CN101561556A - Fully flexible MEMS optical switch - Google Patents
Fully flexible MEMS optical switch Download PDFInfo
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- CN101561556A CN101561556A CNA2009100227067A CN200910022706A CN101561556A CN 101561556 A CN101561556 A CN 101561556A CN A2009100227067 A CNA2009100227067 A CN A2009100227067A CN 200910022706 A CN200910022706 A CN 200910022706A CN 101561556 A CN101561556 A CN 101561556A
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Abstract
The invention relates to an optical switch, in particular to a fully flexible MEMS optical switch, belonging to the technical field of optical fiber communication. The invention is characterized by comprising a flexible bi-stable mechanism (1) and a micro reflector (3), a shuttle (5) of the flexible bi-stable mechanism (1) is connected with a flexible bridge (2), the micro reflector (3) is fixed with the flexible bridge (2) by a connecting block (8), the first stable state position and the second stable state position of the flexible bi-stable mechanism (1) respectively lead the micro reflector (3) to be in a light passing state and a light reflecting state. The invention provides an MEMS switch with simple structure, low manufacture cost, good stability, high repeatability precision, no frictional wearing and strong interference rejection capability.
Description
Technical field
The invention belongs to technical field of optical fiber communication, relate to a kind of photoswitch, particularly a kind of fully flexible MEMS optical switch.
Background technology
Since optical fiber was introduced into communication network, it had made important contribution for the development of communication.Because optical fiber has huge bandwidth, as outstanding transmission medium, Fibre Optical Communication Technology has developed into a new height.Simultaneously, the multiplex technique of light, more and more be subject to people's attention and be widely used as wavelength-division multiplex (WDM), Time Division Multiplexing, space division multiplexing (SDM), but in existing communication net based on these technology, each node of network will be finished the conversion of light/electricity, electricity/light, be subjected to the wherein characteristic restriction of electron device, produced " electronic bottleneck " phenomenon in the communication network.In order to address this problem, people have proposed the notion of all optical network (AON), it is meant signal transmission and the whole lightwave technologies that adopt of exchange between user and the user, be that the transmission course of data from the source node to the destination node all carried out in the light territory, that its exchange at each network node is then used is highly reliable, the optical cross-connection equipment (OXC) of high capacity and high flexible.The correlation technique of all-optical network mainly comprises light exchange/optical routing (full light exchange), optical cross connect, full optical relay and Optical Add Drop Multiplexer etc.Since the nineties, optical cross-connection equipment and the Optical Add/Drop Multiplexer that is used for the optical transport network node competitively studied and manufactured experimently in each big telecommunications manufacturer of the world, and key is to develop advanced optical device, and photoswitch is exactly wherein a kind of core devices of realizing the light exchange.
Mems optical switch is the micromechanics mechanism of making through micro fabrication with semiconductor material (as Si etc.).Its ultimate principle is exactly that effect by power or other type of drive makes and can movable micromirror rotate, thereby changes the direction of propagation of input light, realizes the switch of light signal.
The typical MEMS light shutter device is made up of the small mirror array of in check two dimension, and is installed on the mechanical pedestal.Collimated light beam and rotation micro mirror constitute the multiport photoswitch.By the MEMS manufacturing technology, little hinge is hinged on micromirror on the silicon substrate, there is push rod on the micro mirror both sides, by driving push rod micro mirror is rotated, when micro mirror was in horizontality, micro mirror did not influence the transmission of collimated light beam, after micro mirror suitably rotates an angle, micro mirror will be got involved light path, with the output port output of collimated light beam reflection to correspondence.Because mems optical switch is to rotate by minute surface to realize exchange, so any mechanical friction, wearing and tearing or vibrations all may damage photoswitch.And the driving force that " opening " state of common mems optical switch need continue is kept, if driving force has fluctuation, the anglec of rotation that can influence micro-reflector finally influences the stable of the transmission of light, link.
Summary of the invention
The purpose of this invention is to provide a kind of simple in structure, cost is low, good stability, repeatable accuracy height, no rubbing wear, a kind of fully flexible MEMS optical switch that antijamming capability is strong.
A kind of fully flexible MEMS optical switch, it is characterized in that: comprise flexible bistable mechanism and micro-reflector, the shuttle of flexible bistable mechanism is connected with flexible bridge, micro-reflector is fixed by contiguous block and flexible bridge, and first stable position of flexible bistable mechanism and second stable position make micro-reflector be in light by reflecting two states with light respectively.
Described flexible bridge is made of two sections flexible beams of the nearly end and the one section end far away flexible beam, and flexible beam two ends, the end far away are connected with two sections flexible beams of the nearly end by contiguous block; Flexible beam of the nearly end of left end connects the shuttle of flexible bistable mechanism, and the flexible beam of the nearly end of left end or right-hand member is connected with micro-reflector with the contiguous block between the end flexible beam far away.
Flexible beam right-hand member of the nearly end, the both sides of described flexible bistable mechanism is fixed on the substrate by the anchor district.
Described flexible bistable mechanism is an orthoscopic bistable state compliant mechanism.
Described flexible bridge can be by the length that changes flexible beam of the nearly end and the end far away flexible beam and the anglec of rotation that flexibility changes micro-reflector.
The course of work of the present invention and advantage are: owing in the flexible bistable mechanism work space two steady state (SS)s are arranged, these two steady state (SS)s reach minimizing two poses (comprising the processing pose) corresponding to the elastic potential energy of in-house storage, two poses make the micro-reflector of connection also can be in two poses, two poses of micro-reflector make light input and light output be in " opening " and " pass " two states, and this structure has simply, cost is low, switch accurately, energy consumption is low, no rubbing wear, antijamming capability is strong, and to advantage such as the MEMS processing technology is less demanding.
Description of drawings
The invention will be further described below in conjunction with the embodiment accompanying drawing:
Fig. 1 is an embodiment of the invention structural representation, is in first steady state (SS);
Fig. 2 is the second steady state (SS) synoptic diagram.
Among the figure, 1, flexible bistable mechanism; 2, flexible bridge; 3, micro-reflector; 4, anchor district; 5, shuttle; 6, nearly end flexible beam; 7, far away end flexible beam; 8, contiguous block.
Embodiment
As shown in Figure 1, comprise flexible bistable mechanism 1 and micro-reflector 3, the shuttle 5 of flexible bistable mechanism 1 is connected with flexible bridge 2, it is fixing with flexible bridge 2 that micro-reflector 3 passes through contiguous block 8, and first stable position of flexible bistable mechanism 1 and second stable position make micro-reflector 3 be in light by reflecting two states with light respectively.Flexible bridge 2 is made of two sections flexible beams of the nearly end 6 and the one section end far away flexible beam 7, flexible beam of the nearly end 6 is generated by the mechanical layer near substrate, the end far away flexible beam 7 is generated by the mechanical layer away from substrate, and flexible beam 7 two ends, the end far away are connected with two sections flexible beams of the nearly end 6 by contiguous block 8; Flexible beam of the nearly end of left end 6 connects the shuttle 5 of flexible bistable mechanism 1, and flexible beam 6 right-hand members of the nearly end of right-hand member are in anchor district 4, and flexible beam of the nearly end of right-hand member 6 is connected with micro-reflector 3 with the end far away flexible beam 7 contiguous blocks 8.Flexible bridge 2 has when the flexible bridge direction is parallel to the power of substrate or displacement input and can produce the moment of couple at the contiguous block place at left end, makes the bending of flexible bridge center section upwarp, thereby changes the pose of micro-reflector 3.4 the anchor districts 4 of flexible bistable mechanism 1 and the anchor district 4 of flexible beam 6 right-hand members of the nearly end of right-hand member are fixed on the substrate.Flexible bistable mechanism 1 is an orthoscopic bistable state compliant mechanism.
Duty of the present invention can illustrate together in conjunction with Fig. 1 and Fig. 2.
Fig. 1 is that system is in first stable position under the processing pose, and left-half is a flexible bistable mechanism 1, and wherein two ends are fixed on the substrate by anchor district 4 up and down, and middle shuttle 5 can move along straight line; The right center section is a flexible bridge 2, is made of three sections flexible beams, and wherein both sides are flexible beams of the nearly end 6, and the centre is a end far away flexible beam 7, connects with contiguous block 8 between the flexible beam, and the right-hand member of flexible bridge 2 is anchor districts 4, is fixed on the substrate; Micro-reflector 3 is fixed on the contiguous block 8 of flexible bridge 2.
Flexible bistable mechanism 1 among the figure is because in United States Patent (USP) open (United States Patent (USP) 7075209B2), so the present invention does not do too much description to this.
When system was in processing pose (see figure 1), incident light was from the top process of micro-reflector 3; In shuttle 5 left ends of flexible bistable mechanism 1 application of force to the right, can make flexible bistable mechanism 1 jump to another stable position and (see Fig. 2, this position is a local minizing point of the elastic potential energy of storing in the mechanism), need not to apply confining force mechanism and just can remain on this settling position; At this moment flexible bridge 2 bendings upwarp, and the initial position that micro-reflector 3 leaves among Fig. 1 has rotated certain angle, and incident ray is reflected away, and has changed direction of light.
Can know clearly that from above-mentioned flexible bistable mechanism 1 is the device of deformation energy storage, can be implemented in two locational stable equilibriums by its deformation energy storage micro-reflector 3.Flexible bistable mechanism 1 can adopt the bistable mechanism of any one exportable straight-line displacement, i.e. the motion of its shuttle 5 is rectilinear motions.
When the steady state (SS) of Fig. 2, shuttle 5 is applied left power, can make the photoswitch redirect return the stable position of Fig. 1, flexible bridge 2 is got back to not deformation state, and micro-reflector 3 is got back to initial position shown in Figure 1 again.
On the contiguous block 8 on the right of micro-reflector 3 can be fixed in the flexible bridge (being fixed form shown in Figure 1), also can be fixed on the contiguous block 8 on the flexible bridge left side.
By shuttle 5 is applied acting force, push flexible bistable mechanism 1 to its second stable state pose from the processing pose, flexible bridge contiguous block place between flexible beam of the nearly end and the end far away flexible beam after being subjected to the acting force of shuttle produces the moment of couple, make the bending of flexible bridge center section upwarp, when shuttle jumps to the second stable state pose (this position is the minimum point of stored elastic potential energy in the mechanism) from the processing pose, flexible bridge arches upward and the micro-reflector that drives on it rotates a certain angle, thereby realizes that light path is switched accurately.Utilize the MEMS manufacturing process, can process minute sized fully flexible MEMS optical switch, therefore can integrated a plurality of such photoswitches on single chip, realize array of photoswitch.Parts that are not described in detail among the present invention and element are known or buy on the electronic market, Xi'an.
Claims (5)
1, a kind of fully flexible MEMS optical switch, it is characterized in that: comprise flexible bistable mechanism (1) and micro-reflector (3), the shuttle (5) of flexible bistable mechanism (1) is connected with flexible bridge (2), it is fixing with flexible bridge (2) that micro-reflector (3) passes through contiguous block (8), and first stable position of flexible bistable mechanism (1) and second stable position make micro-reflector (3) be in light by reflecting two states with light respectively.
2, a kind of fully flexible MEMS optical switch according to claim 1, it is characterized in that: described flexible bridge (2) is made of two sections flexible beams of the nearly end (6) and the one section end far away flexible beam (7), and end flexible beam (7) two ends far away are connected with two sections flexible beams of the nearly end (6) by contiguous block (8); Flexible beam of the nearly end of left end (6) connects the shuttle (5) of flexible bistable mechanism (1), and the flexible beam of the nearly end (6) of left end or right-hand member is connected with micro-reflector (3) with the contiguous block (8) between the end flexible beam (7) far away.
3, a kind of fully flexible MEMS optical switch according to claim 1 is characterized in that: flexible beam of the nearly end, both sides (6) right-hand member of described flexible bistable mechanism (1) is fixed on the substrate by anchor district (4).
4, a kind of fully flexible MEMS optical switch according to claim 1 is characterized in that: described flexible bistable mechanism (1) is an orthoscopic bistable state compliant mechanism.
5, a kind of fully flexible MEMS optical switch according to claim 1 is characterized in that: described flexible bridge (2) can be by changing flexible beam of the nearly end (6) and the length of end flexible beam (7) far away and the anglec of rotation that flexibility changes micro-reflector (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100227067A CN101561556B (en) | 2009-05-26 | 2009-05-26 | Fully flexible MEMS optical switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100227067A CN101561556B (en) | 2009-05-26 | 2009-05-26 | Fully flexible MEMS optical switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101561556A true CN101561556A (en) | 2009-10-21 |
| CN101561556B CN101561556B (en) | 2011-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009100227067A Expired - Fee Related CN101561556B (en) | 2009-05-26 | 2009-05-26 | Fully flexible MEMS optical switch |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101799086B (en) * | 2010-01-08 | 2011-09-07 | 西安电子科技大学 | Multistable mechanism design method based on single flexible bistable mechanism |
| WO2012089054A1 (en) * | 2010-12-27 | 2012-07-05 | 上海丽恒光微电子科技有限公司 | Optical switch and mems display |
-
2009
- 2009-05-26 CN CN2009100227067A patent/CN101561556B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101799086B (en) * | 2010-01-08 | 2011-09-07 | 西安电子科技大学 | Multistable mechanism design method based on single flexible bistable mechanism |
| WO2012089054A1 (en) * | 2010-12-27 | 2012-07-05 | 上海丽恒光微电子科技有限公司 | Optical switch and mems display |
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| Publication number | Publication date |
|---|---|
| CN101561556B (en) | 2011-04-06 |
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Granted publication date: 20110406 Termination date: 20140526 |