CN207845779U - Substrate holds formula quartz boat under the arm automatically - Google Patents
Substrate holds formula quartz boat under the arm automatically Download PDFInfo
- Publication number
- CN207845779U CN207845779U CN201820126961.0U CN201820126961U CN207845779U CN 207845779 U CN207845779 U CN 207845779U CN 201820126961 U CN201820126961 U CN 201820126961U CN 207845779 U CN207845779 U CN 207845779U
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- China
- Prior art keywords
- quartz boat
- substrate
- swing arm
- ontology
- arm
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Abstract
The utility model is related to a kind of substrates to hold formula quartz boat, including quartz boat ontology under the arm automatically, it is characterized in that：Swing arm is compressed in the rotation setting of the both sides of the quartz boat ontology, compresses the upper end setting compressed part of swing arm, pressed parts extend to the lower part of quartz boat ontology in the top of quartz boat ontology, the lower end for compressing swing arm.The influence that the utility model can prevent quartz boat vibrated during the motion or air-flow is blown causes substrate to tilt or the case where fall, and ensures the stabilization of depositing operation and reliable.
Description
Technical field
The utility model is related to a kind of quartz boat, especially a kind of substrate holds formula quartz boat under the arm automatically.
Background technology
Quartz boat is the indispensable tool of diffusional deposition technique, and quartz boat high temperature resistant is indeformable, does not pollute device and can weigh
Multiple to use, especially in recent years since solar energy industry is quickly grown, people are also more and more using the style of quartz boat.
Quartz boat common at present does not have special design substrate fixed structure, the required sample source of material deposition to be placed on quartz
The substrate of the front end of boat, deposition is buckled to above quartz boat, heavy to ensure to maintain the distance between substrate and sample source
Long-pending effect.During material deposition process, quartz boat and the substrate being buckled in above quartz boat need to be sent into inside reaction chamber
When, due to the influence of air-flow and vibration, substrate is likely to slide or tilt, thus affects the mistake of entire material deposition
Journey, or even can not deposition materials.
Invention content
The purpose of the utility model is to overcome the deficiencies in the prior art, a kind of substrate is provided and holds formula quartz under the arm automatically
Boat, can prevent quartz boat vibrated during the motion or influence that air-flow is blown causes substrate to tilt or fall
The case where, ensure the stabilization of depositing operation and reliable.
According to technical solution provided by the utility model, the substrate holds formula quartz boat, including quartz boat ontology under the arm automatically,
It is characterized in：Swing arm is compressed in the rotation setting of the both sides of the quartz boat ontology, compresses the upper end setting compressed part of swing arm, compressed part
Positioned at the top of quartz boat ontology, the lower end for compressing swing arm extends to the lower part of quartz boat ontology.
Further, the compression swing arm is rotatably installed in the mounting base of quartz boat ontology following side.
Further, the surface of the compressed part is arc-shaped.
The utility model has the following advantages：
（1）The utility model is easy to operate to be additionally clamped using compression swing arm quartz boat ontology integral structure
Tool；
（2）The utility model improves the Reliability Assurance of substrate clamping process material deposition process quality；
（3）Position of the deposition substrate on quartz boat can arbitrarily adjust, it is ensured that the flexibility of depositing operation.
Description of the drawings
Fig. 1 is that substrate described in the utility model holds formula quartz boat under the arm by the schematic diagram of substrate impaction state automatically.
Fig. 2 is that substrate described in the utility model holds formula quartz boat under the arm by the side view of substrate impaction state automatically.
Fig. 3 is that substrate described in the utility model holds formula quartz boat under the arm by the schematic diagram of substrate releasing orientation automatically.
Fig. 4 is that substrate described in the utility model holds formula quartz boat under the arm by the side view of substrate releasing orientation automatically.
Reference sign：1- quartz boats ontology, 2- compress swing arm, 3- deposition substrates, 4- mounting bases, 5- compressed parts.
Specific implementation mode
With reference to specific attached drawing, the utility model is described in further detail.
As Figure 1-Figure 4, it includes quartz boat ontology 1 that substrate described in the utility model holds formula quartz boat under the arm automatically, in quartz
The both sides rotation setting of boat ontology 1 compresses swing arm 2, compresses the mounting base 4 that swing arm 2 is rotatably installed in 1 following side of quartz boat ontology
On, compressed part 5 is arranged in the upper end for compressing swing arm 2, and compressed part 5 is located at the top of quartz boat ontology 1, and the lower end for compressing swing arm 2 is prolonged
Extend to the lower part of quartz boat ontology 1.
In order to avoid compressed part 5 scratches the surface of deposition substrate 3, the surface of the compressed part 5 is arc-shaped.
Substrate described in the utility model holds the course of work of formula quartz boat under the arm automatically：
1, substrate unclamps：
Quartz boat ontology 1 is put on the table, and the lower part of quartzy midship ontology 1 is under pressure at this time, and compression swing arm 2 is made to occur to turn
Dynamic, opens voluntarily reserves a gap between 1 upper surface of compressed part 5 and quartz boat ontology and places deposition substrate 3, depositing
The material and people's one-handed performance that 3 surface of deposition substrate deposition will not be all scratched when the placement and sampling of substrate 3, ensure
The operability and simplification of structure.
2, substrate clamps：
When quartz boat ontology 1 takes up, the meeting of swing arm 2 is compressed due to gravity and be occurred due to gravity
Rotation, makes compressed part 5 be tightly pressed at 3 surface of deposition substrate, ensure that deposition substrate 3 will not be fallen due to other extraneous factors
Or it tilts.
The utility model is transformed on the basis of existing quartz boat, makes quartz boat for material deposition process
When have sizable advantage, simplify operating process, facility brought to depositing operation, it is simple in structure.Improved structure
It to avoid the bad influence caused by vibration and the factors such as air-flow, can ensure the stabilization of depositing operation and reliable.In addition, substrate is put
It sets easy to operate, saves the destabilizing factor for being positioned manually and bringing, save the time, avoid the sample brought by operation error dirty
Dye, contamination of substrate and sample source position such as are stirred at the risk for seriously affecting material deposition effect.
Claims (3)
1. a kind of substrate holds formula quartz boat, including quartz boat ontology under the arm automatically（1）, it is characterized in that：In the quartz boat ontology（1）'s
Both sides rotation setting compresses swing arm（2）, compress swing arm（2）Upper end be arranged compressed part（5）, compressed part（5）Positioned at quartz boat sheet
Body（1）Top, compress swing arm（2）Lower end extend to quartz boat ontology（1）Lower part.
2. substrate as described in claim 1 holds formula quartz boat under the arm automatically, it is characterized in that：The compression swing arm（2）It is rotatably installed in
Quartz boat ontology（1）The mounting base of following side（4）On.
3. substrate as described in claim 1 holds formula quartz boat under the arm automatically, it is characterized in that：The compressed part（5）Surface be in circular arc
Shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820126961.0U CN207845779U (en) | 2018-01-25 | 2018-01-25 | Substrate holds formula quartz boat under the arm automatically |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820126961.0U CN207845779U (en) | 2018-01-25 | 2018-01-25 | Substrate holds formula quartz boat under the arm automatically |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207845779U true CN207845779U (en) | 2018-09-11 |
Family
ID=63412396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820126961.0U Active CN207845779U (en) | 2018-01-25 | 2018-01-25 | Substrate holds formula quartz boat under the arm automatically |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207845779U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103481A (en) * | 2018-01-25 | 2018-06-01 | 无锡盈芯半导体科技有限公司 | Substrate holds formula quartz boat under the arm automatically |
-
2018
- 2018-01-25 CN CN201820126961.0U patent/CN207845779U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103481A (en) * | 2018-01-25 | 2018-06-01 | 无锡盈芯半导体科技有限公司 | Substrate holds formula quartz boat under the arm automatically |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191226 Address after: Room 1501-08, building 1, No. 311, Yanxin Road, Huishan Economic Development Zone, Wuxi City, Jiangsu Province Patentee after: Wuxi menuo Semiconductor Technology Co., Ltd Address before: 214187 Building 1, Cai Zhi Plaza, 311 Yan new road, Huishan Economic Development Zone, Wuxi, Jiangsu. Patentee before: WUXI YINGXIN SEMICONDUCTOR TECHNOLOGY CO., LTD. |