electrode structure and three standalone features of upper electrode arrangement to constitute；
Described lower electrode arrangement includes step bottom electrode, the spacing plane of X-axis rotation direction substrate minute surface and step bottom electrode
Lead anchor point, its overall lower electrode arrangement driving as applied voltage；Wherein, spacing plane respectively with step bottom electrode and
The lead anchor point of bottom electrode is connected；
Described intermediate electrode structure includes bending cantilever beam, X-axis rotation direction substrate minute surface and X-axis rotation direction substrate minute surface
Spacing salient point, its overall intermediate electrode structure driving as applied voltage；
Described upper electrode arrangement includes left handed twist cantilever beam, right torsional cantilever beam, the upper minute surface of Y-axis rotation direction, Y-axis rotation
On direction minute surface support anchor point, in the spacing salient point of minute surface and Y-axis rotation direction in Y-axis rotation direction minute surface contact conductor
Anchor point, its overall Top electrode driving as applied voltage；Wherein left handed twist cantilever beam and right torsional cantilever beam are arranged in Y-axis and turn
The both sides of mirror support anchor point on dynamic direction, support Y-axis rotation direction upper minute surface, simultaneously in Y-axis rotation direction minute surface limit
Position salient point prevents device structural damage, and in Y-axis rotation direction, the contact conductor anchor point of minute surface is as whole upper electrode arrangement
Anchor leg connects.
2. the driver as described in claim 1 is it is characterised in that constituted using lower electrode arrangement and intermediate electrode structure bonding
An axle micro mirror driving structure in X-axis rotation direction；Upper electrode arrangement is as an axle micro mirror driving structure of Y-axis rotation direction.
3. the driver as described in claim 1 it is characterised in that using the bonding techniques in MEMS by lower electrode arrangement, in
Between electrode structure and upper electrode arrangement when being bonded together in order, upper electrode arrangement is stacked above above intermediate electrode structure,
Three structures cooperatively constitute single stack two axle micro mirror driver, and form stack two axle after array arrangement
Micro mirror array driver；By controlling the driving relationship between lower electrode arrangement and intermediate electrode structure so that X-axis rotates
Direction substrate minute surface is realized X-direction and is rotated；And pass through to control the driving relationship between upper electrode arrangement and intermediate electrode structure,
Make minute surface in Y-axis rotation direction realize Y direction to rotate；Both co- controllings just can be realized X-axis aspect minute surface and rotate and Y
The stack two axle micro mirror driver that direction of principal axis minute surface rotates.
4. the driver applications as any one of claim 1-3 are it is characterised in that by stacking in wavelength-selective switches
Formula two axle micro mirror array driver, Wavelength division multiplexer/demultiplexer and corresponding light path design are constituted.
5. the application as described in claim 4 is it is characterised in that optical signal input is through the light as Wavelength division multiplexer/demultiplexer
After grid, then project in stack two axle micro mirror array driver after the light path that optical lens components are constituted focuses on, pass through
Control the windup-degree of micro mirror, the incident optical signal of reflection exports estimated output channel after light path and grating and completes wavelength
Selecting switch function.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110003994.9A CN102129125B (en) | 2011-01-10 | 2011-01-10 | Stacked dual-shaft micro lens array driver based on MEMS (Micro Electronic Mechanical System) technology and use thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110003994.9A CN102129125B (en) | 2011-01-10 | 2011-01-10 | Stacked dual-shaft micro lens array driver based on MEMS (Micro Electronic Mechanical System) technology and use thereof |
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| CN102129125A CN102129125A (en) | 2011-07-20 |
| CN102129125B true CN102129125B (en) | 2017-02-08 |
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Families Citing this family (2)
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| CN103196555B (en) * | 2013-03-14 | 2015-12-09 | 中国科学院安徽光学精密机械研究所 | Be applied to the spectrum programmable light-source system of ultraphotic spectrum calibration |
| CN114690400B (en) * | 2020-12-29 | 2023-05-02 | 极米科技股份有限公司 | Vibrating mirror driven by electrostatic force |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2649568Y (en) * | 2003-09-12 | 2004-10-20 | 清华大学 | MEMS photoswitch |
| CN1643430A (en) * | 2002-03-19 | 2005-07-20 | 美莎诺普有限公司 | Combination micromachine and optical device array |
| CN1677158A (en) * | 2004-03-31 | 2005-10-05 | 富士通株式会社 | Micromirror element and optical switch |
| JP2008276158A (en) * | 2006-08-29 | 2008-11-13 | Hitachi Metals Ltd | Substrate component and optical component |
| JP2010134027A (en) * | 2008-12-02 | 2010-06-17 | Olympus Corp | Wavelength selection switch |
-
2011
- 2011-01-10 CN CN201110003994.9A patent/CN102129125B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1643430A (en) * | 2002-03-19 | 2005-07-20 | 美莎诺普有限公司 | Combination micromachine and optical device array |
| CN2649568Y (en) * | 2003-09-12 | 2004-10-20 | 清华大学 | MEMS photoswitch |
| CN1677158A (en) * | 2004-03-31 | 2005-10-05 | 富士通株式会社 | Micromirror element and optical switch |
| JP2008276158A (en) * | 2006-08-29 | 2008-11-13 | Hitachi Metals Ltd | Substrate component and optical component |
| JP2010134027A (en) * | 2008-12-02 | 2010-06-17 | Olympus Corp | Wavelength selection switch |
Non-Patent Citations (1)
| Title |
|---|
| 《基于MEMS技术的波长选择开关研究》;宛政文;《中国优秀硕士学位论文全文数据库》;20120425;全文 * |
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