CN220526880U - Substrate positioning device - Google Patents

Abstract

The utility model provides a substrate positioning device which comprises a feeding component, a middle positioning component connected with the feeding component, a discharging component connected with the middle positioning component and a conveying component respectively connected with the feeding component, the middle positioning component and the discharging component; wherein, the feeding component provides a plurality of substrates carried by the tray to the middle positioning component by virtue of the conveying component; the intermediate positioning assembly comprises a carrier, an adjusting mechanism and an adsorption assembly, wherein the substrate is transferred onto the carrier by the conveying assembly, the adjusting mechanism is configured to adjust the position of the substrate on the carrier to align each substrate according to a preset reference, the adsorption assembly is configured to fix the substrate in place, and the substrate which is continuously fixed in place is conveyed to the discharging assembly by the conveying assembly. The device can accurately position the substrate on the bearing piece so as to carry out subsequent processing procedures, and is simple and reliable in positioning, thereby simplifying processing procedures, improving working efficiency and reducing manufacturing cost.

Description

Substrate positioning device

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a substrate positioning device.

Background

In the semiconductor processing industry, a substrate, which is used as a substrate to carry a large number of functional elements, requires a plurality of processing steps. To improve efficiency, batches of substrates are typically fixedly mounted on a carrier and subjected to a predetermined processing treatment. In order to ensure consistency and stability of processing of the plurality of substrates on the carrier, the positions of the plurality of substrates on the carrier often need to be aligned with a predetermined reference, and a common method is to manually align the plurality of substrates with reference to an outer edge of the substrate or a reference pattern on the substrate. However, due to various factors in the upstream manufacturing process, the substrate is not completely uniform in shape, and there is a certain deviation or slight structural deformation, so that the accuracy of the alignment manner is not high, and the requirement cannot be met. In view of this, in order to improve the accuracy of alignment and to maintain the aligned state of the substrates in the subsequent processing steps, it is currently common practice to adhesively fix the substrates to the carrier by means of an adhesive such as an adhesive tape. The method adopting the adhesive tape can improve the positioning accuracy of the substrate to a certain extent, but a plurality of processing steps are certainly added to complicate the processing, such as coating the adhesive tape, and the adhesive tape needs to be removed and cleaned after the subsequent processing is finished; on the other hand, consumption of the adhesive tape certainly increases the cost.

Accordingly, there is a need for an improved substrate positioning device that overcomes the above drawbacks.

Disclosure of Invention

An object of the present utility model is to provide a substrate positioning device, which can accurately position a substrate on a carrier for subsequent processing, and has simple and reliable positioning, thereby simplifying processing procedures, improving working efficiency and reducing manufacturing cost.

In order to achieve the above purpose, the utility model provides a substrate positioning device, which comprises a feeding component, a middle positioning component connected with the feeding component, a discharging component connected with the middle positioning component, and a conveying component respectively connected with the feeding component, the middle positioning component and the discharging component;

wherein, the material feeding component provides a plurality of substrates carried by the tray to the middle positioning component by the conveying component; the intermediate positioning assembly comprises a carrier onto which the substrates are transferred by the transfer assembly, an adjustment mechanism configured to adjust the position of the substrates on the carrier to align each of the substrates with a predetermined reference, and an adsorption assembly configured to secure the substrates in place and to transfer the substrates continuously secured in place to the discharge assembly by the transfer assembly.

Compared with the prior art, the substrate positioning device provided by the utility model has the advantages that the tray and the substrates of the material component are provided to the middle positioning component through the conveying component, the middle positioning component transfers the substrates to the bearing component, the position of the substrates on the bearing component is adjusted by the adjusting mechanism to align each substrate according to the preset reference, the substrates are fixed in place by the adsorption component, the substrates which are continuously fixed in place are conveyed to the material component through the conveying component, so that the position accuracy of the adjusted substrates is greatly improved, and the positions are stably positioned and maintained through the adsorption component, so that the stability and the high efficiency of subsequent processing are improved. Compared with the traditional mode of adhesive tape, the substrate positioning device is simpler to operate through the adsorption component, the subsequent processing steps are simplified, and the adsorption component cannot damage the substrate. Therefore, the substrate positioning device is simple and reliable in positioning, can simplify the processing procedure, improve the working efficiency and reduce the manufacturing cost, and is suitable for industrial popularization and use.

As a preferred embodiment, the feeding assembly comprises a tray table and a top cover for covering the substrates, and the transfer assembly comprises a pick-up arm by which the top cover is covered on the substrates in the tray.

Preferably, the tray, the substrate, and the top cover are integrally transferred to the tray table by the transfer assembly.

As a preferred embodiment, the feed assembly further comprises a substrate detection mechanism to detect the presence of substrates in the tray and the number of substrates.

The feed assembly also includes a tray unloading station for collecting empty trays after the substrates are transferred.

As a preferred embodiment, the intermediate positioning assembly further comprises an optical detection assembly for detecting a position deviation value of each substrate on the carrier, and the adjustment mechanism adjusts the position of each substrate according to the position deviation value.

As a preferred embodiment, the intermediate positioning assembly further comprises a substrate transfer stage to which the substrate is transferred and which is detected by a detection sensor provided on the substrate transfer stage before being transferred to the carrier.

As a preferred embodiment, the adjustment mechanism includes a pick-up assembly to adjust the position of the substrate.

Preferably, the pick-up assembly comprises a pick-up arm movable in the X-direction and/or the Y-direction.

As a preferred embodiment, the suction assembly includes a suction nozzle for sucking the substrate and a vacuum device connected to the suction nozzle.

Preferably, the vacuum device comprises a pipeline connected with the suction nozzle, a vacuum cavity connected with the pipeline, and an air pressure controller connected with the vacuum cavity.

As a preferred embodiment, the conveying assembly comprises a conveying belt, and the conveying belt is arranged between the feeding assembly and the middle positioning assembly, or between the middle positioning assembly and the discharging assembly, or at any position among the feeding assembly, the middle positioning assembly and the discharging assembly.

Preferably, the conveyor belts are double conveyor belts arranged in a crossed manner or double conveyor belts arranged in parallel.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a block diagram of one embodiment of a substrate positioning apparatus of the present utility model.

Fig. 2a is a perspective view of one embodiment of a substrate positioning device of the present utility model.

Figure 2b is a plan view of one embodiment of a substrate positioning device of the present utility model.

Fig. 3 is a partial structural view of an incoming material assembly of the substrate positioning apparatus of the present utility model.

Fig. 4 is a partial structural view of the feed assembly and the transfer assembly of the substrate positioning apparatus of the present utility model.

Fig. 5 is another partial structural view of the feed assembly of the substrate positioning apparatus of the present utility model, showing the substrate detection assembly.

Fig. 6 is a partial view of a substrate positioning device of the present utility model.

Fig. 7 is a partial structural view of the intermediate positioning assembly of the substrate positioning apparatus of the present utility model, showing the substrate transfer stage.

Fig. 8 is a partial structural view of an intermediate positioning assembly of the substrate positioning apparatus of the present utility model, showing an optical inspection assembly.

Fig. 9 shows the substrate after being positioned on the carrier by the intermediate positioning assembly.

Fig. 10 is a partial structural view of an intermediate positioning assembly of the substrate positioning apparatus of the present utility model, showing an exploded view of the carrier and the suction assembly.

Fig. 11 is a partial structural view of the intermediate positioning assembly of the substrate positioning apparatus of the present utility model, showing the transfer of the carrier after positioning.

Detailed Description

The following description of the technical solutions in the embodiments of the present application will be made clearly and completely with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

In the description of the present application, it will be understood that when one component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present.

Furthermore, the terms "upper," "lower," "inner," "outer," "left," "right," "below … …," "above … …," and the like, indicate an orientation or positional relationship as shown based on the drawings, merely for convenience of description of the present application, and do not indicate or imply that the device or element in question must have this particular orientation, operate in a particular orientation configuration, and thus should not be construed as limiting the present application. Spatially relative terms may be intended to encompass different orientations of the device in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the example term "below" … … can encompass both upward and downward orientations.

The substrate positioning device can accurately position the substrate on the bearing piece so as to carry out subsequent processing procedures, has simple and reliable positioning and high precision, thereby ensuring the processing stability, simplifying the processing procedures, improving the working efficiency and reducing the manufacturing cost, and is suitable for industrial popularization and application.

Figures 1, 2a, 2b show one embodiment of the substrate positioning device of the present utility model. As shown in fig. 1, the substrate positioning device 1 includes a feeding assembly 11, an intermediate positioning assembly 13 connected to the feeding assembly 11, a discharging assembly 15 connected to the intermediate positioning assembly 13, and a conveying assembly 17 connected to the feeding assembly 11, the intermediate positioning assembly 13, and the discharging assembly 15, respectively. The supply assembly 11 provides the intermediate positioning assembly 13 with a plurality of substrates carried by the tray, and the substrates are precisely positioned by a series of operations such as transferring, adjusting, vacuum sucking and the like in the intermediate positioning assembly 13, and the positioned substrates are transferred to the discharge assembly 15 and then connected with a subsequent machine or station for relevant processing, such as screen printing processing and the like. Wherein the transmission is carried out by the transmission assembly 17 in an overall coordination mode according to the actual requirement. Specifically, the positioning in the intermediate positioning assembly 13 relies on an adjustment mechanism to align the substrates and the adsorption assembly secures the substrates in place during transport, thereby improving accuracy and providing a distinct advantage over conventional adhesive positioning. The following detailed description is provided with reference to the accompanying drawings.

As a specific embodiment, please refer to fig. 2a-3, fig. 2 a-2 b show a perspective view and a plan layout view of the substrate positioning device 1 of the present utility model, respectively; fig. 3 is a partial structural view of the feed assembly 11 of the substrate positioning apparatus of the present utility model.

Specifically, the supply assembly 11 serves as an upstream module of the present substrate positioning apparatus 1 to provide substrates for the subsequent intermediate positioning assembly 13. As shown in fig. 3, a plurality of substrates 12 are often dispensed onto trays 101 of the feed assembly 11 by an upstream substrate dispensing module (not shown) in order to provide the intermediate positioning assembly 13 in the form of a tray 101 load-bearing, for efficiency reasons. As shown in fig. 3, the feeding assembly 11 includes a tray table 102 where a plurality of trays 101 are stored. The tray table 102 has an upper bracket 103 and a lower bracket 104 for supporting the tray 101, and the lower bracket 104 may be formed in a drawer shape for storing the tray 101, and may have a cover 105 capable of being turned over.

After the substrates 12 are dispensed onto the trays 101 of the feed assembly 11, the pick-up arms (not shown) of the transfer assembly 17 are positioned at the feed assembly 11 to dispense the substrates 12 to the respective load areas of the trays 101. Preferably, as shown in fig. 4, a top cover 14 covering the substrate 12 is further provided at the feeding assembly 11, and after the tray 101 carries the substrate 12, the top cover 14 is covered on the substrate 12 by the pick arm, and then the tray 101, the substrate 12 and the top cover 14 are transferred as a whole by the transfer assembly 17 to the intermediate positioning assembly 13. The provision of the top cover 14 has the advantage of preventing the substrate 12 from tipping out of the tray 101 during transport by the pick arm.

Specifically, as shown in fig. 5, the incoming material assembly 11 further includes a substrate detection mechanism 16 to detect the presence or absence of the substrates 12 in the tray 101 and the number of substrates 12. As one example, two substrate detection mechanisms 16 may be provided to accommodate a larger throughput of lines. Here, the conveyor belt groups 171, 172 of the conveyor assembly 17 may be arranged in parallel and bi-directionally along the Y-direction, and the two substrate detection mechanisms 16 are respectively located at two sides of the conveyor belt groups 171, 172. Alternatively, the tray 101 may be supported and sucked by a vacuum stage, which may be moved up and down in the Z direction. Information such as the number of substrates 12 can be obtained by this detection to better learn about the relevant information.

More preferably, the feed assembly 11 may also be provided with a tray unloading station (not shown) to collect empty trays after the substrates have been transferred. After the intermediate positioning assembly 13 is transferred to the carrier, the empty trays are transported to a tray unloading position by means of a transport assembly 17, collected for subsequent reuse.

Referring to fig. 6, a partial view of the substrate positioning apparatus 1 of the present utility model is shown with a portion of the intermediate positioning assembly 13 and a portion of the transfer assembly 17. Specifically, the intermediate positioning assembly 13 includes a tray loading area 131 and a substrate transfer stage 133, the tray loading area 131 interfacing with the pre-stage substrate detection mechanism 16 to receive the detected tray 101. The transfer assembly 17 includes a first pickup assembly 173 located on a side of the tray loading area 131 and a second pickup assembly 174 located on a side of the substrate transfer stage 133, the first pickup assembly 173 being responsible for transferring substrates in the tray 101 one by one onto the substrate transfer stage 133 for related operations, and the second pickup assembly 174 being responsible for transferring substrates on the substrate transfer stage 133 one by one onto the carrier 132.

Specifically, as shown in FIG. 7, the substrate transfer stage 133 is provided with a plurality of individual substrate stations 134, each substrate station 134 receiving one substrate 12. A separate inspection sensor 135 is provided for each substrate on the substrate transfer stage 133 so that the substrate is transferred to the substrate table 134 and inspected by the inspection sensor 135 before being transferred to the carrier to ensure compliance.

The inspected substrates 12 are transferred to the carrier 132 by the second pick-up assembly 174 (see fig. 6), and the carrier 132 is provided with a plurality of carrier sections, each of which receives each substrate. To ensure accurate positioning of the substrate on the carrier region, the intermediate positioning assembly 13 is provided with an adjustment mechanism (not shown) for aligning the substrate on the carrier and a suction assembly 138 (see fig. 10) for fixing the position of the substrate. The adjustment mechanism is used to adjust the position of the substrates on the carrier 132 to align each substrate with a predetermined reference, and it is understood that the adjustment mechanism may be a pick-up assembly (not shown) including a pick-up arm movable in the X-direction and/or the Y-direction. The suction assembly 138 is used to hold the positioned substrate in place, maintaining this precise position continuously during transport. Preferably, as shown in fig. 8, the intermediate positioning assembly 13 further includes an optical detecting assembly 137 for detecting a position deviation value of each substrate on the carrier 132, and the adjusting mechanism adjusts the position of each substrate according to the position deviation value. Optionally, the optical detection component 137 comprises a camera or the like. Specifically, after the substrate is transferred to the carrier 132, the optical detecting component 137 detects its position, and after the substrate is adjusted by the adjusting mechanism, each substrate 12 on the carrier 132 is aligned according to a certain reference (for example, the outer edge line 121 of the substrate 12 or the reference pattern 122 on the substrate), as shown in fig. 9.

Referring to fig. 10-11, the adsorbing member 138 is a negative pressure type adsorbing member that stably adsorbs the substrate at a predetermined position of the carrier 132 by applying a certain negative pressure thereto. It will be appreciated that the suction assembly 138 is activated after the substrate is aligned and the suction pressure is maintained during the transfer process until the subsequent processing is completed. Through the negative pressure adsorption mode, stability can be ensured, the operation is simpler and easier to implement, the adsorption component 138 can be separated from the substrate only through air pressure control after the processing is finished, and damage to the substrate can be avoided. Specifically, as shown in fig. 10, the suction assembly 138 includes a suction nozzle 1381 for sucking a substrate and a vacuum device 1382 connected to the suction nozzle 1381, the vacuum device 1382 including a pipe 1383 connected to the suction nozzle 1381, a vacuum chamber 1384 connected to the pipe 1383, and an air pressure controller (not shown) connected to the vacuum chamber 1384. The adsorption or release of the adsorption component 138 can be controlled by the air pressure controller, and the negative pressure type control mode is simple and convenient and is easy to realize. More specifically, an adapter 1385 that mates with the carrier 132 is disposed below the carrier 132, and a vacuum chamber 1384 is located below the adapter 1385. The suction nozzles 1381 extend from predetermined openings in the carrier 132 under the adapters 1385 toward the substrate 12 to thereby suck the substrate 12.

Fig. 11 is a partial structural view of the intermediate positioning assembly 13, showing the transfer of the carrier 132 after positioning. Specifically, in the present embodiment, the conveyor belt portion of the conveyor assembly 17 is disposed between the intermediate positioning assembly 13 and the discharging assembly 15, and the conveyor belt is a double conveyor belt disposed in parallel to ensure efficient discharging of the entire apparatus. It will be appreciated that the conveyor belt of the present utility model may be disposed between the incoming material assembly 11 and the intermediate positioning assembly 13, or between the intermediate positioning assembly 13 and the outgoing material assembly 15, or at any location in the incoming material assembly 11, the intermediate positioning assembly 13, and the outgoing material assembly 15 to ensure efficient transport of the device. Alternatively, the conveyor belts may be configured as a cross-disposed double conveyor belt or a parallel-disposed double conveyor belt, as the case may be, without being limited by the drawings herein. The stably positioned substrate 12 is transferred to the discharging unit 15 together with the carrier 132 by the transfer unit 17 for subsequent processing, and the processing machine to which the discharging unit 15 is connected is not limited herein and may be configured according to actual needs. It should be noted that the suction assembly 138 remains suctioned to the substrate 12 during transport of the carrier 132 to ensure that the positioning thereof is not shifted.

It will be appreciated that the conveyor assembly 17 of the present utility model also includes a drive mechanism for controlling the predetermined movement of the conveyor belt and the pick-up assembly/arm, such as various drive motors, gear belts, etc. for effecting movement in various directions, is not limited herein. The transfer assembly 17 may be connected to a control device and/or a computer device to control and/or monitor all actions of the transfer assembly 17.

It should be noted that the substrate positioning apparatus 1 of the present utility model may be combined with other processing platforms of a substrate to form a processing device or processing system having different functions, and is not limited herein.

In summary, in the substrate positioning apparatus 1 of the present utility model, the tray 101 of the feeding assembly 11 and the substrate 12 are provided to the intermediate positioning assembly 13 by the conveying assembly 17, after the intermediate positioning assembly 13 transfers the substrates onto the carrier 132, the adjusting mechanism adjusts the positions of the substrates on the carrier 132 to align each substrate according to the predetermined reference, the adsorbing assembly 138 fixes the substrates in place, and the substrates continuously fixed in place are conveyed to the discharging assembly 15 by the conveying assembly 17, so that the positional accuracy of the adjusted substrates is greatly improved, and the positions are stably positioned and maintained by the adsorbing assembly 138, thereby improving the stability and efficiency of the subsequent processing. Compared with the conventional adhesive tape mode, the substrate positioning device 1 of the utility model has the advantages that the operation of the adsorption component 138 is simpler, the subsequent processing steps are simplified, and the adsorption component 138 can not damage the substrate. Therefore, the substrate positioning device 1 of the utility model has simple and reliable positioning, can simplify the processing procedure, improve the working efficiency and reduce the manufacturing cost, and is suitable for industrial popularization and use.

The utility model has been described in connection with the preferred embodiments, but the utility model is not limited to the embodiments disclosed above, but it is intended to cover various modifications, equivalent combinations according to the essence of the utility model.

Claims (14)

1. The substrate positioning device is characterized by comprising an incoming material component, an intermediate positioning component connected with the incoming material component, a discharging component connected with the intermediate positioning component and a conveying component respectively connected with the incoming material component, the intermediate positioning component and the discharging component;

wherein, the material feeding component provides a plurality of substrates carried by the tray to the middle positioning component by the conveying component; the intermediate positioning assembly comprises a carrier onto which the substrates are transferred by the transfer assembly, an adjustment mechanism configured to adjust the position of the substrates on the carrier to align each of the substrates with a predetermined reference, and an adsorption assembly configured to secure the substrates in place and to transfer the substrates continuously secured in place to the discharge assembly by the transfer assembly.

2. The substrate positioning apparatus of claim 1, wherein the feed assembly comprises a tray table and a cover for covering the substrates, and the transfer assembly comprises a pick-up arm by which the cover is covered on the substrates in the tray.

3. The substrate positioning apparatus of claim 2, wherein the tray, the substrate, and the top cover are integrally transferred to the tray table by the transfer assembly.

4. The substrate positioning device of claim 1, wherein the feed assembly further comprises a substrate detection mechanism to detect the presence of substrates and the number of substrates in the tray.

5. The substrate positioning apparatus of claim 1, wherein the feed assembly further comprises a tray unloading station to collect empty trays after the substrate is transferred.

6. The substrate positioning apparatus of claim 1, wherein the intermediate positioning assembly further comprises an optical detection assembly for detecting a positional offset value of each of the substrates at the carrier, the adjustment mechanism adjusting the position of each of the substrates based on the positional offset values.

7. The substrate positioning apparatus of claim 1, wherein the intermediate positioning assembly further comprises a substrate transfer stage and a detection sensor disposed on the substrate transfer stage, the substrate being transferred to the substrate transfer stage and detected by the detection sensor before being transferred to the carrier.

8. The substrate positioning apparatus of claim 1, wherein the adjustment mechanism comprises a pickup assembly to adjust the position of the substrate.

9. The substrate positioning device of claim 8, wherein the pick-up assembly comprises a pick-up arm movable in an X-direction and/or a Y-direction.

10. The substrate positioning apparatus of claim 1, wherein the suction assembly comprises a suction nozzle for sucking the substrate and a vacuum device connected to the suction nozzle.

11. The substrate positioning device of claim 10, wherein the vacuum device comprises a conduit coupled to the suction nozzle, a vacuum chamber coupled to the conduit, and a pneumatic controller coupled to the vacuum chamber.

12. The substrate positioning apparatus of claim 1, wherein the conveyor assembly comprises a conveyor belt disposed between the incoming assembly and the intermediate positioning assembly, or between the intermediate positioning assembly and the outgoing assembly, or at any position in the incoming assembly, the intermediate positioning assembly, and the outgoing assembly.

13. The substrate positioning device of claim 12 wherein the conveyor belts are cross-disposed dual conveyor belts or parallel-disposed dual conveyor belts.

14. The substrate positioning device of claim 1 wherein a plurality of load zones are provided on said load member, each of said load zones receiving each of said substrates.