CN103033885A - Straight beam buckling electrostatic type micro mechanical optical switch - Google Patents
Straight beam buckling electrostatic type micro mechanical optical switch Download PDFInfo
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- CN103033885A CN103033885A CN2013100133723A CN201310013372A CN103033885A CN 103033885 A CN103033885 A CN 103033885A CN 2013100133723 A CN2013100133723 A CN 2013100133723A CN 201310013372 A CN201310013372 A CN 201310013372A CN 103033885 A CN103033885 A CN 103033885A
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Abstract
The invention discloses a straight beam buckling electrostatic type micro mechanical optical switch which mainly solves the problem that the existing switch is high in driving voltage, long in switching time, high in energy consumption and the like. The straight beam buckling electrostatic type micro mechanical optical switch comprises a micro beam (307) with a diamond-shaped structure in the middle position, a fixed base (304), an outer framework (310), driving electrode pairs (305 and 306), adjusting electrode pairs (302 and 303), a micro reflecting mirror (314) and optical fibers (313), wherein the micro beam (307) is connected with the fixed base (304) together, and a span supporting structure (309) is adopted at the junction of the micro beam (307) and the fixed base (304); the fixed base (304) is fixed with the outer framework (310) through a wedge-shaped extrusion structure (301), and guide mechanisms (308) are arranged at the two ends of the fixed base (304); the adjusting electrode pairs (302 and 303) adopt comb tooth-shaped structures and are symmetrical to each other up and down; a guide groove (312) is formed in the middle position of the outer framework (310); the optical fibers (131) are perpendicularly placed in a crossed manner; and the micro reflecting mirror (314) is fixed at the front end of a micro mirror bracket (311). The straight beam buckling electrostatic type micro mechanical optical switch has the advantages of low driving voltage, short switching time, low energy consumption and expandable switch array and can be used for key optical devices of optical communication network equipment.
Description
Technical field
The invention belongs to the optoelectronic device technical field, particularly a kind of electrostatic micro-mechanical-optical switch can be used for realizing that the light path in the optical communication is selected, the cross-connect of many fibre circuits, light path and the fault fibre circuit is carried out bypass up and down.
Technical background
The electrostatic micro-mechanical-optical switch of straight beam flexing is to be processed by the MEMS technology.Theoretical based on little beam bending with combined axial and lateral load, break through the traditional concept of the unidirectional loading of micro-mechanical-optical switch, utilize elastic energy release and stiffness variation and the kick characteristic that show of little beam in bending deformation, change elastic force into driving force, realize the purpose that the micro-mechanical-optical switch driving voltage is low, switching time is short, energy consumption is little.It has simple in structure, volume is little, lightweight, easy of integration, antijamming capability is strong, energy consumption is low, the characteristics such as can expand without polarization, switch arrays, therefore in the fields such as optical communication network equipment, has tight demand.
Inst. No.13 of Electronics, Ministry of Information Industry was at [electrostatic micromechanical whole light switch in 2003, Xu Yongqing, Yang Yongjun, Zhao Yanjun, Liang Chunguang, Inst. No.13 of Electronics, Ministry of Information Industry, State Intellectual Property Office of the People's Republic of China, the ZL patent No.: in June, 02268460.3,2003, G02B6/35, H04J 14/02-H04 B 10/12] in a kind of electrostatic micromechanical whole light switch has been proposed, as shown in Figure 1, wherein Fig. 1 (a) is the structural representation of this micro-mechanical-optical switch, and Fig. 1 (b) is this micro-mechanical-optical switch A-A direction sectional structure synoptic diagram.Decide tooth 103 each tooth one end and decide tooth drive electrode 102 and be connected, moving tooth 104 each tooth one end are connected with folding overarm 106, folding overarm 106 1 ends are connected with moving tooth drive electrode 105, decide respectively to be coated with layer of metal 109 on tooth drive electrode 102 and the moving tooth drive electrode 105, triangle balance beam 107 is connected with folding overarm 106, intermediate beam 108 cross-under rear end in triangle balance beam 107 is connected with folding overarm 106, and the other end is connected with silicon micromirror 110.Vertical channel 112 on the heavily boron layer 114 of n type single crystal silicon substrate 101 peripheric surfaces is processed into the structure that mutually intersects vertically, optical fiber 111 is seated in vertical channel 112, the V-type groove 113, make 111 one-tenth of the optical fiber structure that mutually intersects vertically, at an optical fiber 111 interior storing silicon micromirrors 110 that intersect vertically.Utilize the photoresist layer 115 that is coated with on the heavily boron layer 114 to make each partial model by lithography.Deciding to load DC voltage between tooth drive electrode 102 and the moving tooth drive electrode 105, this moment respectively with decide that tooth drive electrode 102 is connected with moving tooth drive electrode 105 decide tooth 103, produce electrostatic force between the moving tooth 104, folding overarm 106 is bent, thereby driving silicon micromirror 110 moves in the direction that is parallel to n type single crystal silicon substrate 101, silicon micromirror 110 plays a baffle plate effect, when silicon micromirror 110 is pulled open, the optical fiber direct projection is passed through, corresponding photoswitch is for opening state, when silicon micromirror 110 resets, optical fiber is reflected, and corresponding photoswitch is off status, thereby realizes the on-off action of light.
There is following problem in this photoswitch:
1) adopt the little beam of unidirectional load driver, the driving voltage that needs is too high, and energy consumption is excessive.
2) the structure relative complex is wayward.
Mechanical and the physical study place [flexible cantilever micro-mechanical-optical switch of Chinese Academy of Sciences's Changchun optical precision instrument in 2008, Liang Jingqiu, Li Wei, Liang Zhongzhu, Marvin's is given birth to, Sun Degui, Changchun Institute of Optics, Fine Mechanics and Physics, CAS, State Intellectual Property Office of the People's Republic of China, number of patent application: in April, 200710056340.6,2008, G02B26/08, H01F 5/00-H01F 41/04] in a kind of flexible cantilever micro-mechanical-optical switch has been proposed, as shown in Figure 2, wherein Fig. 2 (a) is the structural representation of this micro-mechanical-optical switch under state of nature, and Fig. 2 (b) is the exploded view of this micro-mechanical-optical switch, Fig. 2 (c) is the constitutional diagram of turning back of the light beam of this micro-mechanical-optical switch, and Fig. 2 (d) is the light beam pass-through state figure of this micro-mechanical-optical switch.Switch stiff end 202 is same material with cantilever 203, and the two is connected as a single entity, and is positioned at substrate 201 upper surfaces.The lower surface of switch stiff end 202 contacts with substrate 201 upper surfaces and is bonding, coil 204 is positioned at upper surface, coil first lead-in wire 205 of cantilever 203 and the upper surface that coil the second lead-in wire 210 is positioned at cantilever 203, switch stiff end 202, and bonding with it, first lead-in wire pressure point 206, second lead-in wire pressure point 211 are positioned at switch stiff end 202 upper surfaces, with it contact and bonding.Permanent magnet 207 be positioned at coil 204 under, in the pit of substrate 201 lower surfaces, and contact fixing with substrate 201.Prismatic micro-reflector 208 is fixed in the top of coil 204.Photoswitch is when state of nature, and cantilever 203 lower surfaces contact with substrate 201 upper surfaces.When coil 204 adds a certain directional current, electromagnetic attraction remains on cantilever 203 position of Fig. 2 (c), it is state of nature, arrive optical element 209 after the one side reflection of incident beam R through prismatic micro-reflector 208, and the light beam that returns from optical element 209 outgoing after the another side reflection of prismatic micro-reflector 208, be folded light beam F, this moment, photoswitch was in off-state; When coil 204 adds current in opposite, electromagnetic repulsion force pushes away substrate 201 with cantilever 203 away from an end of switch stiff end 202, cantilever 203 is upturned, drive lip cylindricality micro-reflector 208 leaves substrate 201 upper surfaces one segment distance, is Fig. 2 (d) state, and this moment, incident beam R directly passed through, do not deflect, namely without optical element 209, do not produce folded light beam F, this moment, photoswitch was in conducting state.Although this structure can satisfy twice requirement of turning back of light path, there are the following problems again for itself:
1) adopt the Electromagnetic Drive method can bring electromagnetic interference problem, on stability and the certain impact of reliability generation of device;
2) state of switch keeps passing into lasting electric current and keeps, and the power consumption of device is larger, and coil can not effectively distribute at the inner heat that produces of semi-girder, has shortened the serviceable life of device.
Summary of the invention
The object of the invention is to overcome the deficiency of above-mentioned prior art, provide a kind of straight beam flexing electrostatic micro-mechanical-optical switch, to reduce driving voltage, shorten switching time, reduce energy consumption.
For achieving the above object, micro-mechanical-optical switch of the present invention comprises: the drive electrode that little beam 307, fixed pedestal 304, outer frame 310, wedge shape extrusion structure 301, quiet tooth drive electrode and moving tooth drive electrode consist of to 305 and 306, quiet tooth regulates electrode and moving tooth is regulated adjusting electrode pair 302 and 303, micro-reflector 314 and the optical fiber 313 that electrode consists of, it is characterized in that:
Fixed pedestal 304 is connected as a single entity with little beam 307, and adopts span supporting construction 309 at both link position places, is used for improving the suffered axial load of little beam 307;
Fixed pedestal 304 is fixing by wedge shape extrusion structure 301 with outer frame 310, is used for improving the suffered axial load of little beam 307;
Fixed pedestal 304 is provided with guiding mechanism 308 with the two ends of outer frame 310, is used for limiting swinging of little beam 307;
Regulate electrode pair 302 and 303 and adopt the comb teeth-shaped structure, be fixed on little beam 307, and symmetrical up and down;
The centre position of outer frame 310 is provided with gathering sill 312, is used for moving up and down of restriction micro mirror support 311.
As preferably, diamond structure is adopted in the centre position of described little beam 307, be used for increasing horizontal static load lifting surface area, reduce the required driving voltage of little beam 307.
As preferably, described fixed base 304, outer frame 310, little beam 307 and micro mirror support 311 all adopt silicon materials to make.
As preferably, the left-hand face of the right side of described fixed pedestal 304 and little beam 307 all deposits golden membranous layer, and this two golden membranous layer consists of drive electrode to 305 and 306, and links to each other with external drive circuit by the pressure welding mode.
As preferably, described adjusting electrode pair 302 links to each other with outside regulating circuit by the pressure welding mode with 303, and synchro control, guarantees that little beam 307 keeps " little curved balance " states.
As preferably, described little beam 307 adopts the bending with combined axial and lateral load distressed structures, drives to realize the large stroke of low pressure.
As preferably, described optical fiber 313 is and intersects vertical the placement.
As preferably, described micro-reflector 314 is fixed in the front end of micro mirror support 311, and micro-reflector 314 and optical fiber 313 are in the same plane.
The present invention has following advantage:
1. the present invention has increased the lifting surface area of horizontal static load, thereby has increased drive displacement because diamond structure is adopted in the Wei Liang centre position, has reduced driving voltage.
2. the present invention has improved the suffered axial load of little beam because fixed pedestal and Wei Liang junction employing span supporting construction and fixed pedestal and outer frame are fixed by the wedge shape extrusion structure, thereby has reduced driving voltage, shortened the switching response time.
3. the present invention has limited swinging of little beam owing to be provided with guiding mechanism at fixed pedestal and outer frame two ends, thereby has guaranteed that little beam bending deformation is symmetrical.
4. the present invention adopts the comb teeth-shaped structure owing to regulate electrode pair, can regulate the voltage that loads on the electrode pair by adjusting, and makes little beam be in " little curved balance " state, thereby has reduced driving voltage, has improved the reliability of little beam bending deformation.
5. the present invention breaks through the traditional concept of unidirectional loading, thereby has reduced driving voltage and deformation time owing to adopt little beam bending with combined axial and lateral load bending deformation structure, realizes the low voltage drive of micro-mechanical-optical switch, large stroke and high switching speed.
6. the electrostatic micro-mechanical-optical switch of straight beam flexing of the present invention is with respect to existing other photoswitch, number of components is few, and all adopt silicon materials to make, have characteristics simple in structure, that energy consumption is low, switch arrays can be expanded, be easy to process, and being applied in the optical communication network with parameters such as the form of signal of communication, wavelength, agreement, modulation system, polarization, transmission directions all irrelevantly, is the desired light switchgear in the optical communication network.
Description of drawings
Fig. 1 is existing electrostatic micromechanical whole light switch structural drawing;
Fig. 2 is existing flexible cantilever micro-mechanical-optical switch structural drawing;
Fig. 3 is the electrostatic micro-mechanical-optical switch "On" state of straight beam flexing of the present invention structural front view;
Fig. 4 is the electrostatic micro-mechanical-optical switch "Off" state of straight beam flexing of the present invention structural front view;
Fig. 5 is the side view of little beam in the electrostatic micro-mechanical-optical switch of straight beam flexing of the present invention.
Embodiment
With reference to Fig. 3, the electrostatic micro-mechanical-optical switch of straight beam flexing of the present invention mainly by little beam 307, fixed pedestal 304, outer frame 310, guiding mechanism 308, drive electrode to 305,306, regulating electrode pair 302,303, gathering sill 312, micro mirror support 311, micro-reflector 314 and optical fiber 313 forms.Wherein optical fiber 313 is square crossing placement formation light path, and little beam 307 centre positions are diamond structure, and guiding mechanism 308 is provided with two altogether, and it lays respectively at the upper and lower end of fixed pedestal 304, and micro mirror support 311 is the square cylinder structure.
Described little beam 307, itself and fixed pedestal 304 are connected as a single entity, and adopt span supporting construction 309 at both link position places, are used for improving the suffered axial load of little beam 307, to reduce driving voltage, shorten the switching response time.Little beam 307 is fixing by wedge shape extrusion structure 301 with outer frame 310, to improve the suffered axial load of little beam 307, reduce the difficulty of processing of little beam 307 and to prevent the generation of little beam 307 reversal deformations.
Described guiding mechanism 308, it is produced by fixed base 304 and outer frame 310 bondings, is used for limiting swinging of little beam 307, guarantees that simultaneously little beam 307 bending deformations are symmetrical, avoids the Second Buckling distortion to occur.
Described adjusting electrode pair 302,303, it adopts the comb teeth-shaped structure, and symmetrical up and down.This regulates electrode pair 302,303 link to each other with outside regulating circuit by the pressure welding mode, the voltage that utilizes outside regulating circuit to load carries out synchro control to little beam 307 two ends, little beam 307 is reached keep " little curved balance " state after Euler closes on load, avoid simultaneously little beam 307 to be in for a long time loaded state, reduce the risk of breakage of little beam 307, improve the reliability of the electrostatic micro-mechanical-optical switch of straight beam flexing.
Described fixed drive electrode pair 305,306, its golden membranous layer by fixed base right side, 304 middle part and little beam 307 left-hand face deposition consists of, and this drive electrode links to each other with external drive circuit by the pressure welding mode to 305,306.Utilize external drive circuit to drive electrode the driving voltage that loads on 305,306 to be produced horizontal electrostatic force, under the effect of horizontal electrostatic force, make little beam 307 that bending deformations occur, thereby the micro-reflector 314 that drives micro mirror support 311 front ends move in the light path that is made of optical fiber 313.
Described gathering sill 312, it in outer frame 310 centre positions, is used for moving up and down of restriction micro mirror support 311 by laser drilling processing, thereby guarantees that micro-reflector 314 levels enter and exit optical,
The present invention is based on straight beam bending with combined axial and lateral load principle and micro mirror principle of reflection, break through the traditional concept of the unidirectional loading of present micro-mechanical-optical switch, energy release and stiffness variation when utilizing little beam flexing combined deformation shows " kick " characteristic, the axial potential energy of storage is discharged fast, change elastic force into driving force.When little beam 307 reaches Euler critical load, keep " little curved balance " state, this moment again to drive electrode to 305, load driver voltage is to produce horizontal electrostatic force on 306, impel little beam 307 that the flexing large deformation occurs, little like this beam 307 will drive the micro mirror support 311 that is fixed therein a position and move horizontally, thereby control micro-reflector 314 enters and exit optical, light path is switched with the reflection two states straight-through, to realize conducting and the break function of the electrostatic micro-mechanical-optical switch of straight beam flexing, it is low to reach straight beam flexing micro-mechanical-optical switch driving voltage, switching time is short, the purpose of design that energy consumption is little.
Principle of work of the present invention is as follows:
When photoswitch is in out state, regulate electrode pair 302,303 with drive electrode to 305,306 equal on-load voltages not, little beam 307 is in linear state, the little beam 307 that is connected as a single entity with fixed pedestal 304 is subject to the effect of axial compression load, this moment, little beam 307 axial loads did not reach Euler critical load, and because upper lower guide mechanism 308 is spacing, guarantee that little beam 307 is in the vertical line state, the micro-reflector 314 that is fixed on micro mirror support 311 front ends in little beam 307 centre positions does not enter light-path, incident light enters into the light path in the place ahead along rectilinear propagation, make the electrostatic micro-mechanical-optical switch of straight beam flexing be in pass-through state, namely this micro-machinery switch is in "On" state, as shown in Figure 3.
When needs conversion optical switch status, give by outside regulating circuit first and regulate electrode pair 302,303 two ends on-load voltage, make little beam 307 axial loads reach Euler's load critical value, little beam 307 is in " little curved balance " state, then by external drive circuit to drive electrode 305,306 two ends load driver voltages, because little beam 306 has been in " little curved balance " state, the electric field force that this moment, very little driving voltage produced, just can impel little beam 306 to produce fast flexing large deformation, the micro mirror support 311 that is fixed on little beam 307 centre positions with drive moves horizontally, and then make the micro-reflector 314 of micro mirror support 311 front ends move into light path fully, incident light changes the light path that direction enters into minute surface the same side after being reflected the mirror reflection, make the electrostatic micro-mechanical-optical switch of straight beam flexing be in reflective condition, namely this micro-mechanical-optical switch is in "Off" state, as shown in Figure 4.
More than be example of the present invention, do not consist of any limitation of the invention, obviously, under thought of the present invention, can carry out different structure modifies, but these are all at the row of protection of the present invention.
Claims (8)
1. electrostatic micro-mechanical-optical switch of straight beam flexing, comprise: the drive electrode that little beam (307), fixed pedestal (304), outer frame (310), wedge shape extrusion structure (301), quiet tooth drive electrode and moving tooth drive electrode consist of is to (305,306), quiet tooth is regulated the adjusting electrode pair (302 of electrode and moving tooth adjusting electrode formation, 303), micro-reflector (314) and optical fiber (313), it is characterized in that:
Fixed pedestal (304) is connected as a single entity with little beam (307), and adopts span supporting construction (309) at both link position places, is used for improving the suffered axial load of little beam (307);
Fixed pedestal (304) is fixing by wedge shape extrusion structure (301) with outer frame (310), is used for improving the suffered axial load of little beam (307);
Fixed pedestal (304) is provided with guiding mechanism (308) with the two ends of outer frame (310), is used for limiting swinging of little beam (307);
Regulate electrode pair (302,303) and adopt the comb teeth-shaped structure, be fixed on little beam (307), and symmetrical up and down;
The centre position of outer frame (310) is provided with gathering sill (312), is used for moving up and down of restriction micro mirror support (311).
2. the electrostatic micro-mechanical-optical switch of straight beam flexing according to claim 1, diamond structure is adopted in the centre position that it is characterized in that little beam (307), be used for increasing the lifting surface area of horizontal static load, reduce the required driving voltage of little beam (307).
3. the electrostatic micro-mechanical-optical switch of straight beam flexing according to claim 1 is characterized in that fixed base (304), outer frame (310), little beam (307) and micro mirror support (311) all adopt silicon materials to make.
4. the electrostatic micro-mechanical-optical switch of straight beam flexing according to claim 1, it is characterized in that the right side of fixed pedestal (304) and the left-hand face of Wei Liang (307) all deposit golden membranous layer, this two golden membranous layer consists of drive electrode to (305,306), and by the pressure welding mode link to each other with external drive circuit.
5. the electrostatic micro-mechanical-optical switch of straight beam flexing according to claim 1, it is characterized in that regulating electrode pair (302,303) link to each other with outside regulating circuit by the pressure welding mode, and synchro control, guarantee that little beam (307) keeps " little curved balance " state.
6. the electrostatic micro-mechanical-optical switch of described straight beam flexing according to claim 1 is characterized in that little beam (307) adopts the bending with combined axial and lateral load distressed structure, drives to realize the large stroke of low pressure.
7. the electrostatic micro-mechanical-optical switch of described straight beam flexing according to claim 1, it is characterized in that optical fiber (313) is intersects vertical the placement.
8. the electrostatic micro-mechanical-optical switch of described straight beam flexing according to claim 1, micro-reflector (314) is fixed in the front end of micro mirror support (311), and micro-reflector (314) and input-output optical fiber (313) are in the same plane.
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| CN201310013372.3A CN103033885B (en) | 2013-01-14 | 2013-01-14 | Straight beam buckling electrostatic type micro mechanical optical switch |
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| CN201310013372.3A CN103033885B (en) | 2013-01-14 | 2013-01-14 | Straight beam buckling electrostatic type micro mechanical optical switch |
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| CN103033885B CN103033885B (en) | 2015-02-18 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103728074A (en) * | 2013-12-09 | 2014-04-16 | 清华大学 | Structure for detecting mechanical properties of micro-nano materials |
| CN103787263A (en) * | 2013-11-18 | 2014-05-14 | 西安电子科技大学 | Dual-stage regulation based electrostatic-actuating large-deformation micromechanical actuator |
| CN108459448A (en) * | 2018-03-29 | 2018-08-28 | 中国科学院西安光学精密机械研究所 | A kind of two-dimentional light beam scan method and optical phased array based on optical phased array |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2555511Y (en) * | 2002-07-25 | 2003-06-11 | 信息产业部电子第十三研究所 | Electrostatic micromechanical whole light switch |
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
-
2013
- 2013-01-14 CN CN201310013372.3A patent/CN103033885B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2555511Y (en) * | 2002-07-25 | 2003-06-11 | 信息产业部电子第十三研究所 | Electrostatic micromechanical whole light switch |
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103787263A (en) * | 2013-11-18 | 2014-05-14 | 西安电子科技大学 | Dual-stage regulation based electrostatic-actuating large-deformation micromechanical actuator |
| CN103787263B (en) * | 2013-11-18 | 2016-05-18 | 西安电子科技大学 | Static based on two-stage regulation and control drives large deformation micromechanics driver |
| CN103728074A (en) * | 2013-12-09 | 2014-04-16 | 清华大学 | Structure for detecting mechanical properties of micro-nano materials |
| CN103728074B (en) * | 2013-12-09 | 2015-08-12 | 清华大学 | A kind of micro-nano material mechanics properties testing structure |
| CN108459448A (en) * | 2018-03-29 | 2018-08-28 | 中国科学院西安光学精密机械研究所 | A kind of two-dimentional light beam scan method and optical phased array based on optical phased array |
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