CN2519299Y - Non-contact optical system air interval measuring device - Google Patents
Non-contact optical system air interval measuring device Download PDFInfo
- Publication number
- CN2519299Y CN2519299Y CN 01257023 CN01257023U CN2519299Y CN 2519299 Y CN2519299 Y CN 2519299Y CN 01257023 CN01257023 CN 01257023 CN 01257023 U CN01257023 U CN 01257023U CN 2519299 Y CN2519299 Y CN 2519299Y
- Authority
- CN
- China
- Prior art keywords
- lens
- optical system
- interferometer
- contact optical
- standard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 12
- 238000005259 measurement Methods 0.000 claims abstract description 14
- 238000003384 imaging method Methods 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000010438 granite Substances 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a non-contact optical system air interval measuring device, by carrying the platform 1 of putting the measured lens, stand 2, can follow the interferometer that stand 2 reciprocated, the observation alignment system who comprises photoelectric imaging converter and monitor, by constituteing with the grating sensing system of interferometer standard lens linkage etc. its light path setting is standard lens 14, collimating mirror 13, spectroscope 12, photoelectric imaging converter 3 by being surveyed lens 8 and going up in proper order, constitute the testing light source by laser instrument 9 beam expanding system 10, aperture diaphragm 11. The utility model has the advantages of to being examined camera lens not damaged, measurement accuracy is high, convenient to use.
Description
The utility model relates to optical system detection, belongs to the Technology of Precision Measurement field.
During optical instrument was produced, the dress alignment in the dress school, particularly object lens of optical system connect and influences imaging optical instrument imaging quality and performance, was very crucial technology.The dress school process of object lens mainly contains the requirement of three aspects: (1) proofreaies and correct the eccentric error of each face, and (2) guarantee the airspace, and is installing under the firm prerequisite (3), guarantees that minute surface is indeformable.If the airspace can not strict be controlled, can bring spherical aberration, aberration and influence focal length, multiplying power etc., even have a strong impact on the image quality of object lens.Therefore, the measurement of airspace and control are one of critical processes of object lens production.
In reality dress school, the measuring method of airspace has two kinds usually: the one, and the distance on the last summit of the last summit of the last lens of measurement and back one lens deducts lens thickness then.The 2nd, measure the distance of sphere summit to the microscope base end face.We all are referred to as interval measurement these two kinds of methods.The surveying instrument great majority are to adopt dial gauge, clock gauge or grating dial gauge etc., belong to contact type measurement.The major defect of contact type measurement is to scratch lens surface easily.For avoiding scratching, between measuring head and measured surface, add one deck protection sheet usually, so measuring accuracy is lower.Some is coated with the surface of special rete, forbids contact type measurement, therefore must adopt non-cpntact measurement.
The utility model purpose provides a kind of non-contact optical system airspace measurement mechanism.Adopt and interfere Positioning Principle, use grating displacement sensor as frame of reference.The measuring accuracy height, error is little, both has been convenient to observe, and does not damage rete again.
The utility model can be realized by following technical measures:
Non-contact optical system airspace measurement mechanism, the observation alignment system of forming by the platform 1 that puts tested camera lens, column, the interferometer that can move up and down along column, by photoelectronic imaging converter and monitor, by forming with the grating sensing system of interferometer standard lens interlock etc.Its light path setting is followed successively by standard lens, collimating mirror, spectroscope, photoelectronic imaging converter on by measured lens; Constitute detection light source by laser instrument, compression system, smallcolumn diaphragm.
The utility model has following characteristics with respect to prior art: by the focus of standard lens location, by adjusting the flexibility of interference fringe, its bearing accuracy can reach λ/more than 20, improved measuring accuracy greatly; The interlock of grating displacement measuring system and standard lens is read the displacement of standard lens from digital display meter, simplifies labor capacity, eliminates artificial reading error.
The utility model is described in further detail below in conjunction with drawings and Examples:
Fig. 1 is the outside drawing of this surveying instrument.Wherein, the 1st, granite platform, the 2nd, column, the 3rd, ccd video camera, the 4th, monitor, the 5th, interferometer main body, the 6th, grating sensor, the 7th, digital display meter, the 8th, measured lens.
Fig. 2 is this surveying instrument optical system diagram.Wherein, the 3rd, ccd video camera, the 4th, monitor, the 8th, measured lens, the 9th, He-Ne laser instrument, the 10th, beam-expanding system, the 11st, smallcolumn diaphragm, the 12nd, Amici prism, the 13rd, collimating mirror, the 14th, standard mirror.
As shown in Figure 1, measured lens 8 places on the granite platform 1, and interferometer main body 5 is installed on the granite platform 1 by column 2, can move up and down to adapt to different tested camera lenses along column 2.Conoscope image is imaged on the monitor 4 by ccd video camera 3, and grating sensor 6 is rigidly connected with interferometer main body 5 and standard lens 14, reads the amount of movement of standard lens 14 from digital display meter 7.
As shown in Figure 2, the laser that He-Ne laser instrument 9 produces is through beam-expanding system 10, smallcolumn diaphragm 11, Amici prism 12, collimating mirror 13, standard mirror 14 forms canonical reference light beam focal spot, the radius-of-curvature of last face of standard mirror 14 is identical with standard mirror 14 vertex focal lengths, part light reflects to form reference beam through last face of standard mirror 14, when the focus of standard lens is positioned at the summit of measured lens 8, light beam is reflected to form the detection light beam by measured lens 8, detect light beam and reference beam by standard mirror 14, collimating mirror 13, spectroscope 12 forms interference on ccd video camera 3 image planes, see straight interference fringe on monitor 4.If out of focus is arranged then striped bends.At sphericity interferometer standard lens quality height, under the situation that instrument is adjusted, visual interpretation precision to defocusing amount can reach λ/20.
Claims (2)
1, non-contact optical system airspace measurement mechanism, it is characterized in that, the observation alignment system of forming by the platform 1 that puts tested camera lens, column 2, the interferometer that can move up and down along column 2, by photoelectronic imaging converter and monitor, by forming with the grating sensing system of interferometer standard lens interlock etc., its light path setting is followed successively by standard lens 14, collimating mirror 13, spectroscope 12, photoelectronic imaging converter 3 on by measured lens 8; Constitute detection light source by laser instrument 9, beam-expanding system 10, smallcolumn diaphragm 11.
2, the non-contact optical system airspace measurement mechanism according to claim 1 is characterized in that described photoelectronic imaging converter 3 is a ccd video camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01257023 CN2519299Y (en) | 2001-12-24 | 2001-12-24 | Non-contact optical system air interval measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01257023 CN2519299Y (en) | 2001-12-24 | 2001-12-24 | Non-contact optical system air interval measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2519299Y true CN2519299Y (en) | 2002-10-30 |
Family
ID=33665872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01257023 Expired - Fee Related CN2519299Y (en) | 2001-12-24 | 2001-12-24 | Non-contact optical system air interval measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2519299Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100513585C (en) * | 2007-03-20 | 2009-07-15 | 钢铁研究总院 | Blocking detecting sensor, device and method for coal spraying pipeline |
| CN101813458A (en) * | 2010-03-11 | 2010-08-25 | 北京理工大学 | Method and device for measuring optical axis and gap of lens group by differential confocal internal focusing method |
-
2001
- 2001-12-24 CN CN 01257023 patent/CN2519299Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100513585C (en) * | 2007-03-20 | 2009-07-15 | 钢铁研究总院 | Blocking detecting sensor, device and method for coal spraying pipeline |
| CN101813458A (en) * | 2010-03-11 | 2010-08-25 | 北京理工大学 | Method and device for measuring optical axis and gap of lens group by differential confocal internal focusing method |
| CN101813458B (en) * | 2010-03-11 | 2011-07-27 | 北京理工大学 | Method and device for measuring optical axis and gap of lens group by differential confocal internal focusing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102147240B (en) | Method and device for measuring multiple element parameters in differential con-focus interference manner | |
| CN107121095B (en) | A kind of method and device of precise measurement super-large curvature radius | |
| CN105157606B (en) | Contactless complicated optical surface profile high precision three-dimensional measurement method and measurement apparatus | |
| CN101813458B (en) | Method and device for measuring optical axis and gap of lens group by differential confocal internal focusing method | |
| CN102679894B (en) | Method for measuring central thickness of reflecting type differential confocal lens | |
| JPH07190885A (en) | Absolute measuring method and execution device of geometrical or optical structure of optical device | |
| CN101788271A (en) | Method and device for measuring thickness of the center of confocal lens | |
| CN110455221B (en) | Optical path structure and equipment for rapidly measuring curvature radius of optical lens | |
| CN101762240B (en) | Method for measuring axial gaps of differential confocal lens set | |
| JP3435019B2 (en) | Lens characteristic measuring device and lens characteristic measuring method | |
| US6791696B1 (en) | Automated optical measurement apparatus and method | |
| CN103123251B (en) | Differential confocal internal focusing method lens axis and method for measuring thickness | |
| US6750958B1 (en) | Automated optical measurement apparatus and method | |
| CN102878933A (en) | Comparator based on white light interference positioning principle and detection method thereof | |
| CN113063367A (en) | Full-field deflection real-time measurement system and measurement method based on oblique optical axis digital image correlation method | |
| CN2519299Y (en) | Non-contact optical system air interval measuring device | |
| CN209706766U (en) | Inverse Hartmann's optical path wafer surface roughness measuring device | |
| KR20110065365A (en) | Method and apparatus for measuring aspherical body | |
| CN1428627A (en) | Working method and equipment for measuring air interval of non-contact optical system | |
| CN108151674B (en) | Method and device for improving precision of optical detection instrument | |
| JP4311952B2 (en) | 3D coordinate measurement method | |
| Su et al. | Optical testing for meter size aspheric optics | |
| CN215726717U (en) | Lens or material microprism detection equipment | |
| Parks | Versatile autostigmatic microscope | |
| JP2830943B2 (en) | Optical shape measurement method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |