CN220136736U - Liquid sampling unit for grinding liquid supply system - Google Patents

Abstract

The utility model discloses a liquid sampling unit for an abrasive liquid supply system, which comprises a sampling branch pipe and a sampling box, wherein a fixing plate and a splash-proof plate are horizontally arranged in the sampling box, a box body space in the sampling box is divided into a first cavity for accommodating a control valve on the sampling branch pipe, a second cavity for accommodating a sampling bottle and a third cavity for collecting splashed waste liquid from top of the sampling box from top to bottom, the sampling branch pipe stretches into the first cavity through the fixing plate and then stretches into the sampling bottle placed on the splash-proof plate, and the sampling branch pipe is respectively connected with a stock solution pipeline, a circulating pipeline and a liquid conveying pipeline. The utility model uses the sampling box to sample, which not only can avoid the liquid accumulation at the bottom of the sampling bottle, but also can monitor the liquid proportion in the pipeline at different stages in the grinding liquid mixing process, thereby ensuring the mixing precision and mixing efficiency of the grinding liquid.

Description

Liquid sampling unit for grinding liquid supply system

Technical Field

The utility model relates to the technical field of grinding fluid supply, in particular to a liquid sampling unit for a grinding fluid supply system.

Background

The existing grinding fluid supply system directly adopts a sampling bottle to sample, splashed liquid can accumulate at the bottom of the sampling bottle during sampling, so that the inside of the grinding fluid supply system is polluted, and the grinding fluid supply system is usually only sampled through a tail end liquid conveying pipeline, if the mixing proportion of the grinding fluid does not reach the standard, the mixing is required to be carried out again, and the mixing precision and the mixing efficiency of the grinding fluid cannot be effectively ensured.

Disclosure of Invention

In view of the above, the present utility model provides a liquid sampling unit for an abrasive liquid supply system, which is used for solving the above-mentioned problems in the prior art.

The utility model provides a liquid sampling unit for grinding fluid supply system, includes sample branch pipe and sample case, the level is provided with fixed plate and splash guard in the sample case, and fixed plate and splash guard divide into the first cavity that is used for holding the control valve on the sample branch pipe, the second cavity that is used for placing the sample bottle and the third cavity that is used for collecting the waste liquid that splashes from last down with the box space of sample case inside, the sample branch pipe stretches into first cavity from the top of sample case and stretches into the sample bottle of placing on the splash guard after passing the fixed plate, is equipped with a plurality of splash guard on the splash guard, the bottom of sample case is provided with the inclined plane and its lowest department is equipped with the waste liquid mouth;

the sampling branch pipe is respectively connected with the stock solution pipeline, the circulating pipeline and the liquid conveying pipeline, the stock solution pipeline is provided with a stock solution pump for pumping stock solution in the stock solution barrel to the mixing barrel for mixing through the stock solution pipeline, the circulating pipeline is provided with a circulating pump for circulating and refluxing mixed solution in the mixing barrel to the barrel through the circulating pipeline, and the liquid conveying pipeline is provided with a liquid conveying pump for pumping mixed solution in the mixing barrel to the valve box through the liquid conveying pipeline.

Preferably, the sampling box comprises a back plate, side plates vertically fixed on two sides of the back plate, a top plate vertically fixed on the upper end of the back plate and a bottom plate vertically fixed on the lower end of the back plate, wherein the side plates on two sides of the back plate are different in length, a supporting plate is arranged on the inner side surface of the side plate with the longer length, one end of the splash guard is placed on the supporting plate, and the other end of the splash guard is lapped at the joint of the side plate with the bottom plate with the shorter length.

Preferably, a mounting plate is fixed on the inner side surface of the back plate, and the control valve on the sampling branch pipe is fixed on the mounting plate.

Preferably, the cross section of the mounting plate is U-shaped.

Preferably, the bottom plate is composed of an inclined section inclined obliquely downwards and a horizontal section horizontally extending from the lowest part of the inclined section, and the waste liquid outlet is arranged on the horizontal section.

Preferably, splash holes on the splash guard are distributed in a matrix.

Preferably, the raw liquid pipeline, the circulating pipeline and the liquid feeding pipeline are all connected with a waste liquid pipeline, and the circulating pipeline is provided with a specific gravity meter for detecting whether the mixing proportion of pure water and mixed liquid reaches the standard.

Preferably, the stock solution pipeline is including connecting the first stock solution conveyer pipe in each stock solution bucket liquid outlet department, with the second stock solution conveyer pipe that all first stock solution conveyer pipes link to each other, set up at the end of second stock solution conveyer pipe and stretch into each third stock solution conveyer pipe of mixing the bucket respectively, all install the valve on first stock solution conveyer pipe, second stock solution conveyer pipe and the third stock solution conveyer pipe, all install a stock solution pump on every first stock solution conveyer pipe, the intake side of stock solution pump is provided with the stock solution communicating pipe that is used for the intercommunication two first stock solution conveyer pipes.

Preferably, the circulation pipeline comprises a first circulation conveying pipe connected to the liquid outlet of each mixing barrel, a second circulation conveying pipe connected to all the first circulation conveying pipes, two third circulation conveying pipes arranged at the tail ends of the second circulation conveying pipes, a fourth circulation conveying pipe connected to the two third circulation conveying pipes, and a fifth circulation conveying pipe arranged at the tail end of the fourth circulation conveying pipe and respectively extending into each mixing barrel, valves are arranged on the first circulation conveying pipe, the third circulation conveying pipe, the fourth circulation conveying pipe and the fifth circulation conveying pipe, a circulation pump is arranged on each third circulation conveying pipe, and the specific gravity meter is arranged on the fourth circulation conveying pipe.

Preferably, the liquid conveying pipeline comprises a first liquid conveying pipe connected to the liquid outlet of each mixing barrel, a second liquid conveying pipe connected to all the first liquid conveying pipes, two third liquid conveying pipes arranged at the tail ends of the second liquid conveying pipes, a fourth liquid conveying pipe with two ends connected to the valve box and the two third liquid conveying pipes respectively, and a fifth liquid conveying pipe connected to the liquid outlet of the valve box and extending into each mixing barrel respectively, wherein valves are arranged on the first liquid conveying pipe, the third liquid conveying pipe, the fourth liquid conveying pipe and the fifth liquid conveying pipe, two liquid conveying pumps are arranged on one third liquid conveying pipe, and a liquid conveying communicating pipe used for communicating the third liquid conveying pipe with the other third liquid conveying pipe is arranged on a pipe section, between the two liquid conveying pumps, of the third liquid conveying pipe.

The beneficial effects of the utility model are as follows:

the sampling unit disclosed by the utility model utilizes the sampling valve box to sample, so that not only can liquid splashed in the sampling process be collected and liquid accumulation at the bottom of the sampling bottle be avoided, but also liquid at different stages in the grinding liquid mixing process can be sampled and detected, so that the liquid proportion in pipelines at different stages can be monitored, and the mixing precision and the mixing efficiency of the grinding liquid are ensured.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural view of a polishing liquid mixing sampling box.

Fig. 2 is a schematic structural view of the sampling tank.

Fig. 3 is a line diagram of the slurry supply system.

The meaning of the reference numerals in the figures is:

1 is a raw liquid barrel, and the liquid barrel is provided with a plurality of grooves,

2 is a mixing barrel, and the mixing barrel is provided with a plurality of grooves,

3 is a raw liquid pump,

4 is a circulating pump, and the water is pumped by the water pump,

5 is a liquid-feeding pump,

the valve box is shown as the reference numeral 6,

71 is a first raw liquid conveying pipe, 72 is a second raw liquid conveying pipe, 73 is a third raw liquid conveying pipe, 74 is a raw liquid communicating pipe,

81 is a first circulation conveying pipe, 82 is a second circulation conveying pipe, 83 is a third circulation conveying pipe, 84 is a fourth circulation conveying pipe, 85 is a fifth circulation conveying pipe, 86 is a hydrometer,

91 is a first liquid feeding pipe, 92 is a second liquid feeding pipe, 93 is a third liquid feeding pipe, 94 is a fourth liquid feeding pipe, 95 is a fifth liquid feeding pipe, 96 is a liquid feeding communicating pipe,

10 is a sampling branch pipe, and the sampling branch pipe,

11 is a waste liquid pipeline, and the waste liquid pipeline,

121 is a pure water supply header pipe, 122 is a first pure water supply branch pipe, 123 is a second pure water supply branch pipe, 124 is a third pure water supply branch pipe, 125 is a fourth pure water supply branch pipe, 126 is a fifth pure water supply branch pipe,

and 13 is a gas pipeline, and the gas pipeline is provided with a gas inlet,

14 is an air quantity regulating device,

15 is a sampling box, 151 is a fixed plate, 152 is a splash guard, 153 is a control valve, 154 is a waste liquid port, 155 is a back plate, 156 are side plates, 157 are top plates, 158 are bottom plates, 159 are support plates, 1510 are mounting plates, 1512 are splash holes.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the present utility model is described below by means of specific embodiments shown in the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the utility model. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present utility model.

The terminology used in the present disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used in this disclosure and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.

It should be understood that, although the terms first, second, third, etc. may be used in this disclosure to describe various information, these information should not be limited to these terms, but rather should not be construed as indicating or implying any relative importance. These terms are only used to distinguish one type of information from another. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the present disclosure.

In the description of the present utility model, unless otherwise specified and defined, it should be noted that the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, mechanical or electrical, or may be in communication with each other between two elements, directly or indirectly through intermediaries, as would be understood by those skilled in the art, in view of the specific meaning of the terms described above.

For a better understanding of the technical solution of the present utility model, the following detailed description of the present utility model refers to the accompanying drawings.

The utility model provides a liquid sampling unit for an abrasive liquid supply system, which comprises a sampling branch pipe 10 and a sampling box 15.

The sampling tank 15 is horizontally provided with a fixing plate 151 and a splash guard 152, and the fixing plate 151 and the splash guard 152 divide the tank space inside the sampling tank 15 from top to bottom into a first chamber for accommodating a control valve 153 on a sampling branch pipe, a second chamber for placing a sampling bottle (not shown in fig. 1), and a third chamber for collecting splashed waste liquid. The bottom of the sampling box 15 is provided with an inclined surface and the lowest part thereof is provided with a waste liquid port 154.

Specifically, the sampling box 15 is composed of a back plate 155, side plates 156 vertically fixed to both sides of the back plate 155, a top plate 157 vertically fixed to the upper end of the back plate 155, and a bottom plate 158 vertically fixed to the lower end of the back plate 155. The side plates 156 arranged on the left side and the right side of the backboard 155 are different in length, the inner side surface of the side plate with the longer length is provided with a supporting plate 159, one end of the splash guard 152 is placed on the supporting plate 159, and the other end is lapped at the joint of the side plate with the shorter length and the bottom plate 158. The splash guard 152 is provided with a plurality of splash guard holes 1512, and the splash guard holes 1512 are distributed in a matrix.

The bottom plate 158 is formed by a slant section inclined obliquely downward and a horizontal section extending horizontally from the lowest part of the slant section, and the waste liquid outlet 154 is provided on the horizontal section.

A mounting plate 1510 is fixed to the inner side of the back plate 155, and the control valve 153 of the sampling branch pipe 10 is fixed to the mounting plate 1510. In this embodiment, mounting plate 1510 has a U-shaped cross section.

The sampling branch pipe 10 extends into the first chamber from the top of the sampling box 15 and passes through the fixing plate 151 and then extends into the sampling bottle placed on the splash guard 152, when liquid splashes out of the sampling bottle during sampling, the splashed liquid can be collected into the third chamber from the splash guard 1512, and the splashed liquid can flow to the waste liquid outlet 154 due to the inclined surface arranged on the bottom plate 158, and is discharged from the waste liquid outlet 154 to the waste liquid treatment device.

The sampling branch pipe 10 comprises a stock solution sampling pipe connected with a stock solution pipeline of the grinding fluid supply system for sampling stock solution in the stock solution pipeline, a mixed solution sampling pipe connected with a circulating pipeline for sampling mixed solution mixed in the circulating pipeline, and a tail end sampling pipe connected with a liquid feeding pipeline for sampling grinding fluid in the liquid feeding pipeline.

The sampling branch pipe also comprises a pure water sampling pipe connected with a pure water pipeline of the grinding fluid supply system.

The semiconductor grinding fluid supply system comprises a stock solution barrel 1, a mixing barrel 2, a stock solution pump 3, a circulating pump 4, a liquid feeding pump 5, a valve box 6, a stock solution pipeline, a circulating pipeline, a liquid feeding pipeline, a pure water pipeline and a waste liquid pipeline.

The stock solution barrel 1 and the mixing barrel 2 are both provided with a plurality of stock solution barrels. The stock solution barrels 1 are used for storing concentrated grinding stock solution, and a plurality of stock solution barrels 1 are connected with each mixing barrel 2 through stock solution pipelines so as to pump the stock solution in the stock solution barrels 1 to the mixing barrels 2 through the stock solution pipelines by using the stock solution pump 3 for mixing.

The stock solution pipeline comprises first stock solution conveying pipes 71 connected to the liquid outlets of the stock solution barrels 1, second stock solution conveying pipes 72 connected to all the first stock solution conveying pipes 71, and third stock solution conveying pipes 73 arranged at the tail ends of the second stock solution conveying pipes 72 and respectively extending into the mixing barrels 2, and each first stock solution conveying pipe 71 is provided with a stock solution pump 3. In this embodiment, the stock solution barrels 1 are provided with 2, and the stock solution communicating pipes 74 for communicating the 2 first stock solution conveying pipes 71 are connected between the 2 first stock solution conveying pipes 71 connected with the 2 stock solution barrels 1, respectively, and two ends of the stock solution communicating pipes 74 are disposed on the water inlet sides of the 2 stock solution pumps 3, respectively. By providing the raw liquid communication pipe 74 between the 2 first raw liquid transport pipes 71, the raw liquid pumps 3 on the 2 first raw liquid transport pipes 71 can be made standby pumps.

Valves for controlling pipeline switch and flow rate are arranged on the first stock solution conveying pipe 71, the second stock solution conveying pipe 72 and the third stock solution conveying pipe 73, and the mixing proportion of the stock solutions conveyed in the two first stock solution conveying pipes 71 can be adjusted by controlling the opening of the valves on the two first stock solution conveying pipes 71.

When the stock solution pump works normally, one stock solution pump works, the other stock solution pump is used as a standby pump, stock solution in 2 stock solution barrels is pumped to 2 mixing barrels through stock solution pipelines respectively, and if the stock solution pump working currently fails, the other standby stock solution pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the raw liquid pump 3 is a pneumatic bellows pump with a maximum working pressure of 0.6Mpa and a maximum flow rate of 16L/min.

The mixing barrels 2 are also provided with a plurality of mixing barrels 2, the mixing barrels 2 are used for mixing the stock solution conveyed by the stock solution pipeline to mix grinding liquid, the grinding liquid can enter the circulating pipeline from the lower part of the mixing barrels 2, and the grinding liquid is circulated and returned into the barrels by the circulating pump 4 through the pumping of the circulating pipeline; or the grinding fluid can enter the liquid conveying pipeline from the lower part of the mixing barrel 2, and the grinding fluid is pumped to the valve box 6 through the liquid conveying pipeline by the liquid conveying pump 3, and then is conveyed to various using points or returned into the barrel by the valve box 6.

The circulation pipeline comprises a first circulation conveying pipe 81 connected to the liquid outlet at the bottom of each mixing barrel 2, a second circulation conveying pipe 82 connected to all the first circulation conveying pipes 81, two third circulation conveying pipes 83 arranged at the tail ends of the second circulation conveying pipes 82, a fourth circulation conveying pipe 84 connected to the two third circulation conveying pipes 83, and a fifth circulation conveying pipe 85 arranged at the tail ends of the fourth circulation conveying pipes 84 and respectively extending into each mixing barrel 2.

Each third circulation conveying pipe 83 is provided with a circulation pump 4, and the two circulation pumps 4 are standby pumps. When the circulating pump works normally, one circulating pump works, the other circulating pump is used as a standby pump, stock solution in the mixing barrel is pumped to the corresponding mixing barrel through the circulating pipeline by the circulating pump in a working state, and if the current working circulating pump fails, the other standby circulating pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the circulating pump 4 is a levitonix magnetic levitation pump, and the maximum working pressure is 0.3Mpa.

Valves for controlling the opening and closing of pipelines are arranged on the first circulation conveying pipe 81, the third circulation conveying pipe 83, the fourth circulation conveying pipe 84 and the fifth circulation conveying pipe 85, a flow valve for controlling the flow of the mixed liquid conveyed by the valves through the opening of the valves so as to adjust the mixing proportion of the mixed liquid and the pure water is also arranged on the third circulation conveying pipe 83, and a hydrometer 86 is arranged on the fourth circulation conveying pipe 84, wherein the hydrometer 86 is used for detecting whether the mixing proportion of the mixed liquid and the pure water reaches the standard.

The liquid delivery pipeline comprises a first liquid delivery pipe 91 connected to the liquid outlet at the lower part of each mixing barrel 2, a second liquid delivery pipe 92 connected to all the first liquid delivery pipes 91, two third liquid delivery pipes 93 arranged at the tail end of the second liquid delivery pipe 92, a fourth liquid delivery pipe 94 with two ends connected to a valve box and the two third liquid delivery pipes 93 respectively, and a fifth liquid delivery pipe 95 connected to the liquid outlet of the valve box 6 and extending into each mixing barrel 2 respectively, wherein two liquid delivery pumps 5 are arranged on one of the third liquid delivery pipes, and a liquid delivery communicating pipe 96 used for communicating the third liquid delivery pipe with the other third liquid delivery pipe is arranged on the pipe section of the third liquid delivery pipe between the two liquid delivery pumps. The two liquid delivery pumps 5 are standby pumps, one liquid delivery pump works and the other liquid delivery pump works as a standby pump in normal working conditions, and the liquid delivery pump in working conditions pumps the mixed stock solution in the mixing barrel to the valve box 6 through the liquid delivery pipeline, and then the mixed stock solution is conveyed to each using point or returned to the barrel by the valve box 6; if the current working liquid feeding pump fails, the stand-by liquid feeding pump starts up and runs, and normal liquid feeding is not affected. In this embodiment, the liquid feeding pump 5 is a Levitronix magnetic levitation pump, and can supply liquid for a pipeline with the total length of 150m, and the maximum flow is 70L/min.

Valves for controlling the opening and the closing of the pipeline and the flow rate are arranged on the first liquid conveying pipe 91, the third liquid conveying pipe 93, the fourth liquid conveying pipe 94 and the fifth liquid conveying pipe 95, and the mixing proportion of the mixed liquid and the pure water can be adjusted by controlling the opening of the valve corresponding to the valve on the third liquid conveying pipe 93.

The pure water (DI) is conveyed through a pure water pipeline. The pure water line may be used to not only transport pure water to mix the pure water with the mixed liquid in the third circulation pipe 83 or the third liquid feed pipe 93 in proportion, but also clean all the lines.

The stock solution pipeline, the circulating pipeline and the liquid feeding pipeline are all provided with sampling branch pipes 10, the sampling branch pipes on the stock solution pipeline are connected to the second stock solution conveying pipe 72, the sampling branch pipes on the circulating pipeline are connected to the fourth circulating conveying pipe 84, and the sampling branch pipes on the liquid feeding pipeline are connected to the fourth liquid feeding pipe 94.

The raw liquid pipeline, the circulating pipeline and the liquid feeding pipeline are all connected with a waste liquid pipeline 11.

The deionized water piping includes a deionized water supply main 121, a first deionized water supply branch pipe 122, a second deionized water supply branch pipe 123, a third deionized water supply branch pipe 124, a fourth deionized water supply branch pipe 125, and a fifth deionized water supply branch pipe 126 connected to the deionized water supply main 121.

The first pure water delivery branch pipes 122 are respectively connected with the 2 first raw liquid delivery pipes 71 of the raw liquid pipeline, and are used for cleaning the raw liquid pipeline. The pure water supplied through the first pure water supply branch pipe 122 can flow in the raw liquid pipeline, clean the raw liquid pipeline, the raw liquid barrel and the sampling branch pipe thereof, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline thereof.

The second pure water delivery branch pipe 123 is connected to a third liquid delivery pipe 93 of the liquid delivery pipe, to which a liquid delivery pump is mounted, for cleaning the liquid delivery pipe or mixing the delivered pure water with the mixed liquid in the pipe in a set ratio, and the second pure water delivery branch pipe 123 is provided with two water outlet pipe sections, one of which is connected to the water inlet side of the first liquid delivery pump and the other of which is connected to the water inlet side of the second liquid delivery pump. The pure water supplied through the second pure water supply branch pipe 123 can flow in the liquid supply pipe, the liquid supply pipe and the sampling branch pipe thereof can be cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipe thereof.

The third pure water delivery branch pipes 124 are respectively connected with the two third circulation delivery pipes 83 of the circulation pipeline, and are used for cleaning the circulation pipeline or mixing the delivered pure water with the mixed liquid in the pipeline according to a set proportion. The pure water supplied through the third pure water supply branch pipe 124 can flow in the circulation pipe, the sampling branch pipe thereof, and the mixing tank are cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through the waste liquid pipe thereof.

The fourth pure water supply branch pipe 125 is connected to the fourth circulation pipe 84 of the circulation line for cleaning the circulation line. The pure water supplied through the fourth pure water supply branch pipe 125 can flow in the circulation pipe, clean the circulation pipe, its sampling branch pipe, and the mixing tank, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through its waste liquid pipe.

The fifth pure water conveying branch pipe 126 is connected with the sampling branch pipe connected to the raw liquid pipeline, and is used for cleaning the sampling branch pipe, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline.

Preferably, the full-automatic semiconductor grinding fluid supply system further comprises a gas pipeline 13 for blowing and drying the cleaned pipeline, wherein the gas pipeline 13 is respectively connected with the raw fluid barrel 1, the pure water conveying main pipe 121 of the pure water pipeline and the mixing barrel 2. After all the pipelines and the mixing barrel are cleaned, N2 can be introduced into the pipelines, the mixing barrel 2 and the stock solution barrel 1 through the gas pipelines, and the pipelines are purged and dried.

The air pipeline is also provided with an air quantity adjusting device 14.

The on-off of all valves and the start-stop of the pump in the system are controlled by a controller.

In the actual use process, the raw liquid pump 3 pumps the raw liquid in the raw liquid barrel to the mixing barrel 2 through the raw liquid pipeline, the stirring mechanism in the mixing barrel 2 uniformly stirs the raw liquid, then the raw liquid is discharged into the circulating pipeline from the liquid outlet at the lower part of the mixing barrel, the raw liquid is mixed with pure water sent by the pure water pipeline in the circulating pipeline according to a set proportion, and then the mixture flows into the mixing barrel 2 again through the circulating pipeline to be uniformly stirred, so that the grinding liquid is prepared. The prepared grinding fluid is discharged into a fluid delivery pipeline from a lower fluid outlet of the mixing barrel 2, and is delivered to a valve box 6 through the fluid delivery pipeline, and the valve box 6 conveys the grinding fluid to each use point or returns to the mixing barrel 2.

When the cleaning is needed, the electric control module controls the corresponding valve on the pure water pipeline to be opened, pure water enters the stock solution pipeline, the circulating pipeline or the liquid conveying pipeline through the pure water pipeline, the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid hanging pipeline, then the electric control module controls the corresponding valve on the gas pipeline to be opened, and the gas pipeline blows nitrogen to purge and dry each pipeline.

It should be understood that the described embodiments are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Claims (10)

1. The utility model provides a liquid sampling unit for grinding fluid supply system, its characterized in that includes sample branch pipe and sampling box, the level is provided with fixed plate and splash guard in the sampling box, and fixed plate and splash guard divide into the first cavity that is used for holding the control valve on the sample branch pipe, the second cavity that is used for placing the sample bottle and is used for collecting the third cavity that splashes the waste liquid from the top of sampling box into first cavity and stretch into the sample bottle of placing on the splash guard after passing the fixed plate from top of sampling box, are equipped with a plurality of splash guard on the splash guard, the bottom of sampling box is provided with the inclined plane and its lowest department is equipped with the waste liquid mouth;

the sampling branch pipe is respectively connected with the stock solution pipeline, the circulating pipeline and the liquid conveying pipeline, the stock solution pipeline is provided with a stock solution pump for pumping stock solution in the stock solution barrel to the mixing barrel for mixing through the stock solution pipeline, the circulating pipeline is provided with a circulating pump for circulating and refluxing mixed solution in the mixing barrel to the barrel through the circulating pipeline, and the liquid conveying pipeline is provided with a liquid conveying pump for pumping mixed solution in the mixing barrel to the valve box through the liquid conveying pipeline.

2. The liquid sampling unit for an abrasive liquid supply system according to claim 1, wherein the sampling box is composed of a back plate, side plates vertically fixed on both sides of the back plate, a top plate vertically fixed on the upper end of the back plate, and a bottom plate vertically fixed on the lower end of the back plate, the side plates on both sides of the back plate are different in length, a support plate is provided on the inner side surface of the side plate of longer length, one end of the splash plate is placed on the support plate, and the other end is overlapped at the junction of the side plate of shorter length and the bottom plate.

3. The liquid sampling unit for an abrasive liquid supply system according to claim 2, wherein a mounting plate is fixed to an inner side surface of the back plate, and the control valve on the sampling branch pipe is fixed to the mounting plate.

4. A liquid sampling unit for an abrasive liquid supply system according to claim 3, wherein the mounting plate is U-shaped in cross section.

5. The liquid sampling unit for an abrasive liquid supply system according to claim 2, wherein the bottom plate is formed of an inclined section inclined obliquely downward, a horizontal section extending horizontally from a lowest part of the inclined section, and the liquid discharge port is provided on the horizontal section.

6. The liquid sampling unit for an abrasive liquid supply system according to claim 1, wherein the splash guard has splash guard apertures in a matrix distribution.

7. The liquid sampling unit for an abrasive liquid supply system according to claim 1, wherein the raw liquid pipeline, the circulating pipeline and the liquid feeding pipeline are all connected with a waste liquid pipeline, and the circulating pipeline is provided with a gravimeter for detecting whether the mixing ratio of pure water and mixed liquid reaches the standard.

8. The liquid sampling unit for an abrasive liquid supply system according to claim 7, wherein the circulation line includes a first circulation pipe connected to the liquid outlet of each mixing tub, a second circulation pipe connected to all the first circulation pipes, two third circulation pipes provided at the ends of the second circulation pipe, a fourth circulation pipe connected to the two third circulation pipes, and a fifth circulation pipe provided at the ends of the fourth circulation pipe and extending into each mixing tub, valves being installed on the first circulation pipe, the third circulation pipe, the fourth circulation pipe, and the fifth circulation pipe, one circulation pump being installed on each third circulation pipe, and the weight meter being installed on the fourth circulation pipe.

9. The liquid sampling unit for an abrasive liquid supply system according to claim 1 or 7, wherein the stock liquid pipeline comprises first stock liquid conveying pipes connected to the liquid outlets of the respective stock liquid barrels, second stock liquid conveying pipes connected to all the first stock liquid conveying pipes, third stock liquid conveying pipes arranged at the ends of the second stock liquid conveying pipes and respectively extending into the respective mixing barrels, valves are installed on the first stock liquid conveying pipes, the second stock liquid conveying pipes and the third stock liquid conveying pipes, one stock liquid pump is installed on each first stock liquid conveying pipe, and stock liquid communicating pipes for communicating the two first stock liquid conveying pipes are arranged on the water inlet sides of the stock liquid pumps.

10. The liquid sampling unit for an abrasive liquid supply system according to claim 1 or 7, wherein the liquid supply line includes a first liquid supply pipe connected to the liquid outlet of each mixing tub, a second liquid supply pipe connected to all the first liquid supply pipes, two third liquid supply pipes provided at the ends of the second liquid supply pipes, a fourth liquid supply pipe connected to the valve box and the two third liquid supply pipes, respectively, at both ends thereof, and a fifth liquid supply pipe connected to the liquid outlet of the valve box and extending into each mixing tub, respectively, valves are installed on the first liquid supply pipe, the third liquid supply pipe, the fourth liquid supply pipe, and the fifth liquid supply pipe, and a liquid supply communication pipe for communicating the third liquid supply pipe with the other third liquid supply pipe is provided on a pipe section of one of the third liquid supply pipes, which is provided with two liquid supply pumps and is located between the two liquid supply pipes.