CN220553412U - Multi-connecting-rod sliding block open-close type wafer boat bearing device for wafer drying - Google Patents

Abstract

The utility model designs a multi-connecting rod sliding block open-close type wafer boat bearing device for wafer drying, which is characterized by comprising the following components: the device comprises a driving mechanism, a transmission mechanism, a swinging mechanism, a support column, a bearing platform and a wafer boat. The wafer is placed in the wafer boat, the wafer boat is placed on the bearing platform, and the bearing platform achieves the opening and closing movement effect by utilizing the swinging mechanism, so that the wafer boat can swing slightly, and the wafer in the wafer boat can tilt leftwards and rightwards along with the wafer boat continuously. The utility model well solves the problem that the moisture in the contact part between the wafer and the wafer boat is not easy to dry, and improves the drying efficiency and the drying effect.

Description

Multi-connecting-rod sliding block open-close type wafer boat bearing device for wafer drying

Technical Field

The utility model relates to the field of wafer drying, in particular to a multi-link slide block open-close type wafer boat bearing device for wafer drying.

Background

In the wafer processing process, cleaning and drying after cleaning are indispensable links for ensuring the production quality of the wafer. In the current wafer drying process, marangoni (Marangoni) drying is one of the common drying methods. However, in the drying process, the wafer is often contacted with the wafer boat, so that the wafer cannot be sufficiently dried by the hot air, and the drying efficiency of the wafer is reduced.

2021, hangzhou silicon electronic technologies, inc. Yan et al, proposed a wafer cleaning and drying method and mechanism (authorized bulletin number: CN 113345821B). The method improves the wafer supporting mode, so that the wafer contacts with the pushing mechanism when rising, the constant stress is ensured, and the influence of the idle stroke of the wafer positioning groove on the process effect is avoided; meanwhile, the fixed supporting seat is added, so that the wafer can be processed at a higher position without being transmitted to the bottom of the box, the whole stroke of the wafer is shortened, and the whole process speed is further accelerated. However, this method results in inefficient wafer drying and longer drying times due to the wafer always contacting the support and the pushing mechanism in a fixed position during processing.

In 2022, shanghai to pure clean systems science and technology Co., ltd., hefei to Hui semiconductor application technologies Co., ltd., liao Shibao et al have proposed a wafer drying apparatus (authorized bulletin number: CN 217182138U). The device is through injecting the isopropyl alcohol liquid in the dry cavity, makes the isopropyl alcohol liquid soak the wafer that treats the drying to make the hydrone on the wafer dissolve in the isopropyl alcohol completely, simultaneously through the bottom plate setting of bottom V type distribution, change the gas circuit direction of nitrogen gas, and then accelerate the drying rate on wafer surface and promote drying effect. However, since the wafers are always in contact with the cassette, there is a problem that the moisture in the contact portion is difficult to dry and the drying time is long.

In summary, in order to solve the problem that the contact portion between the wafer and the wafer boat is difficult to sufficiently dry, the present utility model provides a wafer boat carrying device, i.e. a multi-link slider open/close type wafer boat carrying device for wafer drying. The device can enable the wafer boat to swing slightly by utilizing the swinging mechanism to perform the opening and closing operation, so that the wafers in the wafer boat are continuously inclined leftwards and rightwards along with the wafer boat, and the problem that the moisture of the contact part of the wafers and the wafer boat is not easy to dry is solved.

Disclosure of Invention

The utility model aims to overcome the defects of the prior art and provides a multi-link slide block open-close type wafer boat bearing device for wafer drying. The device has simple and reasonable integral structure, and can well enable the wafer boat to swing slightly by utilizing the swinging mechanism, so that the wafers in the wafer boat continuously incline leftwards and rightwards along with the wafer boat, and the problem that the contact part of the wafers and the wafer boat is not thoroughly dried is solved.

The utility model aims at realizing the following technical scheme:

a many connecting rods slider open-close formula wafer boat carrier for wafer is dry, its characterized in that includes: the device comprises a driving mechanism, a transmission mechanism, a swinging mechanism, a support column, a bearing platform and a wafer boat: the driving mechanism is fixedly arranged on the right side of the supporting column; the transmission mechanism is meshed with the gear of the driving mechanism through the gear and is arranged on the guide rail of the support column through the sliding block; the swing mechanism is connected with the transmission mechanism through a shaft pin and is fixed on the support through a bracket; the bearing platform is fixed on the swing mechanism through screws, and the wafer boat is placed in a limiting block of the bearing platform.

Further, the driving mechanism includes: a motor, a gear I and a motor bracket; the motor is arranged on the right lower side of the support column through a motor bracket, and the first gear is connected with the motor and is driven to rotate through the motor.

Further, the transmission mechanism comprises a gear II, a sliding block, a first connecting rod, a second connecting rod, a first shaft pin, a second shaft pin and a third shaft pin; the second gear is arranged below the front side of the support column and meshed with the first gear, so that the whole transmission module is driven to move in a set mode; the first shaft pin is arranged on the second gear, the second shaft pin is arranged on the sliding block, and the first connecting rod is connected with the first shaft pin and the second shaft pin; the third shaft pin is arranged on the sliding block, one end of the second connecting rod is connected with the third shaft pin, and the other end of the second connecting rod is connected with the fourth shaft pin of the swinging mechanism.

Further, the swing mechanism includes: the fourth shaft pin, the limit module, the bracket, the swing arm and the central shaft; the support is mounted on the support column through a screw; the limiting module is fixedly arranged on the bracket; the swing arm is arranged on the bracket through the central shaft and is connected with the transmission mechanism through a shaft pin IV, so that the swinging effect is realized.

Furthermore, a limiting block is arranged above the bearing platform and used for fixing the wafer boat, and a plurality of holes are formed in the bottom of the bearing platform and used for draining water.

Compared with the prior art, the utility model adopts the technical scheme and has the beneficial effects that:

according to the utility model, the wafer boat placed on the bearing platform is driven to slightly swing in a mode that the bearing platform is enabled to perform opening and closing movement by the swinging mechanism, so that the wafer placed in the wafer boat can continuously tilt leftwards and rightwards along with the wafer boat, and the contact part of the wafer and the wafer boat is separated, so that the wafer is fully dried, and the drying quality is improved.

Drawings

FIG. 1 is an assembly view of the overall structure of the present utility model;

FIG. 2 is a schematic diagram of a driving mechanism and a transmission mechanism according to the present utility model;

FIG. 3 is a schematic diagram of a swing mechanism according to the present utility model;

FIG. 4 is a schematic diagram of an open-close swing gesture of the present utility model;

in the figure: the driving mechanism 1, the motor 11, the first gear 12 and the motor bracket 13; the device comprises a transmission mechanism 2, a gear II 21, a sliding block 22, a first connecting rod 23, a second connecting rod 24, a first shaft pin 25, a second shaft pin 26 and a third shaft pin 27; the swing mechanism 3, the fourth shaft pin 31, the limit module 32, the bracket 33, the swing arm 34 and the central shaft 35; a support column 4; a carrying platform 5; and a boat 6.

Detailed Description

The utility model is further described with reference to the drawings and detailed description which follow:

the multi-link slide block open-close type wafer boat carrying device for wafer drying as shown in fig. 1 comprises a driving mechanism 1, a transmission mechanism 2, a swinging mechanism 3, a supporting column 4, a carrying platform 5 and a wafer boat 6: the driving mechanism 1 is fixedly arranged on the right side of the support column 4; the transmission mechanism 2 is meshed with the first gear 12 of the driving mechanism 1 through the second gear 21 and is arranged on a guide rail of the support column 4 through a sliding block 22; the swinging mechanism 3 is connected with the transmission mechanism 2 through a first shaft pin 25 and is fixed on the support column 4 through a bracket 33; the bearing platform 5 is fixed on the swing arm 34 of the swing mechanism 3 through screws, and the wafer boat 6 is placed in a limiting block of the bearing platform 5; the driving mechanism 1 drives the transmission mechanism 2 to operate so as to drive the swinging mechanism 3, so that the carrying platform 5 achieves the opening and closing movement effect, and the wafer boat 6 is slightly swung.

As shown in fig. 2, the drive mechanism 1 includes: a motor 11, a first gear 12 and a motor bracket 13; the transmission mechanism 2 comprises a gear II 21, a sliding block 22, a first connecting rod 23, a second connecting rod 24, a first shaft pin 25, a second shaft pin 26 and a third shaft pin 27; the motor 11 is fixedly arranged on the right lower side of the support column 4 through the motor bracket 13, the first gear 12 is connected with the motor 11, the second gear 21 is arranged below the front side of the support column 4 and meshed with the first gear 12, and the motor 11 drives the first gear 12 to rotate so as to drive the second gear 21 to rotate; the first shaft pin 25 is arranged on the second gear 21, the second shaft pin 26 is arranged on the sliding block, and the first connecting rod 23 is connected with the first shaft pin 25 and the second shaft pin 26; the third shaft pin 27 is arranged on the sliding block, one section of the second connecting rod 24 is connected with the third shaft pin 27, the other end of the second connecting rod is connected with the fourth shaft pin 21 of the swinging mechanism 2, and the second gear 21 drives the whole transmission mechanism 2 to operate, so that the swinging mechanism 3 operates.

As shown in fig. 3, the swing mechanism 3 includes: the fourth shaft pin 31, the limit module 32, the bracket 33, the swing arm 34 and the central shaft 35; the bracket 33 is mounted on the support column 4 by a screw; the limit module 32 is fixedly arranged on the bracket 33; the swing arm 34 is arranged on the bracket 33 through a central shaft 35 and is connected with the second connecting rod 24 of the transmission mechanism 2 through a fourth shaft pin 31; when the transmission mechanism 2 operates according to a set operation mode, the swing arm 34 is driven to move by the second connecting rod 24, and the limit module 32 is assisted, so that the whole swing mechanism 3 operates in an expected route, and the swing effect is realized.

As shown in fig. 4, the solid line diagram is a pose a of the bearing platform 5 combined upwards along with the swinging mechanism 3; the virtual line diagram is a pose B of the bearing platform 5 which is opened downwards along with the swinging mechanism 3; the wafers in the boat 6 are continuously inclined leftward and rightward along with the boat 6, so that the contact portions of the wafers are sufficiently dried.

The wafer drying work flow of the utility model is as follows:

firstly, a wafer boat filled with wafers is placed in a bearing platform, a motor is started, a gear I drives a gear II to synchronously rotate, then a connecting rod I drives a sliding block to move up and down under the connection effect of a shaft pin I, and then under the connection effect of two groups of shaft pins III, the connecting rod II is driven to synchronously move, so that a swing arm is driven to swing, and meanwhile, a limit module is used for limiting the swing route of the swing arm, so that the bearing platform and the wafer boat are driven to swing, and the expected effect of micro swing is achieved.

The utility model provides a multi-link slide block open-close type wafer boat carrying device for wafer drying, which realizes the effect of slightly swinging a wafer boat by utilizing a swinging mechanism to enable the carrying platform to generate open-close type movement, so that the wafer in the wafer boat continuously inclines leftwards and rightwards along with the wafer boat, the contact part of the wafer and the wafer boat is fully dried, and the whole structure is relatively simple and reasonable.

Claims (3)

1. A many connecting rods slider open-close formula wafer boat carrier for wafer is dry, its characterized in that includes: the device comprises a driving mechanism, a transmission mechanism, a swinging mechanism, a support column, a bearing platform and a wafer boat: the driving mechanism is fixedly arranged on the right side of the supporting column; the transmission mechanism is meshed with the first gear of the driving mechanism through the second gear and is arranged on a guide rail of the support column through a sliding block; the swing mechanism is connected with the transmission mechanism through a first shaft pin and is fixed on the support column through a bracket; the bearing platform is fixed on the swing arm of the swing mechanism through screws, and the wafer boat is placed in the limiting block of the bearing platform.

2. The multi-link slide open and close type boat carrier for wafer drying according to claim 1, wherein: the driving mechanism and the transmission mechanism comprise: the motor comprises a motor, a gear I, a motor bracket, a gear II, a sliding block, a connecting rod I, a connecting rod II, a shaft pin I, a shaft pin II and a shaft pin III; the motor is fixedly arranged on the right lower side of the support column through a motor bracket, the first gear is connected with the motor, the second gear is arranged below the front side of the support column and meshed with the first gear, and the motor drives the first gear to rotate so as to drive the second gear to rotate; the first shaft pin is arranged on the second gear, the second shaft pin is arranged on the sliding block, and the first connecting rod is connected with the first shaft pin and the second shaft pin; the third shaft pin is arranged on the sliding block, one end of the second connecting rod is connected with the third shaft pin, the other end of the second connecting rod is connected with the fourth shaft pin of the swinging mechanism, and the second gear drives the whole transmission mechanism to operate, so that the swinging mechanism operates.

3. The multi-link slide open and close type boat carrier for wafer drying according to claim 1, wherein: the swing mechanism includes: the fourth shaft pin, the limit module, the bracket, the swing arm and the central shaft; the support is mounted on the support column through a screw; the limiting module is fixedly arranged on the bracket; the swing arm is arranged on the bracket through the central shaft and is connected with a connecting rod II of the transmission mechanism through a shaft pin IV; when the transmission mechanism operates according to a set operation mode, the second connecting rod drives the swing arm to move, and the limit module is used for assisting, so that the whole swing mechanism operates in an expected route, and the swing effect is achieved.