CN220197353U - Grinding fluid mixing and circulating system - Google Patents

Abstract

The utility model discloses a grinding fluid mixing and circulating system, which comprises a cabinet body, raw fluid barrels, a mixing system and an electric control module, wherein the raw fluid barrels, the mixing system and the electric control module are arranged in different cavities in the cabinet body; the mixing system comprises a mixing barrel, a stock solution pipeline, a circulating pipeline, a liquid conveying pipeline, a pure water pipeline and a gas pipeline, wherein the stock solution pipeline is provided with a stock solution pump, the circulating pipeline is provided with a circulating pump, the liquid conveying pipeline is provided with a liquid conveying pump, and the stock solution pipeline, the circulating pipeline and the liquid conveying pipeline are all connected with a sampling branch pipe and a waste liquid pipeline. The utility model can automatically prepare and supply the liquid, greatly improves the preparation efficiency of the grinding liquid, ensures the stable and effective operation of the system due to the double redundancy system of the mixing and preparing system, and can continuously supply the grinding liquid for 24 hours.

Description

Grinding fluid mixing and circulating system

Technical Field

The utility model relates to the technical field of grinding fluid supply, in particular to a grinding fluid mixing and circulating system.

Background

Chemical Mechanical Polishing (CMP) is used as an indispensable process in chip processing, not only in the wafer preparation stage, but also in the wafer processing process for global planarization of the wafer surface.

The existing system for supplying grinding fluid to silicon wafer grinding equipment is low in grinding fluid preparation efficiency, and when the equipment fails, the equipment must be stopped for maintenance, so that the production efficiency is greatly influenced. And the grinding fluid mixing barrel adopted by the grinding fluid supply system is only stirred by the stirring mechanism, so that the stock solution in the mixing barrel is difficult to stir uniformly.

Moreover, the current grinding fluid supply device directly adopts the sampling bottle to sample, and the liquid that splashes can accumulate in the sampling bottle bottom when taking a sample, causes the pollution to grinding fluid supply system inside, and just generally only take a sample to terminal liquid feeding pipeline, if grinding fluid mix proportion does not reach standard, then need to proportioned again, can't effectively guarantee grinding fluid's mix precision and mix efficiency.

Disclosure of Invention

In view of the above, the present utility model provides a polishing slurry mixing and circulating system for solving the above-mentioned problems in the prior art.

The grinding fluid mixing and circulating system comprises a cabinet body, raw fluid barrels, a mixing system and an electronic control module, wherein the raw fluid barrels, the mixing system and the electronic control module are arranged in different cavities in the cabinet body;

the mixing system comprises a mixing barrel, a raw liquid pump for pumping raw liquid in the raw liquid barrel to the mixing barrel for mixing through a raw liquid pipeline, a circulating pump for circulating and refluxing mixed liquid in the mixing barrel to the barrel through a circulating pipeline, a liquid feeding pump for pumping mixed liquid in the mixing barrel to a valve box through a liquid feeding pipeline, a valve box for distributing the mixed liquid to other equipment, and a pure water pipeline for conveying pure water to mix the pure water with the mixed liquid in the circulating pipeline in proportion or clean all pipelines; the bubbling humidifying device is arranged on the mixing barrel, the raw liquid pipeline, the circulating pipeline and the liquid conveying pipeline are all connected with a waste liquid pipeline, and the circulating pipeline is provided with a hydrometer for detecting whether the mixing proportion of pure water and mixed liquid reaches the standard;

the utility model discloses a liquid sampling device, including former liquid pipeline, circulation pipeline and liquid delivery pipeline, the former liquid pipeline, circulation pipeline and liquid delivery pipeline all are equipped with the sample branch pipe on, in the sample bottle of sample case is stretched into to the sample branch pipe, the level is provided with fixed plate and splash guard in the sample case, and fixed plate and splash guard divide into the first cavity that is used for holding the control valve on the sample branch pipe, the second cavity that is used for placing the sample bottle and the third cavity that is used for collecting the waste liquid that splashes down from last down with the box space of sample case, be equipped with a plurality of splash guard holes on the splash guard, the bottom of sample case is provided with the inclined plane and its minimum is equipped with the waste liquid mouth.

Preferably, the sampling box comprises a back plate, side plates vertically fixed on two sides of the back plate, a top plate vertically fixed on the upper end of the back plate and a bottom plate vertically fixed on the lower end of the back plate, wherein the side plates on two sides of the back plate are different in length, a supporting plate is arranged on the inner side surface of the side plate with the longer length, one end of the splash guard is placed on the supporting plate, and the other end of the splash guard is lapped at the joint of the side plate with the bottom plate with the shorter length.

Preferably, a mounting plate is fixed on the inner side surface of the back plate, and the control valve on the sampling branch pipe is fixed on the mounting plate.

Preferably, the bottom plate is composed of an inclined section inclined obliquely downwards and a horizontal section horizontally extending from the lowest part of the inclined section, and the waste liquid outlet is arranged on the horizontal section.

Preferably, splash holes on the splash guard are distributed in a matrix.

Preferably, the bubbling humidifying device comprises a box body, a ventilation pipe arranged at the top of the box body, a water inlet pipe arranged on the side surface of the box body and used for introducing pure water into the box body, an air inlet pipe used for introducing nitrogen into the box body, and a discharge pipe arranged at the bottom of the box body and used for feeding generated bubbles into the mixing barrel, wherein valves are arranged on the ventilation pipe, the water inlet pipe, the air inlet pipe and the discharge pipe, the water inlet pipe is connected with a pure water pipeline, and the air inlet pipe is connected with a gas pipeline.

Preferably, the stock solution pipeline is including connecting the first stock solution conveyer pipe in each stock solution bucket liquid outlet department, with the second stock solution conveyer pipe that all first stock solution conveyer pipes link to each other, set up at the end of second stock solution conveyer pipe and stretch into each third stock solution conveyer pipe of mixing the bucket respectively, all install the valve on first stock solution conveyer pipe, second stock solution conveyer pipe and the third stock solution conveyer pipe, all install a stock solution pump on every first stock solution conveyer pipe, the intake side of stock solution pump is provided with the stock solution communicating pipe that is used for the intercommunication two first stock solution conveyer pipes.

Preferably, the circulation pipeline comprises a first circulation conveying pipe connected to the liquid outlet of each mixing barrel, a second circulation conveying pipe connected to all the first circulation conveying pipes, two third circulation conveying pipes arranged at the tail ends of the second circulation conveying pipes, a fourth circulation conveying pipe connected to the two third circulation conveying pipes, and a fifth circulation conveying pipe arranged at the tail end of the fourth circulation conveying pipe and respectively extending into each mixing barrel, valves are arranged on the first circulation conveying pipe, the third circulation conveying pipe, the fourth circulation conveying pipe and the fifth circulation conveying pipe, a circulation pump is arranged on each third circulation conveying pipe, and the specific gravity meter is arranged on the fourth circulation conveying pipe.

Preferably, the liquid conveying pipeline comprises a first liquid conveying pipe connected to the liquid outlet of each mixing barrel, a second liquid conveying pipe connected to all the first liquid conveying pipes, two third liquid conveying pipes arranged at the tail ends of the second liquid conveying pipes, a fourth liquid conveying pipe with two ends connected to the valve box and the two third liquid conveying pipes respectively, and a fifth liquid conveying pipe connected to the liquid outlet of the valve box and extending into each mixing barrel respectively, wherein valves are arranged on the first liquid conveying pipe, the third liquid conveying pipe, the fourth liquid conveying pipe and the fifth liquid conveying pipe, two liquid conveying pumps are arranged on one third liquid conveying pipe, and a liquid conveying communicating pipe used for communicating the third liquid conveying pipe with the other third liquid conveying pipe is arranged on a pipe section, between the two liquid conveying pumps, of the third liquid conveying pipe.

Preferably, the mixing system further comprises a gas pipeline for blowing and drying the cleaned pipeline, and the gas pipeline is further provided with an air quantity adjusting device.

The beneficial effects of the utility model are as follows:

1. this application can be automatic join in marriage liquid, supplies liquid, has improved the configuration efficiency of lapping liquid greatly, and former liquid pump, circulating pump and liquid feeding pump all are equipped with two, each other are reserve pump, when one of them pump breaks down, and another pump can stand-by horse independent operation work, can guarantee that the system is stable effective to be operated, need not shut down, can 24 hours uninterrupted supply lapping liquid.

2. This application utilizes the sample valve box to sample, not only can collect the liquid that samples in-process splashes, avoids sample bottle bottom hydrops, also can sample the detection to the liquid of the different stages of grinding fluid blending in-process to monitor the liquid ratio in the pipeline of different stages, thereby guarantee the blending precision and the blending efficiency of grinding fluid.

3. According to the method, the bubbling humidifying device is arranged on the mixing barrel, and bubbles can be introduced into the mixing barrel through the bubbling humidifying device in the process of stirring the stock solution in the mixing barrel, so that the stock solution can be mixed more uniformly; and the bottom of the mixing barrel is arranged to be in an inverted cone shape, so that the grinding liquid in the mixing barrel can be guaranteed to be exhausted by being pumped out, the formation of crystal particles at the bottom of the mixing barrel is avoided, the formation of scratches on the surface of a grinding product is effectively avoided, the residual crystal particles on the surface of the grinding product are caused, and the product yield is improved.

4. The ventilating and exhausting effect can be increased by arranging the exhaust plate on the partition plate in the cabinet body, and the ventilating area of the exhaust plate can be adjusted, so that the control of the ventilating area can be realized; and the filter screen that sets up between its exhaust fixed plate and the regulating plate is favorable to filtering the impurity in the inside air of lapping liquid mixed liquor cabinet, avoids causing the pollution to external environment.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic view of the structure of a polishing liquid sampling tank.

Fig. 2 is a schematic view of the structure of a sample tank body of the polishing liquid sample tank.

Fig. 3 is a line diagram of the slurry mixing circulation system.

Fig. 4 is a schematic perspective view of a slurry mixing circulation system.

Fig. 5 is a schematic structural view of a cabinet of the slurry mixing circulation system.

Fig. 6 is one of schematic structural views of the exhaust plate.

Fig. 7 is one of schematic structural views of the exhaust fixing plate.

Fig. 8 is one of the structural schematic diagrams of the regulating plate.

FIG. 9 is a second schematic view of the structure of the exhaust plate.

FIG. 10 is a second schematic view of the structure of the exhaust fixing plate.

FIG. 11 is a second schematic view of the structure of the adjusting plate.

Fig. 12 is a schematic structural view of the mixing tub.

Fig. 13 is a schematic structural view of the bubbling humidification device.

The meaning of the reference numerals in the figures is:

1 is a raw liquid barrel, and the liquid barrel is provided with a plurality of grooves,

2 is a mixing barrel, 21 is a barrel, 22 is a barrel cover, 23 is a cylindrical barrel, 24 is an inverted cone barrel, 25 is a liquid outlet, 26 is a liquid inlet, 27 is an air inlet, 28 is a stirring mechanism,

3 is a raw liquid pump,

4 is a circulating pump, and the water is pumped by the water pump,

5 is a liquid-feeding pump,

the valve box is shown as the reference numeral 6,

71 is a first raw liquid conveying pipe, 72 is a second raw liquid conveying pipe, 73 is a third raw liquid conveying pipe, 74 is a raw liquid communicating pipe,

81 is a first circulation conveying pipe, 82 is a second circulation conveying pipe, 83 is a third circulation conveying pipe, 84 is a fourth circulation conveying pipe, 85 is a fifth circulation conveying pipe, 86 is a hydrometer,

91 is a first liquid feeding pipe, 92 is a second liquid feeding pipe, 93 is a third liquid feeding pipe, 94 is a fourth liquid feeding pipe, 95 is a fifth liquid feeding pipe, 96 is a liquid feeding communicating pipe,

10 is a sampling branch pipe, and the sampling branch pipe,

11 is a waste liquid pipeline, and the waste liquid pipeline,

121 is a pure water supply header pipe, 122 is a first pure water supply branch pipe, 123 is a second pure water supply branch pipe, 124 is a third pure water supply branch pipe, 125 is a fourth pure water supply branch pipe, 126 is a fifth pure water supply branch pipe,

and 13 is a gas pipeline, and the gas pipeline is provided with a gas inlet,

14 is an air quantity regulating device,

15 is a sampling box, 151 is a fixed plate, 152 is a splash guard, 153 is a control valve, 154 is a waste liquid port, 155 is a back plate, 156 is a side plate, 157 is a top plate, 158 is a bottom plate, 159 is a support plate, 1510 is a mounting plate, 1512 is a splash guard,

16 is a cabinet body, 161 is an exhaust port, 162 is a baffle plate,

17 is a bubbling humidifying device, 171 is a box body, 172 is a ventilation pipe, 173 is an air inlet pipe, 174 is an exhaust pipe, 175 is a water inlet pipe,

18 is an exhaust plate, 181 is an exhaust fixing plate, 182 is a first exhaust hole, 183 is a first fixing hole, 184 is a clamping portion, 185 is a fixing portion, 186 is a connecting portion, 187 is an adjusting plate, 188 is a second exhaust hole, 189 is a second fixing hole,

19 is a vent hole, and the air is introduced into the air hole,

20 is an exhaust chamber.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the present utility model is described below by means of specific embodiments shown in the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the utility model. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present utility model.

The terminology used in the present disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used in this disclosure and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.

It should be understood that, although the terms first, second, third, etc. may be used in this disclosure to describe various information, these information should not be limited to these terms, but rather should not be construed as indicating or implying any relative importance. These terms are only used to distinguish one type of information from another. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the present disclosure.

In the description of the present utility model, unless otherwise specified and defined, it should be noted that the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, mechanical or electrical, or may be in communication with each other between two elements, directly or indirectly through intermediaries, as would be understood by those skilled in the art, in view of the specific meaning of the terms described above.

For a better understanding of the technical solution of the present utility model, the following detailed description of the present utility model refers to the accompanying drawings.

The utility model provides a grinding fluid mixing and circulating system which comprises a cabinet body 16, raw fluid barrels 1 arranged in different cavities in the cabinet body 16, a mixing system and an electronic control module.

The cabinet 16 adopts stainless steel as a framework and is wrapped with PP plates. The front panel of the cabinet body is provided with a PP door, an instrument panel, a dial panel, control keys, a touch screen, a code scanning gun and the like, the PP door is provided with a transparent PVC observation window, the liquid supply condition of the stock solution barrel can be observed through the observation window, and the control keys comprise a start-up state, a shut-down state, a reset state, a silencing state, an emergency stop state, an A barrel, a B barrel, an on-line/off-line state and the like. The back panel of the cabinet body is also provided with a PP door, and the PP door is provided with a transparent PVC observation window through which the mixed liquid condition of the mixing system can be observed. A PP door is arranged on one side face of the cabinet body, a PVC observation window capable of being opened and closed is arranged on one side of the PP door, and liquid taking conditions of sampling bottles in the sampling valve box can be observed through the observation window. The top plate of the cabinet body is provided with a plurality of ports such as an exhaust port, a pure water inlet, a pure water outlet, a nitrogen outlet, a stock solution sampling port, a mixed solution outlet, a circulating end sampling port and the like, and each port can be connected with a corresponding pipeline inside the cabinet body.

The interior of the cabinet 16 is divided into three chambers by two partition plates 162, and the stock solution tank 1, the mixing system and the electronic control module are respectively arranged in the three chambers.

An exhaust plate with adjustable ventilation area is arranged on one side plate surface of a partition plate used for separating the stock solution barrel 1 and the mixing system, so that the intercommunication of chamber airflow between a chamber where the stock solution barrel 1 is positioned and a chamber where the mixing system is positioned can be realized; and the bottom of the partition plate is provided with a vent 19 for communicating the chamber where the stock solution barrel 1 is positioned and the chamber where the mixing system is positioned.

The exhaust plate 18 includes an exhaust fixing plate 181, and a plurality of adjusting plates 187 movably mounted on the exhaust fixing plate 181 by fasteners.

The position of the exhaust fixing plate 181, where the adjusting plate 187 is installed, is provided with a first exhaust hole 182 and a first fixing hole 183, the adjusting plate 187 is provided with a second exhaust hole 188 overlapped with the first exhaust hole 182 and a second fixing hole 189 aligned with the first fixing hole 183, the fastener passes through the first fixing hole 183 and the second fixing hole 189 at the same time, and the overlapped area between the first exhaust hole 182 and the second exhaust hole 188 is adjustable.

The first exhaust holes 182 on the exhaust fixing plate 181 and the second fixing holes 189 on the adjusting plate 187 are all provided in plurality, and the number and the positions of the two are the same and are uniformly distributed.

The exhaust fixing plate 181 includes a vertically disposed clamping portion 184 and a fixing portion 185, and an inclined connecting portion 186 connected between the clamping portion 184 and the fixing portion 185, and the clamping portion 184 is clamped at the top of the cabinet. The adjusting plate is mounted on the fixing portion 185.

The adjustment plate 187, the first fixing hole 183, the second fixing hole 189, the first exhaust hole 182, and the second exhaust hole 188 may be provided in various shapes as needed.

If the adjusting plate 187 is designed as a rectangular plate, the left and right ends thereof are respectively fixed on the exhaust fixing plate 181 by bolts; the first fixing hole 183 is designed as a circular hole, the second fixing hole 189 is designed as a kidney-shaped hole, and the first vent hole 182 and the second vent hole 188 are identical in shape and are designed as kidney-shaped holes, circular holes, bar-shaped holes, square holes or any other polygonal or irregular shapes. In use, the adjusting plate 187 is fixed to the exhaust fixing plate 181 by passing a bolt through both the first fixing hole 183 and the second fixing hole 189 and suspending a nut on the bolt. When the ventilation effect is required to be adjusted, the nut can be unscrewed, the adjusting plate 187 is moved up and down to change the overlapping area between the first exhaust hole 182 and the second exhaust hole 188, the ventilation area can be adjusted, and after the adjustment is in place, the nut can be screwed down.

Or the adjusting plate 187 is designed as a circular plate, the center of which is fixed to the exhaust fixing plate 181 by a bolt; the first and second fixing holes 183 and 189 are designed as circular holes, and the first and second exhaust holes 182 and 188 are identical in shape and designed as petals or any other polygonal or irregular shape. In use, the adjusting plate 177 is fixed to the exhaust fixing plate 181 by passing a bolt through both the first fixing hole 173 and the second fixing hole 189 and suspending a nut on the bolt. When the ventilation effect is required to be adjusted, the nut can be unscrewed, the adjusting plate 187 is rotated in the circumferential direction to change the overlapping area between the first exhaust hole 182 and the second exhaust hole 188, the ventilation area can be adjusted, and the nut can be screwed after the ventilation area is adjusted in place.

Preferably, the exhaust fixing plate 181 is integrally formed.

Preferably, a filter screen is further disposed between the exhaust fixing plate 181 and the adjusting plate 187.

When the exhaust plate 18 is installed, an exhaust chamber 20 is formed between the exhaust plate and a partition plate for separating the raw liquid barrel from the mixing system, and gas in the chamber where the raw liquid barrel 1 is located and the chamber where the mixing system is located can be replaced by a vent 19, then enter the exhaust chamber 20 through an exhaust hole in the exhaust plate 18, and then be exhausted from an exhaust hole 161 in the top plate of the cabinet 16 through the exhaust chamber 20. An exhaust port 161 in the top plate of the cabinet 16 is located above the exhaust chamber 20.

The mixing system comprises a mixing barrel 2, a raw liquid pump 3 for pumping raw liquid in the raw liquid barrel 1 to the mixing barrel 2 for mixing through a raw liquid pipeline, a circulating pump 4 for pumping mixed liquid in the mixing barrel 2 to the barrel in a circulating way, a liquid feeding pump 5 for pumping mixed liquid in the mixing barrel 2 to a valve box through a liquid feeding pipeline, a valve box 6 for distributing the mixed liquid to other equipment, and a pure water pipeline for conveying pure water to mix the pure water with the mixed liquid in the circulating pipeline in proportion or clean all pipelines.

The stock solution bucket 1 is used for storing concentrated grinding stock solution, and stock solution bucket 1 is provided with a plurality of, and a plurality of stock solution buckets 1 link to each thoughtlessly join in marriage bucket 2 through stock solution pipeline to utilize stock solution pump 3 to pump the stock solution in the stock solution bucket 1 to thoughtlessly join in marriage bucket 2 through the stock solution pipeline and mix.

The stock solution barrel 1 and the mixing barrel 2 are both provided with a plurality of stock solution barrels. The stock solution barrels 1 are used for storing concentrated grinding stock solution, and a plurality of stock solution barrels 1 are connected with each mixing barrel 2 through stock solution pipelines so as to pump the stock solution in the stock solution barrels 1 to the mixing barrels 2 through the stock solution pipelines by using the stock solution pump 3 for mixing.

The stock solution pipeline comprises first stock solution conveying pipes 71 connected to the liquid outlets of the stock solution barrels 1, second stock solution conveying pipes 72 connected to all the first stock solution conveying pipes 71, and third stock solution conveying pipes 73 arranged at the tail ends of the second stock solution conveying pipes 72 and respectively extending into the mixing barrels 2, and each first stock solution conveying pipe 71 is provided with a stock solution pump 3. In this embodiment, the stock solution barrels 1 are provided with 2, and the stock solution communicating pipes 74 for communicating the 2 first stock solution conveying pipes 71 are connected between the 2 first stock solution conveying pipes 71 connected with the 2 stock solution barrels 1, respectively, and two ends of the stock solution communicating pipes 74 are disposed on the water inlet sides of the 2 stock solution pumps 3, respectively. By providing the raw liquid communication pipe 74 between the 2 first raw liquid transport pipes 71, the raw liquid pumps 3 on the 2 first raw liquid transport pipes 71 can be made standby pumps.

Valves for controlling pipeline switch and flow rate are arranged on the first stock solution conveying pipe 71, the second stock solution conveying pipe 72 and the third stock solution conveying pipe 73, and the mixing proportion of the stock solutions conveyed in the two first stock solution conveying pipes 71 can be adjusted by controlling the opening of the valves on the two first stock solution conveying pipes 71.

When the stock solution pump works normally, one stock solution pump works, the other stock solution pump is used as a standby pump, stock solution in 2 stock solution barrels is pumped to 2 mixing barrels through stock solution pipelines respectively, and if the stock solution pump working currently fails, the other standby stock solution pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the raw liquid pump 3 is a pneumatic bellows pump with a maximum working pressure of 0.6Mpa and a maximum flow rate of 16L/min.

The mixing barrels 2 are also provided with a plurality of mixing barrels 2, the mixing barrels 2 are used for mixing the stock solution conveyed by the stock solution pipeline to mix grinding liquid, the grinding liquid can enter the circulating pipeline from the lower part of the mixing barrels 2, and the grinding liquid is circulated and returned into the barrels by the circulating pump 4 through the pumping of the circulating pipeline; or the grinding fluid can enter the liquid conveying pipeline from the lower part of the mixing barrel 2, and the grinding fluid is pumped to the valve box 6 through the liquid conveying pipeline by the liquid conveying pump 3, and then is conveyed to various using points or returned into the barrel by the valve box 6.

The mixing barrel 2 is provided with a stirring mechanism 28 and a bubbling humidifying device 16, and the mixing barrel 2 comprises a barrel 21 and a barrel cover 22 fixed on the top of the barrel 21.

The cylinder 21 is composed of a cylindrical cylinder 23 and an inverted cone-shaped cylinder 24 extending from the lower part of the cylindrical cylinder 23, and a plurality of liquid discharge ports 25 are formed at the bottom of the inverted cone-shaped cylinder 24.

The barrel cover 22 is provided with a liquid inlet 26 for allowing a raw liquid conveying pipeline (comprising a raw liquid pipeline, a circulating pipeline and a liquid conveying pipeline) of the semiconductor grinding liquid supply system to pass through so as to fill raw liquid into the mixing barrel 2, and an air inlet 27 for allowing a discharge pipe of the bubbling humidifying device to pass through so as to convey bubbles into the mixing barrel 2. In this embodiment, a plurality of liquid inlets 26 are provided.

The stirring mechanism 28 may be set to any structure capable of realizing a stirring function, for example, the stirring mechanism may be composed of a transmission rod vertically fixed on the barrel cover of the mixing barrel and stirring discs fixed on the transmission rod along the length direction of the transmission rod and distributed regularly, the transmission rod may be driven by a power motor fixed on the top of the barrel cover of the mixing barrel, that is, the transmission rod is connected with the output end of the power motor, and when in use, the power motor is controlled by a controller of the semiconductor grinding fluid supply system to start, and the power motor may drive the transmission rod to rotate, further drive the stirring discs to rotate.

The bubbling humidifying device 16 comprises a box body 161, a ventilation pipe 162 arranged at the top of the box body 161, a water inlet pipe 165 arranged on the side surface of the box body 161 and used for introducing pure water into the box body 161, an air inlet pipe 163 used for introducing nitrogen into the box body 161, and a discharge pipe 164 arranged at the bottom of the box body 161 and used for conveying generated bubbles into the mixing barrel 2, wherein valves are arranged on the ventilation pipe 162, the water inlet pipe 165, the air inlet pipe 163 and the discharge pipe 164, the water inlet pipe 165 is connected with a pure water pipeline of the semiconductor grinding fluid supply system, the air inlet pipe 163 is connected with a gas pipeline of the semiconductor grinding fluid supply system, and a plurality of ventilation round holes are formed in the air inlet pipe 163. In this embodiment, the valves mounted on the ventilation pipe 162, the water inlet pipe 165, the air inlet pipe 163 and the discharge pipe 164 are electrically controlled valves.

When pure water is introduced into the box of the bubbling humidifying device 16 through the nitrogen gas pipeline and the pure water pipeline through the water inlet pipe 165 and the box of the bubbling humidifying device 16 through the air inlet pipe 163, bubbles are generated in the pure water under the action of the nitrogen gas, and when the bubbles enter the mixing barrel 2 through the discharge pipe, the mixing uniformity of the raw liquid in the mixing barrel 2 can be increased.

The circulation pipeline comprises a first circulation conveying pipe 81 connected to the liquid outlet at the bottom of each mixing barrel 2, a second circulation conveying pipe 82 connected to all the first circulation conveying pipes 81, two third circulation conveying pipes 83 arranged at the tail ends of the second circulation conveying pipes 82, a fourth circulation conveying pipe 84 connected to the two third circulation conveying pipes 83, and a fifth circulation conveying pipe 85 arranged at the tail ends of the fourth circulation conveying pipes 84 and respectively extending into each mixing barrel 2.

Each third circulation conveying pipe 83 is provided with a circulation pump 4, and the two circulation pumps 4 are standby pumps. When the circulating pump works normally, one circulating pump works, the other circulating pump is used as a standby pump, stock solution in the mixing barrel is pumped to the corresponding mixing barrel through the circulating pipeline by the circulating pump in a working state, and if the current working circulating pump fails, the other standby circulating pump is started up and runs immediately, so that normal liquid supply cannot be influenced. In this embodiment, the circulating pump 4 is a levitonix magnetic levitation pump, and the maximum working pressure is 0.3Mpa.

Valves for controlling the opening and closing of pipelines are arranged on the first circulation conveying pipe 81, the third circulation conveying pipe 83, the fourth circulation conveying pipe 84 and the fifth circulation conveying pipe 85, a flow valve for controlling the flow of the mixed liquid conveyed by the valves through the opening of the valves so as to adjust the mixing proportion of the mixed liquid and the pure water is also arranged on the third circulation conveying pipe 83, and a hydrometer 86 is arranged on the fourth circulation conveying pipe 84, wherein the hydrometer 86 is used for detecting whether the mixing proportion of the mixed liquid and the pure water reaches the standard.

The liquid delivery pipeline comprises a first liquid delivery pipe 91 connected to the liquid outlet at the lower part of each mixing barrel 2, a second liquid delivery pipe 92 connected to all the first liquid delivery pipes 91, two third liquid delivery pipes 93 arranged at the tail end of the second liquid delivery pipe 92, a fourth liquid delivery pipe 94 with two ends connected to a valve box and the two third liquid delivery pipes 93 respectively, and a fifth liquid delivery pipe 95 connected to the liquid outlet of the valve box 6 and extending into each mixing barrel 2 respectively, wherein two liquid delivery pumps 5 are arranged on one of the third liquid delivery pipes, and a liquid delivery communicating pipe 96 used for communicating the third liquid delivery pipe with the other third liquid delivery pipe is arranged on the pipe section of the third liquid delivery pipe between the two liquid delivery pumps. The two liquid delivery pumps 5 are standby pumps, one liquid delivery pump works and the other liquid delivery pump works as a standby pump in normal working conditions, and the liquid delivery pump in working conditions pumps the mixed stock solution in the mixing barrel to the valve box 6 through the liquid delivery pipeline, and then the mixed stock solution is conveyed to each using point or returned to the barrel by the valve box 6; if the current working liquid feeding pump fails, the stand-by liquid feeding pump starts up and runs, and normal liquid feeding is not affected. In this embodiment, the liquid feeding pump 5 is a Levitronix magnetic levitation pump, and can supply liquid for a pipeline with the total length of 150m, and the maximum flow is 70L/min.

Valves for controlling the opening and the closing of the pipeline and the flow rate are arranged on the first liquid conveying pipe 91, the third liquid conveying pipe 93, the fourth liquid conveying pipe 94 and the fifth liquid conveying pipe 95, and the mixing proportion of the mixed liquid and the pure water can be adjusted by controlling the opening of the valve corresponding to the valve on the third liquid conveying pipe 93.

The raw liquid pipeline, the circulating pipeline and the liquid feeding pipeline are all connected with a waste liquid pipeline 11.

The stock solution pipeline, the circulating pipeline and the liquid feeding pipeline are all provided with sampling branch pipes 10, the sampling branch pipes on the stock solution pipeline are connected to the second stock solution conveying pipe 72, the sampling branch pipes on the circulating pipeline are connected to the fourth circulating conveying pipe 84, and the sampling branch pipes on the liquid feeding pipeline are connected to the fourth liquid feeding pipe 94.

The pure water (DI) is conveyed through a pure water pipeline. The pure water line may be used to not only transport pure water to mix the pure water with the mixed liquid in the third circulation pipe 83 or the third liquid feed pipe 93 in proportion, but also clean all the lines.

The deionized water piping includes a deionized water supply main 121, a first deionized water supply branch pipe 122, a second deionized water supply branch pipe 123, a third deionized water supply branch pipe 124, a fourth deionized water supply branch pipe 125, and a fifth deionized water supply branch pipe 126 connected to the deionized water supply main 121.

The first pure water delivery branch pipes 122 are respectively connected with the 2 first raw liquid delivery pipes 71 of the raw liquid pipeline, and are used for cleaning the raw liquid pipeline. The pure water supplied through the first pure water supply branch pipe 122 can flow in the raw liquid pipeline, clean the raw liquid pipeline, the raw liquid barrel and the sampling branch pipe thereof, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline thereof.

The second pure water delivery branch pipe 123 is connected to a third liquid delivery pipe 93 of the liquid delivery pipe, to which a liquid delivery pump is mounted, for cleaning the liquid delivery pipe or mixing the delivered pure water with the mixed liquid in the pipe in a set ratio, and the second pure water delivery branch pipe 123 is provided with two water outlet pipe sections, one of which is connected to the water inlet side of the first liquid delivery pump and the other of which is connected to the water inlet side of the second liquid delivery pump. The pure water supplied through the second pure water supply branch pipe 123 can flow in the liquid supply pipe, the liquid supply pipe and the sampling branch pipe thereof can be cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipe thereof.

The third pure water delivery branch pipes 124 are respectively connected with the two third circulation delivery pipes 83 of the circulation pipeline, and are used for cleaning the circulation pipeline or mixing the delivered pure water with the mixed liquid in the pipeline according to a set proportion. The pure water supplied through the third pure water supply branch pipe 124 can flow in the circulation pipe, the sampling branch pipe thereof, and the mixing tank are cleaned, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through the waste liquid pipe thereof.

The fourth pure water supply branch pipe 125 is connected to the fourth circulation pipe 84 of the circulation line for cleaning the circulation line. The pure water supplied through the fourth pure water supply branch pipe 125 can flow in the circulation pipe, clean the circulation pipe, its sampling branch pipe, and the mixing tank, and the cleaned waste liquid can be discharged to the waste liquid treatment apparatus through its waste liquid pipe.

The fifth pure water conveying branch pipe 126 is connected with the sampling branch pipe connected to the raw liquid pipeline, and is used for cleaning the sampling branch pipe, and the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid pipeline.

The sampling branch pipes extend into the sampling bottles of the sampling boxes, and the sampling boxes can be used for sampling the liquid in the respective pipelines.

The sampling tank 15 is horizontally provided with a fixing plate 151 and a splash guard 152, and the fixing plate 151 and the splash guard 152 divide the tank space inside the sampling tank 15 from top to bottom into a first chamber for accommodating a control valve 153 on a sampling branch pipe, a second chamber for placing a sampling bottle (not shown in fig. 1), and a third chamber for collecting splashed waste liquid. The bottom of the sampling box 15 is provided with an inclined surface and the lowest part thereof is provided with a waste liquid port 154.

Specifically, the sampling box 15 is composed of a back plate 155, side plates 156 vertically fixed to both sides of the back plate 155, a top plate 157 vertically fixed to the upper end of the back plate 155, and a bottom plate 158 vertically fixed to the lower end of the back plate 155. The side plates 156 arranged on the left side and the right side of the backboard 155 are different in length, the inner side surface of the side plate with the longer length is provided with a supporting plate 159, one end of the splash guard 152 is placed on the supporting plate 159, and the other end is lapped at the joint of the side plate with the shorter length and the bottom plate 158. The splash guard 152 is provided with a plurality of splash guard holes 1512, and the splash guard holes 1512 are distributed in a matrix.

The bottom plate 158 is formed by a slant section inclined obliquely downward and a horizontal section extending horizontally from the lowest part of the slant section, and the waste liquid outlet 154 is provided on the horizontal section.

A mounting plate 1510 is fixed to the inner side of the back plate 155, and the control valve 153 of the sampling branch pipe 10 is fixed to the mounting plate 1510. In this embodiment, mounting plate 1510 has a U-shaped cross section.

The sampling branch pipe 10 extends into the first chamber from the top of the sampling box 15 and passes through the fixing plate 151 and then extends into the sampling bottle placed on the splash guard 152, when liquid splashes from the sampling bottle during sampling, the splashed liquid can be collected into the third chamber from the splash guard 1512, and the splashed liquid can flow to the waste liquid port 154 due to the inclined surface arranged on the bottom plate 158 and then be discharged to the waste liquid treatment device from the waste liquid pipeline connected to the waste liquid port 154.

Preferably, the grinding fluid mixing device of the utility model further comprises a gas pipeline 13 for blowing and drying the cleaned pipeline, and the gas pipeline 13 is respectively connected with the raw liquid barrel 1, the pure water conveying main pipe 121 of the pure water pipeline and the mixing barrel 2. After all the pipelines and the mixing barrel are cleaned, N2 can be introduced into the pipelines, the mixing barrel 2 and the stock solution barrel 1 through the gas pipelines, and the pipelines are purged and dried.

The air pipeline is also provided with an air quantity adjusting device 14.

The on-off of all valves and the start-stop of the pump are controlled by an electric control module.

In the actual use process, the raw liquid pump 3 pumps the raw liquid in the raw liquid barrel to the mixing barrel 2 through the raw liquid pipeline, the stirring mechanism in the mixing barrel 2 uniformly stirs the raw liquid, then the raw liquid is discharged into the circulating pipeline from the liquid outlet at the lower part of the mixing barrel, the raw liquid is mixed with pure water sent by the pure water pipeline in the circulating pipeline according to a set proportion, and then the mixture flows into the mixing barrel 2 again through the circulating pipeline to be uniformly stirred, so that the grinding liquid is prepared. The prepared grinding fluid is discharged into a fluid delivery pipeline from a lower fluid outlet of the mixing barrel 2, and is delivered to a valve box 6 through the fluid delivery pipeline, and the valve box 6 conveys the grinding fluid to each use point or returns to the mixing barrel 2.

When the cleaning is needed, the electric control module controls the corresponding valve on the pure water pipeline to be opened, pure water enters the stock solution pipeline, the circulating pipeline or the liquid conveying pipeline through the pure water pipeline, the cleaned waste liquid can be discharged to the waste liquid treatment device through the waste liquid hanging pipeline, then the electric control module controls the corresponding valve on the gas pipeline to be opened, and the gas pipeline blows nitrogen to purge and dry each pipeline.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather to enable any modification, equivalent replacement, improvement or the like to be made within the spirit and principles of the utility model.

Claims (10)

1. The grinding fluid mixing and circulating system is characterized by comprising a cabinet body, raw fluid barrels, a mixing system and an electronic control module, wherein the raw fluid barrels, the mixing system and the electronic control module are arranged in different cavities in the cabinet body;

the mixing system comprises a mixing barrel, a raw liquid pump for pumping raw liquid in the raw liquid barrel to the mixing barrel for mixing through a raw liquid pipeline, a circulating pump for circulating and refluxing mixed liquid in the mixing barrel to the barrel through a circulating pipeline, a liquid feeding pump for pumping mixed liquid in the mixing barrel to a valve box through a liquid feeding pipeline, a valve box for distributing the mixed liquid to each using point, and a pure water pipeline for conveying pure water to mix the pure water with the mixed liquid in the circulating pipeline in proportion or clean all pipelines; the bubbling humidifying device is arranged on the mixing barrel, the raw liquid pipeline, the circulating pipeline and the liquid conveying pipeline are all connected with a waste liquid pipeline, and the circulating pipeline is provided with a hydrometer for detecting whether the mixing proportion of pure water and mixed liquid reaches the standard;

the utility model discloses a liquid sampling device, including former liquid pipeline, circulation pipeline and liquid delivery pipeline, the former liquid pipeline, circulation pipeline and liquid delivery pipeline all are equipped with the sample branch pipe on, in the sample bottle of sample case is stretched into to the sample branch pipe, the level is provided with fixed plate and splash guard in the sample case, and fixed plate and splash guard divide into the first cavity that is used for holding the control valve on the sample branch pipe, the second cavity that is used for placing the sample bottle and the third cavity that is used for collecting the waste liquid that splashes down from last down with the box space of sample case, be equipped with a plurality of splash guard holes on the splash guard, the bottom of sample case is provided with the inclined plane and its minimum is equipped with the waste liquid mouth.

2. The grinding fluid mixing and circulating system according to claim 1, wherein the sampling box is composed of a back plate, side plates vertically fixed on two sides of the back plate, a top plate vertically fixed on the upper end of the back plate and a bottom plate vertically fixed on the lower end of the back plate, the side plates on two sides of the back plate are different in length, a supporting plate is arranged on the inner side surface of the side plate with the longer length, one end of the splash guard is placed on the supporting plate, and the other end of the splash guard is lapped at the joint of the side plate with the bottom plate with the shorter length.

3. The slurry mixing circulation system of claim 2, wherein a mounting plate is secured to the inner side of the back plate, and the control valve on the sampling manifold is secured to the mounting plate.

4. The slurry mixing circulation system according to claim 2, wherein the bottom plate comprises an inclined section inclined obliquely downward, a horizontal section extending horizontally from a lowest part of the inclined section, and the waste liquid port is provided in the horizontal section.

5. The slurry mixing circulation system of claim 1, wherein the splash guard has splash guard apertures in a matrix distribution.

6. The polishing liquid mixing and circulating system according to claim 1, wherein the bubbling humidifying device comprises a box body, a ventilation pipe arranged at the top of the box body, a water inlet pipe arranged at the side surface of the box body and used for introducing pure water into the box body, an air inlet pipe used for introducing nitrogen into the box body, and a discharge pipe arranged at the bottom of the box body and used for feeding generated bubbles into the mixing barrel, valves are arranged on the ventilation pipe, the water inlet pipe, the air inlet pipe and the discharge pipe, the water inlet pipe is connected with a pure water pipeline, and the air inlet pipe is connected with a gas pipeline.

7. The slurry mixing and circulating system according to claim 1 or 6, wherein the slurry pipeline comprises first slurry conveying pipes connected to the liquid outlets of the slurry tanks, second slurry conveying pipes connected to all the first slurry conveying pipes, and third slurry conveying pipes arranged at the tail ends of the second slurry conveying pipes and respectively extending into the mixing tanks, valves are installed on the first slurry conveying pipes, the second slurry conveying pipes and the third slurry conveying pipes, a slurry pump is installed on each first slurry conveying pipe, and a slurry communicating pipe for communicating the two first slurry conveying pipes is arranged on the water inlet side of each slurry pump.

8. The slurry mixing circulation system according to claim 1 or 6, wherein the circulation line includes a first circulation pipe connected to the liquid outlet of each mixing tub, a second circulation pipe connected to all the first circulation pipes, two third circulation pipes provided at the ends of the second circulation pipes, a fourth circulation pipe connected to the two third circulation pipes, and a fifth circulation pipe provided at the ends of the fourth circulation pipes and extending into each mixing tub, valves are installed on the first circulation pipe, the third circulation pipe, the fourth circulation pipe, and the fifth circulation pipe, one circulation pump is installed on each third circulation pipe, and the hydrometer is installed on the fourth circulation pipe.

9. The grinding fluid mixing and circulating system according to claim 1 or 6, wherein the fluid delivery pipeline comprises a first fluid delivery pipe connected to the fluid outlet of each mixing barrel, a second fluid delivery pipe connected to all the first fluid delivery pipes, two third fluid delivery pipes arranged at the tail ends of the second fluid delivery pipes, a fourth fluid delivery pipe with two ends connected to the valve box and the two third fluid delivery pipes respectively, and a fifth fluid delivery pipe connected to the fluid outlet of the valve box and extending into each mixing barrel respectively, wherein valves are installed on the first fluid delivery pipe, the third fluid delivery pipe, the fourth fluid delivery pipe and the fifth fluid delivery pipe, two fluid delivery pumps are installed on one third fluid delivery pipe, and a fluid delivery communicating pipe for communicating the third fluid delivery pipe with the other third fluid delivery pipe is arranged on a pipe section of the third fluid delivery pipe between the two fluid delivery pumps.

10. The grinding fluid mixing and circulating system according to claim 1, wherein the mixing system further comprises a gas pipeline for blowing and drying the cleaned pipeline, and an air quantity adjusting device is further arranged on the gas pipeline.