CN219925709U - Grinding fluid supply equipment - Google Patents

Abstract

The utility model discloses grinding fluid supply equipment, which comprises a cabinet body, a stock solution barrel, a mixing system and an electric control module, wherein the stock solution barrel, the mixing system and the electric control module are arranged in different chambers in the cabinet body, the mixing system comprises a mixing barrel, a stock solution pump for pumping stock solution in the stock solution barrel to the mixing barrel through a stock solution pipeline for mixing, a circulating pump for pumping and circulating mixed solution in the mixing barrel to the barrel through a circulating pipeline, a liquid feeding pump for pumping the mixed solution in the mixing barrel to a valve box through a liquid feeding pipeline, a valve box for distributing the mixed solution to other equipment, and a pure water pipeline for conveying pure water to mix the pure water with the mixed solution in the circulating pipeline in proportion or clean all pipelines. The utility model can automatically prepare and supply the liquid, greatly improves the preparation efficiency of the grinding liquid, ensures the stable and effective operation of the system due to the double redundancy system of the mixing and preparing system, and can continuously supply the grinding liquid for 24 hours.

Description

Grinding fluid supply equipment

Technical Field

The utility model relates to the technical field of grinding fluid supply, in particular to grinding fluid supply equipment.

Background

Chemical Mechanical Polishing (CMP) is used as an indispensable process in chip processing, not only in the wafer preparation stage, but also in the wafer processing process for global planarization of the wafer surface.

The existing semiconductor grinding fluid supply equipment is low in grinding fluid preparation efficiency, and when the equipment fails, the equipment is required to be stopped for maintenance, so that the production efficiency is greatly influenced. The existing semiconductor grinding fluid supply equipment only exhausts through the top ventilation opening of the equipment, the ventilation and exhaust effects are poor, and the adopted grinding fluid mixing barrel is only stirred through the stirring mechanism, so that the stock solution in the mixing barrel is difficult to stir uniformly.

Disclosure of Invention

In view of the above, the present utility model provides a polishing liquid supply apparatus for solving the above-mentioned problems in the prior art.

The grinding fluid supply equipment comprises a cabinet body, raw fluid barrels, a mixing system and an electronic control module, wherein the raw fluid barrels, the mixing system and the electronic control module are arranged in different cavities in the cabinet body;

wherein, an exhaust plate with adjustable ventilation area is arranged on one side surface of a baffle plate for separating the stock solution barrel and the mixing system, a vent hole for communicating a chamber where the stock solution barrel is positioned with a chamber where the mixing system is positioned is arranged at the bottom,

the mixing system comprises a mixing barrel, a raw liquid pump for pumping raw liquid in the raw liquid barrel to the mixing barrel for mixing through a raw liquid pipeline, a circulating pump for circulating and refluxing mixed liquid in the mixing barrel to the barrel through a circulating pipeline, a liquid feeding pump for pumping mixed liquid in the mixing barrel to a valve box through a liquid feeding pipeline, a valve box for distributing the mixed liquid to other equipment, and a pure water pipeline for conveying pure water to mix the pure water with the mixed liquid in the circulating pipeline in proportion or clean all pipelines; the device is characterized in that sampling branch pipes are arranged on the raw liquid pipeline, the circulating pipeline and the liquid conveying pipeline, waste liquid pipelines are connected to the raw liquid pipeline, the circulating pipeline and the liquid conveying pipeline, a specific gravity meter for detecting whether the mixing proportion of pure water and mixed liquid reaches the standard or not is arranged on the circulating pipeline, and a bubbling humidifying device is arranged on the mixing barrel.

Preferably, the mixing system further comprises a gas pipeline for blowing and drying the cleaned pipeline, and the gas pipeline is further provided with an air quantity adjusting device.

Preferably, the bubbling humidifying device comprises a box body, a ventilation pipe arranged at the top of the box body, a water inlet pipe arranged on the side surface of the box body and used for introducing pure water into the box body, an air inlet pipe used for introducing nitrogen into the box body, and a discharge pipe arranged at the bottom of the box body and used for feeding generated bubbles into the mixing barrel, wherein valves are arranged on the ventilation pipe, the water inlet pipe, the air inlet pipe and the discharge pipe, the water inlet pipe is connected with a pure water pipeline, and the air inlet pipe is connected with a gas pipeline.

Preferably, the mixing barrel comprises a barrel body and a barrel cover fixed at the top of the barrel body, wherein the barrel body consists of a cylindrical barrel body and an inverted cone barrel body extending from the lower part of the cylindrical barrel body, and a plurality of liquid discharge ports are formed in the bottom of the inverted cone barrel body.

Preferably, the stock solution pipeline is including connecting the first stock solution conveyer pipe in each stock solution bucket liquid outlet department, with the second stock solution conveyer pipe that all first stock solution conveyer pipes link to each other, set up at the end of second stock solution conveyer pipe and stretch into each third stock solution conveyer pipe of mixing the bucket respectively, all install the valve on first stock solution conveyer pipe, second stock solution conveyer pipe and the third stock solution conveyer pipe, all install a stock solution pump on every first stock solution conveyer pipe, the intake side of stock solution pump is provided with the stock solution communicating pipe that is used for the intercommunication two first stock solution conveyer pipes.

Preferably, the circulation pipeline comprises a first circulation conveying pipe connected to the liquid outlet of each mixing barrel, a second circulation conveying pipe connected to all the first circulation conveying pipes, two third circulation conveying pipes arranged at the tail ends of the second circulation conveying pipes, a fourth circulation conveying pipe connected to the two third circulation conveying pipes, and a fifth circulation conveying pipe arranged at the tail end of the fourth circulation conveying pipe and respectively extending into each mixing barrel, valves are arranged on the first circulation conveying pipe, the third circulation conveying pipe, the fourth circulation conveying pipe and the fifth circulation conveying pipe, a circulation pump is arranged on each third circulation conveying pipe, and the specific gravity meter is arranged on the fourth circulation conveying pipe.

Preferably, the liquid conveying pipeline comprises a first liquid conveying pipe connected to the liquid outlet of each mixing barrel, a second liquid conveying pipe connected to all the first liquid conveying pipes, two third liquid conveying pipes arranged at the tail ends of the second liquid conveying pipes, a fourth liquid conveying pipe with two ends connected to the valve box and the two third liquid conveying pipes respectively, and a fifth liquid conveying pipe connected to the liquid outlet of the valve box and extending into each mixing barrel respectively, wherein valves are arranged on the first liquid conveying pipe, the third liquid conveying pipe, the fourth liquid conveying pipe and the fifth liquid conveying pipe, two liquid conveying pumps are arranged on one third liquid conveying pipe, and a liquid conveying communicating pipe used for communicating the third liquid conveying pipe with the other third liquid conveying pipe is arranged on a pipe section, between the two liquid conveying pumps, of the third liquid conveying pipe.

Preferably, a plurality of rollers and a plurality of supporting feet are further arranged at the bottom of the cabinet body.

Preferably, the exhaust plate comprises an exhaust fixing plate and an adjusting plate, the exhaust fixing plate is fixed on a partition plate for separating a stock solution barrel and a mixing system, the upper end of the exhaust fixing plate is clamped at the top of the cabinet body, the adjusting plate is movably mounted on the exhaust fixing plate through a fastener, a first exhaust hole and a first fixing hole are formed in the position of the exhaust fixing plate, a second exhaust hole overlapped with the first exhaust hole and a second fixing hole aligned with the first fixing hole are formed in the adjusting plate, the fastener passes through the first fixing hole and the second fixing hole at the same time, and the overlapping area between the first exhaust hole and the second exhaust hole is adjustable.

Preferably, a filter screen is further arranged between the exhaust fixing plate and the adjusting plate.

The beneficial effects of the utility model are as follows:

1. the utility model can automatically prepare and supply liquid, greatly improves the configuration efficiency of the grinding liquid, and the raw liquid pump, the circulating pump and the liquid feeding pump are two mutually standby pumps, when one pump fails, the other pump can independently operate and work, thereby ensuring the stable and effective operation of the system, avoiding the need of stopping the machine and continuously supplying the grinding liquid for 24 hours.

2. The ventilating and exhausting effect can be increased by arranging the exhaust plate on the partition plate in the cabinet body, and the ventilating area of the exhaust plate can be adjusted, so that the control of the ventilating area can be realized; and the filter screen that sets up between its exhaust fixed plate and the regulating plate is favorable to filtering the impurity in the inside air of lapping liquid mixed liquor cabinet, avoids causing the pollution to external environment.

3. The stock solution pipeline, the circulating pipeline and the liquid conveying pipeline are all connected with sampling branch pipes, so that the stock solution, the mixed solution and the conveying liquid at the tail end can be sampled respectively, and the liquid preparation proportion at different stages can be monitored.

4. According to the utility model, the bubbling humidifying device is arranged on the mixing barrel, and bubbles can be introduced into the mixing barrel through the bubbling humidifying device in the process of stirring the stock solution in the mixing barrel, so that the stock solution can be mixed more uniformly; and the bottom of the mixing barrel is arranged to be in an inverted cone shape, so that the grinding liquid in the mixing barrel can be guaranteed to be exhausted by being pumped out, the formation of crystal particles at the bottom of the mixing barrel is avoided, the formation of scratches on the surface of a grinding product is effectively avoided, the residual crystal particles on the surface of the grinding product are caused, and the product yield is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a line diagram of a polishing liquid supply apparatus.

Fig. 2 is a schematic structural view of the cabinet.

Fig. 3 is one of schematic structural views of the exhaust plate.

Fig. 4 is one of schematic structural views of the exhaust fixing plate.

Fig. 5 is one of the structural schematic diagrams of the regulating plate.

FIG. 6 is a second schematic view of the structure of the exhaust plate.

FIG. 7 is a second schematic view of the structure of the exhaust fixing plate.

FIG. 8 is a second schematic view of the structure of the adjusting plate.

Fig. 9 is a schematic perspective view of the polishing liquid supply apparatus.

Fig. 10 is a schematic structural view of the mixing tub.

Fig. 11 is a schematic structural view of the bubbling humidification device.

The meaning of the reference numerals in the figures is:

1 is a raw liquid barrel, and the liquid barrel is provided with a plurality of grooves,

2 is a mixing barrel, 21 is a barrel, 22 is a barrel cover, 23 is a cylindrical barrel, 24 is an inverted cone barrel, 25 is a liquid outlet, 26 is a liquid inlet, 27 is an air inlet, 28 is a stirring mechanism,

3 is a raw liquid pump,

4 is a circulating pump, and the water is pumped by the water pump,

5 is a liquid-feeding pump,

the valve box is shown as the reference numeral 6,

71 is a first raw liquid conveying pipe, 72 is a second raw liquid conveying pipe, 73 is a third raw liquid conveying pipe, 74 is a raw liquid communicating pipe,

81 is a first circulation conveying pipe, 82 is a second circulation conveying pipe, 83 is a third circulation conveying pipe, 84 is a fourth circulation conveying pipe, 85 is a fifth circulation conveying pipe, 86 is a hydrometer,

91 is a first liquid feeding pipe, 92 is a second liquid feeding pipe, 93 is a third liquid feeding pipe, 94 is a fourth liquid feeding pipe, 95 is a fifth liquid feeding pipe, 96 is a liquid feeding communicating pipe,

10 is a sampling branch pipe, and the sampling branch pipe,

11 is a waste liquid pipeline, and the waste liquid pipeline,

121 is a pure water supply header pipe, 122 is a first pure water supply branch pipe, 123 is a second pure water supply branch pipe, 124 is a third pure water supply branch pipe, 125 is a fourth pure water supply branch pipe, 126 is a fifth pure water supply branch pipe,

and 13 is a gas pipeline, and the gas pipeline is provided with a gas inlet,

14 is an air quantity regulating device,

15 is a cabinet body, and the back cover is provided with a plurality of grooves,

16 is a bubbling humidifying device, 161 is a box body, 162 is a ventilation pipe, 163 is an air inlet pipe, 164 is an exhaust pipe, 165 is a water inlet pipe,

17 is an exhaust plate, 171 is an exhaust fixing plate, 172 is a first exhaust hole, 173 is a first fixing hole, 174 is a clamping portion, 175 is a fixing portion, 176 is a connecting portion, 177 is an adjusting plate, 178 is a second exhaust hole, 179 is a second fixing hole,

the reference numeral 18 denotes a vent hole,

19 is an exhaust chamber and is provided with a vent,

and 20 is an exhaust port, and,

21 is a separator.

Detailed Description

For a better understanding of the technical solution of the present utility model, the following detailed description of the embodiments of the present utility model refers to the accompanying drawings.

It should be understood that the described embodiments are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The utility model will now be described in further detail with reference to specific examples thereof in connection with the accompanying drawings.

In the description of the present utility model, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance unless explicitly specified or limited otherwise; the term "plurality" means two or more, unless specified or indicated otherwise; the terms "coupled," "secured," and the like are to be construed broadly, and may be fixedly coupled, detachably coupled, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the description of the present specification, it should be understood that the terms "upper", "lower", "left", "right" and the like in the embodiments of the present utility model are described in terms of angles shown in the drawings, and should not be construed as limiting the embodiments of the present utility model. In the context of this document, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on the other element or be indirectly on the other element through intervening elements.

The embodiment of the utility model provides an grinding fluid mixing cabinet which comprises a cabinet body 15, stock solution barrels 1 arranged in different cavities in the cabinet body 15, a mixing system and an electronic control module.

The cabinet body 1 adopts stainless steel as a framework and is wrapped with PP plates. The front panel of the cabinet body is provided with a PP door, an instrument panel, a dial panel, control keys, a touch screen, a code scanning gun and the like, the PP door is provided with a transparent PVC observation window, the liquid supply condition of the stock solution barrel can be observed through the observation window, and the control keys comprise a start-up state, a shut-down state, a reset state, a silencing state, an emergency stop state, an A barrel, a B barrel, an on-line/off-line state and the like. The back panel of the cabinet body is also provided with a PP door, and the PP door is provided with a transparent PVC observation window through which the mixed liquid condition of the mixing system can be observed. A PP door is arranged on one side face of the cabinet body, a PVC observation window capable of being opened and closed is arranged on one side of the PP door, and liquid taking conditions of sampling bottles in the sampling valve box can be observed through the observation window. The top plate of the cabinet body is provided with a plurality of ports such as an exhaust port, a pure water inlet, a pure water outlet, a nitrogen outlet, a raw liquid sampling port, a mixed liquid outlet, a circulating tail end sampling port and the like, and each port can be connected with a corresponding pipeline inside the cabinet body.

The interior of the cabinet body 1 is divided into three chambers by two partition plates 21, and the stock solution barrel 1, the mixing system and the electronic control module are respectively arranged in the three chambers.

An exhaust plate 17 with adjustable ventilation area is arranged on one side plate surface of a baffle plate 21 for separating the stock solution barrel 1 and the mixing system, and a vent 18 for communicating a chamber where the stock solution barrel 1 is positioned with a chamber where the mixing system is positioned is arranged at the bottom.

The exhaust plate 17 includes an exhaust fixing plate 171, and a plurality of adjustment plates 177 movably mounted on the exhaust fixing plate 171 by fasteners.

The position of the exhaust fixing plate 171, where the adjusting plate 177 is installed, is provided with a first exhaust hole 172 and a first fixing hole 173, the adjusting plate 177 is provided with a second exhaust hole 178 overlapped with the first exhaust hole 172 and a second fixing hole 179 aligned with the first fixing hole 173, the fastener passes through the first fixing hole 173 and the second fixing hole 179 at the same time, and the overlapping area between the first exhaust hole 172 and the second exhaust hole 178 is adjustable.

The first vent holes 172 on the vent fixing plate 171 and the second fixing holes 179 on the adjusting plate 177 are provided in plural numbers, and the number and the positions of the two are the same and are uniformly distributed.

The exhaust fixing plate 171 includes a vertically disposed clamping portion 174 and a fixing portion 175, and an inclined connecting portion 176 connected between the clamping portion 174 and the fixing portion 175, and the clamping portion 174 is clamped at the top of the cabinet. The adjusting plate is mounted on the fixing portion 175.

The adjustment plate 177, the first fixing hole 173, the second fixing hole 179, the first vent hole 172, and the second vent hole 178 may be provided in various shapes as needed.

If the adjusting plate 177 is designed as a rectangular plate, its left and right ends are fixed to the exhaust fixing plate 171 by bolts, respectively; the first fixing hole 173 is designed as a circular hole, the second fixing hole 179 is designed as a kidney-shaped hole, and the first vent hole 172 and the second vent hole 178 are identical in shape and are designed as kidney-shaped holes, circular holes, bar-shaped holes, square holes or any other polygonal or irregular shapes. In use, the adjusting plate 177 is fixed to the exhaust fixing plate 171 by passing a bolt through both the first fixing hole 173 and the second fixing hole 179 and suspending a nut on the bolt. When the ventilation effect is required to be adjusted, the nut can be unscrewed, the adjusting plate 177 is moved up and down to change the overlapping area between the first vent hole 172 and the second vent hole 178, the ventilation area can be adjusted, and after the adjustment is in place, the nut can be screwed down.

Or the adjusting plate 177 is designed as a circular plate, the center of which is fixed to the exhaust fixing plate 171 by a bolt; the first and second fixing holes 173 and 179 are designed as circular holes, and the first and second vent holes 172 and 178 are identical in shape and are designed as petal shapes or any other polygonal or irregular shapes. In use, the adjusting plate 177 is fixed to the exhaust fixing plate 171 by passing a bolt through both the first fixing hole 173 and the second fixing hole 179 and suspending a nut on the bolt. When the ventilation effect is required to be adjusted, the nut can be unscrewed, the adjusting plate 177 is rotated in the circumferential direction to change the overlapping area between the first exhaust hole 172 and the second exhaust hole 178, the ventilation area can be adjusted, and after the adjustment is in place, the nut can be screwed.

Preferably, the exhaust fixing plate 171 is integrally formed.

Preferably, a filter screen is further disposed between the exhaust fixing plate 171 and the adjusting plate 177.

When the exhaust plate 17 is installed, an exhaust chamber 19 is formed between the exhaust plate and a partition plate for separating the stock solution barrel from the mixing system, gas in the chamber where the stock solution barrel 1 is located and the chamber where the mixing system is located can be replaced by the gas through the vent 18, then the gas enters the exhaust chamber 19 through the exhaust hole on the exhaust plate 17, and then is exhausted from the exhaust interface 20 on the top plate of the cabinet body 15 through the exhaust chamber 19. An exhaust port 20 on the top plate of the cabinet 15 is located above the exhaust chamber 19.

The mixing system comprises a mixing barrel 2, a raw liquid pump 3 for pumping raw liquid in the raw liquid barrel 1 to the mixing barrel 2 for mixing through a raw liquid pipeline, a circulating pump 4 for pumping mixed liquid in the mixing barrel 2 to the barrel in a circulating way, a liquid feeding pump 5 for pumping mixed liquid in the mixing barrel 2 to a valve box through a liquid feeding pipeline, a valve box 6 for distributing the mixed liquid to other equipment, and a pure water pipeline for conveying pure water to mix the pure water with the mixed liquid in the circulating pipeline in proportion or clean all pipelines.

The stock solution bucket 1 is used for storing concentrated grinding stock solution, and stock solution bucket 1 is provided with a plurality of, and a plurality of stock solution buckets 1 link to each thoughtlessly join in marriage bucket 2 through stock solution pipeline to utilize stock solution pump 3 to pump the stock solution in the stock solution bucket 1 to thoughtlessly join in marriage bucket 2 through the stock solution pipeline and mix.

The stock solution barrel 1 and the mixing barrel 2 are both provided with a plurality of stock solution barrels. The stock solution barrels 1 are used for storing concentrated grinding stock solution, and a plurality of stock solution barrels 1 are connected with each mixing barrel 2 through stock solution pipelines so as to pump the stock solution in the stock solution barrels 1 to the mixing barrels 2 through the stock solution pipelines by using the stock solution pump 3 for mixing.

The stock solution pipeline comprises first stock solution conveying pipes 71 connected to the liquid outlets of the stock solution barrels 1, second stock solution conveying pipes 72 connected to all the first stock solution conveying pipes 71, and third stock solution conveying pipes 73 arranged at the tail ends of the second stock solution conveying pipes 72 and respectively extending into the mixing barrels 2, and each first stock solution conveying pipe 71 is provided with a stock solution pump 3. In this embodiment, the stock solution barrels 1 are provided with 2, and the stock solution communicating pipes 74 for communicating the 2 first stock solution conveying pipes 71 are connected between the 2 first stock solution conveying pipes 71 connected with the 2 stock solution barrels 1, respectively, and two ends of the stock solution communicating pipes 74 are disposed on the water inlet sides of the 2 stock solution pumps 3, respectively. By providing the raw liquid communication pipe 74 between the 2 first raw liquid transport pipes 71, the raw liquid pumps 3 on the 2 first raw liquid transport pipes 71 can be made standby pumps.

Valves for controlling pipeline switch and flow rate are arranged on the first stock solution conveying pipe 71, the second stock solution conveying pipe 72 and the third stock solution conveying pipe 73, and the mixing proportion of the stock solutions conveyed in the two first stock solution conveying pipes 71 can be adjusted by controlling the opening of the valves on the two first stock solution conveying pipes 71.

When the stock solution pump works normally, one stock solution pump works, the other stock solution pump is used as a standby pump, stock solution in 2 stock solution barrels is pumped to 2 mixing barrels through stock solution pipelines respectively, and if the stock solution pump working currently fails, the other standby stock solution pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the raw liquid pump 3 is a pneumatic bellows pump with a maximum working pressure of 0.6Mpa and a maximum flow rate of 16L/min.

The mixing barrels 2 are also provided with a plurality of mixing barrels 2, the mixing barrels 2 are used for mixing the stock solution conveyed by the stock solution pipeline to mix grinding liquid, the grinding liquid can enter the circulating pipeline from the lower part of the mixing barrels 2, and the grinding liquid is circulated and returned into the barrels by the circulating pump 4 through the pumping of the circulating pipeline; or the grinding fluid can enter the liquid conveying pipeline from the lower part of the mixing barrel 2, and the grinding fluid is pumped to the valve box 6 through the liquid conveying pipeline by the liquid conveying pump 3, and then is conveyed to various using points or returned into the barrel by the valve box 6.

The mixing barrel 2 is provided with a stirring mechanism 28 and a bubbling humidifying device 16, and the mixing barrel 2 comprises a barrel 21 and a barrel cover 22 fixed on the top of the barrel 21.

The cylinder 21 is composed of a cylindrical cylinder 23 and an inverted cone-shaped cylinder 24 extending from the lower part of the cylindrical cylinder 23, and a plurality of liquid discharge ports 25 are formed at the bottom of the inverted cone-shaped cylinder 24.

The barrel cover 22 is provided with a liquid inlet 26 for allowing a raw liquid conveying pipeline (comprising a raw liquid pipeline, a circulating pipeline and a liquid conveying pipeline) of the semiconductor grinding liquid supply system to pass through so as to fill raw liquid into the mixing barrel 2, and an air inlet 27 for allowing a discharge pipe of the bubbling humidifying device to pass through so as to convey bubbles into the mixing barrel 2. In this embodiment, a plurality of liquid inlets 26 are provided.

The stirring mechanism 28 may be set to any structure capable of realizing a stirring function, for example, the stirring mechanism may be composed of a transmission rod vertically fixed on the barrel cover of the mixing barrel and stirring discs fixed on the transmission rod along the length direction of the transmission rod and distributed regularly, the transmission rod may be driven by a power motor fixed on the top of the barrel cover of the mixing barrel, that is, the transmission rod is connected with the output end of the power motor, and when in use, the power motor is controlled by a controller of the semiconductor grinding fluid supply system to start, and the power motor may drive the transmission rod to rotate, further drive the stirring discs to rotate.

The bubbling humidifying device 16 comprises a box body 161, a ventilation pipe 162 arranged at the top of the box body 161, a water inlet pipe 165 arranged on the side surface of the box body 161 and used for introducing pure water into the box body 161, an air inlet pipe 163 used for introducing nitrogen into the box body 161, and a discharge pipe 164 arranged at the bottom of the box body 161 and used for conveying generated bubbles into the mixing barrel 2, wherein valves are arranged on the ventilation pipe 162, the water inlet pipe 165, the air inlet pipe 163 and the discharge pipe 164, the water inlet pipe 165 is connected with a pure water pipeline of the semiconductor grinding fluid supply system, the air inlet pipe 163 is connected with a gas pipeline of the semiconductor grinding fluid supply system, and a plurality of ventilation round holes are formed in the air inlet pipe 163. In this embodiment, the valves mounted on the ventilation pipe 162, the water inlet pipe 165, the air inlet pipe 163 and the discharge pipe 164 are electrically controlled valves.

When pure water is introduced into the box of the bubbling humidifying device 16 through the nitrogen gas pipeline and the pure water pipeline through the water inlet pipe 165 and the box of the bubbling humidifying device 16 through the air inlet pipe 163, bubbles are generated in the pure water under the action of the nitrogen gas, and when the bubbles enter the mixing barrel 2 through the discharge pipe, the mixing uniformity of the raw liquid in the mixing barrel 2 can be increased.

The circulation pipeline comprises a first circulation conveying pipe 81 connected to the liquid outlet at the bottom of each mixing barrel 2, a second circulation conveying pipe 82 connected to all the first circulation conveying pipes 81, two third circulation conveying pipes 83 arranged at the tail ends of the second circulation conveying pipes 82, a fourth circulation conveying pipe 84 connected to the two third circulation conveying pipes 83, and a fifth circulation conveying pipe 85 arranged at the tail ends of the fourth circulation conveying pipes 84 and respectively extending into each mixing barrel 2.

Each third circulation conveying pipe 83 is provided with a circulation pump 4, and the two circulation pumps 4 are standby pumps. When the circulating pump works normally, one circulating pump works, the other circulating pump is used as a standby pump, stock solution in the mixing barrel is pumped to the corresponding mixing barrel through the circulating pipeline by the circulating pump in a working state, and if the current working circulating pump fails, the other standby circulating pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the circulating pump 4 is a levitonix magnetic levitation pump, and the maximum working pressure is 0.3Mpa.

Valves for controlling the opening and closing of pipelines are arranged on the first circulation conveying pipe 81, the third circulation conveying pipe 83, the fourth circulation conveying pipe 84 and the fifth circulation conveying pipe 85, a flow valve for controlling the flow of the mixed liquid conveyed by the valves through the opening of the valves so as to adjust the mixing proportion of the mixed liquid and the pure water is also arranged on the third circulation conveying pipe 83, and a hydrometer 86 is arranged on the fourth circulation conveying pipe 84, wherein the hydrometer 86 is used for detecting whether the mixing proportion of the mixed liquid and the pure water reaches the standard.

The liquid delivery pipeline comprises a first liquid delivery pipe 91 connected to the liquid outlet at the lower part of each mixing barrel 2, a second liquid delivery pipe 92 connected to all the first liquid delivery pipes 91, two third liquid delivery pipes 93 arranged at the tail end of the second liquid delivery pipe 92, a fourth liquid delivery pipe 94 with two ends connected to a valve box and the two third liquid delivery pipes 93 respectively, and a fifth liquid delivery pipe 95 connected to the liquid outlet of the valve box 6 and extending into each mixing barrel 2 respectively, wherein two liquid delivery pumps 5 are arranged on one of the third liquid delivery pipes, and a liquid delivery communicating pipe 96 used for communicating the third liquid delivery pipe with the other third liquid delivery pipe is arranged on the pipe section of the third liquid delivery pipe between the two liquid delivery pumps. The two liquid delivery pumps 5 are standby pumps, one liquid delivery pump works and the other liquid delivery pump works as a standby pump in normal working conditions, and the liquid delivery pump in working conditions pumps the mixed stock solution in the mixing barrel to the valve box 6 through the liquid delivery pipeline, and then the mixed stock solution is conveyed to each using point or returned to the barrel by the valve box 6; if the current working liquid feeding pump fails, the stand-by liquid feeding pump starts up and runs, and normal liquid feeding is not affected. In this embodiment, the liquid feeding pump 5 is a Levitronix magnetic levitation pump, and can supply liquid for a pipeline with the total length of 150m, and the maximum flow is 70L/min.

Valves for controlling the opening and the closing of the pipeline and the flow rate are arranged on the first liquid conveying pipe 91, the third liquid conveying pipe 93, the fourth liquid conveying pipe 94 and the fifth liquid conveying pipe 95, and the mixing proportion of the mixed liquid and the pure water can be adjusted by controlling the opening of the valve corresponding to the valve on the third liquid conveying pipe 93.

The pure water (DI) is conveyed through a pure water pipeline. The pure water line may be used to not only transport pure water to mix the pure water with the mixed liquid in the third circulation pipe 83 or the third liquid feed pipe 93 in proportion, but also clean all the lines.

The stock solution pipeline, the circulating pipeline and the liquid feeding pipeline are all provided with sampling branch pipes 10, the sampling branch pipes on the stock solution pipeline are connected to the second stock solution conveying pipe 72, the sampling branch pipes on the circulating pipeline are connected to the fourth circulating conveying pipe 84, and the sampling branch pipes on the liquid feeding pipeline are connected to the fourth liquid feeding pipe 94.

The raw liquid pipeline, the circulating pipeline and the liquid feeding pipeline are all connected with a waste liquid pipeline 11.

The deionized water piping includes a deionized water supply main 121, a first deionized water supply branch pipe 122, a second deionized water supply branch pipe 123, a third deionized water supply branch pipe 124, a fourth deionized water supply branch pipe 125, and a fifth deionized water supply branch pipe 126 connected to the deionized water supply main 121.

The first pure water delivery branch pipes 122 are respectively connected with the 2 first raw liquid delivery pipes 71 of the raw liquid pipeline, and are used for cleaning the raw liquid pipeline. The pure water supplied through the first pure water supply branch pipe 122 can flow in the raw liquid pipeline, clean the raw liquid pipeline, the raw liquid barrel and the sampling branch pipe thereof, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline thereof.

The second pure water delivery branch pipe 123 is connected to a third liquid delivery pipe 93 of the liquid delivery pipe, to which a liquid delivery pump is mounted, for cleaning the liquid delivery pipe or mixing the delivered pure water with the mixed liquid in the pipe in a set ratio, and the second pure water delivery branch pipe 123 is provided with two water outlet pipe sections, one of which is connected to the water inlet side of the first liquid delivery pump and the other of which is connected to the water inlet side of the second liquid delivery pump. The pure water supplied through the second pure water supply branch pipe 123 can flow in the liquid supply pipe, the liquid supply pipe and the sampling branch pipe thereof can be cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipe thereof.

The third pure water delivery branch pipes 124 are respectively connected with the two third circulation delivery pipes 83 of the circulation pipeline, and are used for cleaning the circulation pipeline or mixing the delivered pure water with the mixed liquid in the pipeline according to a set proportion. The pure water supplied through the third pure water supply branch pipe 124 can flow in the circulation pipe, the sampling branch pipe thereof, and the mixing tank are cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through the waste liquid pipe thereof.

The fourth pure water supply branch pipe 125 is connected to the fourth circulation pipe 84 of the circulation line for cleaning the circulation line. The pure water supplied through the fourth pure water supply branch pipe 125 can flow in the circulation pipe, clean the circulation pipe, its sampling branch pipe, and the mixing tank, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through its waste liquid pipe.

The fifth pure water conveying branch pipe 126 is connected with the sampling branch pipe connected to the raw liquid pipeline, and is used for cleaning the sampling branch pipe, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline.

Preferably, the full-automatic semiconductor grinding fluid supply system further comprises a gas pipeline 13 for blowing and drying the cleaned pipeline, wherein the gas pipeline 13 is respectively connected with the raw fluid barrel 1, the pure water conveying main pipe 121 of the pure water pipeline and the mixing barrel 2. After all the pipelines and the mixing barrel are cleaned, N2 can be introduced into the pipelines, the mixing barrel 2 and the stock solution barrel 1 through the gas pipelines, and the pipelines are purged and dried.

The air pipeline is also provided with an air quantity adjusting device 14.

The on-off of all valves and the start-stop of the pump are controlled by an electric control module.

In the actual use process, the raw liquid pump 3 pumps the raw liquid in the raw liquid barrel to the mixing barrel 2 through the raw liquid pipeline, the stirring mechanism in the mixing barrel 2 uniformly stirs the raw liquid, then the raw liquid is discharged into the circulating pipeline from the liquid outlet at the lower part of the mixing barrel, the raw liquid is mixed with pure water sent by the pure water pipeline in the circulating pipeline according to a set proportion, and then the mixture flows into the mixing barrel 2 again through the circulating pipeline to be uniformly stirred, so that the grinding liquid is prepared. The prepared grinding fluid is discharged into a fluid delivery pipeline from a lower fluid outlet of the mixing barrel 2, and is delivered to a valve box 6 through the fluid delivery pipeline, and the valve box 6 conveys the grinding fluid to each use point or returns to the mixing barrel 2.

When the cleaning is needed, the electric control module controls the corresponding valve on the pure water pipeline to be opened, pure water enters the stock solution pipeline, the circulating pipeline or the liquid conveying pipeline through the pure water pipeline, the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid hanging pipeline, then the electric control module controls the corresponding valve on the gas pipeline to be opened, and the gas pipeline blows nitrogen to purge and dry each pipeline.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather to enable any modification, equivalent replacement, improvement or the like to be made within the spirit and principles of the utility model.

Claims (10)

1. The grinding fluid supply equipment is characterized by comprising a cabinet body, raw fluid barrels, a mixing system and an electronic control module, wherein the raw fluid barrels, the mixing system and the electronic control module are arranged in different cavities in the cabinet body;

wherein, an exhaust plate with adjustable ventilation area is arranged on one side surface of a baffle plate for separating the stock solution barrel and the mixing system, a vent hole for communicating a chamber where the stock solution barrel is positioned with a chamber where the mixing system is positioned is arranged at the bottom,

the mixing system comprises a mixing barrel, a raw liquid pump for pumping raw liquid in the raw liquid barrel to the mixing barrel for mixing through a raw liquid pipeline, a circulating pump for circulating and refluxing mixed liquid in the mixing barrel to the barrel through a circulating pipeline, a liquid feeding pump for pumping mixed liquid in the mixing barrel to a valve box through a liquid feeding pipeline, a valve box for distributing the mixed liquid to each using point, and a pure water pipeline for conveying pure water to mix the pure water with the mixed liquid in the circulating pipeline in proportion or clean all pipelines; the device is characterized in that sampling branch pipes are arranged on the raw liquid pipeline, the circulating pipeline and the liquid conveying pipeline, waste liquid pipelines are connected to the raw liquid pipeline, the circulating pipeline and the liquid conveying pipeline, a specific gravity meter for detecting whether the mixing proportion of pure water and mixed liquid reaches the standard or not is arranged on the circulating pipeline, and a bubbling humidifying device is arranged on the mixing barrel.

2. The slurry supply apparatus according to claim 1, wherein the mixing system further comprises a gas line for purging and drying the cleaned line, and the gas line is further provided with an air volume adjusting device.

3. The polishing liquid supply apparatus according to claim 2, wherein the bubbling humidifying device comprises a case, a ventilation pipe provided at the top of the case, a water inlet pipe provided at the side of the case for introducing pure water into the case and an air inlet pipe for introducing nitrogen into the case, and a discharge pipe provided at the bottom of the case for introducing generated bubbles into the mixing tub, valves being provided on the ventilation pipe, the water inlet pipe, the air inlet pipe and the discharge pipe, the water inlet pipe being connected to the pure water pipe, the air inlet pipe being connected to the gas pipe.

4. The polishing liquid supply apparatus according to claim 3, wherein the mixing drum comprises a drum body, a drum cover fixed on the top of the drum body, the drum body comprising a cylindrical drum body and an inverted cone drum body extending from the lower part of the cylindrical drum body, the bottom of the inverted cone drum body being provided with a plurality of liquid discharge ports.

5. The polishing liquid supply apparatus according to claim 1, wherein the liquid supply pipe comprises first liquid supply pipes connected to the liquid outlets of the liquid tanks, second liquid supply pipes connected to all the first liquid supply pipes, and third liquid supply pipes disposed at the ends of the second liquid supply pipes and extending into the mixing tanks, respectively, valves being installed on the first liquid supply pipes, the second liquid supply pipes, and the third liquid supply pipes, one liquid pump being installed on each of the first liquid supply pipes, and liquid communication pipes for communicating the two first liquid supply pipes being provided on the water inlet side of the liquid pump.

6. The polishing liquid supply apparatus according to claim 1, wherein the circulation line includes a first circulation pipe connected to the liquid outlet of each mixing tub, a second circulation pipe connected to all the first circulation pipes, two third circulation pipes provided at the ends of the second circulation pipes, a fourth circulation pipe connected to the two third circulation pipes, and a fifth circulation pipe provided at the ends of the fourth circulation pipes and extending into each mixing tub, valves being installed on the first circulation pipe, the third circulation pipe, the fourth circulation pipe, and the fifth circulation pipe, one circulation pump being installed on each third circulation pipe, and the hydrometer being installed on the fourth circulation pipe.

7. The polishing liquid supply apparatus according to claim 1, wherein the liquid supply line comprises a first liquid supply pipe connected to the liquid outlet of each mixing tank, a second liquid supply pipe connected to all the first liquid supply pipes, two third liquid supply pipes provided at the ends of the second liquid supply pipes, a fourth liquid supply pipe connected to the valve box and the two third liquid supply pipes, respectively, and a fifth liquid supply pipe connected to the liquid outlet of the valve box and extending into each mixing tank, respectively, valves being installed on the first liquid supply pipe, the third liquid supply pipe, the fourth liquid supply pipe, and the fifth liquid supply pipe, wherein two liquid supply pumps are installed on one of the third liquid supply pipes, and a liquid supply communication pipe for communicating the third liquid supply pipe with the other third liquid supply pipe is provided on a pipe section of the third liquid supply pipe located between the two liquid supply pumps.

8. The polishing liquid supply apparatus according to claim 1, wherein the bottom of the cabinet is further provided with a plurality of rollers and a plurality of supporting feet.

9. The polishing liquid supply apparatus according to claim 1, wherein the exhaust plate comprises an exhaust fixing plate and an adjusting plate, the exhaust fixing plate is fixed on a partition plate for separating the stock liquid barrel and the mixing system, the upper end of the exhaust fixing plate is clamped at the top of the cabinet body, the adjusting plate is movably mounted on the exhaust fixing plate through a fastener, a first exhaust hole and a first fixing hole are formed in the position of the exhaust fixing plate where the adjusting plate is mounted, a second exhaust hole overlapped with the first exhaust hole and a second fixing hole aligned with the first fixing hole are formed in the adjusting plate, the fastener passes through the first fixing hole and the second fixing hole at the same time, and the overlapping area between the first exhaust hole and the second exhaust hole is adjustable.

10. The polishing liquid supply apparatus according to claim 9, wherein a filter screen is further provided between the exhaust fixing plate and the adjusting plate.