CN1428627A - Working method and equipment for measuring air interval of non-contact optical system - Google Patents
Working method and equipment for measuring air interval of non-contact optical system Download PDFInfo
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- CN1428627A CN1428627A CN 01133730 CN01133730A CN1428627A CN 1428627 A CN1428627 A CN 1428627A CN 01133730 CN01133730 CN 01133730 CN 01133730 A CN01133730 A CN 01133730A CN 1428627 A CN1428627 A CN 1428627A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000003384 imaging method Methods 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000010438 granite Substances 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
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- 238000012360 testing method Methods 0.000 description 1
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Abstract
The invention discloses a working method and equipment for measuring air space of a non-contact optical system, wherein a main optical detection system is formed by a Fizeau interferometer, so that the focus of a standard lens of the interferometer is focused on the top point of a lens to be measured, and the top point wave front of the lens surface of the lens to be measured is overturned for self-alignment interference through a photoelectric imaging converter to be positioned; the indicating grating is linked with a standard lens of the interferometer, and the air interval value of the optical system is obtained by reading the movement amount of the standard lens through a reading system consisting of a grating sensor and a digital display meter. The invention has the advantages of no damage to the detected lens, high measurement precision, convenient use and the like.
Description
The present invention relates to optical system detection, belong to the Technology of Precision Measurement field.
During optical instrument was produced, the dress alignment in the dress school, particularly object lens of optical system connect and influences imaging optical instrument imaging quality and performance, was very crucial technology.The dress school process of object lens mainly contains the requirement of three aspects: (1) proofreaies and correct the eccentric error of each face, and (2) guarantee the airspace, and is installing under the firm prerequisite (3), guarantees that minute surface is indeformable.If the airspace can not strict be controlled, can bring spherical aberration, aberration and influence focal length, multiplying power etc., even have a strong impact on the image quality of object lens.Therefore, the measurement of airspace and control are one of critical processes of object lens production.
In reality dress school, the measuring method of airspace has two kinds usually: the one, and the distance on the last summit of the last summit of the last lens of measurement and back one lens deducts lens thickness then.The 2nd, measure the distance of sphere summit to the microscope base end face.We all are referred to as interval measurement these two kinds of methods.The surveying instrument great majority are to adopt dial gauge, clock gauge or grating dial gauge etc., belong to contact type measurement.The major defect of contact type measurement is to scratch lens surface easily.For avoiding scratching, between measuring head and measured surface, add one deck protection sheet usually, so measuring accuracy is lower.Some is coated with the surface of special rete, forbids contact type measurement, therefore must adopt non-cpntact measurement.
The object of the invention provides a kind of non-contact optical system airspace surveying work method, adopts and interferes Positioning Principle, realizes the contactless detection of airspace.
The present invention also aims to, design a kind of non-contact optical system airspace measuring equipment, adopt and interfere Positioning Principle, use grating displacement sensor as frame of reference.And making it to have the measuring accuracy height, error is little, both has been convenient to observe, and does not damage the advantage of rete again.
The present invention can realize by following technical measures:
Constitute main optical detection system by the Fizeau interferometer, the focus of interferometer standard lens is gathered on the summit of measured lens, measured lens minute surface summit wavefront upset auto-interference is located by a photoelectronic imaging converter; The amount of movement that standard lens is read in the interlock of the standard lens of indication grating and interferometer, the frame of reference of forming by grating sensor and digital display meter obtains the airspace value of optical system.
Adopt the checkout equipment of non-contact optical system airspace testing method, the observation alignment system of forming by the platform 1 that puts tested camera lens, column, the interferometer that can move up and down along column, by photoelectronic imaging converter and monitor, form by the grating sensing system that links with the interferometer standard lens etc.Its light path setting is followed successively by standard lens, collimating mirror, spectroscope, photoelectronic imaging converter on by measured lens; Constitute detection light source by laser instrument, compression system, smallcolumn diaphragm.
The present invention has following characteristics with respect to prior art: by the focus of standard lens location, by adjusting the flexibility of interference fringe, its bearing accuracy can reach λ/more than 20, improved measuring accuracy greatly; The interlock of grating displacement measuring system and standard lens is read the displacement of standard lens from digital display meter, simplifies labor capacity, eliminates artificial reading error.
The invention will be further described below in conjunction with drawings and Examples:
Fig. 1 is the outside drawing of this surveying instrument.Wherein, the 1st, granite platform, the 2nd, column, the 3rd, ccd video camera, the 4th, monitor, the 5th, interferometer main body, the 6th, grating sensor, the 7th, digital display meter, the 8th, measured lens.
Fig. 2 is this surveying instrument optical system diagram.Wherein, the 3rd, ccd video camera, the 4th, monitor, the 8th, measured lens, the 9th, He-Ne laser instrument, the 10th, beam-expanding system, the 11st, smallcolumn diaphragm, the 12nd, Amici prism, the 13rd, collimating mirror, the 14th, standard mirror.
As shown in Figure 1, measured lens 8 places on the granite platform 1, and interferometer main body 5 is installed on the granite platform 1 by column 2, can move up and down to adapt to different tested camera lenses along column 2.Conoscope image is imaged on the monitor 4 by ccd video camera 3, and grating sensor 6 is rigidly connected with interferometer main body 5 and standard lens 14, reads the amount of movement of standard lens 14 from digital display meter 7.
As shown in Figure 2, the laser that He-Ne laser instrument 9 produces is through beam-expanding system 10, smallcolumn diaphragm 11, Amici prism 12, collimating mirror 13, standard mirror 14 forms canonical reference light beam focal spot, the radius-of-curvature of last face of standard mirror 14 is identical with standard mirror 14 vertex focal lengths, part light reflects to form reference beam through last face of standard mirror 14, when the focus of standard lens is positioned at the summit of measured lens 8, light beam is reflected to form the detection light beam by measured lens 8, detect light beam and reference beam by standard mirror 14, collimating mirror 13, spectroscope 12 forms interference on ccd video camera 3 image planes, see straight interference fringe on monitor 4.If out of focus is arranged then striped bends.At sphericity interferometer standard lens quality height, under the situation that instrument is adjusted, visual interpretation precision to defocusing amount can reach λ/20.
Claims (3)
1. non-contact optical system airspace surveying work method, it is characterized in that, constitute main optical detection system by the Fizeau interferometer, the focus of interferometer standard lens is gathered on the summit of measured lens, measured lens minute surface summit wavefront upset auto-interference is located by a photoelectronic imaging converter; The amount of movement that standard lens is read in the interlock of the standard lens of indication grating and interferometer, the frame of reference of forming by grating sensor and digital display meter obtains the airspace value of optical system.
2, a kind of optical detection apparatus of realizing the described non-contact optical system of claim 1 airspace surveying work method, it is characterized in that, the observation alignment system of forming by the platform 1 that puts tested camera lens, column 2, the interferometer that can move up and down along column 2, by photoelectronic imaging converter and monitor, by forming with the grating sensing system of interferometer standard lens interlock etc., its light path setting is followed successively by standard lens 14, collimating mirror 13, spectroscope 12, photoelectronic imaging converter 3 on by measured lens 8; Constitute detection light source by laser instrument 9, beam-expanding system 10, smallcolumn diaphragm 11.
3, the non-contact optical system airspace measurement mechanism according to claim 2 is characterized in that described photoelectronic imaging converter 3 is a ccd video camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01133730 CN1428627A (en) | 2001-12-24 | 2001-12-24 | Working method and equipment for measuring air interval of non-contact optical system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01133730 CN1428627A (en) | 2001-12-24 | 2001-12-24 | Working method and equipment for measuring air interval of non-contact optical system |
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| CN1428627A true CN1428627A (en) | 2003-07-09 |
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| CN 01133730 Pending CN1428627A (en) | 2001-12-24 | 2001-12-24 | Working method and equipment for measuring air interval of non-contact optical system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101762240B (en) * | 2010-01-13 | 2011-07-27 | 北京理工大学 | Method for measuring axial gaps of differential confocal lens set |
| CN110553593A (en) * | 2018-05-30 | 2019-12-10 | 南京杰晟光电科技有限公司 | Double-laser interference non-contact thickness measuring instrument |
| CN110989128A (en) * | 2019-11-26 | 2020-04-10 | 天津津航技术物理研究所 | Reflector assembling and adjusting tool and method based on optical self-centering technology |
| CN114608509A (en) * | 2022-03-23 | 2022-06-10 | 东莞市宇瞳光学科技股份有限公司 | Detection mechanism and detection method |
-
2001
- 2001-12-24 CN CN 01133730 patent/CN1428627A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101762240B (en) * | 2010-01-13 | 2011-07-27 | 北京理工大学 | Method for measuring axial gaps of differential confocal lens set |
| CN110553593A (en) * | 2018-05-30 | 2019-12-10 | 南京杰晟光电科技有限公司 | Double-laser interference non-contact thickness measuring instrument |
| CN110989128A (en) * | 2019-11-26 | 2020-04-10 | 天津津航技术物理研究所 | Reflector assembling and adjusting tool and method based on optical self-centering technology |
| CN114608509A (en) * | 2022-03-23 | 2022-06-10 | 东莞市宇瞳光学科技股份有限公司 | Detection mechanism and detection method |
| CN114608509B (en) * | 2022-03-23 | 2023-01-10 | 东莞市宇瞳光学科技股份有限公司 | Detection mechanism and detection method |
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