CN220604637U - Wafer clip lifting device - Google Patents

Abstract

The utility model relates to a wafer cassette lifting device, which comprises: the cartridge clip comprises a placing platform, a lifting mechanism and a cartridge clip box body; the lifting mechanism comprises a lifting screw rod and a connecting table, the connecting table is in threaded connection with the lifting screw rod, and the lifting screw rod is used for controlling the lifting of the connecting table; the placing platform is fixed on the surface of the connecting table, the table top of the placing platform is perpendicular to the lifting direction of the connecting table, and the placing platform is used for placing the cartridge clip box body; a bearing layer rack for stacking and placing the crystal discs is arranged in the cartridge clip box body; according to the scheme provided by the utility model, automatic feeding and returning of the die bonder are realized, and the lifting device can reduce the consumption of manpower and time cost.

Description

Wafer clip lifting device

Technical Field

The utility model relates to the technical field of wafer chip manufacturing equipment, in particular to a wafer cassette lifting device.

Background

With the development of technology, many intelligent products are emerging on the market, and most of the intelligent products are provided with special chips, wherein the chips are electronic components commonly used in the electronic industry at present, and the manufacturing of the chips needs to undergo a plurality of flow steps, mainly: the method comprises the steps of depositing, photoresist coating, exposing, calculating photoetching, baking and developing, etching, calculating and inspecting, ion implantation and packaging chips, wherein the packaging of the chips comprises bonding processes, the bonding processes are divided into a traditional method and an advanced method, the traditional method adopts chip bonding (or chip mounting) and wire bonding, the advanced method adopts flip chip bonding technology developed by IBM corporation in the later stage of 60 s, the flip chip bonding technology combines the chip bonding and the wire bonding, the chip and the substrate are connected in a way of forming bumps on chip bonding pads, and the bonding technology realizes the electric connection between the chip and the outside by attaching a semiconductor chip to a lead frame or a printed circuit board; at present, bonding of wafer chips is completed by a die bonder, wherein the traditional die bonder adopts a manual feeding mode, so that the feeding speed is low, the labor cost is high, and the large-batch automatic operation is not facilitated.

For example, the patent name of the Chinese patent with the publication number of 'CN 115472543A' is 'a semiconductor clip feeding device', in order to realize automatic feeding of crystal discs, specifically, the scheme is that a feeding assembly, a clamping assembly and a clip body are arranged, the whole stacking of semiconductor crystal compasses is arranged on the clip body, the feeding assembly moves the clip body to the clamping assembly, the clamping assembly controls the height of the clip body to match with a pushing assembly to orderly push the semiconductor wafers to the feeding assembly, after the pushing is completed, the clamping assembly moves the clip body to the feeding assembly to be recovered, and the feeding assembly of the device needs the matching movement of the clamping assembly to realize the switching of the feeding level and the withdrawal level, so that the working efficiency of the device is not high, and meanwhile, the pushing assembly has the capabilities of identifying and space movement, so that the application range of the device is relatively narrow, and is not suitable for popularization and use.

Therefore, how to automatically feed and return the die bonder is a technical problem that needs to be solved by the current technicians.

Disclosure of Invention

In order to overcome the problems in the related art, the utility model provides the wafer cassette lifting device which can automatically feed and return the die bonder, thereby improving the production efficiency.

In order to achieve the above object, the present utility model provides a wafer cassette lifting device, comprising: the cartridge clip comprises a placing platform, a lifting mechanism and a cartridge clip box body;

the lifting mechanism comprises a lifting screw rod and a connecting table, the connecting table is in threaded connection with the lifting screw rod, and the lifting screw rod is used for controlling the lifting of the connecting table;

the placing platform is fixed on the surface of the connecting table, the table top of the placing platform is perpendicular to the lifting direction of the connecting table, and the placing platform is used for placing the cartridge clip box body;

the cartridge clip box body is internally provided with a bearing layer rack for stacking and placing the crystal discs.

Preferably, the storage device further comprises a storage judging mechanism, the storage judging mechanism comprises a pressing rocker arm, a reset spring, a U-shaped photoelectric device and a fixed support, the pressing rocker arm is located on the table top of the placement platform and hinged to the fixed support, one end of the reset spring is fixedly connected with the fixed support, the other end of the reset spring is abutted to the bottom of the pressing rocker arm, the U-shaped photoelectric device is adjacent to the reset spring, the pressing rocker arm comprises a sensing plate, the sensing plate is located in a detection zone of the U-shaped photoelectric device, and the storage judging mechanism is used for judging whether the cartridge clip box is placed on the placement platform or not.

Preferably, the placing platform is provided with a fixed air cylinder and a limiting baffle, the fixed air cylinder is positioned at one corner of the placing platform, and the limiting baffle is fixed on a telescopic rod of the fixed air cylinder.

Preferably, the placement platform comprises a centering clamping groove, wherein the centering clamping groove is positioned in the center of the placement platform and is used for being matched with a centering limiting rib at the bottom of the cartridge clip box body.

Preferably, the placement platform further comprises a longitudinal fixing rod and a transverse fixing rod, wherein the transverse fixing rod and the longitudinal fixing rod are respectively positioned at two sides of the centering clamping groove, the transverse fixing rod is used for limiting the transverse movement of the cartridge clip box, and the longitudinal fixing rod is used for limiting the longitudinal movement of the cartridge clip box.

Preferably, the lifting device further comprises a fixed straight plate, the fixed straight plate is located on one side of the placing platform, the lifting screw rod is fixed on the fixed straight plate, a guide sliding rail is arranged on the fixed straight plate, the guide sliding rail is parallel to the lifting screw rod, and the connecting table is in sliding connection with the guide sliding rail.

Preferably, the placement platform further comprises limiting side plates, the limiting side plates are respectively located on two sides of the placement platform, the plate surfaces of the limiting side plates are parallel to the central axis of the centering clamping groove, and the limiting side plates are used for limiting the size of the placed cartridge clip box body.

The technical scheme provided by the utility model can comprise the following beneficial effects:

in the technical scheme, a placing platform, a lifting mechanism and a cartridge clip box body are respectively arranged on a lifting device; the lifting mechanism consists of a lifting screw rod and a connecting table, the connecting table is in threaded connection with the lifting screw rod, then the lifting screw rod is used for controlling the lifting of the connecting table, then a placing platform is fixed on the surface of the connecting table, the table top of the placing platform is perpendicular to the lifting direction of the connecting table, a cartridge clip box body is placed by the placing platform, and finally a bearing layer rack for stacking and placing crystal discs is arranged in the cartridge clip box body; for example, when the feeding device is required to be fed, the driving motor drives the lifting screw rod to rotate, threads on the lifting screw rod drive the connecting table to lift, so that the placing platform and the cartridge box body on the placing platform are lifted to a set position, the bearing layer frame is aligned with the feeding device, the feeding device can directly take out the wafer disc from the cartridge box body, automatic feeding of the feeding device is realized, after the wafer chip on the wafer disc is taken out, the driving motor drives the lifting screw rod to rotate, lifting of the placing platform is controlled, the layer frame hollow in the bearing layer frame is aligned with the material returning device, the material returning device can retract the wafer disc after the wafer chip is taken out into the empty bearing layer frame, automatic material returning of the wafer disc is realized, the lifting device can reduce consumption of labor and time cost, and meanwhile, the risk of damaging the wafer disc during manual feeding is avoided.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed.

Drawings

The foregoing and other objects, features and advantages of the utility model will be apparent from the following more particular descriptions of exemplary embodiments of the utility model as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the utility model.

Fig. 1 is a schematic structural view of a lifting device according to an embodiment of the present utility model.

Fig. 2 is a schematic view of the cartridge case according to the embodiment of the present utility model.

Fig. 3 is a schematic structural view of a placement determination mechanism according to an embodiment of the present utility model.

In the figure: 1. placing a platform; 10. centering the clamping groove; 11. a longitudinal fixing rod; 12. a transverse fixing rod; 13. defining a side panel; 2. a lifting mechanism; 20. lifting the screw rod; 21. a connection station; 3. a cartridge clip case; 30. a carrier layer rack; 31. centering limit ribs; 4. a placement determination means; 40. pressing down the rocker arm; 400. an induction plate; 41. a return spring; 42. u-shaped photoelectricity; 43. a fixed bracket; 5. a fixed cylinder; 6. a limit baffle; 7. fixing the straight plate; 70. and a guide sliding rail.

Detailed Description

In order to make the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments of the present utility model. All other embodiments obtained by those skilled in the art without making any inventive effort are within the scope of the present utility model. Preferred embodiments of the present utility model will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present utility model are shown in the drawings, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.

It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

In the description of the present utility model, it should be understood that the terms "thickness," "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

It should be understood that although the terms "first," "second," "third," etc. may be used herein to describe various information, these information should not be limited by these terms. These terms are only used to distinguish one type of information from another. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the utility model. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

Referring to fig. 1 to 3, the lifting device includes: a placing platform 1, a lifting mechanism 2 and a cartridge clip box 3;

the lifting mechanism 2 comprises a lifting screw rod 20 and a connecting table 21, the connecting table 21 is in threaded connection with the lifting screw rod 20, and the lifting screw rod 20 is used for controlling the lifting of the connecting table 21;

the placing platform 1 is fixed on the surface of the connecting table 21, the table top of the placing platform 1 is perpendicular to the lifting direction of the connecting table 21, and the placing platform 1 is used for placing the cartridge clip case 3;

a bearing layer frame 30 for stacking and placing the crystal discs is arranged in the cartridge clip box body 3.

Specifically, the device further comprises a placement judging mechanism 4, the placement judging mechanism 4 comprises a pressing rocker arm 40, a reset spring 41, a U-shaped photoelectric device 42 and a fixed support 43, the pressing rocker arm 40 is located on the table top of the placement platform 1, the pressing rocker arm 40 is hinged to the fixed support 43, one end of the reset spring 41 is fixedly connected with the fixed support 43, the other end of the reset spring 41 is in butt joint with the bottom of the pressing rocker arm 40, the U-shaped photoelectric device 42 is adjacent to the reset spring 41, the pressing rocker arm 40 comprises a sensing plate 400, the sensing plate 400 is located in a detection zone of the U-shaped photoelectric device 42, and the placement judging mechanism 4 is used for judging whether the cartridge clip box 3 is placed on the placement platform 1.

Specifically, fixed cylinder 5 and limit baffle 6 are provided with on the place platform 1, fixed cylinder 5 is located place platform 1's one corner, limit baffle 6 is fixed on fixed cylinder 5's telescopic link.

Specifically, the placement platform 1 includes a centering slot 10, the centering slot 10 is located at the center of the placement platform 1, and the centering slot 10 is adapted to a centering limit rib 31 at the bottom of the cartridge clip case 3.

Specifically, the placement platform 1 further includes a longitudinal fixing rod 11 and a transverse fixing rod 12, where the transverse fixing rod 12 and the longitudinal fixing rod 11 are respectively located at two sides of the centering slot 10, the transverse fixing rod 12 is used to limit the transverse movement of the cartridge clip case 3, and the longitudinal fixing rod 11 is used to limit the longitudinal movement of the cartridge clip case 3.

Specifically, the lifting device further comprises a fixed straight plate 7, the fixed straight plate 7 is located on one side of the placement platform 1, the lifting screw rod 20 is fixed on the fixed straight plate 7, a guide sliding rail 70 is arranged on the fixed straight plate 7, the guide sliding rail 70 is parallel to the lifting screw rod 20, and the connecting table 21 is in sliding connection with the guide sliding rail 70.

Specifically, the placement platform 1 further includes limiting side plates 13, the limiting side plates 13 are respectively located at two sides of the placement platform 1, the plate surfaces of the limiting side plates 13 are parallel to the central axis of the centering clamping groove 10, and the limiting side plates 13 are used for limiting the size of the placed cartridge clip case 3.

Example 1

In the embodiment, in order to realize automatic feeding and returning of the crystal disc, specifically, a placing platform, a lifting mechanism and a cartridge box body are respectively arranged on the lifting device of the embodiment; the lifting mechanism consists of a lifting screw rod and a connecting table, the connecting table is in threaded connection with the lifting screw rod, then the lifting screw rod is utilized to control the lifting of the connecting table, then the placing platform is fixed on the surface of the connecting table, the table top of the placing platform is perpendicular to the lifting direction of the connecting table, the placing platform is utilized to place the cartridge clip box body, and finally a bearing layer frame for stacking and placing the crystal discs is arranged in the cartridge clip box body.

For example, when the feeding device is required to be fed, the lifting screw rod is driven by the driving motor to rotate, the connecting table is driven by threads on the lifting screw rod to lift, so that the placing platform and the cartridge box body on the placing platform are lifted to a set position, the bearing layer frame is aligned with the feeding device, the feeding device can directly take out the wafer disc from the cartridge box body, automatic feeding of the feeding device is realized, after the wafer chip on the wafer disc is taken out, the lifting screw rod is driven by the driving motor to rotate, lifting of the placing platform is controlled, the layer frame hollow in the bearing layer frame is aligned with the material returning device, the material returning device can retract the wafer disc after the wafer chip is taken out into the empty bearing layer frame, automatic material returning to the wafer disc is realized, and the lifting device can be simultaneously adapted to crystal fixing equipment integrating the feeding and the material returning device or crystal fixing equipment of the feeding device and the material returning device, suitability of the lifting device as feeding and the material returning device is improved, and the lifting device can reduce manpower and time consumption because the wafer disc is prevented from being damaged when the wafer is manually fed.

Example two

In this embodiment, in order to realize judging whether the cartridge holder box is placed on the platform, specifically, this example is through setting up put thing decision mechanism, put thing decision mechanism by pushing down the rocking arm, reset spring, U type photoelectricity and fixed bolster are constituteed, make the rocking arm that pushes down be located the mesa of platform, then will push down the rocking arm and the fixed bolster is articulated, afterwards with reset spring's one end and fixed bolster fixed connection, and the other end and the bottom butt of pushing down the rocking arm, U type photoelectricity is adjacent with reset spring, wherein, push down the rocking arm including the induction plate, make the induction plate be located the detection interval of U type photoelectricity, before elevating gear goes up and down, elevating gear needs to judge whether the cartridge holder box has been placed on the platform, when the cartridge holder box has been placed on the platform, the bottom surface of cartridge holder box compresses down the rocking arm, make reset spring compression, the induction plate gets into the detection interval of U type photoelectricity, U type photoelectricity sends the signal for control computer, control computer can judge that the cartridge holder box is located the platform, when the platform does not place the cartridge holder box, U type photoelectricity is adjacent with reset spring, the detection plate is pushed down, the manual work that the condition of lifting up the cartridge holder box has not been left to the device when the elevating gear has been lifted, the cartridge holder box has been avoided, the condition that the manual work is not been stopped to place the apparatus to the condition of lifting up, the cartridge holder box has been lifted up, when the elevating gear is not been stopped to the apparatus to the device is not been lifted up to the control the equipment to the equipment.

It is worth noting that, in order to stably fix the cartridge clip box on the placing flat plate, specifically, in this example, the fixed air cylinder and the limit baffle are arranged on the placing platform, so that the fixed air cylinder is positioned at one corner of the placing platform, and then the limit baffle is fixed on the telescopic rod of the fixed air cylinder; the positioning platform is provided with a centering clamping groove, a longitudinal fixing rod and a transverse fixing rod, the centering clamping groove is positioned in the center of the positioning platform, the centering clamping groove is used for being matched with a centering limiting rib at the bottom of the cartridge clip box body, the transverse fixing rod and the longitudinal fixing rod are respectively positioned at two sides of the centering clamping groove, the transverse fixing rod is used for limiting the transverse movement of the cartridge clip box body, and the longitudinal fixing rod is used for limiting the longitudinal movement of the cartridge clip box body; when the worker puts the cartridge clip box in place the platform, the centering spacing muscle of cartridge clip box bottom need block into centering draw-in groove to this guarantees that the cartridge clip box is located place the center of platform, and horizontal dead lever and vertical dead lever then paste tightly with the lateral wall of the horizontal spacing muscle of cartridge clip box bottom and vertical spacing muscle respectively, vertical and the horizontal spacing of going on to the cartridge clip box, prevent that the cartridge clip box from sliding on place the platform, horizontal dead lever and vertical dead lever accessible adjustment are fixed the bolt that uses simultaneously and are adjusted the distance, make place the platform can be applicable to the cartridge clip box that the size is different, fix the back on place the platform when the cartridge clip box, fixed cylinder drive telescopic link removes, push away limit baffle to one corner of cartridge clip box, limit baffle is hugged closely with two lateral walls that the cartridge clip box is adjacent, can prevent to take place to rock at the in-process cartridge clip box that goes up and down, thereby lead to the crystal disc to take place to destroy.

Example III

In this embodiment, in order to guide the lifting direction of the connection platform, specifically, in this embodiment, a fixed straight plate is disposed, so that the fixed straight plate is located at one side of the placement platform, then the lifting screw rod is fixed on the fixed straight plate, a guiding slide rail is disposed on the fixed straight plate, so that the guiding slide rail is parallel to the lifting screw rod, and the connection platform is slidably connected with the guiding slide rail; when the connection table goes up and down, the direction slide rail can guide the lift direction of connection table, prevents to drive the connection table and appear rotating the skew owing to the rotation of lift lead screw to can avoid the cartridge clip box on the place platform to take place to rotate the skew.

It should be noted that, in order to prevent the oversized cartridge clip case from being placed on the placement platform, specifically, in this embodiment, the limiting side plates are disposed on two sides of the placement platform respectively, and the plate surfaces of the limiting side plates are parallel to the central axis of the centering clamping groove, and the limiting side plates are used to limit the size of the placed cartridge clip case; the size of the crystal disc is large, so that the cartridge clip box body also has corresponding different sizes, in order to prevent the bottom surface area of the cartridge clip box body from exceeding the table surface area of the placing platform, the limiting side plates can limit the maximum width of the cartridge clip box body, and damage to a driving motor for driving the lifting screw rod caused by the cartridge clip box body with oversized size is avoided.

The aspects of the present utility model have been described in detail hereinabove with reference to the accompanying drawings. In the foregoing embodiments, the descriptions of the embodiments are focused on, and for those portions of one embodiment that are not described in detail, reference may be made to the related descriptions of other embodiments. Those skilled in the art will also appreciate that the acts and modules referred to in the specification are not necessarily required for the present utility model. In addition, it can be understood that the steps in the method of the embodiment of the present utility model may be sequentially adjusted, combined and pruned according to actual needs, and the structure in the apparatus of the embodiment of the present utility model may be combined, divided and pruned according to actual needs.

The foregoing description of embodiments of the utility model has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described. The terminology used herein was chosen in order to best explain the principles of the embodiments, the practical application, or the improvement of technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.

Claims (7)

1. The utility model provides a wafer cartridge clip elevating gear which characterized in that includes:

the cartridge clip comprises a placing platform, a lifting mechanism and a cartridge clip box body;

the lifting mechanism comprises a lifting screw rod and a connecting table, the connecting table is in threaded connection with the lifting screw rod, and the lifting screw rod is used for controlling the lifting of the connecting table;

the placing platform is fixed on the surface of the connecting table, the table top of the placing platform is perpendicular to the lifting direction of the connecting table, and the placing platform is used for placing the cartridge clip box body;

the cartridge clip box body is internally provided with a bearing layer rack for stacking and placing the crystal discs.

2. The wafer clip lifting device according to claim 1, further comprising a placement judging mechanism, wherein the placement judging mechanism comprises a pressing rocker arm, a reset spring, a U-shaped photoelectric device and a fixed support, the pressing rocker arm is located on the table top of the placement platform, the pressing rocker arm is hinged with the fixed support, one end of the reset spring is fixedly connected with the fixed support, the other end of the reset spring is abutted to the bottom of the pressing rocker arm, the U-shaped photoelectric device is adjacent to the reset spring, the pressing rocker arm comprises an induction plate, the induction plate is located in a detection zone of the U-shaped photoelectric device, and the placement judging mechanism is used for judging whether the clip box body is placed on the placement platform.

3. The wafer cassette lifting device according to claim 1, wherein a fixed cylinder and a limit baffle are arranged on the placement platform, the fixed cylinder is located at one corner of the placement platform, and the limit baffle is fixed on a telescopic rod of the fixed cylinder.

4. The wafer cassette lifting device of claim 1, wherein the placement platform comprises a centering slot, the centering slot is located at the center of the placement platform, and the centering slot is adapted to fit with a centering limit rib at the bottom of the cassette box.

5. The wafer cassette lifting device of claim 4, wherein said placement platform further comprises a longitudinal securing bar and a transverse securing bar, said transverse securing bar and said longitudinal securing bar being positioned on opposite sides of said centering slot, respectively, said transverse securing bar being configured to define a transverse movement of said cassette housing and said longitudinal securing bar being configured to define a longitudinal movement of said cassette housing.

6. The wafer cassette lifting device according to claim 1, further comprising a fixed straight plate, wherein the fixed straight plate is located at one side of the placement platform, the lifting screw is fixed on the fixed straight plate, a guiding sliding rail is arranged on the fixed straight plate, the guiding sliding rail is parallel to the lifting screw, and the connecting table is in sliding connection with the guiding sliding rail.

7. The wafer cassette lifting device of claim 4, wherein the placement platform further comprises limiting side plates, the limiting side plates are respectively located on two sides of the placement platform, the plate surfaces of the limiting side plates are parallel to the central axis of the centering clamping groove, and the limiting side plates are used for limiting the size of the placed cassette box.