CN221304654U - Upper and lower clamp cover type wafer visual inspection reversible jig - Google Patents
Upper and lower clamp cover type wafer visual inspection reversible jig Download PDFInfo
- Publication number
- CN221304654U CN221304654U CN202322924847.6U CN202322924847U CN221304654U CN 221304654 U CN221304654 U CN 221304654U CN 202322924847 U CN202322924847 U CN 202322924847U CN 221304654 U CN221304654 U CN 221304654U
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- plate
- mounting frame
- wafer
- fixed
- motor
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- 238000011179 visual inspection Methods 0.000 title claims abstract description 15
- 230000002441 reversible effect Effects 0.000 title abstract description 8
- 230000007306 turnover Effects 0.000 claims abstract description 23
- 238000007689 inspection Methods 0.000 claims description 8
- 230000002146 bilateral effect Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 abstract description 50
- 238000001125 extrusion Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 239000013013 elastic material Substances 0.000 abstract 2
- 239000013078 crystal Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses an up-down cover clamping type wafer visual inspection reversible jig which comprises a containing box, wherein a strong light lamp is fixedly extended upwards from the rear part of the containing box, a rotating device is arranged on the lower inner wall of the containing box, two bilaterally symmetrical turnover devices are arranged at the upper end of the rotating device, the two turnover devices are extended upwards, clamping devices are arranged on one sides, close to each other, of the upper parts of the two turnover devices, and the two clamping devices are arranged bilaterally symmetrically. According to the upper and lower cover clamping type wafer visual inspection reversible jig, the moving motor is started to drive the screw rod to rotate, so that the left mounting frame can move left and right, wafers with different sizes can be conveniently adapted, the mounting frame and the clamping device are driven to overturn through the overturning motor, the wafer clamped by the clamping device is enabled to overturn, the other side of the wafer is conveniently inspected, the buffer pad can be made of elastic materials, such as rubber, and damage to the wafer in the extrusion process by the extrusion plate can be reduced by using the elastic materials.
Description
Technical Field
The utility model relates to the technical field of wafer visual inspection devices, in particular to an upper and lower clamping cover type wafer visual inspection reversible jig.
Background
A wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer is circular in shape; the silicon dioxide ore is refined by an electric arc furnace, chloridized by hydrochloric acid and distilled to prepare high-purity polysilicon, the polysilicon is melted by a wafer manufacturing plant, seed crystals are planted in the melted solution and then slowly pulled out to form a cylindrical monocrystalline silicon crystal rod, and the silicon crystal rod is gradually generated in a molten silicon raw material by seed crystals determined by the orientation of a crystal face, so that the process is called as crystal growth, and the silicon crystal rod is subjected to cutting, barreling, slicing, chamfering, polishing, laser lithography and packaging to obtain a basic raw material of the integrated circuit plant, namely a silicon wafer.
The existing inspection device sucks up the wafer through negative pressure, the contact area between the wafer and the wafer is larger, the wafer is not beneficial to comprehensively inspecting the wafer, the wafer is turned manually in the turning process, and accidental scratches of the wafer can be possibly generated, so that the upper and lower cover clamping type wafer visual inspection reversible jig is provided.
Disclosure of utility model
The utility model mainly aims to provide an upper and lower cover clamping type wafer visual inspection reversible jig which can effectively solve the problems in the background technology.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
The utility model provides a but upper and lower clamp lid formula wafer visual inspection turnover jig, includes holds the box, holds the rear portion of box upwards and extends and be fixed with the strong light, holds the lower inner wall of box and be provided with rotary device, rotary device's upper end is provided with two bilateral symmetry's turning device, two turning device all upwards extend, two turning device's upper portion one side that is close to each other all is provided with clamping device, two clamping device bilateral symmetry sets up.
Preferably, the accommodating box comprises a box body, the rear part of the upper end of the box body is fixedly connected with a placement plate, the placement plate extends upwards, and the upper part of the front end of the placement plate is fixedly provided with a strong light lamp.
Preferably, the rotating device comprises a rotating motor, the rotating motor is fixed at the center of the lower inner wall of the box body, the output end of the rotating motor is fixedly connected with a mounting plate, two support plates are symmetrically and fixedly arranged at the left part of the lower end of the mounting plate and the right part of the lower end of the mounting plate, and the two support plates are in sliding connection with the lower inner wall of the box body.
Preferably, the turning device comprises a mounting frame and a mobile motor, wherein the mounting frame is fixed at the left part of the upper end or the right part of the upper end of the mounting plate, the mobile motor is fixed at the middle part of the upper end of the mounting plate, the output end of the mobile motor is fixedly connected with a screw rod, the screw rod is in threaded connection with the left mounting frame, the upper end of the mounting frame is fixedly provided with the turning motor, and the output end of the turning motor is fixedly connected with the mounting frame.
Preferably, the clamping device comprises a push rod and a fixing plate, the fixing plate is fixedly arranged on the lower inner wall of the mounting frame, the push rod is fixed in the middle of the upper inner wall of the mounting frame, the output end of the push rod is fixedly connected with an extrusion plate, and the position of the extrusion plate corresponds to the fixing plate.
Preferably, the lower part of the extrusion plate and the upper part of the fixed plate are both provided with buffer pads, and the extrusion plate and the fixed plate are both C-shaped and the openings of the extrusion plate and the fixed plate on the left side and the right side are oppositely arranged.
Compared with the prior art, the utility model has the following beneficial effects:
1. According to the utility model, the moving motor is started to drive the screw to rotate, so that the left mounting frame can move left and right, and the wafer processing device is convenient to adapt to wafers with different sizes.
2. According to the utility model, the mounting frame and the clamping device are driven to overturn by the overturning motor, so that the wafer clamped by the clamping device overturns, and the other surface of the wafer is conveniently inspected.
Drawings
FIG. 1 is a schematic diagram of the whole structure of a flip-top wafer inspection tool according to the present utility model;
FIG. 2 is a schematic diagram of the overall structure of a receiving box and a rotating device of a flip-top wafer visual inspection tool according to the present utility model;
FIG. 3 is a schematic diagram of a turnover device for a visual inspection turnover jig for wafers with upper and lower covers according to the present utility model;
fig. 4 is a schematic structural view of a clamping device of a connection mechanism of a flip-top wafer visual inspection fixture according to the present utility model.
In the figure: 1. a housing case; 2. a rotating device; 3. a turnover device; 4. a clamping device; 5. a strong light lamp; 11. a case body; 12. a setting plate; 21. a rotating electric machine; 22. a mounting plate; 23. a support plate; 31. a mounting frame; 32. a turnover motor; 33. a mounting frame; 34. a moving motor; 35. a screw; 41. a push rod; 42. an extrusion plate; 43. a cushion pad; 44. and a fixing plate.
Detailed Description
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1-4, an up-down cover clamping type wafer visual inspection reversible jig comprises a containing box 1, wherein the rear part of the containing box 1 is fixedly extended upwards to form a strong light lamp 5, the lower inner wall of the containing box 1 is provided with a rotating device 2, the upper end of the rotating device 2 is provided with two bilaterally symmetrical turnover devices 3, the two turnover devices 3 are extended upwards, one sides, close to each other, of the upper parts of the two turnover devices 3 are provided with clamping devices 4, and the two clamping devices 4 are arranged bilaterally symmetrically.
The accommodating box 1 comprises a box body 11, the rear part of the upper end of the box body 11 is fixedly connected with a placement plate 12, the placement plate 12 extends upwards, the upper part of the front end of the placement plate 12 is fixedly provided with a strong light lamp 5, other parts can be accommodated and protected in the accommodating box 1, the placement plate 12 can be provided with the strong light lamp 5, the strong light lamp 5 can illuminate the surface of a wafer, and whether the wafer is scratched or not is convenient to observe;
The rotating device 2 comprises a rotating motor 21, the rotating motor 21 is fixed in the center of the lower inner wall of the box body 11, the output end of the rotating motor 21 is fixedly connected with a mounting plate 22, two support plates 23 are symmetrically and fixedly arranged at the left part and the right part of the lower end of the mounting plate 22, the two support plates 23 are in sliding connection with the lower inner wall of the box body 11, the rotating motor 21 is started, a wafer can be rotated to other angles, and the support plates 23 can support the mounting plate 22 and other parts above;
The turnover device 3 comprises a mounting frame 33 and a mobile motor 34, wherein the mounting frame 33 is fixed at the left part or the right part of the upper end of the mounting plate 22, the mobile motor 34 is fixed at the middle part of the upper end of the mounting plate 22, the output end of the mobile motor 34 is fixedly connected with a screw rod 35, the screw rod 35 is in threaded connection with the left mounting frame 33, the upper end of the mounting frame 33 is fixedly connected with a turnover motor 32, the output end of the turnover motor 32 is fixedly connected with a mounting frame 31, the mobile motor 34 is started to drive the screw rod 35 to rotate, so that the left mounting frame 33 is moved to a proper position, wafers with different sizes are convenient to adapt, two turnover motors 32 on two sides are started to drive the mounting frame 31 and the clamping device 4 to turn over, and the wafer clamped by the clamping device 4 is convenient to check the wafer on the other surface;
The clamping device 4 comprises a push rod 41 and a fixed plate 44, the fixed plate 44 is fixedly arranged on the lower inner wall of the mounting frame 31, the push rod 41 is fixed in the middle of the upper inner wall of the mounting frame 31, the output end of the push rod 41 is fixedly connected with an extrusion plate 42, the position of the extrusion plate 42 corresponds to the fixed plate 44, the push rod 41 can push the extrusion plate 42 to move downwards, and the extrusion plate 42 and the fixed plate 44 can jointly clamp a wafer;
the lower part of the squeeze plate 42 and the upper part of the fixed plate 44 are both provided with a buffer pad 43, the squeeze plate 42 and the fixed plate 44 are both C-shaped, openings of the squeeze plate 42 and the fixed plate 44 on the left side and the right side are oppositely arranged, the buffer pad 43 can be made of rubber or fiber materials, and scratches and pollution to a wafer in the clamping process are reduced.
It should be noted that the utility model is a turnover jig for visual inspection of upper and lower cover-clamping type wafers, which starts a moving motor 34, drives a screw 35 to rotate, enables a mounting frame 33 on the left side to move to a proper position, adapts to wafers with different sizes, places the wafers to be inspected between a pressing plate 42 and a fixing plate 44, a cushion 43 can buffer the pressure born by the wafers, starts a push rod 41, drives the pressing plate 42 to move downwards, enables the pressing plate 42 and the fixing plate 44 to jointly fix the wafers, starts a rotating motor 21, can rotate the wafers to other angles, and a supporting plate 23 can support a mounting plate 22 and other parts above, starts two turnover motors 32 on the two sides, drives a mounting frame 31 and a clamping device 4 to turn over, enables the wafers clamped by the clamping device 4 to turn over, and facilitates the inspection of wafers on the other side.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a top and bottom double-layered lid formula wafer visual inspection tool that can overturn, includes holding box (1), its characterized in that: the utility model discloses a portable electronic device, including holding box (1), rotary device (2), clamping device (4) and clamping device, the rear portion of holding box (1) upwards extends and is fixed with strong light (5), the lower inner wall of holding box (1) is provided with rotary device (2), the upper end of rotary device (2) is provided with two bilateral symmetry's turning device (3), two turning device (3) all upwards extend, two one side that upper portion of turning device (3) is close to each other all is provided with clamping device (4), two clamping device (4) bilateral symmetry sets up.
2. The flip-top wafer vision inspection jig of claim 1, wherein: the accommodating box (1) comprises a box body (11), wherein a placement plate (12) is fixedly connected to the rear portion of the upper end of the box body (11), the placement plate (12) extends upwards, and a strong light lamp (5) is fixedly installed on the upper portion of the front end of the placement plate (12).
3. The flip-top wafer inspection jig of claim 2, wherein: the rotating device (2) comprises a rotating motor (21), the rotating motor (21) is fixed at the center of the lower inner wall of the box body (11), the output end of the rotating motor (21) is fixedly connected with a mounting plate (22), two support plates (23) are symmetrically and fixedly arranged at the left part of the lower end and the right part of the lower end of the mounting plate (22), and the two support plates (23) are in sliding connection with the lower inner wall of the box body (11).
4. The flip-top wafer inspection jig of claim 3, wherein: the turnover device (3) comprises a mounting frame (33) and a mobile motor (34), wherein the mounting frame (33) is fixed on the left part of the upper end or the right part of the upper end of the mounting plate (22), the mobile motor (34) is fixed on the middle part of the upper end of the mounting plate (22), the output end of the mobile motor (34) is fixedly connected with a screw rod (35), the screw rod (35) is in threaded connection with the left mounting frame (33), the upper end of the mounting frame (33) is fixedly provided with a turnover motor (32), and the output end of the turnover motor (32) is fixedly connected with a mounting frame (31).
5. The flip-top wafer inspection jig of claim 4, wherein: the clamping device (4) comprises a push rod (41) and a fixing plate (44), wherein the fixing plate (44) is fixedly arranged on the lower inner wall of the mounting frame (31), the push rod (41) is fixed in the middle of the upper inner wall of the mounting frame (31), the output end of the push rod (41) is fixedly connected with a squeezing plate (42), and the position of the squeezing plate (42) corresponds to the fixing plate (44).
6. The flip-top wafer inspection jig of claim 5, wherein: the lower part of stripper plate (42) with the upper portion of fixed plate (44) all is provided with blotter (43), stripper plate (42) and fixed plate (44) are the opening subtend setting of stripper plate (42) and fixed plate (44) of C shape and left and right sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322924847.6U CN221304654U (en) | 2023-10-31 | 2023-10-31 | Upper and lower clamp cover type wafer visual inspection reversible jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322924847.6U CN221304654U (en) | 2023-10-31 | 2023-10-31 | Upper and lower clamp cover type wafer visual inspection reversible jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221304654U true CN221304654U (en) | 2024-07-09 |
Family
ID=91741184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322924847.6U Active CN221304654U (en) | 2023-10-31 | 2023-10-31 | Upper and lower clamp cover type wafer visual inspection reversible jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221304654U (en) |
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2023
- 2023-10-31 CN CN202322924847.6U patent/CN221304654U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |