CN221262325U - Automatic substrate inserting machine - Google Patents

Abstract

The utility model relates to the technical field of auxiliary facilities for slicing substrates, in particular to an automatic substrate inserting machine which comprises a supporting frame, a lifting tray, an air injection structure, a slice taking structure, a conveying structure and a storage structure, wherein the lifting tray is arranged on the supporting frame and used for placing substrates, the air injection structure is arranged on the supporting frame and used for suspending the substrates positioned on the lifting tray, the slice taking structure is positioned between the placing structure and the conveying structure and used for grabbing the suspended substrates and transferring the grabbed substrates to the conveying structure, and the storage structure is positioned at the tail end of the conveying structure in the conveying direction and used for receiving the substrates conveyed by the conveying structure. By the arrangement, automatic inserting sheets can be realized, and adverse effects caused by manual inserting sheets are avoided.

Description

Automatic substrate inserting machine

Technical Field

The utility model relates to the technical field of auxiliary facilities for slicing of substrates, in particular to an automatic substrate inserting machine.

Background

At present, the traditional substrate processing after slicing is carried out by manual operation, and the specific working flow is as follows: firstly, preparing a wafer cassette required for receiving a wafer and a substrate to be received; then, the wafer boat box is placed at a fixed position, and a foam cushion is cushioned at the bottom to avoid the collision of the wafer boat box; finally, a stack of substrates is manually held and sequentially stacked into the cassette. This approach has the following problems: at present, the substrate collecting is manually operated, so that the manual fatigue is easily caused, and the requirements on the proficiency and skill of personnel are high; in addition, because the spacing between the wafer cassette sheets is smaller, visual errors are easy to occur in the manual inserting process, so that oblique insertion or misplug is caused, and the surface of the substrate is scratched and other adverse conditions are caused.

It should be noted that the information disclosed in this background section is only for the purpose of increasing the understanding of the general background of the utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art

Disclosure of utility model

The utility model provides an automatic substrate inserting machine which comprises a supporting frame, a lifting tray, an air injection structure, a piece taking structure, a conveying structure and a storage structure.

The lifting tray is arranged on the supporting frame and used for placing the substrate. The air injection structure is arranged on the supporting frame and used for suspending the substrate on the lifting tray. The slice taking structure is positioned between the placing structure and the conveying structure and is used for grabbing the suspended substrate and transferring the grabbed substrate onto the conveying structure. The storage structure is positioned at the tail end of the transmission direction of the transmission structure and is used for receiving the substrate conveyed by the transmission structure.

Further, the substrate automatic tab machine may also include a gripping device. The clamping device is connected with the storage structure and used for clamping the storage structure and conveying the clamped storage structure to a preset area. The clamping device can comprise a clamping arm, a pressing device, a transverse transmission device and a lifting air cylinder, wherein the clamping arm is connected with the storage structure, the pressing device is connected with the clamping arm and corresponds to the upper part of the storage structure, the transverse transmission device is connected with the pressing device, and the lifting air cylinder is connected with the transverse transmission device.

Further, the substrate automatic tab machine may further include a counting structure for recording substrate information passing over the transport structure.

Further, the automatic substrate inserting machine can further comprise a guide structure, and the guide structure is connected with the lifting tray. The guide structure may be a guide belt.

Further, the sheet taking structure can comprise a rotary sheet taking frame, a lifting structure and 2 suckers. The lifting structure is connected with the rotary sheet taking frame, and the 2 suckers are respectively positioned at two opposite ends of the rotary sheet taking frame.

Further, the support frame is rotatable. The number of the lifting trays is multiple, and the lifting trays are uniformly distributed at the periphery of the supporting frame. The air injection structure is an air nozzle.

According to the automatic substrate inserting machine provided by the embodiment of the utility model, the automatic inserting can be realized by means of the collocation of the supporting frame, the lifting tray, the air injection structure, the sheet taking structure, the transmission structure and the storage structure, and adverse effects caused by manual inserting are avoided. Taking 100 ten thousand substrates per month of 4 inches as an example, 3 staff are needed to be placed into the wafer boat material box as manual inserting sheets in the traditional mode, and the automatic substrate inserting machine can greatly reduce the personnel load, reduce the labor load to 1 staff, work the wafer boat material box, and only need to put stacked substrates and retract the filled material box. In addition, defects such as scratch, corner breakage and the like caused by artificial inserting sheets can be avoided.

Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, a brief description will be given below of the drawings required for the embodiments or the prior art descriptions, and it is obvious that some of the drawings in the following description are some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a substrate automatic tab machine according to one embodiment of the present utility model;

Fig. 2 is an enlarged partial schematic view of the area a in fig. 1.

Reference numerals:

10-supporting frames; 12-lifting a tray; 14-jet structure; 16-taking a piece structure; 162-rotating the film taking rack; 164-lifting structure; 166-sucking disc; 18-a transmission structure; 20-a storage structure; 22-a substrate; 24-guiding structure; 26-a gripping device; 262-clamping arms; 264-pressing device; 266-transverse transport means; 268-lifting cylinder; 28-counting structure; 30-finishing the operation area; 32-a region to be loaded.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model; the technical features designed in the different embodiments of the utility model described below can be combined with each other as long as they do not conflict with each other; all other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or components referred to must have a specific orientation or be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more. In addition, the term "comprising" and any variations thereof are meant to be "at least inclusive".

Referring to fig. 1 and 2, fig. 1 is a schematic structural diagram of an automatic substrate 22 inserting machine according to an embodiment of the utility model, and fig. 2 is a partially enlarged schematic diagram of a region a in fig. 1. To achieve at least one of the advantages and others, an embodiment of the present utility model provides an automatic substrate 22 tab machine. As shown, the substrate 22 robotic tab machine includes a support frame 10, a lift tray 12, an air jet structure 14, a tab taking structure 16, a transport structure 18, and a storage structure 20.

The lifting tray 12 is disposed on the support frame 10 for placing the substrates 22, and the number of the placed substrates 22 is usually plural, so as to improve the working efficiency, but the present invention is not limited thereto, and the number of the placed substrates 22 may be one. The lift pallet 12 itself is liftable to raise and lower the substrate 22 thereon.

An air jet structure 14 is provided on the support frame 10 for suspending a substrate 22 positioned on the lift tray 12. The gas injection structure 14 may be a gas nozzle or other structure capable of effecting separation of the substrates 22. Taking an air nozzle as an example, when the air nozzle is activated to eject air, the uppermost substrate 22 is suspended and separated from the underlying substrate 22 for removal by the take-off structure 16. The air pressure at the air nozzle may be 40psi and the inner diameter may be 2mm, and a pressure regulating valve may be added to the tubing to blow up and suspend the substrate 22. In some embodiments, the height at which the substrate 22 is stopped from rising may be 0.5mm below the height of the air nozzle to prevent more substrates 22 from being blown up. In some embodiments, the number of air jets may be 2, with 2 air jets being oppositely disposed to facilitate better levitation of the substrate 22.

The pick-up structure 16 is located between the placement structure and the transfer structure 18 for grasping a suspended substrate 22 and transferring the grasped substrate 22 onto the transfer structure 18. In some embodiments, the pick up structure 16 may include a rotating pick up frame 162, a lifting structure 164, and 2 suction cups 166. The rotating film take-off rack 162 is itself rotatable, such as by rotating a base to effect rotation thereof. The lifting structure 164 is connected to the rotary film taking frame 162, and is used for driving the rotary film taking frame 162 to lift. The 2 suction cups 166 are respectively located at opposite ends of the rotating pick-up frame 162, and the suction cups 166 are used to suck the suspended substrate 22, and then the rotating pick-up frame 162 rotates, so as to move the sucked substrate 22 onto the transport structure 18. The suction cup 166 may be configured to suck the substrate 22 by vacuum suction, and subsequently release the vacuum to release the substrate 22 from the suction cup 166 and onto the transport structure 18.

The storage structure 20 is located at the trailing end of the transport direction of the transport structure 18 for receiving substrates 22 transported by the transport structure 18. The tail end of the transport direction can be understood as: when the transmission direction is from left to right, the right end is the tail end of the transmission direction. The storage structure 20 may be a cassette or the like capable of storing the substrates 22. The transport structure 18 is used for transporting the substrate 22, and the transport structure 18 may be a structure capable of achieving a transport purpose, such as a conveyor belt.

In some embodiments, the substrate 22 automatic tab machine may also include a guide structure 24. The guiding structure 24 is connected to the lifting tray 12, and is used for guiding the lifting of the substrate 22, so as to avoid the adverse situations such as deviation of the substrate 22 and the like, and cause operation errors. The guide structure 24 may be a guide belt, and may also prevent the substrate 22 from being bumped or the like.

In some embodiments, the substrate 22 automatic tab machine may also include a gripping device 26. The gripping device 26 is connected to the storage structure 20 for gripping the storage structure 20 and delivering the gripped storage structure 20 to a predetermined area, such as a finishing area 30, for performing subsequent further operations. In addition, the gripping device 26 may also grip the empty storage structure 20 located in the loading area 32 to the tail end of the transport structure 18, so that the storage structure 20 may perform the operation of collecting the substrates 22.

The gripping device 26 may include a gripping arm 262, a hold-down device 264, a lateral transfer device 266, and a lift cylinder 268. The clamping arm 262 is connected with the storage structure 20 and is used for clamping the storage structure 20 to drive the storage structure to move, and the clamping arm 262 can achieve the clamping effect through the clamping cylinder. A hold down device 264 is coupled to the gripping arm 262 and corresponds to an upper portion of the storage structure 20 for holding down the storage structure 20, such as lowering the storage structure 20 by the height of one substrate 22 to facilitate entry of a next substrate 22 into the storage structure 20. A lateral transfer device 266 is connected to the hold-down device 264 for moving the storage structure 20, for example, moving a full storage structure 20 to the completion area 30 and an empty storage structure 20 from the to-be-loaded area 32 to the end of the transfer structure 18. Lifting cylinder 268 is connected to lateral transfer device 266 to provide functional support for lifting and lowering to effect lifting and lowering of the overall structure.

The substrate 22 robot blade may also include a counting structure 28, the counting structure 28 being configured to record information of the substrates 22 passing over the transport structure 18. A counting structure 28 may be provided on the transport structure 18 to facilitate recording information passed by the substrate 22 for subsequent retrospective verification of the substrate 22. The counting mechanism 28 may be coupled to the gripping mechanism 26, the inserted substrates 22 are transferred via the transfer mechanism 18, and the counting mechanism 28 counts the number of sheets, and the pressing mechanism 264 controls the storage mechanism 20 to descend until the next substrate 22 is entered. The counting structure 28 not only can count the number of the substrates 22 to determine whether there is a count of loss or drop during the operation, but also can count numbers according to the sequence of the substrates 22, for example, form a serial number of lot numbers, so as to implement a tracing function, for example, tracing the source information of the substrates 22 in a subsequent stage.

In some embodiments, the support frame 10 is rotatable. The number of the lifting trays 12 may be plural, and the lifting trays 12 are uniformly distributed at the periphery of the supporting frame 10, so as to improve the working efficiency of the working procedure. For example, the number of lifting trays 12 may be 4, and 4 lifting trays 12 are uniformly distributed at the periphery of the support frame 10, and each lifting tray 12 is provided with a substrate 22.

The workflow of the substrate 22 automatic tab machine is described as follows: first, the substrates 22 to be picked up are stacked on the lift pallet 12, and the empty storage structure 20 is placed in the loading area 32 to be picked up by the pick device 26. Then, the lifting tray 12 is lifted up one by one through the guide structure 24, the subsequent air injection structure 14 starts air injection, the uppermost substrate 22 is suspended and separated from the substrate 22 below, the suspended substrate 22 is sucked by the suction cup 166, and the substrate 22 is taken out by the rotary sheet taking mechanism and placed on the conveying structure 18 for conveying. Then, the lifting tray 12 is lifted to the height position of one piece of the substrate 22, the air spraying structure 14 starts air spraying, the sucker 166 sucks the next piece, and the above steps are repeated. Transport structure 18 carries substrates 22 for movement and, after passing counting structure 28, into storage structure 20. In the process, the storage structure 20 is controlled to descend by the signal of the counting structure 28 so that the next substrate 22 can normally enter the storage structure 20. So reciprocating, after the storage structure 20 is fully stored, the machine is suspended. The lateral transfer device 266 transfers the filled storage structure 20 to the completion station 30, and picks up the empty storage structure 20 at the loading-to-be-loaded station 32 to the tail end of the transfer structure 18 for standby, and then starts the machine to repeat the process of transferring the substrates 22, and ends the process after all the substrates 22 have been inserted into the storage structure 20.

According to the automatic substrate 22 inserting machine provided by the embodiment of the utility model, by means of the collocation arrangement of the supporting frame 10, the lifting tray 12, the air injection structure 14, the sheet taking structure 16, the transmission structure 18 and the storage structure 20, automatic inserting can be realized, and adverse effects caused by manual inserting can be avoided. Taking 100 ten thousand substrates 22 per month of 4 inches as an example, 3 workers are needed to be placed into the cassette as manual inserting sheets in the conventional manner, and the automatic inserting machine for the substrates 22 can greatly reduce the personnel load, reduce the labor load to 1 worker, only need to put stacked substrates 22 and retract the filled cassettes. In addition, defects such as scratch, corner breakage and the like caused by artificial inserting sheets can be avoided. In addition, the feeding area can be provided with multiple stations; the discharging area conveyor belt can be extended to the next procedure or combined with an automatic arm or AGV automatic transmission trolley for extension, and combined with the automatic layout of the whole workshop.

In addition, it should be understood by those skilled in the art that although there are many problems in the prior art, each embodiment or technical solution of the present utility model may be modified in only one or several respects, without having to solve all technical problems listed in the prior art or the background art at the same time. Those skilled in the art will understand that nothing in one claim should be taken as a limitation on that claim.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims (10)

1. An automatic substrate inserting machine is characterized in that: the automatic substrate inserting machine comprises a support frame, a lifting tray, an air injection structure, a wafer taking structure, a transmission structure and a storage structure;

the lifting tray is arranged on the supporting frame and used for placing a substrate;

The air injection structure is arranged on the supporting frame and used for suspending the substrate on the lifting tray;

The slice taking structure is positioned between the placing structure and the transmission structure and is used for grabbing the suspended substrate and transferring the grabbed substrate onto the transmission structure;

the storage structure is positioned at the tail end of the transmission direction of the transmission structure and is used for receiving the substrate conveyed by the transmission structure.

2. The automatic substrate insertion machine of claim 1, wherein: the automatic substrate inserting machine further comprises a clamping device, wherein the clamping device is connected with the storage structure and used for clamping the storage structure and conveying the clamped storage structure to a preset area.

3. The substrate automatic tab machine of claim 2 wherein: the clamping device comprises a clamping arm, a pressing device, a transverse transmission device and a lifting cylinder, wherein the clamping arm is connected with the storage structure, the pressing device is connected with the clamping arm and corresponds to the upper portion of the storage structure, the transverse transmission device is connected with the pressing device, and the lifting cylinder is connected with the transverse transmission device.

4. The substrate automatic tab machine of claim 2 wherein: the automatic substrate inserting machine further comprises a counting structure, wherein the counting structure is connected with the clamping device and used for recording substrate information passing through the transmission structure.

5. The automatic substrate insertion machine of claim 1, wherein: the automatic substrate inserting machine further comprises a guide structure, and the guide structure is connected with the lifting tray.

6. The automatic substrate inserting machine according to claim 5, wherein: the guide structure is a guide belt.

7. The automatic substrate insertion machine of claim 1, wherein: the sheet taking structure comprises a rotary sheet taking frame, a lifting structure and 2 suckers, wherein the lifting structure is connected with the rotary sheet taking frame, and the 2 suckers are respectively positioned at two opposite ends of the rotary sheet taking frame.

8. The automatic substrate insertion machine of claim 1, wherein: the support frame is rotatable.

9. The automatic substrate insertion machine of claim 8, wherein: the number of the lifting trays is multiple, and the lifting trays are uniformly distributed at the periphery of the supporting frame.

10. The automatic substrate insertion machine of claim 1, wherein: the air injection structure is an air nozzle.