CN220509991U - Silicon wafer transmission device - Google Patents

Abstract

The utility model relates to a silicon wafer transmission device which comprises a transmission assembly, a base and a cleaning assembly, wherein the cleaning assembly comprises a spraying module and a washing module, two sides of the transmission assembly are arranged on grooves of the base, the cleaning assembly is positioned at the bottoms of the grooves of the base, the cleaning assembly is positioned below the transmission assembly, the bottoms of the spraying module and the washing module are fixedly arranged on the base, the spraying module is used for spraying a cleaning agent, and the washing module is used for washing a crawler belt. The spraying module can spray the cleaning agent on the crawler belt, the washing module can wash and clean the crawler belt, the cleaning assembly can clean the crawler belt when the crawler belt is conveyed to the lower side, the cleaning of the crawler belt can be timely carried out after the silicon wafer is conveyed to the next link, and the situation that water stains are accumulated and difficult to clean to cause scratch damage on the surface of the silicon wafer is avoided. The utility model has the effect of cleaning the crawler belt.

Description

Silicon wafer transmission device

Technical Field

The utility model relates to the technical field of silicon wafer transmission devices, in particular to a silicon wafer transmission device.

Background

Silicon wafers are raw materials for manufacturing transistors and integrated circuits, and the silicon wafers are strictly cleaned in the production of semiconductor devices, and trace pollution can cause device failure. The cleaning aims at removing surface pollution impurities including organic matters and inorganic matters. Some of these impurities exist in an atomic state or an ionic state on the surface of a silicon wafer in a thin film form or a particle form, and various defects are caused.

In the prior art, as disclosed in chinese patent with publication number CN210296327U, a silicon wafer transmission device and a wafer inserting machine are disclosed, the silicon wafer transmission device includes: the conveying mechanism is used for conveying the silicon wafers, the at least one blowing mechanism comprises an air outlet, the air outlet faces the silicon wafers on the conveying mechanism, the silicon wafers on the conveying mechanism can be dried, the air outlet is in a strip-shaped gap, and an air knife can be formed to better remove liquid on the surfaces of the silicon wafers. According to the embodiment of the utility model, the silicon wafer can be prevented from bending deformation due to the fact that a large amount of liquid is carried, and the efficiency and the yield of the inserting sheet are improved.

The prior art solutions described above have the following drawbacks: although the technical scheme can be used for carrying out air blowing treatment on the cleaned silicon wafer, water stains are easy to accumulate on the crawler belt, the service life of the crawler belt is easy to be reduced, the surface of the silicon wafer is easy to be damaged due to the accumulation of the water stains, and scratches are generated on the surface of the silicon wafer.

Disclosure of Invention

Aiming at the defects in the prior art, the utility model aims to provide a silicon wafer conveying device which has the effect of cleaning a track.

The above object of the present utility model is achieved by the following technical solutions:

the silicon wafer transmission device comprises a transmission component and a base, wherein two sides of the transmission component are arranged on a groove of the base, the silicon wafer transmission device further comprises a cleaning component, the cleaning component is positioned at the bottom of the groove of the base, and the cleaning component is positioned below the transmission component;

the cleaning assembly comprises a spraying module and a washing module, wherein the bottoms of the spraying module and the washing module are fixedly arranged on the base, the spraying module is used for spraying a cleaning agent, and the washing module is used for washing the crawler belt.

Through above-mentioned technical scheme, spout the module and can spray the sanitizer on the track, wash the module and can wash the track and clean, clean the subassembly can carry out the cleanness of track when the track transmits the below, can in time carry out the cleanness of track after the silicon chip transportation to next link, avoid the water stain to pile up and be difficult to clean, cause the scratch damage on silicon chip surface.

The present utility model may be further configured in a preferred example to: the washing module comprises a cleaning brush, a worm, a turbine, a second shaft, a flat key and a second motor, wherein one end of the cleaning brush is fixedly connected with the worm, the turbine is matched with the worm, the second shaft is connected with the turbine through the flat key, a transmission shaft of the second motor is connected with the second shaft, and the worm can move in the vertical direction.

Through above-mentioned technical scheme, the cooperation of turbine and worm can make the worm carry out the displacement of upper and lower direction, can move down the worm when need not the cleanness, and the height of the cleaning brush of being convenient for automatic regulation, cleaning brush are used for cleaning the track, get rid of water stain and detergent.

The present utility model may be further configured in a preferred example to: the cleaning module further comprises a support, a cover plate and a plurality of screws, the support is fixedly connected with the base, the worm and the turbine are located in the support, a first through hole is formed in the portion, located far away from the base, of the support, the worm can be placed in the support through the first through hole, and the length of the cleaning brush is larger than the diameter of the first through hole;

the part of the support, which is positioned on the turbine, is provided with a second through hole for placing the second shaft, the side of the support, which is positioned on the turbine part and is far away from the worm, is open and is used for placing the turbine to the inside of the support, the cover plate is arranged on the open side of the support, and the cover plate is connected with the support through a plurality of screws.

Through above-mentioned technical scheme, the support is used for supporting turbine and worm, has also avoided the detergent to lead to the fact corrosion injury to turbine and worm, prevents that the dust from getting into inside.

The present utility model may be further configured in a preferred example to: the spraying module comprises a cleaner, the cleaner is fixedly connected with the base, a plurality of cleaning holes are formed in one side, away from the base, of the cleaner, a cleaning pipeline is arranged between the base and the cleaner, and the cleaning pipeline is externally connected with a cleaner device.

Through above-mentioned technical scheme, the cleaner is used for spraying the cleaner to the track when the track rotates to the below, and clean pipeline can external cleaner device, and the different types of cleaner of being convenient for is easy for clean track.

The present utility model may be further configured in a preferred example to: two ventilating ducts and a plurality of blowing holes are formed in two sides of the base, the plurality of blowing holes are communicated with the two ventilating ducts, the blowing holes are inclined, and the ventilating ducts are externally connected with an air inlet device.

Through above-mentioned technical scheme, the blowhole can carry out the drying of blowing to the silicon chip on the track, and air pipe is located inside the base, practices thrift the space, is convenient for practice thrift manufacturing material.

The present utility model may be further configured in a preferred example to: the transmission assembly comprises a plurality of first shafts, a track and a plurality of first motors, wherein the track is arranged on the plurality of first shafts, the plurality of first shafts are arranged on a plurality of third through holes formed in two sides of the base, the plurality of first motors are connected with the plurality of first shafts, and the plurality of first motors are positioned on the outer side of the base.

Through the technical scheme, the rotation of the first shafts drives the rotation of the crawler belt, the silicon wafer is transported to the next link, the first motors are used for automatically controlling the rotation of the first shafts, and the rotation speed of the first shafts is convenient to adjust, so that the movement speed of the crawler belt is controlled.

The present utility model may be further configured in a preferred example to: the length of the cleaning brush is greater than the width of the caterpillar.

Through the technical scheme, the length of the cleaning brush is larger than the width of the crawler belt, so that the cleaning brush is convenient to brush the whole crawler belt, the crawler belt is more clean in cleaning, and the phenomenon that the part which cannot be brushed is avoided.

The present utility model may be further configured in a preferred example to: the angle between the blowing hole and the top of the base is 110-160 degrees.

Through the technical scheme, the air blowing hole is inclined, so that the silicon wafer is more favorably dried by blowing, the silicon wafer is prevented from being blown off, and the air blowing area of the silicon wafer is increased.

In summary, the present utility model includes at least one of the following beneficial technical effects:

1. the utility model discloses a silicon wafer conveying device, which can spray a cleaning agent on a crawler belt through a spraying module, wherein the washing module can wash and clean the crawler belt, a cleaning assembly can clean the crawler belt when the crawler belt is conveyed to the lower part, and the crawler belt can be cleaned in time after the silicon wafer is conveyed to the next link, so that the situation that water stains are accumulated and hard to clean, and scratch damage on the surface of the silicon wafer is avoided;

2. through the cooperation of the turbine and the worm, the worm can be displaced in the up-down direction, the worm can be moved downwards when cleaning is not needed, automatic adjustment of the height of the cleaning brush is facilitated, and the cleaning brush is used for cleaning the caterpillar band and removing water stains and cleaning agents;

3. the cleaner is used for spraying the cleaner onto the crawler belt when the crawler belt rotates to the lower side, the cleaning pipeline can be externally connected with a cleaner device, different types of cleaners are convenient to replace, and the crawler belt is easy to clean.

Drawings

Fig. 1 is a schematic overall structure of the first embodiment.

Fig. 2 is a front partial sectional view of the first embodiment.

Fig. 3 is a right cross-sectional view of the first embodiment.

Fig. 4 is a rear cross-sectional view of the wash module.

Fig. 5 is a front cross-sectional view of the spray module.

Reference numerals: 1. a base; 2. a first shaft; 3. a cleaner; 4. cleaning the pipeline; 5. a track; 6. a first motor; 7. a ventilation duct; 8. a blowing hole; 9. a cleaning brush; 10. a second motor; 11. a second shaft; 12. a worm; 13. a turbine; 14. a flat key; 15. a cover plate; 16. a bracket; 17. a screw; 18. cleaning the hole.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application; it is apparent that the described embodiments are only a part of the embodiments of the present application, not all of the embodiments, and all other embodiments obtained by a person having ordinary skill in the art without making creative efforts based on the embodiments in the present application are within the scope of protection of the present application.

In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "top/bottom", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description of the present application and to simplify the description, and do not indicate or imply that the devices or elements to be referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "configured to," "engaged with," "connected to," and the like are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

Embodiment one:

referring to fig. 1, in order to disclose a silicon wafer transmission device of the present utility model, two sides of a transmission component are disposed on a groove of a base 1, and the silicon wafer transmission device comprises the transmission component and the base 1, and further comprises a cleaning component, wherein the cleaning component is located at the bottom of the groove of the base 1, and the cleaning component is located below the transmission component.

The cleaning assembly comprises a spraying module and a washing module, wherein the bottoms of the spraying module and the washing module are fixedly arranged on the base 1, the spraying module is used for spraying a cleaning agent, and the washing module is used for washing the crawler belt 5.

The cleaning component can clean the track 5 when the track 5 is transmitted to the lower part, can timely clean the track 5 after the silicon wafer is transported to the next link, and avoids the situation that water stains are accumulated and difficult to clean, so that scratches on the surface of the silicon wafer are damaged.

Referring to fig. 4, the washing module comprises a cleaning brush 9, a worm 12, a turbine 13, a second shaft 11, a flat key 14 and a second motor 10, wherein the cleaning brush 9 is fixedly arranged at one end of the worm 12, the cleaning brush 9 is rectangular, the cleaning brush 9 is made of cotton, the turbine 13 is matched with the worm 12, the second shaft 11 is connected with the turbine 13 through the flat key 14, the second motor 10 is externally connected with a power supply, the second motor 10 is connected with the second shaft 11, the worm 12 can move in the vertical direction, the height of the cleaning brush 9 is convenient to automatically adjust, and the cleaning brush 9 is used for cleaning the caterpillar 5 and removing water stains and cleaning agents.

The length of the cleaning brush 9 is greater than the width of the crawler belt 5, so that the cleaning brush 9 is convenient for brushing the whole crawler belt 5, the crawler belt 5 is more clean, and the phenomenon that the part which cannot be brushed is avoided.

The washing module further comprises a support 16, a cover plate 15 and two screws 17, wherein the support 16 and the base 1 are integrated, the support 16 is fixedly arranged on the base 1, the worm 12 and the turbine 13 are located in the support 16, a first through hole is formed in the portion, far away from the base 1, of the support 16, the worm 12 can be placed in the support 16 through the first through hole, and the length of the cleaning brush 9 is larger than the diameter of the first through hole.

The part of the support 16 located on the turbine 13 is provided with a second through hole for placing the second shaft 11, one side of the support 16 located on the turbine 13 and away from the worm 12 is open and used for placing the turbine 13 into the support 16, the cover plate 15 is arranged on the open side of the support 16, and the cover plate 15 is connected with the support 16 through two screws 17. The support 16 is used for supporting the worm wheel 13 and the worm 12, and also avoids the cleaning agent from corroding the worm wheel and the worm 12 and preventing dust from entering the inside.

Referring to fig. 5, the spray module includes a cleaner 3, the cleaner 3 and the base 1 are integrated, the cleaner 3 is T-shaped, the cleaner 3 is fixedly disposed on the base 1, five cleaning holes 18 are provided on one side of the cleaner 3 away from the base 1, a cleaning pipe 4 is provided between the base 1 and the cleaner 3, and the cleaning pipe 4 is externally connected with a cleaner device. The cleaner 3 is used for spraying the cleaning agent onto the crawler belt 5 when the crawler belt 5 rotates to the lower side, and the cleaning pipeline 4 can be externally connected with a cleaning agent device, so that different types of cleaning agents can be conveniently replaced, and the crawler belt 5 can be easily cleaned.

Referring to fig. 2, two ventilation pipes 7 and ten air blowing holes 8 are provided on both sides of the base 1, the ten air blowing holes 8 are communicated with the two ventilation pipes 7, and the ventilation pipes 7 are externally connected with an air inlet device. The air blowing holes 8 are inclined, the angles between the air blowing holes 8 and the top of the base 1 are 110-160 degrees, the silicon wafer is more favorably dried by blowing, the silicon wafer is prevented from being blown off, and the blowing area of the silicon wafer is increased. The blowing holes 8 can be used for drying the silicon wafers on the caterpillar tracks 5 in a blowing way, the ventilating duct 7 is positioned in the base 1, the space is saved, and the manufacturing materials are saved conveniently.

Referring to fig. 3, the transmission assembly includes three first shafts 2, a track 5 and three first motors 6, the three first motors 6 are externally connected with a power supply, the track 5 is arranged on the three first shafts 2, the three first shafts 2 are arranged on six third through holes formed in two sides of the base 1, the three first motors 6 are connected with the three first shafts 2, and the three first motors 6 are located on the outer side of the base 1. The rotation of the three first shafts 2 drives the crawler belt 5 to rotate for transporting silicon wafers to the next link, and the three first motors 6 are used for automatically controlling the rotation of the first shafts 2, so that the rotation speed of the first shafts 2 is convenient to adjust, and the movement speed of the crawler belt 5 is controlled.

The implementation principle of the utility model is as follows: the three first motors 6 are started, the three first shafts 2 start to rotate, the caterpillar tracks 5 rotate along with the first shafts 2, and the silicon wafers are transported. The air inlet device is connected to the ventilating duct 7, wind enters the blowing holes 8 from the ventilating duct 7, and then is blown to the surface of the silicon wafer on the crawler belt 5 from the blowing holes 8, so that the silicon wafer is dried.

When the silicon wafer is transported to the next link, the part of the caterpillar band 5 for placing the silicon wafer is moved to the lower part of the first shaft 2, a cleaning agent device is connected into the cleaning pipeline 4, the cleaning agent is sprayed onto the caterpillar band 5 from the cleaning holes 18 under external pressure, and residual water stains on the silicon wafer are cleaned. Part of the track 5 reaches the cleaning brush 9, and the cleaning brush 9 is able to clean residual detergent and water stains, keeping the track 5 dry and clean.

When the cleaning brush 9 is not needed, the second motor 10 is started, the second shaft 11 rotates, the turbine 13 starts to rotate along with the second shaft 11, the worm 12 moves downwards, the cleaning brush 9 moves downwards along with the worm 12, and the cleaning brush 9 is far away from the caterpillar 5.

The embodiments of the present utility model are all preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model in this way, therefore: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.

Claims (8)

1. The silicon wafer transmission device comprises a transmission component and a base (1), wherein two sides of the transmission component are arranged on a groove of the base (1), and the silicon wafer transmission device is characterized by further comprising a cleaning component, wherein the cleaning component is positioned at the bottom of the groove of the base (1), and the cleaning component is positioned below the transmission component;

the cleaning assembly comprises a spraying module and a washing module, wherein the bottoms of the spraying module and the washing module are fixedly arranged on the base (1), the spraying module is used for spraying a cleaning agent, and the washing module is used for washing the crawler belt (5).

2. The silicon wafer transmission device according to claim 1, wherein the cleaning module comprises a cleaning brush (9), a worm (12), a turbine (13), a second shaft (11), a flat key (14) and a second motor (10), one end of the cleaning brush (9) is fixedly connected with the worm (12), the turbine (13) is matched with the worm (12), the second shaft (11) is connected with the turbine (13) through the flat key (14), a transmission shaft of the second motor (10) is connected with the second shaft (11), and the worm (12) can move in the up-down direction.

3. The silicon wafer transmission device according to claim 2, wherein the washing module further comprises a bracket (16), a cover plate (15) and a plurality of screws (17), the bracket (16) is fixedly connected with the base (1), the worm (12) and the turbine (13) are positioned in the bracket (16), a first through hole is formed in a part, far away from the base (1), of the bracket (16), on the part, positioned on the worm (12), of the bracket (16), the worm (12) can be placed in the bracket (16) through the first through hole, and the length of the cleaning brush (9) is larger than the diameter of the first through hole;

the part of support (16) is located turbine (13) is seted up and is used for placing the second through-hole of second shaft (11), be located on support (16) turbine (13) part keep away from one side of worm (12) is open, is used for placing turbine (13) extremely the inside of support (16), apron (15) set up in support (16) open one side, apron (15) with support (16) are connected through a plurality of screws (17).

4. The silicon wafer conveying device according to claim 1, wherein the spraying module comprises a cleaner (3), the cleaner (3) is fixedly connected with the base (1), a plurality of cleaning holes (18) are formed in one side, away from the base (1), of the cleaner (3), a cleaning pipeline (4) is formed between the base (1) and the cleaner (3), and the cleaning pipeline (4) is externally connected with a cleaner device.

5. The silicon wafer transmission device according to claim 1, wherein two ventilation pipelines (7) and a plurality of air blowing holes (8) are formed in two sides of the base (1), the air blowing holes (8) are communicated with the two ventilation pipelines (7), the air blowing holes (8) are inclined, and the ventilation pipelines (7) are externally connected with an air inlet device.

6. The silicon wafer transmission device according to claim 2, wherein the transmission assembly comprises a plurality of first shafts (2), a crawler belt (5) and a plurality of first motors (6), the crawler belt (5) is arranged on the plurality of first shafts (2), the plurality of first shafts (2) are arranged on a plurality of third through holes formed in two sides of the base (1), the plurality of first motors (6) are connected with the plurality of first shafts (2), and the plurality of first motors (6) are located on the outer side of the base (1).

7. A silicon wafer transport device according to claim 6, characterized in that the length of the cleaning brush (9) is greater than the width of the caterpillar (5).

8. A silicon wafer transport device according to claim 5, characterized in that the angle of the blowing opening (8) to the top of the base (1) is 110 ° -160 °.