CN220553412U - Multi-connecting-rod sliding block open-close type wafer boat bearing device for wafer drying - Google Patents

Abstract

The utility model designs a multi-connecting rod sliding block open-close type wafer boat bearing device for wafer drying, which is characterized by comprising the following components: the device comprises a driving mechanism, a transmission mechanism, a swinging mechanism, a support column, a bearing platform and a wafer boat. The wafer is placed in the wafer boat, the wafer boat is placed on the bearing platform, and the bearing platform achieves the opening and closing movement effect by utilizing the swinging mechanism, so that the wafer boat can swing slightly, and the wafer in the wafer boat can tilt leftwards and rightwards along with the wafer boat continuously. The utility model well solves the problem that the moisture in the contact part between the wafer and the wafer boat is not easy to dry, and improves the drying efficiency and the drying effect.

Description

Multi-link slider opening and closing wafer boat carrying device for wafer drying

Technical field

The utility model relates to the field of wafer drying, and in particular to a multi-link slider opening and closing type wafer boat carrying device used for wafer drying.

Background technique

In the wafer processing process, in order to ensure the quality of wafer production, cleaning and drying after cleaning are indispensable links. In today's wafer drying process, the Marangoni drying method is one of the commonly used drying methods. However, during the drying process, because there is often contact between the wafer and the wafer boat, the dry hot air cannot fully dry the wafer, resulting in a reduction in wafer drying efficiency.

In 2021, Yin Qi and others from Hangzhou Zhongsi Electronic Technology Co., Ltd. proposed a wafer cleaning and drying method and mechanism (authorization announcement number: CN113345821B). This method improves the wafer support method so that the wafer comes into contact with the propulsion mechanism when it rises, ensuring that it is always stressed and avoiding the impact of the idle stroke of the wafer positioning groove on the process effect; at the same time, by adding a fixed support base, the wafer can be The wafer can be processed at a higher position without being transferred to the bottom of the box, shortening the overall wafer stroke and thus speeding up the overall process speed. However, during the processing of this method, since the wafer is always in fixed contact with the support seat and the pushing mechanism, the drying efficiency of the wafer is not high and the drying time is long.

In 2022, Shanghai Zhichun Purification System Technology Co., Ltd., Hefei Zhihui Semiconductor Application Technology Co., Ltd., Liao Shibao and others proposed a wafer drying device (authorization announcement number: CN217182138U). The device injects isopropyl alcohol liquid into the drying chamber to soak the wafer to be dried, so that the water molecules on the wafer are completely integrated into the isopropyl alcohol. At the same time, it is set through the V-shaped bottom plate at the bottom. , changing the direction of the nitrogen gas path, thereby speeding up the drying rate of the wafer surface and improving the drying effect. However, since the wafer and the wafer boat are always in contact, the moisture in the contact parts is difficult to dry and requires a long drying time.

In summary, in order to solve the problem of difficulty in fully drying the contact area between the wafer and the wafer boat, this utility model proposes a wafer boat carrying device, that is, a multi-link slider opening and closing type wafer dryer for wafer drying. Boat carrying device. This device can make the wafer boat swing slightly by using the swing mechanism to open and close, so that the wafers in the wafer boat can continuously tilt to the left and right with the wafer boat, thereby solving the problem of wafer wafers. The problem that the water in contact with the wafer boat is not easy to dry.

Utility model content

The purpose of this utility model is to overcome the shortcomings of the prior art and provide a multi-link slider opening and closing type wafer boat carrying device for wafer drying. The overall structure of the device is simple and reasonable. At the same time, it can use the swing mechanism to make the wafer boat swing slightly, so that the wafers in the wafer boat can continuously tilt to the left and right with the wafer boat, solving the problem of This solves the problem of incomplete drying of the contact area between the wafer and the wafer boat.

The purpose of this utility model is achieved through the following technical solutions:

A multi-link slider opening and closing wafer boat carrying device for wafer drying, which features: a driving mechanism, a transmission mechanism, a swing mechanism, a support column, a carrying platform and a wafer boat: the driving mechanism is fixedly installed on the support column. On the right side; the transmission mechanism meshes with the gear of the driving mechanism through gears, and is installed on the guide rail of the support column through a slider; the swing mechanism is connected to the transmission mechanism through a shaft pin, and is fixed on the support through a bracket ; The load-bearing platform is fixed on the swing mechanism through screws, and the wafer boat is placed in the limit block of the load-bearing platform.

Further, the driving mechanism includes: a motor, gear one, and a motor bracket; the motor is installed on the lower right side of the support column through the motor bracket, and the gear one is connected to the motor, and the motor drives the gear one to rotate.

Further, the transmission mechanism includes gear two, a slider, connecting rod one, connecting rod two, shaft pin one, shaft pin two, and shaft pin three; gear two is installed below the front side of the support column and meshes with gear one. , thereby driving the entire transmission module to move in a set manner; the first shaft pin is installed on the second gear, the second shaft pin is installed on the slider, and the first connecting rod connects the first shaft pin and the second shaft pin; so The shaft pin three is installed on the slide block, one end of the connecting rod two is connected to the shaft pin three, and the other end is connected to the shaft pin four of the swing mechanism.

Further, the swing mechanism includes: a shaft pin 4, a limit module, a bracket, a swing arm, and a central axis; the bracket is installed on the support column through screws; the limit module is fixedly installed on the bracket; The swing arm is installed on the bracket through the central axis, and is connected to the transmission mechanism through the shaft pin 4, thereby achieving the swing effect.

Furthermore, a limiting block is provided above the load-bearing platform for fixing the wafer boat, and a plurality of holes are provided at the bottom for drainage.

The utility model adopts the above technical solution. Compared with the existing technology, the beneficial effects are:

The utility model uses a swing mechanism to cause the carrying platform to open and close, thereby driving the wafer boat placed on the carrying platform to swing slightly, so that the wafers placed in the wafer boat can continuously move along with the wafer boat. The tilt to the left and right separates the contact part between the wafer and the wafer boat, so that the wafer can be fully dried and the quality of drying can be improved.

Description of drawings

Figure 1 is an assembly diagram of the overall structure of the utility model;

Figure 2 is a schematic diagram of the driving mechanism and transmission mechanism of the present utility model;

Figure 3 is a schematic diagram of the swing mechanism of the present utility model;

Figure 4 is a schematic diagram of the open and close swing position of the present utility model;

In the picture: driving mechanism 1, motor 11, gear one 12, motor bracket 13; transmission mechanism 2, gear two 21, slider 22, connecting rod one 23, connecting rod two 24, shaft pin one 25, shaft pin two 26, Axis pin three 27; swing mechanism 3, axis pin four 31, limit module 32, bracket 33, swing arm 34, central axis 35; support column 4; bearing platform 5; crystal boat 6.

Detailed ways

The utility model will be further described below in conjunction with the accompanying drawings and specific implementation modes:

As shown in Figure 1, the multi-link slider opening and closing wafer boat carrying device for wafer drying includes a driving mechanism 1, a transmission mechanism 2, a swing mechanism 3, a support column 4, a carrying platform 5 and a wafer boat 6: Drive Mechanism 1 is fixedly installed on the right side of support column 4; transmission mechanism 2 meshes with gear one 12 of drive mechanism 1 through gear two 21, and is installed on the guide rail of support column 4 through slide block 22; swing mechanism 3 passes through a shaft pin One 25 is connected to the transmission mechanism 2 and fixed on the support column 4 through the bracket 33; the bearing platform 5 is fixed on the swing arm 34 of the swing mechanism 3 through screws, and the wafer boat 6 is placed in the limit block of the bearing platform 5; The driving mechanism 1 operates the transmission mechanism 2, which in turn drives the swing mechanism 3, so that the carrying platform 5 achieves an opening and closing movement effect, thereby causing the wafer boat 6 to swing slightly.

As shown in Figure 2, the driving mechanism 1 includes: a motor 11, a gear 12, and a motor bracket 13; the transmission mechanism 2 includes a gear 21, a slider 22, a connecting rod 23, a connecting rod 24, a shaft pin 25, a shaft Pin two 26, shaft pin three 27; the motor 11 is fixedly installed on the lower right side of the support column 4 through the motor bracket 13, the gear one 12 is connected to the motor 11, the gear two 21 is installed under the front side of the support column 4, and is connected to the gear one 12 When meshed, the motor 11 drives gear one 12 to rotate, thereby driving gear two 21 to rotate; shaft pin one 25 is installed on gear two 21, shaft pin two 26 is installed on the slider, connecting rod one 23 connects shaft pin one 25 and the shaft Pin two 26; pin three 27 are installed on the slider. One section of connecting rod 24 is connected to pin three 27, and the other end is connected to pin four 21 of swing mechanism 2. Gear two 21 drives the entire transmission mechanism 2 to operate, and then Let the swing mechanism 3 operate.

As shown in Figure 3, the swing mechanism 3 includes: a shaft pin 31, a limit module 32, a bracket 33, a swing arm 34, and a central axis 35; the bracket 33 is installed on the support column 4 through screws; the limit module 32 is fixedly installed on On the bracket 33; the swing arm 34 is installed on the bracket 33 through the central axis 35, and is connected to the connecting rod 24 of the transmission mechanism 2 through the shaft pin 4 31; when the transmission mechanism 2 operates according to the set operating mode, through the connecting rod The two 24 drive the swing arm 34 to move, and are supplemented by the limiting module 32, so that the entire swing mechanism 3 operates in the expected route, thereby achieving the swing effect.

As shown in Figure 4, the solid line diagram shows the posture A when the load-bearing platform 5 merges upwards with the swing mechanism 3; the dotted line diagram shows the position B when the load-bearing platform 5 opens downwards along with the swing mechanism 3; The wafer will continuously tilt to the left and right along with the wafer boat 6, so that the contact parts of the wafers are fully dried.

The working process of wafer drying in this utility model is as follows:

First, place the wafer boat filled with wafers on the carrying platform, start the motor, gear one drives gear two to rotate synchronously, and then under the connection of shaft pin one, connecting rod one drives the slider to move up and down, and then Under the connection of the two sets of shaft pins three, the connecting rod two is driven to move synchronously, thereby driving the swing arm to swing. At the same time, the limit module is used to limit the swing route of the swing arm, thereby driving the load-bearing platform and the wafer boat to swing, achieving the expected The effect of slight swing.

The utility model provides a multi-link slider opening and closing wafer boat carrying device for wafer drying. By utilizing a swing mechanism to cause the loading platform to open and close, the effect of causing the wafer boat to swing slightly is achieved. , so that the wafers in the wafer boat continuously tilt to the left and right with the wafer boat, so that the contact parts between the wafers and the wafer boat are fully dried, and the overall structure is relatively simple and reasonable.

Claims (3)

1. A many connecting rods slider open-close formula wafer boat carrier for wafer is dry, its characterized in that includes: the device comprises a driving mechanism, a transmission mechanism, a swinging mechanism, a support column, a bearing platform and a wafer boat: the driving mechanism is fixedly arranged on the right side of the supporting column; the transmission mechanism is meshed with the first gear of the driving mechanism through the second gear and is arranged on a guide rail of the support column through a sliding block; the swing mechanism is connected with the transmission mechanism through a first shaft pin and is fixed on the support column through a bracket; the bearing platform is fixed on the swing arm of the swing mechanism through screws, and the wafer boat is placed in the limiting block of the bearing platform.

2. The multi-link slide open and close type boat carrier for wafer drying according to claim 1, wherein: the driving mechanism and the transmission mechanism comprise: the motor comprises a motor, a gear I, a motor bracket, a gear II, a sliding block, a connecting rod I, a connecting rod II, a shaft pin I, a shaft pin II and a shaft pin III; the motor is fixedly arranged on the right lower side of the support column through a motor bracket, the first gear is connected with the motor, the second gear is arranged below the front side of the support column and meshed with the first gear, and the motor drives the first gear to rotate so as to drive the second gear to rotate; the first shaft pin is arranged on the second gear, the second shaft pin is arranged on the sliding block, and the first connecting rod is connected with the first shaft pin and the second shaft pin; the third shaft pin is arranged on the sliding block, one end of the second connecting rod is connected with the third shaft pin, the other end of the second connecting rod is connected with the fourth shaft pin of the swinging mechanism, and the second gear drives the whole transmission mechanism to operate, so that the swinging mechanism operates.

3. The multi-link slide open and close type boat carrier for wafer drying according to claim 1, wherein: the swing mechanism includes: the fourth shaft pin, the limit module, the bracket, the swing arm and the central shaft; the support is mounted on the support column through a screw; the limiting module is fixedly arranged on the bracket; the swing arm is arranged on the bracket through the central shaft and is connected with a connecting rod II of the transmission mechanism through a shaft pin IV; when the transmission mechanism operates according to a set operation mode, the second connecting rod drives the swing arm to move, and the limit module is used for assisting, so that the whole swing mechanism operates in an expected route, and the swing effect is achieved.