CN220821598U - Piezoelectric effect needling huge transfer device - Google Patents

Abstract

The utility model discloses a piezoelectric effect needling huge amount transfer device, which comprises a piezoelectric needling motion system, a crystal film motion system and a substrate motion system which are arranged on a marble platform; the piezoelectric needling system comprises a supporting beam, a needling sliding table movement module, a needling assembly movement module and a needling assembly; the crystal film movement system comprises a left marble Dan Zhi, a right marble support, a carrier mounting rack, a crystal film carrier and a crystal film, wherein a plurality of chips are adhered to the bottom surface of the crystal film; the substrate motion system comprises a left guide rail, a right guide rail, a support frame motor, a substrate support frame, a substrate fixing disc, a fixing disc motor and a substrate, wherein the substrate is arranged on the substrate fixing disc. The piezoelectric effect needling huge amount transfer device with the structure drives the thimble to move rapidly by using the inverse piezoelectric effect, so that the thimble pressure born by the chip is in a reasonable range, and the short-distance rapid start and stop is realized by using the piezoelectric mechanism, thereby realizing high efficiency and high yield.

Description

Piezoelectric effect needling huge transfer device

Technical Field

The utility model relates to the technical field of chip mass transfer, in particular to a piezoelectric effect needling mass transfer device.

Background

The development of the modern information society is not separated from the electronic display technology, and since the first Cathode Ray Tube (CRT) utility model in 1897, the display technology has developed for more than one hundred years to form LCD technology, OLED technology and Mini/Micro LED display technology. Compared with other display technologies, the Mini/Micro LED display screen is formed by independently packaging a plurality of Micro LEDs to form a single pixel point, has incomparable advantages in the aspects of luminous efficiency, power consumption, contrast ratio, response speed, service life and the like, and is the best choice of the next generation mainstream display screen.

The main technologies for producing the Mini/micro LED display screen mainly comprise chip preparation, mass transfer (MT, mass Transfer), detection and repair, and the like, wherein the mass transfer is to transfer millions or even tens of millions of peeled micro LED chips to a new substrate, and the process requires the chips to be aligned with the substrate and uses accurate position control technology and pressure control technology. The mass transfer technology directly affects the production speed, yield and production cost of the Mini/Micro LED display screen, and is a key factor for restricting the mass production of the LED display screen at present. Through many years of development, the mass transfer technology can be divided into: the precise pick-and-release transfer technology, the self-assembly technology, the roller transfer technology, the needle punching transfer technology, the laser stripping technology and other technical genres.

The huge amount transfer equipment is characterized by fast point-to-point repeated motion, the servo driving system is required to be started and stopped frequently at high speed, and the platform can accurately reach a preset position so as to meet the huge amount transfer requirement. Meanwhile, under the condition of meeting the given positioning precision, the speed and the acceleration of the platform are improved as much as possible, the mechanical movement time is shortened, and the requirement of high productivity is met. In order to improve transfer efficiency, the piezoelectric needling scheme is used for accurately controlling the ejector pins to move up and down at high frequency by changing the driving mode of the action of the ejector pin needling core and using the piezoelectric ceramic actuating element, so that the chip is pushed to flexibly peel off to a target substrate, and the system response is fast and the control precision is high.

The application patent 202210692296.2 discloses a chip spot press and a chip huge quantity transfer method, which provides a huge quantity transfer scheme which adopts a voice coil motor and a piezoelectric ceramic actuating element as power sources for controlling the movement of a flexible ejector pin in the x-axis direction and the z-axis direction respectively, and the piezoelectric ceramic actuating element drives the flexible ejector pin to move in the z-axis direction to strike a Micro-LED so that the flexible ejector pin falls into a chip receiving platform below to realize the huge quantity transfer of the Micro-LED chip.

Disclosure of utility model

The utility model aims to provide a piezoelectric effect needling huge transfer device, which drives a thimble to move rapidly by using the inverse piezoelectric effect, so that the thimble pressure born by a chip is in a reasonable range, and the short-distance rapid start and stop, high efficiency and high yield are realized by using a piezoelectric mechanism.

In order to achieve the above purpose, the utility model provides a piezoelectric effect needling huge amount transfer device, which comprises a piezoelectric needling motion system, a crystal film motion system and a substrate motion system which are arranged on a marble platform;

The piezoelectric needling system comprises a supporting beam, a needling sliding table moving module, a needling assembly moving module and a needling assembly, wherein the supporting beam is arranged on the marble platform, the needling sliding table moving module is fixed on the front end surface of the supporting beam, the needling assembly moving module is in sliding connection with the needling sliding table moving module through a needling sliding table mounting plate, the needling assembly is in sliding connection with the needling assembly moving module through a needle connecting plate, and a left industrial camera and a right industrial camera are arranged on two sides of the needling assembly moving module;

The crystal film movement system comprises a left marble Dan Zhi, a right marble support, a carrier mounting frame, a crystal film carrier and a crystal film, wherein a plurality of chips are adhered to the bottom surface of the crystal film, the crystal film is arranged in the crystal film carrier, the crystal film carrier is arranged in the center of the carrier mounting frame, and two ends of the carrier mounting frame are in sliding connection with the left marble Dan Zhi and the right marble Dan Zhi;

The base plate motion system comprises a left guide rail, a right guide rail, a support frame motor, a base plate support frame, a base plate fixing disc, a fixing disc motor and a base plate, wherein the base plate is arranged on the base plate fixing disc, the base plate fixing disc is in linkage with the fixing disc motor, the fixing disc motor is arranged at the top of the base support frame, the base plate support frame is in linkage with the support frame motor, the left end and the right end of the base plate support frame are in sliding connection with the left guide rail and the right guide rail, and the left guide rail and the right guide rail are fixed on the marble platform.

Preferably, the support beam spans above the left marble Dan Zhi and right marble support, and the left marble Dan Zhi and right marble Dan Zhi are located between the left marble Dan Zhi and right marble support against the support beam left and right rails.

Preferably, the needling slip table movement module comprises a movement module mounting plate, an upper guide rail, a lower guide rail, a piezoelectric actuator stator and a piezoelectric actuator rotor, wherein the movement module mounting plate is fixed on the front end face of a supporting beam through screws, the upper guide rail and the lower guide rail are respectively fixed on the upper edge and the lower edge of the movement module mounting plate in an up-down parallel manner, the piezoelectric actuator stator is fixed in the middle of the movement module mounting plate and is positioned between the upper guide rail and the lower guide rail, the piezoelectric actuator rotor is in sliding connection with the piezoelectric actuator stator, the two ends of the upper guide rail are respectively provided with an upper left limiting plate and an upper right limiting plate, and the two ends of the lower guide rail are respectively provided with a lower left limiting plate and a lower right limiting plate.

Preferably, the needling sliding table mounting plate is fixedly connected with the piezoelectric actuator rotor, the needling assembly movement module is fixed in the center of the front end face of the needling sliding table mounting plate, a left camera mounting seat and a right camera mounting seat are arranged on two sides of the front end face of the needling sliding table mounting plate, a left industrial camera is fixed on the left camera mounting seat, a right industrial camera is fixed on the right camera mounting seat, and lenses of the left industrial camera and the right industrial camera face downwards.

Preferably, the needling assembly comprises an air passage joint, an upper needle inserting rod, a lower needle inserting rod and a thimble, wherein the air passage joint is fixed on the needle connecting plate, the upper needle inserting rod penetrates through the air passage joint, the lower needle inserting rod is connected with the upper needle inserting rod, and the thimble is fixed at the tail end of the lower needle inserting rod.

Preferably, the needling assembly is continuously ventilated in the process of descending close to the crystal film, and the working clearance range of the air blowing of the thimble and the upper surface of the crystal film is 0.1mm-0.8mm; the ejector pin penetrates below the horizontal line of the crystal film, and the height of bubbles generated between the ejector pin and the crystal film under the action of air pressure is 0.05mm-0.3mm.

Preferably, a left outer guide rail and a left inner guide rail are arranged on the left marble support, a left linear motor stator is arranged between the left outer guide rail and the left inner guide rail, the left linear motor stator is fixed on the left marble support through screws, and the left end of the carrier mounting frame is fixedly connected with the left linear motor rotor; the right marble support is provided with a right outer guide rail and a right inner guide rail, a right linear motor stator is arranged between the right outer guide rail and the right inner guide rail, the right linear motor stator is fixed on the right marble support through screws, and the right end of the carrying platform mounting frame is fixedly connected with the right linear motor rotor.

Preferably, the support frame motor stator is fixed on the marble support between the left guide rail and the right guide rail through a screw, the substrate support frame is fixedly connected with the support frame motor rotor, the bottom surfaces of the left end and the right end of the substrate support frame are respectively in sliding connection with the left guide rail and the right guide rail, the upper surface of the substrate support frame is provided with a substrate front sliding rail and a substrate rear sliding rail, the fixed disc motor stator is fixed on the substrate support frame between the substrate front sliding rail and the substrate rear sliding rail, the substrate fixed disc is fixedly connected with the fixed disc motor rotor, and the bottom surfaces of the two ends of the substrate fixed disc are in sliding connection with the substrate front sliding rail and the substrate rear sliding rail.

Preferably, the crystal film comprises an elastic film and an adhesive layer which are arranged from top to bottom, a plurality of chips are adhered below the adhesive layer, and one or more of PDMS, TPE, TPEE, TPU, TPR, TPV, PO and PVC materials with recovery deformation capability are selected as the elastic film; the adhesive layer is one or more of organic silica gel adhesive, epoxy resin adhesive, polyurethane adhesive and acrylic adhesive.

Preferably, the bonding point surface of the substrate is coated with a bond and a material, wherein the bond and the material are selected from one or more of solder paste, soldering flux, conductive adhesive, ACP and ACF, and the adhesion force of the adhesive layer to the chip is smaller than the adhesion force of the bond and the material to the chip.

Therefore, the piezoelectric effect needling huge-amount transfer device adopting the structure adopts the piezoelectric actuator to drive the needling assembly to do high-speed high-frequency motion, applies the macro-motion and micro-motion technology to huge-amount transfer by virtue of the characteristics of quick response, high racing speed, no magnetism, low power consumption and high reliability, adopts a corresponding driving scheme according to the motion requirements and the motion characteristics of needling motion, aligning motion and feeding motion, reduces the complexity of a control system, and simultaneously improves the single chip transfer speed and the chip transfer yield compared with the traditional scheme.

The technical scheme of the utility model is further described in detail through the drawings and the embodiments.

Drawings

FIG. 1 is a schematic diagram of a piezoelectric effect needling mass transfer apparatus according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a piezoelectric needling motion system according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram of a crystal film movement system according to an embodiment of the present utility model;

FIG. 4 is a schematic diagram of a substrate movement system according to an embodiment of the present utility model;

Fig. 5 is a schematic diagram of a movement module of a needling slide table according to an embodiment of the present utility model;

FIG. 6 is a schematic diagram showing a movement process of a movement module of a needling assembly according to an embodiment of the present utility model, (a) is a periodic initial state; (b) deforming the piezoelectric ceramic actuating element; (c) is a periodic end state;

Fig. 7 is a schematic diagram of a crystal film structure according to an embodiment of the utility model.

Reference numerals

1. A marble platform; 2. a support beam; 3. needling a sliding table movement module; 301. a motion module mounting plate; 302A, upper guide rail; 302B, lower guide rail; 303. a piezoelectric actuator stator; 304A, upper left limiting plate; 304B, lower left limiting plate; 304C, upper right stop plate; 304D, lower right limiting plate; 305. a piezoelectric actuator mover; 4A, a left camera mounting seat; 4B, a right camera mounting seat; 5A, left industrial camera; 5B, right industrial camera; 6. needling a slipway mounting plate; 7. a needling assembly movement module; 701. needling the motion bottom plate; 702. needling a piezoelectric motion stator; 703. a piezoelectric ceramic actuation element; 704. needling a piezoelectric motion mover; 8. a needling assembly; 801. an upper needle insertion rod; 802. the gas circuit joint; 803. a lower needle inserting rod; 804. a thimble; 9. a needle connecting plate; 10A, left marble Dan Zhi; 10B, right marble Dan Zhi; 11A, left outer rail; 11B, left inner guide rail; 11C, right outer rail; 11D, right inner rail; 12A, left linear motor stator; 12B, right linear motor stator; 12C, a left linear motor rotor; 12D, a right linear motor rotor; 13. a carrier mounting rack; 14. a crystal film carrier; 15. a crystal film; 1501. an elastic film; 1502. an adhesive layer; 1503. a chip; 16A, left guide rail; 16B, right guide rail; 17A, a support frame motor stator; 17B, supporting a motor rotor; 18. a substrate support; 19. a substrate fixing plate; 20. a substrate; 21A, a front slide rail of the base plate; 21B, a substrate rear slide rail; 22A, fixed disk motor stator; 22B, a fixed disk motor rotor.

Detailed Description

The technical scheme of the utility model is further described below through the attached drawings and the embodiments.

Examples

As shown in fig. 1, a piezoelectric effect needling mass transfer device comprises a piezoelectric needling motion system, a crystal film 15 motion system and a substrate 20 motion system which are arranged on a marble platform 1.

As shown in fig. 2, the piezoelectric needling system comprises a supporting beam 2, a needling sliding table movement module 3, a needling assembly movement module 7 and a needling assembly 8, wherein the supporting beam 2 is arranged on the marble platform 1. The needling sliding table moving module 3 is fixed on the front end surface of the supporting beam 2, as shown in fig. 5, the needling sliding table moving module 3 comprises a moving module mounting plate 301, an upper guide rail 302A, a lower guide rail 302B, a piezoelectric actuator stator 303 and a piezoelectric actuator rotor 305, the moving module mounting plate 301 is fixed on the front end surface of the supporting beam 2 through screws, the upper guide rail 302A and the lower guide rail 302B are respectively fixed on the upper edge and the lower edge of the moving module mounting plate 301 in an up-down parallel manner, and the upper guide rail 302A and the lower guide rail 302B have guiding and limiting functions. The piezoelectric actuator stator 303 is fixed to the middle of the movement module mounting plate 301 and is located between the upper rail 302A and the lower rail 302B, and the piezoelectric actuator mover 305 is slidably connected to the piezoelectric actuator stator 303. The two ends of the upper guide rail 302A are respectively provided with an upper left limiting plate 304A and an upper right limiting plate 304C, and the two ends of the lower guide rail 302B are respectively provided with a lower left limiting plate 304B and a lower right limiting plate 304D, which are used as limiting structures at the two ends of the guide rail.

The needling assembly movement module 7 is fixed in the center of the front end face of the needling slipway mounting plate 6, the needling slipway mounting plate 6 is fixedly connected with the piezoelectric actuator rotor 305, and after the piezoelectric actuator is started, the piezoelectric actuator rotor 305 slides along the piezoelectric actuator stator 303 with the needling slipway mounting plate 6. The front end face both sides of the needling slide table mounting plate 6 are provided with a left camera mounting seat 4A and a right camera mounting seat 4B, a left industrial camera 5A is fixed on the left camera mounting seat 4A, a right industrial camera 5B is fixed on the right camera mounting seat 4B, and lenses of the left industrial camera 5A and the right industrial camera 5B face downwards. The left and right industrial cameras 5A and 5B are used to scan and record the position of the chip 1503 on the die 15 and the position of the pads on the substrate 20.

As shown in fig. 6, the needling assembly moving module 7 has the same structure as the needling slide moving module 3 but is oriented perpendicularly thereto. The needling assembly movement module 7 comprises a needling movement base plate 701, a needling piezoelectric movement stator 702 and a needling piezoelectric movement rotor 704, wherein the needling piezoelectric movement stator 702 is fixed on the needling movement base plate 701, the needling piezoelectric movement rotor 704 crawls on the needling piezoelectric movement stator 702, and a piezoelectric ceramic actuating element 703 is arranged between the needling piezoelectric movement rotor 704 and the needling piezoelectric movement stator 702. When a motion signal is acquired, a prestress is applied to the piezoceramic actuation element 703, and the synapse on the piezo-electric motion mover 704 is forced against the piezoceramic actuation element 703 by the needle. The piezoelectric ceramic actuator element 703 is excited to generate ultrasonic vibrations by a high-frequency alternating voltage of 100 to 200 kHz. The deformation of the piezoceramic actuation element 703 causes the coupling element thereon to move periodically relative to the needled piezomotion stator 702, establishing a feed per cycle of d, achieving high speed motion by high frequency voltages.

The needling assembly 8 is connected with the needling assembly moving module 7 in a sliding way through a needle connecting plate 9, and the needling assembly 8 ascends or descends under the drive of a needling piezoelectric motion mover 704. The needling assembly 8 comprises an air passage joint 802, an upper needle inserting rod 801, a lower needle inserting rod 803 and a thimble 804, wherein the air passage joint 802 is fixed on the needle connecting plate 9, the upper needle inserting rod 801 penetrates through the air passage joint 802, the lower needle inserting rod 803 is connected with the upper needle inserting rod 801, and the thimble 804 is fixed at the tail end of the lower needle inserting rod 803.

The needling assembly 8 is continuously ventilated in the process of descending close to the crystal film 15, and the working clearance range of the air blowing of the thimble 804 and the upper surface of the crystal film 15 is 0.1mm-0.8mm; the ejector pins 804 penetrate below the horizontal line of the crystal film 15, and the height of bubbles generated between the ejector pins 804 and the crystal film 15 under the action of air pressure is 0.05mm-0.3mm.

As shown in fig. 3, the wafer film 15 movement system includes a left marble Dan Zhi a, a right marble Dan Zhi B, a stage mounting rack 13, a wafer film stage 14 and a wafer film 15, the support beam 2 spans over the left marble Dan Zhi a and the right marble Dan Zhi B, and the left marble Dan Zhi a and the right marble Dan Zhi B abut against the support beam 2. A left outer guide rail 11A and a left inner guide rail 11B are arranged on the left marble Dan Zhi A, a left linear motor stator 12A is arranged between the left outer guide rail 11A and the left inner guide rail 11B, the left linear motor stator 12A is fixed on the left marble Dan Zhi A through screws, and the left end of the carrier mounting frame 13 is fixedly connected with a left linear motor rotor 12C; the right marble Dan Zhi B is provided with a right outer guide rail 11C and a right inner guide rail 11D, a right linear motor stator 12B is arranged between the right outer guide rail 11C and the right inner guide rail 11D, the right linear motor stator 12B is fixed on the right marble Dan Zhi B through screws, and the right end of the carrier mounting frame 13 is fixedly connected with the right linear motor rotor 12D. The left linear motor and the right linear motor synchronously move to drive the carrier mounting rack 13 to move along the guide rail, so that the position of the crystal film 15 is adjusted.

The crystal film 15 is arranged in the crystal film carrying table 14, the crystal film carrying table 14 is arranged in the center of the carrying table mounting frame 13, and two ends of the carrying table mounting frame 13 are in sliding connection with the left marble Dan Zhi A and the right marble Dan Zhi B. As shown in fig. 7, the die 15 includes an elastic film 1501 and an adhesive layer 1502 disposed from top to bottom, and a plurality of chips 1503 are bonded under the adhesive layer 1502. The elastic membrane 1501 is selected from one or more of PDMS, TPE, TPEE, TPU, TPR, TPV, PO and PVC materials having a recovery deformation capability. Adhesive layer 1502 is one or more of silicone adhesive, epoxy adhesive, polyurethane adhesive, and acrylic adhesive, and the adhesion of adhesive layer 1502 to die 1503 is less than the adhesion of the bond and material on substrate 20 to die 1503.

As shown in fig. 4, the substrate 20 moving system includes a left rail 16A, a right rail 16B, a support motor, a substrate support 18, a substrate fixing plate 19, a fixing plate motor, and a substrate 20. The left and right rails 16A and 16B are fixed to the marble platform 1, and the left and right rails 16A and 16B are positioned between the left marble Dan Zhi a and the right marble holder 10B. The left and right ends of the base plate support frame 18 are in sliding connection with the left guide rail 16A and the right guide rail 16B, the support frame motor stator 17A is fixed on a marble support between the left guide rail 16A and the right guide rail 16B through screws, and the base plate support frame 18 is fixedly connected with the support frame motor rotor 17B.

The upper surface of base plate support frame 18 is provided with base plate front rail 21A and base plate back rail 21B, and fixed disk motor stator 22A is fixed on base plate support frame 18 between base plate front rail 21A and base plate back rail 21B, and base plate fixed disk 19 and fixed disk motor active cell 22B fixed connection, base plate fixed disk 19's both ends bottom surface and base plate front rail 21A and base plate back rail 21B sliding connection. The substrate 20 is disposed on the substrate fixing plate 19, and the solder joint surface of the substrate 20 is coated with a bond and a material, wherein the bond and the material are selected from one or more of solder paste, soldering flux, conductive adhesive, ACP and ACF.

The working principle is as follows: the support frame motor and the fixed disk motor enable the substrate 20 to have two degrees of freedom of movement, and the ejector pins 804, the chips 1503 and the bonding pads can be vertically collinear based on the positioning of the left industrial camera 5A and the right industrial camera 5B by combining the movement of the crystal film carrier 14 and the movement of the needling sliding table mounting plate 6.

The needling assembly 8 is used for realizing the needling and lifting actions of the thimble 804 as a period, and when the thimble 804 contacts the crystal film 15 downwards, the needling sliding table movement module 3 and the substrate 20 are stationary; during the lifting process of the thimble 804, the needling sliding table movement module 3 moves transversely, so that the thimble 804 moves to a position opposite to the position of the next chip 1503 on the crystal film 15, and the support frame motor and the fixed disk motor move the target welding spot on the substrate 20 to a position opposite to the position of the next chip 1503 on the crystal film 15. When the ejector pins 804 descend to contact the die 15, air is blown into the ejector pins 804 through the air passage connectors 802, so that the die 15 is pushed to bulge downwards, and when the adhesion force of the solder paste to the die 1503 is larger than the adhesion force of the lower surface of the die 15 to the die 1503, the die 1503 is transferred to the substrate 20 by means of the adhesion force difference between the lower surface of the die 15 and the solder paste to the die 1503.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model and not for limiting it, and although the present utility model has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that: the technical scheme of the utility model can be modified or replaced by the same, and the modified technical scheme cannot deviate from the spirit and scope of the technical scheme of the utility model.

Claims (10)

1. A piezoelectric effect needling huge transfer device is characterized in that: the device comprises a piezoelectric needling motion system, a crystal film motion system and a substrate motion system which are arranged on a marble platform;

The piezoelectric needling system comprises a supporting beam, a needling sliding table moving module, a needling assembly moving module and a needling assembly, wherein the supporting beam is arranged on the marble platform, the needling sliding table moving module is fixed on the front end surface of the supporting beam, the needling assembly moving module is in sliding connection with the needling sliding table moving module through a needling sliding table mounting plate, the needling assembly is in sliding connection with the needling assembly moving module through a needle connecting plate, and a left industrial camera and a right industrial camera are arranged on two sides of the needling assembly moving module;

The crystal film movement system comprises a left marble Dan Zhi, a right marble support, a carrier mounting frame, a crystal film carrier and a crystal film, wherein a plurality of chips are adhered to the bottom surface of the crystal film, the crystal film is arranged in the crystal film carrier, the crystal film carrier is arranged in the center of the carrier mounting frame, and two ends of the carrier mounting frame are in sliding connection with the left marble Dan Zhi and the right marble Dan Zhi;

The base plate motion system comprises a left guide rail, a right guide rail, a support frame motor, a base plate support frame, a base plate fixing disc, a fixing disc motor and a base plate, wherein the base plate is arranged on the base plate fixing disc, the base plate fixing disc is in linkage with the fixing disc motor, the fixing disc motor is arranged at the top of the base support frame, the base plate support frame is in linkage with the support frame motor, the left end and the right end of the base plate support frame are in sliding connection with the left guide rail and the right guide rail, and the left guide rail and the right guide rail are fixed on the marble platform.

2. The piezoelectric effect needling mass transfer device of claim 1, wherein: the support beam spans over the left marble Dan Zhi and right marble support, and the left marble Dan Zhi and right marble Dan Zhi are located between the left marble Dan Zhi and right marble support, immediately adjacent to the support beam left and right rails.

3. The piezoelectric effect needling mass transfer device of claim 1, wherein: the needling slip table motion module includes motion module mounting panel, the upper rail, the lower rail, the piezoelectricity actuator stator, the piezoelectricity actuator active cell, the motion module mounting panel passes through the screw fixation on the preceding terminal surface of supporting beam, upper rail and lower rail are fixed at the upper and lower edge of motion module mounting panel respectively from top to bottom parallelly, piezoelectricity actuator stator is fixed at the middle part of motion module mounting panel and is located between upper rail and the lower rail, piezoelectricity actuator active cell and piezoelectricity actuator stator sliding connection, the both ends of upper rail are provided with upper left limiting plate and upper right limiting plate respectively, the both ends of lower rail are provided with lower left limiting plate and lower right limiting plate respectively.

4. A piezoelectric effect needling mass transfer apparatus in accordance with claim 3 wherein: the needling slipway mounting plate is fixedly connected with the piezoelectric actuator rotor, the needling assembly movement module is fixed in the center of the front end face of the needling slipway mounting plate, a left camera mounting seat and a right camera mounting seat are arranged on two sides of the front end face of the needling slipway mounting plate, a left industrial camera is fixed on the left camera mounting seat, a right industrial camera is fixed on the right camera mounting seat, and lenses of the left industrial camera and the right industrial camera face downwards.

5. The piezoelectric effect needling mass transfer apparatus of claim 4 wherein: the needling assembly comprises an air passage joint, an upper needle inserting rod, a lower needle inserting rod and a thimble, wherein the air passage joint is fixed on the needle connecting plate, the upper needle inserting rod penetrates through the air passage joint, the lower needle inserting rod is connected with the upper needle inserting rod, and the thimble is fixed at the tail end of the lower needle inserting rod.

6. The piezoelectric effect needling mass transfer apparatus of claim 5 wherein: continuously ventilating the needling assembly in the process of descending close to the crystal film, wherein the working gap range between the thimble and the upper surface of the crystal film for blowing is 0.1mm-0.8mm; the ejector pin penetrates below the horizontal line of the crystal film, and the height of bubbles generated between the ejector pin and the crystal film under the action of air pressure is 0.05mm-0.3mm.

7. The piezoelectric effect needling mass transfer apparatus of claim 2 wherein: the left marble support is provided with a left outer guide rail and a left inner guide rail, a left linear motor stator is arranged between the left outer guide rail and the left inner guide rail, the left linear motor stator is fixed on the left marble support through screws, and the left end of the carrier mounting frame is fixedly connected with the left linear motor rotor; the right marble support is provided with a right outer guide rail and a right inner guide rail, a right linear motor stator is arranged between the right outer guide rail and the right inner guide rail, the right linear motor stator is fixed on the right marble support through screws, and the right end of the carrying platform mounting frame is fixedly connected with the right linear motor rotor.

8. The piezoelectric effect needling mass transfer device of claim 1, wherein: the marble supporting seat comprises a left guide rail, a right guide rail, a base plate motor, a base plate fixing plate motor stator, a base plate fixing plate and a base plate motor rotor, wherein the base plate motor stator is fixed on a marble supporting seat between the left guide rail and the right guide rail through screws, the base plate supporting frame is fixedly connected with the base plate motor rotor, the bottom surfaces of the left end and the right end of the base plate supporting frame are respectively connected with the left guide rail and the right guide rail in a sliding mode, the base plate front sliding rail and the base plate rear sliding rail are arranged on the upper surface of the base plate supporting frame, the base plate fixing plate motor stator is fixed on the base plate supporting frame between the base plate front sliding rail and the base plate rear sliding rail, and the base plate fixing plate motor rotor is fixedly connected with the bottom surfaces of the two ends of the base plate fixing plate.

9. The piezoelectric effect needling mass transfer device of claim 1, wherein: the crystal film comprises an elastic film and an adhesive layer which are arranged from top to bottom, a plurality of chips are adhered below the adhesive layer, and the elastic film is one or more of PDMS, TPE, TPEE, TPU, TPR, TPV, PO and PVC materials with recovery deformation capability; the adhesive layer is one or more of organic silica gel adhesive, epoxy resin adhesive, polyurethane adhesive and acrylic adhesive.

10. The piezoelectric effect needling mass transfer apparatus of claim 9 wherein: the solder joint surface of the base plate is coated with a bond and a material, wherein the bond and the material are selected from one or more of solder paste, soldering flux, conductive adhesive, ACP and ACF; the adhesion of the adhesive layer to the chip is less than the adhesion of the bond and material to the chip.