CN220855445U - Manual double-sided concentric adjusting platform - Google Patents
Manual double-sided concentric adjusting platform Download PDFInfo
- Publication number
- CN220855445U CN220855445U CN202322594809.9U CN202322594809U CN220855445U CN 220855445 U CN220855445 U CN 220855445U CN 202322594809 U CN202322594809 U CN 202322594809U CN 220855445 U CN220855445 U CN 220855445U
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- platform
- alignment lens
- supporting seat
- adjustment platform
- lens
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- 238000003825 pressing Methods 0.000 claims description 8
- 238000001259 photo etching Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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Abstract
The utility model belongs to the technical field of photoetching machines, and discloses a manual double-sided concentric adjustment platform which comprises a platform, wherein an installation seat is vertically arranged on the platform, a horizontally arranged supporting seat and a vertically arranged linear guide rail are arranged on the installation seat, a lower adjustment mechanism and an upper adjustment mechanism are slidably arranged on the linear guide rail, a lower alignment lens is arranged on the lower adjustment mechanism, a Y-axis fine adjustment platform is arranged on the upper adjustment mechanism, an X-axis fine adjustment platform is arranged on the Y-axis fine adjustment platform, an upper alignment lens is arranged on the X-axis fine adjustment platform, the upper alignment lens and the lower alignment lens are respectively positioned on the upper side and the lower side of the supporting seat, and a calibration ruler is arranged on the supporting seat. The manual double-sided concentric adjustment platform is characterized in that the calibration ruler is arranged on the XY axis object stage when in use, and the calibration ruler is used as a reference, so that the upper alignment lens and the lower alignment lens can be conveniently adjusted, and the upper alignment lens and the lower alignment lens are concentric.
Description
Technical Field
The utility model belongs to the technical field of photoetching machines, and particularly relates to a manual double-sided concentric adjustment platform.
Background
The photoetching machine is used as core manufacturing equipment of an integrated circuit, and the manufacturing precision in the production process is a key for guaranteeing the chip yield. In double-sided exposure lithography, before exposure, an upper alignment lens and a lower alignment lens are required to be adjusted to be concentric, then alignment marks are carried out, exposure operation can be carried out after alignment is completed, an automatic adjustment mode and a manual adjustment mode are provided for concentric adjustment platforms of the upper alignment lens and the lower alignment lens, and during manual adjustment, the adjustment can be carried out through auxiliary tools such as a calibration ruler, but the structural design of the conventional manual adjustment platform is unreasonable, and the adjustment of an X axis and a Y axis is inconvenient and the operation is complicated.
Disclosure of utility model
The present utility model aims to solve the above technical problems at least to some extent. To this end, the present utility model aims to provide a manual double-sided concentric adjustment platform.
The technical scheme adopted by the utility model is as follows:
The utility model provides a manual two-sided concentric adjustment platform, the on-line screen storage device comprises a base, vertical mount pad that installs on the base, be equipped with the supporting seat and the linear guide of vertical setting that the level set up on the mount pad, sliding mounting has adjustment mechanism and last adjustment mechanism down on the linear guide, install down the counterpoint camera lens on the adjustment mechanism down, install Y axle fine setting platform on the last adjustment mechanism, install X axle fine setting platform on the Y axle fine setting platform, install on the X axle fine setting platform and counterpoint camera lens, go up counterpoint camera lens and lower counterpoint camera lens and be located the upper and lower both sides of supporting seat respectively, be provided with the scale on the supporting seat.
Preferably, the support seat is provided with an XY axis object stage, and the calibration ruler is arranged on the XY axis object stage.
Preferably, the lower adjusting mechanism is provided with a supporting plate, the supporting plate is provided with a pressing plate through a screw, and the lower alignment lens is arranged between the supporting plate and the pressing plate.
The beneficial effects of the utility model are as follows:
The manual double-sided concentric adjustment platform provided by the utility model is used, when the manual double-sided concentric adjustment platform is used, the calibration ruler is placed on the XY axis object stage, and the calibration ruler is used as a reference, so that the upper alignment lens and the lower alignment lens can be conveniently adjusted, and the upper alignment lens and the lower alignment lens are concentric.
Drawings
FIG. 1 is a perspective view of a manual double-sided concentric adjustment platform of the present utility model.
FIG. 2 is a front view of the manual double-sided concentric adjustment platform of the present utility model.
FIG. 3 is a side view of a manual double sided concentric adjustment platform of the present utility model.
In the figure: 1-a base; 2-a mounting base; 3-a lower adjustment mechanism; 4-a supporting seat; 5-XY axis stage; 6-a linear guide rail; 7-an upper adjustment mechanism; 8-upper alignment lens; 9-Y axis fine tuning platform; a 10-X axis fine tuning platform; 11-calibrating a ruler; 12-lower alignment lens; 13-a support plate; 14-pressing plate.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements.
The utility model will be further described with reference to the drawings and specific examples.
As shown in fig. 1 to 3, a manual double-sided concentric adjustment platform of this embodiment includes a base 1, the base 1 is a foundation for installing each component, a mounting seat 2 is vertically installed on the base 1, a supporting seat 4 horizontally arranged and a linear guide 6 vertically arranged are provided on the mounting seat 2, and the supporting seat 4 and the linear guide 6 are located on the same side of the mounting seat 2. The linear guide rail 6 is provided with a lower adjusting mechanism 3 and an upper adjusting mechanism 7 in a sliding manner, and the lower adjusting mechanism 3 and the upper adjusting mechanism 7 can move up and down along the linear guide rail 6 to adjust positions.
The lower adjusting mechanism 3 is provided with a lower alignment lens 12, specifically, the lower adjusting mechanism 3 is provided with a supporting plate 13, the supporting plate 13 is provided with a pressing plate 14 through a screw, and the lower alignment lens 12 is arranged between the supporting plate 13 and the pressing plate 14 and is fixed through pressure.
The upper adjusting mechanism 7 is provided with a Y-axis fine adjustment platform 9, the Y-axis fine adjustment platform 9 is provided with an X-axis fine adjustment platform 10, the X-axis fine adjustment platform 10 is provided with an upper alignment lens 8, the position of the upper alignment lens 8 in the X-axis direction can be adjusted through the X-axis fine adjustment platform 10, and the positions of the X-axis fine adjustment platform 10 and the upper alignment lens 8 in the Y-axis direction can be adjusted through the Y-axis fine adjustment platform 9.
The upper alignment lens 8 is also mounted on the X-axis fine adjustment platform 10 through a support plate and a pressing plate, and its specific mounting structure is consistent with that of the lower alignment lens 12, which will not be described herein.
The upper alignment lens 8 and the lower alignment lens 12 are respectively positioned on the upper side and the lower side of the supporting seat 4, the supporting seat 4 is provided with an XY axis object stage 5, and the calibration ruler 11 is arranged on the XY axis object stage 5. The upper alignment lens 8 and the lower alignment lens 12 are electrically connected with the display.
The operation flow and the working principle of the manual double-sided concentric adjustment platform are as follows: manually placing the calibration ruler 11 on the XY axis object stage 5, manually adjusting the position of the XY axis object stage 5, and manually adjusting the position of the lower adjusting mechanism 3 to enable the lower alignment lens 12 to align the marks on the calibration ruler 11, wherein a clear lower alignment lens 12 mark frame is arranged on the display; then the upper adjusting mechanism 7 is manually adjusted to enable the display to be provided with a clear upper alignment lens 8 marking frame, and then the Y-axis fine adjustment platform and the X-axis fine adjustment platform are manually adjusted according to the situation to enable the marking frames of the upper alignment lens and the lower alignment lens to coincide, so that the concentric adjustment of the upper alignment lens and the lower alignment lens is completed.
The utility model is not limited to the above-described alternative embodiments, and any person who may derive other various forms of products in the light of the present utility model, however, any changes in shape or structure thereof, all falling within the technical solutions defined in the scope of the claims of the present utility model, fall within the scope of protection of the present utility model.
Claims (4)
1. A manual two-sided concentric adjustment platform, its characterized in that: including base (1), install mount pad (2) on base (1) vertically, be equipped with supporting seat (4) and the linear guide (6) of vertical setting that the level set up on mount pad (2), sliding mounting has lower adjustment mechanism (3) and last adjustment mechanism (7) on linear guide (6), install down counterpoint camera lens (12) on lower adjustment mechanism (3), install Y axle fine setting platform (9) on last adjustment mechanism (7), install X axle fine setting platform (10) on Y axle fine setting platform (9), install on X axle fine setting platform (10) and go up counterpoint camera lens (8) and be located the upper and lower both sides of supporting seat (4) respectively with counterpoint camera lens (12), be provided with on supporting seat (4) and mark chi (11).
2. The manual double-sided concentric adjustment platform according to claim 1, characterized in that: an XY axis objective table (5) is arranged on the supporting seat (4), and the calibrating ruler (11) is arranged on the XY axis objective table (5).
3. The manual double-sided concentric adjustment platform according to claim 1, characterized in that: the upper alignment lens (8) and the lower alignment lens (12) are electrically connected with the display.
4. A manual double sided concentric adjustment platform according to any one of claims 1 to 3, wherein: the lower adjusting mechanism (3) is provided with a supporting plate (13), the supporting plate (13) is provided with a pressing plate (14) through a screw, and the lower alignment lens (12) is arranged between the supporting plate (13) and the pressing plate (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322594809.9U CN220855445U (en) | 2023-09-25 | 2023-09-25 | Manual double-sided concentric adjusting platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322594809.9U CN220855445U (en) | 2023-09-25 | 2023-09-25 | Manual double-sided concentric adjusting platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220855445U true CN220855445U (en) | 2024-04-26 |
Family
ID=90788794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322594809.9U Active CN220855445U (en) | 2023-09-25 | 2023-09-25 | Manual double-sided concentric adjusting platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220855445U (en) |
-
2023
- 2023-09-25 CN CN202322594809.9U patent/CN220855445U/en active Active
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