CN219922773U - Mixing barrel for semiconductor grinding fluid supply system - Google Patents

Abstract

The utility model discloses a mixing barrel for a semiconductor grinding fluid supply system, which is characterized in that a stirring mechanism and a bubbling humidifying device are arranged on the mixing barrel, the bubbling humidifying device comprises a box body, a vent pipe arranged at the top of the box body, a water inlet pipe arranged at the side surface of the box body and used for introducing pure water into the box body, an air inlet pipe used for introducing nitrogen into the box body, and a discharge pipe arranged at the bottom of the box body and used for conveying generated bubbles into the mixing barrel. According to the utility model, the bubbling humidifying device is arranged on the mixing barrel, and bubbles can be introduced into the mixing barrel through the bubbling humidifying device in the process of stirring the stock solution in the mixing barrel, so that the stock solution can be mixed more uniformly.

Description

Mixing barrel for semiconductor grinding fluid supply system

Technical Field

The utility model relates to the technical field of grinding fluid supply, in particular to a mixing barrel for a semiconductor grinding fluid supply system.

Background

Chemical Mechanical Polishing (CMP) is used as an indispensable process in chip processing, not only in the wafer preparation stage, but also in the wafer processing process for global planarization of the wafer surface. The chemical mechanical polishing method is mainly a flattening technology which utilizes a mechanical polishing principle, and combines chemical additives in polishing liquid to react with the surface of a chip to flatten the contour of the surface of the chip with variable height.

Polishing slurry is a key consumable in chemical mechanical polishing processes and plays an important role in chip chemical mechanical polishing. The grinding fluid mixing barrel adopted by the grinding fluid supply system in the prior art is only through a stirring mechanism, stock solution in the mixing barrel is difficult to stir uniformly, the mixing barrel is flat bottom, the grinding fluid at the bottom is difficult to evacuate and use up, the grinding fluid remained at the bottom of the mixing barrel can precipitate and crystallize to form large particles, and the grinding fluid doped with the crystal particles can form scratches on the surface of a grinding product and can enable the surface of the grinding product to remain the crystal particles in the mechanical grinding process of the product through the grinding fluid supply system, so that the product yield is affected.

Disclosure of Invention

In view of the above, the present utility model provides a mixing drum for a semiconductor polishing liquid supply system, which is used for solving the above-mentioned problems in the prior art.

A mix bucket for semiconductor grinding fluid supply system installs rabbling mechanism and bubble humidification device on the mix bucket, bubble humidification device includes the box, sets up at the permeability cell at box top, sets up at the inlet tube that is used for letting in pure water and is used for letting in the intake pipe of nitrogen gas in the box to the box side to and set up at the discharge pipe that is used for sending into the mix bucket with the bubble of formation in the box bottom, all install the valve on permeability cell, inlet tube, intake pipe and the discharge pipe, the inlet tube with semiconductor grinding fluid supply system's pure water pipeline links to each other, the intake pipe with semiconductor grinding fluid supply system's gas line links to each other.

Preferably, the mixing barrel comprises a barrel body and a barrel cover fixed at the top of the barrel body.

Preferably, the cylinder body consists of a cylindrical cylinder body and an inverted cone-shaped cylinder body extending from the lower part of the cylindrical cylinder body, and a plurality of liquid discharge ports are formed in the bottom of the inverted cone-shaped cylinder body.

Preferably, the barrel cover is provided with a liquid inlet for enabling a raw liquid conveying pipeline of the semiconductor grinding liquid supply system to pass through so as to fill raw liquid into the mixing barrel, and an air inlet for enabling a discharge pipe of the bubbling humidifying device to pass through so as to feed bubbles into the mixing barrel.

Preferably, the liquid inlet is provided with a plurality of liquid inlets.

Preferably, the valves arranged on the ventilation pipe, the water inlet pipe, the air inlet pipe and the discharge pipe are electric control valves.

The beneficial effects of the utility model are as follows:

according to the utility model, the bubbling humidifying device is arranged on the mixing barrel, and bubbles can be introduced into the mixing barrel through the bubbling humidifying device in the process of stirring the stock solution in the mixing barrel, so that the stock solution can be mixed more uniformly; and the bottom of the mixing barrel is arranged to be in an inverted cone shape, so that the grinding liquid in the mixing barrel can be guaranteed to be exhausted by being pumped out, the formation of crystal particles at the bottom of the mixing barrel is avoided, the formation of scratches on the surface of a grinding product is effectively avoided, the residual crystal particles on the surface of the grinding product are caused, and the product yield is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a line diagram of a semiconductor slurry supply system.

Fig. 2 is a schematic structural view of the mixing tub.

Fig. 3 is a bubbling humidification device.

The meaning of the reference numerals in the figures is:

1 is a raw liquid barrel, and the liquid barrel is provided with a plurality of grooves,

2 is a mixing barrel, 21 is a barrel, 22 is a barrel cover, 23 is a cylindrical barrel, 24 is an inverted cone barrel, 25 is a liquid outlet, 26 is a liquid inlet, 27 is an air inlet,

3 is a raw liquid pump,

4 is a circulating pump, and the water is pumped by the water pump,

5 is a liquid-feeding pump,

the valve box is shown as the reference numeral 6,

71 is a first raw liquid conveying pipe, 72 is a second raw liquid conveying pipe, 73 is a third raw liquid conveying pipe, 74 is a raw liquid communicating pipe,

81 is a first circulation conveying pipe, 82 is a second circulation conveying pipe, 83 is a third circulation conveying pipe, 84 is a fourth circulation conveying pipe, 85 is a fifth circulation conveying pipe, 86 is a hydrometer,

91 is a first liquid feeding pipe, 92 is a second liquid feeding pipe, 93 is a third liquid feeding pipe, 94 is a fourth liquid feeding pipe, 95 is a fifth liquid feeding pipe, 96 is a liquid feeding communicating pipe,

10 is a sampling branch pipe, and the sampling branch pipe,

11 is a waste liquid pipeline, and the waste liquid pipeline,

121 is a pure water supply header pipe, 122 is a first pure water supply branch pipe, 123 is a second pure water supply branch pipe, 124 is a third pure water supply branch pipe, 125 is a fourth pure water supply branch pipe, 126 is a fifth pure water supply branch pipe,

and 13 is a gas pipeline, and the gas pipeline is provided with a gas inlet,

14 is an air quantity regulating device,

15 is a stirring mechanism, and the stirring mechanism is a stirring mechanism,

16 is a bubbling humidifying device, 161 is a box body, 162 is a ventilation pipe, 163 is an air inlet pipe, 164 is an exhaust pipe, and 165 is a water inlet pipe.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the present utility model is described below by means of specific embodiments shown in the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the utility model. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present utility model.

The terminology used in the present disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used in this disclosure and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.

In the description of the present utility model, unless otherwise specified and defined, it should be noted that the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, mechanical or electrical, or may be in communication with each other between two elements, directly or indirectly through intermediaries, as would be understood by those skilled in the art, in view of the specific meaning of the terms described above.

For a better understanding of the technical solution of the present utility model, the following detailed description of the present utility model refers to the accompanying drawings.

The embodiment of the utility model provides a mixing barrel 2 for a semiconductor grinding fluid supply system, wherein a stirring mechanism 15 and a bubbling humidifying device 16 are arranged on the mixing barrel 2.

The mixing barrel 2 comprises a barrel 21 and a barrel cover 22 fixed on the top of the barrel 21.

The cylinder 21 is composed of a cylindrical cylinder 23 and an inverted cone-shaped cylinder 24 extending from the lower part of the cylindrical cylinder 23, and a plurality of liquid discharge ports 25 are formed at the bottom of the inverted cone-shaped cylinder 24.

The barrel cover 22 is provided with a liquid inlet 26 for allowing a raw liquid conveying pipeline (comprising a raw liquid pipeline, a circulating pipeline and a liquid conveying pipeline) of the semiconductor grinding liquid supply system to pass through so as to fill raw liquid into the mixing barrel 2, and an air inlet 27 for allowing a discharge pipe of the bubbling humidifying device to pass through so as to convey bubbles into the mixing barrel 2. In this embodiment, a plurality of liquid inlets 26 are provided.

The stirring mechanism 15 may be set to any structure capable of realizing a stirring function, for example, the stirring mechanism may be composed of a transmission rod vertically fixed on the barrel cover of the mixing barrel and a stirring disc fixed on the transmission rod along the length direction of the transmission rod and distributed regularly, the transmission rod may be driven by a power motor fixed on the top of the barrel cover of the mixing barrel, that is, the transmission rod is connected with the output end of the power motor, and when in use, the power motor is controlled by a controller of the semiconductor grinding fluid supply system to start, and the power motor may drive the transmission rod to rotate to further drive the stirring disc to rotate.

The bubbling humidifying device 16 comprises a box body 161, a ventilation pipe 162 arranged at the top of the box body 161, a water inlet pipe 165 arranged on the side surface of the box body 161 and used for introducing pure water into the box body 161, an air inlet pipe 163 used for introducing nitrogen into the box body 161, and a discharge pipe 164 arranged at the bottom of the box body 161 and used for conveying generated bubbles into the mixing barrel 2, wherein valves are arranged on the ventilation pipe 162, the water inlet pipe 165, the air inlet pipe 163 and the discharge pipe 164, the water inlet pipe 165 is connected with a pure water pipeline of the semiconductor grinding fluid supply system, the air inlet pipe 163 is connected with a gas pipeline of the semiconductor grinding fluid supply system, and a plurality of ventilation round holes are formed in the air inlet pipe 163. In this embodiment, the valves mounted on the ventilation tube 162, the water inlet tube 165, the air inlet tube 163 and the discharge tube 164 are electrically controlled valves

When pure water is introduced into the box of the bubbling humidifying device 16 through the nitrogen gas pipeline and the pure water pipeline through the water inlet pipe 165 and the box of the bubbling humidifying device 16 through the air inlet pipe 163, bubbles are generated in the pure water under the action of the nitrogen gas, and when the bubbles enter the mixing barrel 2 through the discharge pipe, the mixing uniformity of the raw liquid in the mixing barrel 2 can be increased.

The semiconductor grinding fluid supply system comprises a stock solution barrel 1, a mixing barrel 2, a stock solution pump 3, a circulating pump 4, a liquid feeding pump 5, a valve box 6, a stock solution pipeline, a circulating pipeline, a liquid feeding pipeline, a pure water pipeline and a waste liquid pipeline.

The stock solution barrel 1 and the mixing barrel 2 are both provided with a plurality of stock solution barrels. The stock solution barrels 1 are used for storing concentrated grinding stock solution, and a plurality of stock solution barrels 1 are connected with each mixing barrel 2 through stock solution pipelines so as to pump the stock solution in the stock solution barrels 1 to the mixing barrels 2 through the stock solution pipelines by using the stock solution pump 3 for mixing.

The stock solution pipeline comprises first stock solution conveying pipes 71 connected to the liquid outlets of the stock solution barrels 1, second stock solution conveying pipes 72 connected to all the first stock solution conveying pipes 71, and third stock solution conveying pipes 73 arranged at the tail ends of the second stock solution conveying pipes 72 and respectively extending into the mixing barrels 2, and each first stock solution conveying pipe 71 is provided with a stock solution pump 3. In this embodiment, the stock solution barrels 1 are provided with 2, and the stock solution communicating pipes 74 for communicating the 2 first stock solution conveying pipes 71 are connected between the 2 first stock solution conveying pipes 71 connected with the 2 stock solution barrels 1, respectively, and two ends of the stock solution communicating pipes 74 are disposed on the water inlet sides of the 2 stock solution pumps 3, respectively. By providing the raw liquid communication pipe 74 between the 2 first raw liquid transport pipes 71, the raw liquid pumps 3 on the 2 first raw liquid transport pipes 71 can be made standby pumps.

Valves for controlling pipeline switch and flow rate are arranged on the first stock solution conveying pipe 71, the second stock solution conveying pipe 72 and the third stock solution conveying pipe 73, and the mixing proportion of the stock solutions conveyed in the two first stock solution conveying pipes 71 can be adjusted by controlling the opening of the valves on the two first stock solution conveying pipes 71.

When the stock solution pump works normally, one stock solution pump works, the other stock solution pump is used as a standby pump, stock solution in 2 stock solution barrels is pumped to 2 mixing barrels through stock solution pipelines respectively, and if the stock solution pump working currently fails, the other standby stock solution pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the raw liquid pump 3 is a pneumatic bellows pump with a maximum working pressure of 0.6Mpa and a maximum flow rate of 16L/min.

The mixing barrels 2 are also provided with a plurality of mixing barrels 2, the mixing barrels 2 are used for mixing the stock solution conveyed by the stock solution pipeline to mix grinding liquid, the grinding liquid can enter the circulating pipeline from the lower part of the mixing barrels 2, and the grinding liquid is circulated and returned into the barrels by the circulating pump 4 through the pumping of the circulating pipeline; or the grinding fluid can enter the liquid conveying pipeline from the lower part of the mixing barrel 2, and the grinding fluid is pumped to the valve box 6 through the liquid conveying pipeline by the liquid conveying pump 3, and then is conveyed to various using points or returned into the barrel by the valve box 6.

The circulation pipeline comprises a first circulation conveying pipe 81 connected to the liquid outlet at the bottom of each mixing barrel 2, a second circulation conveying pipe 82 connected to all the first circulation conveying pipes 81, two third circulation conveying pipes 83 arranged at the tail ends of the second circulation conveying pipes 82, a fourth circulation conveying pipe 84 connected to the two third circulation conveying pipes 83, and a fifth circulation conveying pipe 85 arranged at the tail ends of the fourth circulation conveying pipes 84 and respectively extending into each mixing barrel 2.

Each third circulation conveying pipe 83 is provided with a circulation pump 4, and the two circulation pumps 4 are standby pumps. When the circulating pump works normally, one circulating pump works, the other circulating pump is used as a standby pump, stock solution in the mixing barrel is pumped to the corresponding mixing barrel through the circulating pipeline by the circulating pump in a working state, and if the current working circulating pump fails, the other standby circulating pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the circulating pump 4 is a levitonix magnetic levitation pump, and the maximum working pressure is 0.3Mpa.

Valves for controlling the opening and closing of pipelines are arranged on the first circulation conveying pipe 81, the third circulation conveying pipe 83, the fourth circulation conveying pipe 84 and the fifth circulation conveying pipe 85, a flow valve for controlling the flow of the mixed liquid conveyed by the valves through the opening of the valves so as to adjust the mixing proportion of the mixed liquid and the pure water is also arranged on the third circulation conveying pipe 83, and a hydrometer 86 is arranged on the fourth circulation conveying pipe 84, wherein the hydrometer 86 is used for detecting whether the mixing proportion of the mixed liquid and the pure water reaches the standard.

The liquid delivery pipeline comprises a first liquid delivery pipe 91 connected to the liquid outlet at the lower part of each mixing barrel 2, a second liquid delivery pipe 92 connected to all the first liquid delivery pipes 91, two third liquid delivery pipes 93 arranged at the tail end of the second liquid delivery pipe 92, a fourth liquid delivery pipe 94 with two ends connected to a valve box and the two third liquid delivery pipes 93 respectively, and a fifth liquid delivery pipe 95 connected to the liquid outlet of the valve box 6 and extending into each mixing barrel 2 respectively, wherein two liquid delivery pumps 5 are arranged on one of the third liquid delivery pipes, and a liquid delivery communicating pipe 96 used for communicating the third liquid delivery pipe with the other third liquid delivery pipe is arranged on the pipe section of the third liquid delivery pipe between the two liquid delivery pumps. The two liquid delivery pumps 5 are standby pumps, one liquid delivery pump works and the other liquid delivery pump works as a standby pump in normal working conditions, and the liquid delivery pump in working conditions pumps the mixed stock solution in the mixing barrel to the valve box 6 through the liquid delivery pipeline, and then the mixed stock solution is conveyed to each using point or returned to the barrel by the valve box 6; if the current working liquid feeding pump fails, the stand-by liquid feeding pump starts up and runs, and normal liquid feeding is not affected. In this embodiment, the liquid feeding pump 5 is a Levitronix magnetic levitation pump, and can supply liquid for a pipeline with the total length of 150m, and the maximum flow is 70L/min.

Valves for controlling the opening and the closing of the pipeline and the flow rate are arranged on the first liquid conveying pipe 91, the third liquid conveying pipe 93, the fourth liquid conveying pipe 94 and the fifth liquid conveying pipe 95, and the mixing proportion of the mixed liquid and the pure water can be adjusted by controlling the opening of the valve corresponding to the valve on the third liquid conveying pipe 93.

The pure water (DI) is conveyed through a pure water pipeline. The pure water line may be used to not only transport pure water to mix the pure water with the mixed liquid in the third circulation pipe 83 or the third liquid feed pipe 93 in proportion, but also clean all the lines.

The stock solution pipeline, the circulating pipeline and the liquid feeding pipeline are all provided with sampling branch pipes 10, the sampling branch pipes on the stock solution pipeline are connected to the second stock solution conveying pipe 72, the sampling branch pipes on the circulating pipeline are connected to the fourth circulating conveying pipe 84, and the sampling branch pipes on the liquid feeding pipeline are connected to the fourth liquid feeding pipe 94.

The raw liquid pipeline, the circulating pipeline and the liquid feeding pipeline are all connected with a waste liquid pipeline 11.

The deionized water piping includes a deionized water supply main 121, a first deionized water supply branch pipe 122, a second deionized water supply branch pipe 123, a third deionized water supply branch pipe 124, a fourth deionized water supply branch pipe 125, and a fifth deionized water supply branch pipe 126 connected to the deionized water supply main 121.

The first pure water delivery branch pipes 122 are respectively connected with the 2 first raw liquid delivery pipes 71 of the raw liquid pipeline, and are used for cleaning the raw liquid pipeline. The pure water supplied through the first pure water supply branch pipe 122 can flow in the raw liquid pipeline, clean the raw liquid pipeline, the raw liquid barrel and the sampling branch pipe thereof, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline thereof.

The second pure water delivery branch pipe 123 is connected to a third liquid delivery pipe 93 of the liquid delivery pipe, to which a liquid delivery pump is mounted, for cleaning the liquid delivery pipe or mixing the delivered pure water with the mixed liquid in the pipe in a set ratio, and the second pure water delivery branch pipe 123 is provided with two water outlet pipe sections, one of which is connected to the water inlet side of the first liquid delivery pump and the other of which is connected to the water inlet side of the second liquid delivery pump. The pure water supplied through the second pure water supply branch pipe 123 can flow in the liquid supply pipe, the liquid supply pipe and the sampling branch pipe thereof can be cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipe thereof.

The third pure water delivery branch pipes 124 are respectively connected with the two third circulation delivery pipes 83 of the circulation pipeline, and are used for cleaning the circulation pipeline or mixing the delivered pure water with the mixed liquid in the pipeline according to a set proportion. The pure water supplied through the third pure water supply branch pipe 124 can flow in the circulation pipe, the sampling branch pipe thereof, and the mixing tank are cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through the waste liquid pipe thereof.

The fourth pure water supply branch pipe 125 is connected to the fourth circulation pipe 84 of the circulation line for cleaning the circulation line. The pure water supplied through the fourth pure water supply branch pipe 125 can flow in the circulation pipe, clean the circulation pipe, its sampling branch pipe, and the mixing tank, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through its waste liquid pipe.

The fifth pure water conveying branch pipe 126 is connected with the sampling branch pipe connected to the raw liquid pipeline, and is used for cleaning the sampling branch pipe, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline.

Preferably, the full-automatic semiconductor grinding fluid supply system further comprises a gas pipeline 13 for blowing and drying the cleaned pipeline, wherein the gas pipeline 13 is respectively connected with the raw fluid barrel 1, the pure water conveying main pipe 121 of the pure water pipeline and the mixing barrel 2. After all the pipelines and the mixing barrel are cleaned, N2 can be introduced into the pipelines, the mixing barrel 2 and the stock solution barrel 1 through the gas pipelines, and the pipelines are purged and dried.

The air pipeline is also provided with an air quantity adjusting device 14.

In the actual use process, the raw liquid pump 3 pumps the raw liquid in the raw liquid barrel to the mixing barrel 2 through the raw liquid pipeline, the stirring mechanism in the mixing barrel 2 uniformly stirs the raw liquid, then the raw liquid is discharged into the circulating pipeline from the liquid outlet at the lower part of the mixing barrel, the raw liquid is mixed with pure water sent by the pure water pipeline in the circulating pipeline according to a set proportion, and then the mixture flows into the mixing barrel 2 again through the circulating pipeline to be uniformly stirred, so that the grinding liquid is prepared. The prepared grinding fluid is discharged into a fluid delivery pipeline from a lower fluid outlet of the mixing barrel 2, and is delivered to a valve box 6 through the fluid delivery pipeline, and the valve box 6 conveys the grinding fluid to each use point or returns to the mixing barrel 2.

The opening and closing of all valves and the start and stop of the pump are controlled by a controller.

It should be understood that the described embodiments are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Claims (6)

1. The utility model provides a mix bucket for semiconductor grinding fluid supply system, its characterized in that, install rabbling mechanism and bubble humidification device on the mix bucket, bubble humidification device includes the box, set up at the gas permeability cell at box top, set up at the box side be used for to the inlet tube of letting in pure water in the box and be used for to the intake pipe of letting in nitrogen gas in the box, and set up at the bottom of the box be used for sending the bubble of formation into the discharge pipe of mix bucket, all install the valve on gas permeability cell, inlet tube, intake pipe and the discharge pipe, the inlet tube with semiconductor grinding fluid supply system's pure water pipeline links to each other, the intake pipe links to each other with semiconductor grinding fluid supply system's gas pipeline.

2. The mixing drum for a semiconductor slurry supply system according to claim 1, wherein the mixing drum comprises a drum body, a drum cover fixed on the top of the drum body.

3. The mixing drum for a semiconductor polishing liquid supply system according to claim 2, wherein the drum is composed of a cylindrical drum and an inverted cone drum extending from a lower portion of the cylindrical drum, and a plurality of liquid discharge ports are opened at a bottom of the inverted cone drum.

4. The mixing drum for a semiconductor polishing liquid supply system according to claim 2, wherein the drum cover is provided with a liquid inlet for passing a raw liquid conveying pipeline of the semiconductor polishing liquid supply system to fill raw liquid into the mixing drum, and an air inlet for passing a discharge pipe of the bubbling humidifying device to feed air bubbles into the mixing drum.

5. The mixing drum for a semiconductor polishing liquid supply system as claimed in claim 4, wherein the liquid inlet is provided in plurality.

6. The mixing drum for a semiconductor grinding fluid supply system according to claim 1, wherein valves installed on the ventilation pipe, the water inlet pipe, the air inlet pipe and the discharge pipe are electrically controlled valves.