CN103033885B - Straight beam buckling electrostatic type micro mechanical optical switch - Google Patents
Straight beam buckling electrostatic type micro mechanical optical switch Download PDFInfo
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- CN103033885B CN103033885B CN201310013372.3A CN201310013372A CN103033885B CN 103033885 B CN103033885 B CN 103033885B CN 201310013372 A CN201310013372 A CN 201310013372A CN 103033885 B CN103033885 B CN 103033885B
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Abstract
The invention discloses a straight beam buckling electrostatic type micro mechanical optical switch which mainly solves the problem that the existing switch is high in driving voltage, long in switching time, high in energy consumption and the like. The straight beam buckling electrostatic type micro mechanical optical switch comprises a micro beam (307) with a diamond-shaped structure in the middle position, a fixed base (304), an outer framework (310), driving electrode pairs (305 and 306), adjusting electrode pairs (302 and 303), a micro reflecting mirror (314) and optical fibers (313), wherein the micro beam (307) is connected with the fixed base (304) together, and a span supporting structure (309) is adopted at the junction of the micro beam (307) and the fixed base (304); the fixed base (304) is fixed with the outer framework (310) through a wedge-shaped extrusion structure (301), and guide mechanisms (308) are arranged at the two ends of the fixed base (304); the adjusting electrode pairs (302 and 303) adopt comb tooth-shaped structures and are symmetrical to each other up and down; a guide groove (312) is formed in the middle position of the outer framework (310); the optical fibers (131) are perpendicularly placed in a crossed manner; and the micro reflecting mirror (314) is fixed at the front end of a micro mirror bracket (311). The straight beam buckling electrostatic type micro mechanical optical switch has the advantages of low driving voltage, short switching time, low energy consumption and expandable switch array and can be used for key optical devices of optical communication network equipment.
Description
Technical field
The invention belongs to optoelectronic device technology field, particularly the electrostatic micro-mechanical-optical switch of one, can be used for realizing the light path selection in optical communication, the cross-connect of many fibre circuits, up and down light path and carrying out bypass to fault fibre circuit.
Technical background
The electrostatic micro-mechanical-optical switch of straight beam flexing is processed by MEMS technology.Theoretical based on micro-beam bending with combined axial and lateral load, break through the traditional concept of the unidirectional loading of micro-mechanical-optical switch, utilize the elastic energy release of micro-beam in bending deformation and stiffness variation and the kick characteristic that shows, change elastic force into driving force, realize the object that micro-mechanical-optical switch driving voltage is low, switching time is short, energy consumption is little.It has, and structure is simple, volume is little, lightweight, easy of integration, antijamming capability is strong, energy consumption is low, without features such as polarization, switch arrays easily extensible, therefore in the fields such as optical communication network equipment, have tight demand.
Within 2003, Inst. No.13 of Electronics, Ministry of Information Industry is at [electrostatic micromechanical whole light switch, Xu Yongqing, Yang Yongjun, Zhao Yanjun, Liang Chunguang, Inst. No.13 of Electronics, Ministry of Information Industry, State Intellectual Property Office of the People's Republic of China, the ZL patent No.: 02268460.3, in June, 2003, G02B6/35, H04J 14/02-H04 B 10/12] in propose a kind of electrostatic micromechanical whole light switch, as shown in Figure 1, wherein Fig. 1 (a) structural representation that is this micro-mechanical-optical switch, Fig. 1 (b) is this micro-mechanical-optical switch A-A direction sectional structure schematic diagram.Determine each tooth one end of tooth 103 and determine tooth drive electrode 102 and be connected, dynamic tooth 104 each tooth one end is connected with folding overarm 106, folding overarm 106 one end is connected with dynamic tooth drive electrode 105, determine tooth drive electrode 102 and dynamic tooth drive electrode 105 are respectively coated with layer of metal 109, triangle balance beam 107 is connected with folding overarm 106, intermediate beam 108 cross-under rear one end in triangle balance beam 107 is connected with folding overarm 106, and the other end is connected with silicon micromirror 110.Vertical channel 112 on the heavily boron layer 114 of n type single crystal silicon substrate 101 peripheric surface is processed into the structure that mutually intersects vertically, optical fiber 111 is seated in vertical channel 112, V-type groove 113, optical fiber 111 one-tenth is intersected vertically structure mutually, puts silicon micromirror 110 intersecting vertically in an optical fiber 111.The photoresist layer 115 that heavily boron layer 114 is coated with is utilized to make each partial model by lithography.Determining to load DC voltage between tooth drive electrode 102 and dynamic tooth drive electrode 105, now respectively with determine that tooth drive electrode 102 is connected with dynamic tooth drive electrode 105 determine tooth 103, electrostatic force is produced between dynamic tooth 104, under the effect of electrostatic force, make folding overarm 106 bend, thus drive the side that silicon micromirror 110 is being parallel to n type single crystal silicon substrate 101 to move upward, silicon micromirror 110 plays a baffle plate effect, when silicon micromirror 110 is opened, optical fiber direct projection is passed through, corresponding photoswitch is open state, when silicon micromirror 110 resets, optical fiber is reflected, corresponding photoswitch is off status, thus realize the on-off action of light.
There is following problem in this photoswitch:
1) adopt the micro-beam of unidirectional load driver, the driving voltage of needs is too high, and energy consumption is excessive.
2) structure relative complex, wayward.
Chinese Academy of Sciences's Changchun optical precision instrument machineries in 2008 and physical study place [flexible cantilever micro-mechanical-optical switch, Liang Jingqiu, Li Wei, Liang Zhongzhu, Marvin's is raw, Sun Degui, Changchun Institute of Optics, Fine Mechanics and Physics, CAS, State Intellectual Property Office of the People's Republic of China, number of patent application: 200710056340.6, in April, 2008, G02B26/08, H01F 5/00-H01F 41/04] in propose a kind of flexible cantilever micro-mechanical-optical switch, as shown in Figure 2, wherein Fig. 2 (a) is this micro-mechanical-optical switch structural representation in its natural state, the exploded view that Fig. 2 (b) is this micro-mechanical-optical switch, the light beam that Fig. 2 (c) is this micro-mechanical-optical switch is turned back constitutional diagram, the light beam pass-through state figure that Fig. 2 (d) is this micro-mechanical-optical switch.Switch stiff end 202 and cantilever 203 are same material, and the two is connected as a single entity, and is positioned at substrate 201 upper surface.The lower surface of switch stiff end 202 contacts with substrate 201 upper surface and bonds, coil 204 is positioned at the upper surface of cantilever 203, coil first goes between 205 and coil second to go between 210 upper surfaces being positioned at cantilever 203, switch stiff end 202, and bond with it, first lead-in wire pressure point 206, second lead-in wire pressure point 211 is positioned at switch stiff end 202 upper surface, contacts with it and bonds.Permanent magnet 207 is positioned at immediately below coil 204, in the pit of substrate 201 lower surface, and contacts fixing with substrate 201.Prismatic micro-reflector 208 is fixed on the top of coil 204.Photoswitch is when state of nature, and cantilever 203 lower surface contacts with substrate 201 upper surface.When coil 204 adds a direction electric current, cantilever 203 is remained on the position of Fig. 2 (c) by electromagnetic attraction, i.e. state of nature, incident beam R arrives optical element 209 after the one side reflection of prismatic micro-reflector 208, and from light beam outgoing after the another side reflection of prismatic micro-reflector 208 that optical element 209 returns, for folded light beam F, this light switch is in off-state; When coil 204 adds current in opposite, cantilever 203 is pushed away substrate 201 away from one end of switch stiff end 202 by electromagnetic repulsion force, cantilever 203 is upturned, drive lip cylindricality micro-reflector 208 leaves substrate 201 upper surface one segment distance, and in Fig. 2 (d) state, now incident beam R directly passes through, do not deflect, namely without optical element 209, do not produce folded light beam F, this light switch is in conducting state.Although this structure can meet the requirement of turning back for twice of light path, there are the following problems again for itself:
1) adopt Electromagnetic Drive method to bring electromagnetic interference problem, certain impact is produced on the stability of device and reliability;
2) state of switch keeps needing to pass into lasting electric current to maintain, and the power consumption of device is comparatively large, and the heat that coil produces in semi-girder inside can not effectively distribute, and shortens the serviceable life of device.
Summary of the invention
The object of the invention is to the deficiency overcoming above-mentioned prior art, provide a kind of straight beam flexing electrostatic micro-mechanical-optical switch, to reduce driving voltage, shorten switching time, reduce energy consumption.
For achieving the above object, micro-mechanical-optical switch of the present invention comprises: the drive electrode that micro-beam 307, fixed pedestal 304, outer frame 310, wedge shaped squeeze structure 301, quiet tooth drive electrode and dynamic tooth drive electrode are formed to 305 and 306, the quiet tooth adjustment electrode pair 302 and 303, micro-reflector 314 and the optical fiber 313 that regulate electrode and dynamic tooth to regulate electrode to form, it is characterized in that:
Fixed pedestal 304 and micro-beam 307 are connected as a single entity, and adopt span support structure 309, for improving the axial load suffered by micro-beam 307 at both link position places;
Fixed pedestal 304 is fixed, for improving the axial load suffered by micro-beam 307 by wedge shaped squeeze structure 301 with outer frame 310;
Fixed pedestal 304 is provided with guiding mechanism 308, for limiting swinging of micro-beam 307 with the two ends of outer frame 310;
Regulate electrode pair 302 and 303 to adopt comb teeth-shaped structure, be fixed on micro-beam 307, and symmetrical up and down;
The centre position of outer frame 310 is provided with gathering sill 312, for limiting moving up and down of micro mirror support 311.
As preferably, the centre position of described micro-beam 307 adopts diamond structure, for increase horizontal electrostatic load lifting surface area, reduce the driving voltage needed for micro-beam 307.
As preferably, described fixed base 304, outer frame 310, micro-beam 307 and micro mirror support 311 all adopt silicon materials to make.
As preferably, the right side of described fixed pedestal 304 and the left-hand face of micro-beam 307 all deposit golden membranous layer, and this two golden membranous layer forms drive electrode to 305 and 306, and is connected with external drive circuit by pressure welding mode.
As preferably, described adjustment electrode pair 302 is connected with outside regulating circuit by pressure welding mode with 303, and synchro control, ensure that micro-beam 307 keeps " micro-curved balance " state.
As preferably, described micro-beam 307 adopts bending with combined axial and lateral load distressed structure, drives to realize low pressure Long Distances.
As preferably, described optical fiber 313 is placed in intersecting vertical.
As preferably, described micro-reflector 314 is fixed on the front end of micro mirror support 311, and micro-reflector 314 and optical fiber 313 in the same plane.
Tool of the present invention has the following advantages:
1. the present invention adopts diamond structure due to Wei Liang centre position, increases the lifting surface area of horizontal electrostatic load, thus increases drive displacement, reduce driving voltage.
2. the present invention adopts span support structure and fixed pedestal and outer frame to be fixed by wedge shaped squeeze structure due to fixed pedestal and Wei Liang junction, improves the axial load suffered by micro-beam, thus reduces driving voltage, shortens the switching response time.
3. the present invention is owing to being provided with guiding mechanism at fixed pedestal and outer frame two ends, limits swinging of micro-beam, thus ensure that micro-beam bending deformation is symmetrical.
4. the present invention adopts comb teeth-shaped structure owing to regulating electrode pair, regulates the voltage that electrode pair loads, make micro-beam be in " micro-curved balance " state, thus reduce driving voltage, improve the reliability of micro-beam bending deformation by adjustment.
5. the present invention is owing to adopting micro-beam bending with combined axial and lateral load bending deformation structure, breaks through the traditional concept of unidirectional loading, thus reduces driving voltage and deformation time, realize the low voltage drive of micro-mechanical-optical switch, Long Distances and high switching speed.
6. the electrostatic micro-mechanical-optical switch of straight beam flexing of the present invention is relative to other photoswitch existing, number of components is few, and all adopt silicon materials to make, have that structure is simple, energy consumption is low, switch arrays easily extensible, be easy to the feature of processing, and being applied in optical communication network all irrelevant with parameters such as the form of signal of communication, wavelength, agreement, modulation system, polarization, transmission directions, is the desired light switchgear in optical communication network.
Accompanying drawing explanation
Fig. 1 is existing electrostatic micromechanical whole light switch structural drawing;
Fig. 2 is existing flexible cantilever micro-mechanical-optical switch structural drawing;
Fig. 3 is straight beam flexing of the present invention electrostatic micro-mechanical-optical switch "On" state structural front view;
Fig. 4 is straight beam flexing of the present invention electrostatic micro-mechanical-optical switch "Off" state structural front view;
Fig. 5 is the side view of micro-beam in the electrostatic micro-mechanical-optical switch of straight beam flexing of the present invention.
Embodiment
With reference to Fig. 3, the electrostatic micro-mechanical-optical switch of straight beam flexing of the present invention primarily of micro-beam 307, fixed pedestal 304, outer frame 310, guiding mechanism 308, drive electrode to 305,306, electrode pair 302,303, gathering sill 312, micro mirror support 311, micro-reflector 314 and optical fiber 313 is regulated to form.Wherein optical fiber 313 is placed in square crossing and is formed light path, and micro-beam 307 centre position is diamond structure, and guiding mechanism 308 is provided with two altogether, and it lays respectively at the upper and lower end of fixed pedestal 304, and micro mirror support 311 is square cylinder structure.
Described micro-beam 307, itself and fixed pedestal 304 are connected as a single entity, and adopt span support structure 309 at both link position places, for improving the axial load suffered by micro-beam 307, to reduce driving voltage, shorten the switching response time.Micro-beam 307 is fixed by wedge shaped squeeze structure 301 with outer frame 310, to improve axial load suffered by micro-beam 307, reduce the difficulty of processing of micro-beam 307 and prevent the generation of micro-beam 307 reversal deformation.
Described guiding mechanism 308, it is produced by fixed base 304 and outer frame 310 bonding, for limiting swinging of micro-beam 307, ensureing that micro-beam 307 bending deformation is symmetrical simultaneously, avoiding Second Buckling to be out of shape and occurring.
Described adjustment electrode pair 302,303, it adopts comb teeth-shaped structure, and symmetrical up and down.This adjustment electrode pair 302,303 are connected with outside regulating circuit by pressure welding mode, the voltage utilizing outside regulating circuit to load carries out synchro control to micro-beam 307 two ends, make micro-beam 307 reach Euler to close on after load and keep " micro-curved balance " state, avoid micro-beam 307 to be in loaded state for a long time simultaneously, reduce the risk of breakage of micro-beam 307, improve the reliability of the electrostatic micro-mechanical-optical switch of straight beam flexing.
Described fixed drive electrode pair 305,306, its golden membranous layer deposited by right side in the middle part of fixed base 304 and micro-beam 307 left-hand face is formed, and this drive electrode, to 305,306, is connected with external drive circuit by pressure welding mode.External drive circuit is utilized to produce horizontal electrostatic force to drive electrode to the driving voltage loaded on 305,306, under the effect of horizontal electrostatic force, make micro-beam 307 that bending deformation occurs, thus drive the micro-reflector 314 of micro mirror support 311 front end to move in the light path be made up of optical fiber 313.
Described gathering sill 312, it in outer frame 310 centre position, for limiting moving up and down of micro mirror support 311, thus ensures that micro-reflector 314 level enters and exit optical by laser drilling processing,
The present invention is based on straight beam bending with combined axial and lateral load principle and micromirror reflects principle, break through the traditional concept of the unidirectional loading of current micro-mechanical-optical switch, fault offset when utilizing micro-beam flexing combined deformation and stiffness variation show " kick " characteristic, the axial potential energy of storage is discharged fast, changes elastic force into driving force.When micro-beam 307 reaches Euler critical load, keep " micro-curved balance " state, now again to drive electrode to 305, on 306, load driver voltage is to produce horizontal electrostatic force, impel micro-beam 307 that flexing large deformation occurs, micro-like this beam 307 will drive the micro mirror support 311 being fixed therein a position to move horizontally, thus control micro-reflector 314 enters and exit optical, light path is switched with reflection two states straight-through, to realize conducting and the break function of the electrostatic micro-mechanical-optical switch of straight beam flexing, reach straight beam flexing micro-mechanical-optical switch driving voltage low, switching time is short, the purpose of design that energy consumption is little.
Principle of work of the present invention is as follows:
When photoswitch is in open state, regulate electrode pair 302, 303 with drive electrode to 305, 306 all non-on-load voltages, micro-beam 307 is in linear state, the micro-beam 307 be connected as a single entity with fixed pedestal 304 is subject to the effect of axial compression load, now micro-beam 307 axial load does not reach Euler critical load, and spacing due to upper lower guide mechanism 308, ensure that micro-beam 307 is in vertical line state, the micro-reflector 314 being fixed on micro mirror support 311 front end in micro-beam 307 centre position does not enter light-path, incident light linearly spreads in the light path in front, the electrostatic micro-mechanical-optical switch of straight beam flexing is made to be in pass-through state, namely this micro-machinery switch is in "On" state, as shown in Figure 3.
When needs convert light on off state, first given by outside regulating circuit and regulate electrode pair 302, the two ends on-load voltage of 303, micro-beam 307 axial load is made to reach Euler's threshold load value, micro-beam 307 is in " micro-curved balance " state, then by external drive circuit to drive electrode 305, 306 two ends load driver voltages, because micro-beam 306 is in " micro-curved balance " state, the electric field force that now very little driving voltage produces, micro-beam 306 just can be impelled to produce flexing large deformation fast, move horizontally to drive the micro mirror support 311 being fixed on micro-beam 307 centre position, and then make the micro-reflector 314 of micro mirror support 311 front end move into light path completely, incident light is changed by after catoptron reflection the light path that direction enters into minute surface the same side, the electrostatic micro-mechanical-optical switch of straight beam flexing is made to be in reflective condition, namely this micro-mechanical-optical switch is in "Off" state, as shown in Figure 4.
Be more than example of the present invention, do not form any limitation of the invention, obviously, can different structure modifies be carried out under thought of the present invention, but these are all at the row of protection of the present invention.
Claims (4)
1. the electrostatic micro-mechanical-optical switch of straight beam flexing, comprise: the drive electrode that micro-beam (307), fixed pedestal (304), outer frame (310), wedge shaped squeeze structure (301), quiet tooth drive electrode and dynamic tooth drive electrode are formed is to (305,306), quiet tooth regulates the adjustment electrode pair (302 that electrode and dynamic tooth regulate electrode to form, 303), micro-reflector (314) and input-output optical fiber (313), it is characterized in that:
The centre position of micro-beam (307) adopts diamond structure, for increasing the lifting surface area of horizontal electrostatic load, reduces the driving voltage needed for micro-beam (307);
Fixed pedestal (304) and micro-beam (307) are connected as a single entity, and adopt span support structure (309), for improving the axial load suffered by micro-beam (307) at both link position places;
Fixed pedestal (304) is fixed, for improving the axial load suffered by micro-beam (307) by wedge shaped squeeze structure (301) with outer frame (310);
Fixed pedestal (304) is provided with guiding mechanism (308), for limiting swinging of micro-beam (307) with the two ends of outer frame (310);
Regulate electrode pair (302,303) to adopt comb teeth-shaped structure, be fixed on micro-beam (307), and symmetrical up and down;
The centre position of outer frame (310) is provided with gathering sill (312), for limiting moving up and down of micro mirror support (311);
Drive electrode is formed the golden membranous layer that (305,306) are deposited by right side in the middle part of fixed base 304 and micro-beam 307 left-hand face, and is connected with external drive circuit by pressure welding mode;
Input-output optical fiber (313) is placed in intersecting vertical;
Micro-reflector (314) is fixed on the front end of micro mirror support (311), and micro-reflector (314) and input-output optical fiber (313) in the same plane.
2. the electrostatic micro-mechanical-optical switch of straight beam flexing according to claim 1, is characterized in that fixed base (304), outer frame (310), micro-beam (307) and micro mirror support (311) all adopt silicon materials to make.
3. the electrostatic micro-mechanical-optical switch of straight beam flexing according to claim 1, it is characterized in that regulating electrode pair (302,303) be connected with outside regulating circuit by pressure welding mode, and synchro control, ensure that micro-beam (307) keeps " micro-curved balance " state.
4. the electrostatic micro-mechanical-optical switch of straight beam flexing according to claim 1, is characterized in that micro-beam (307) adopts bending with combined axial and lateral load distressed structure, drives to realize low pressure Long Distances.
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| CN201310013372.3A CN103033885B (en) | 2013-01-14 | 2013-01-14 | Straight beam buckling electrostatic type micro mechanical optical switch |
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| CN103033885B true CN103033885B (en) | 2015-02-18 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103787263B (en) * | 2013-11-18 | 2016-05-18 | 西安电子科技大学 | Static based on two-stage regulation and control drives large deformation micromechanics driver |
| CN103728074B (en) * | 2013-12-09 | 2015-08-12 | 清华大学 | A kind of micro-nano material mechanics properties testing structure |
| CN108459448A (en) * | 2018-03-29 | 2018-08-28 | 中国科学院西安光学精密机械研究所 | Two-dimensional light beam scanning method based on optical phased array and optical phased array |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2555511Y (en) * | 2002-07-25 | 2003-06-11 | 信息产业部电子第十三研究所 | Electrostatic micromechanical whole light switch |
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
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2013
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2555511Y (en) * | 2002-07-25 | 2003-06-11 | 信息产业部电子第十三研究所 | Electrostatic micromechanical whole light switch |
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
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