CN208712409U - The overflow spray equipment of cleaning machine - Google Patents
The overflow spray equipment of cleaning machine Download PDFInfo
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- CN208712409U CN208712409U CN201821146280.7U CN201821146280U CN208712409U CN 208712409 U CN208712409 U CN 208712409U CN 201821146280 U CN201821146280 U CN 201821146280U CN 208712409 U CN208712409 U CN 208712409U
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Abstract
The utility model discloses the overflow spray equipment of cleaning machine, including water system, spray system and overflow collection system, the water of spray system derives from water system or overflow collection system, and the water of overflow collection system derives from water system or spray system；Water system includes pipe network and water supplying pipe, and spray system includes spray tube and sink A, and pipe network is connected to spray tube by water supplying pipe；Overflow collection system includes the overflow pipe of both sink B, water storage tank and connection, and water storage tank is connect with spray tube and sink B respectively by water pump, and pipe network is connected to sink B by water supplying pipe.Described device realizes the changeable of spray condition using the mode that multichannel supplies water, and reaches the Ke Xunhuanliyong of ejected wash water；The cleaning effect for improving silicon wafer, promotes the quality of product；It can directly graft and be used on cleaning machine, realize and spray removing is carried out to flume surface floating sundries in key position, by the reuse to overflow water, realize the purpose of internal circulating water supply and water conservation.
Description
Technical field
The utility model belongs to cleaning equipment technical field, the water treatment facilities being related to during a kind of Wafer Cleaning, tool
Body is the overflow spray equipment of cleaning machine.
Background technique
Photovoltaic needs to clean silicon wafer using cleaning equipment in silicon wafer production process, in the process of cleaning, due to
The addition of chemical agent and continuous impurities accumulation is cleaned for a long time, cleaning effect can be had an impact.
Predominantly liquid level overflow water mode below is used only to eliminate impurity and bad, such mode water in the prior art
Amount is big, can not floating material to surface and foam effectively removed.Although structure is simple, effect is general.
Utility model content
The technical issues of solving the problem of: water consumption control is solved for overcome the deficiencies in the prior art, to water surface surface
Floating material and foam carry out specific aim removal, improve the cleaning yield of product, improve the cleaning effect of silicon wafer, promote product
Quality, the utility model provides the overflow spray equipment of cleaning machine.
Technical solution: the overflow spray equipment of cleaning machine described in the utility model can be grafted directly in existing cleaning
In equipment, by increasing this covering device, realizes and spray removing is carried out to flume surface floating sundries in key position, by excessive
The purpose of internal circulating water supply and water conservation is realized in the reuse of flowing water.The specific structure of device is as follows:
The overflow spray equipment of cleaning machine, described device include water system, spray system and overflow collection system, spray
The water of system derives from water system or overflow collection system, and the water of overflow collection system is from water system or spray system
System；Water system includes pipe network and water supplying pipe, and spray system includes spray tube and sink A, and pipe network and spray tube pass through water supplying pipe
Connection；Overflow collection system include sink B, water storage tank and connection both overflow pipe, water storage tank by water pump respectively with spray
Pipe is connected with sink B, and pipe network is connected to sink B by water supplying pipe.
The water system of device described in the utility model includes two kinds of paths, i.e. pipeline direct-furnish water and collection self-water-supplying；Its
In, it is directly that the present apparatus supplies water that pipeline direct-furnish water, which is by pipe network, collects self-water-supplying and refers to the overflow water for collecting each sink itself
To water storage tank.Then it is supplied water by water pump to this covering device.
Preferably, the water supplying pipe that pipe network is connected to spray tube is divided into two-way in parallel, and two-way is opened by solenoid valve A control
It closes；It is wherein equipped with hand-operated valve A on the way, is arranged in series hand-operated valve B and on-line heating device in another way.
According to the difference in water supply source, spray system can be divided into three tunnels, and every road can be used alone, can also be free
Combination switches to the spray mode of needs by hand-operated valve folding.Direct-furnish water spray: being supplied water by pipe network, passes through solenoid valve control
It is switched, and controls its uninterrupted by hand-operated valve.Water temperature is pipe network water temperature.Heating water spray: it is supplied water, is first passed through a set of by pipe network
On-line heating system first preheats water, then by its switch of solenoid valve control, controls its uninterrupted by hand-operated valve.
Water temperature is water temperature after preheating.Overflow water spray: the overflow water of each sink itself to water storage tank.This covering device is supplied by water pump
Water controls its uninterrupted by hand-operated valve then by its switch of solenoid valve control.Water temperature is sink water temperature.
Preferably, it is connected on the water supplying pipe of pipe network and sink B and is arranged in series hand-operated valve C and suspended body flowmeter.
Preferably, float level meter is equipped in water storage tank.
It is separated all the way by pipe network as supplying water, is controlled and opened and closed by hand-operated valve, present flow rate is shown by suspended body flowmeter.Pass through
The height of pipeline is arranged, so that water flow is overflowed automatically, it is spare to be then collected into water storage tank.It is returned again by water pump to needing overflow
In groove body.By constantly recycling, the turbidity of water body is reduced.
Preferably, it is connected on the water supplying pipe of water storage tank and water pump and is in series with solenoid valve B, and be two-way in solenoid valve B punishment,
It is wherein connected to all the way with the bottom of sink B, another way is connected to spray tube, is equipped with hand-operated valve on two-way water supplying pipe.
Preferably, the spray tube is wall thickness 2.5mm or more, stainless steel tube, PPR pipe or the pvc pipe of diameter 16mm.
Preferably, the hole that diameter is 1mm is uniformly distributed on the spray tube.
Preferably, the spray tube both ends, which are equipped between bracket, with water supplying pipe, uses loose joint.
The use length of spray tube customizes according to demand, the bracket at both ends for facilitating up and down adjustment, with water supplying pipe it
Between using loose joint in order to angular adjustment, to cooperate the installation requirement of each different groove bodies.
Preferably, described device is controlled by PLC system.This system is by touch screen as parameter input window, level sensing
Device is input signal, and solenoid valve and water pump are output signal.During process flow, process requirements sheet is set in touch screen
At the beginning of system intervenes and the end time, PLC realizes starting and stopping for battery valve and water pump, such as by programming in logic
It need to fetch water from water storage tank, the liquid level sensor high point in water storage tank is the conditioned signal that water pump can star, the liquid in water storage tank
Level sensor low spot is the protective condition signal that water pump can not start.
The installation method of the overflow spray equipment of cleaning machine described in the utility model is as follows: present apparatus pipeline portions can root
It constructs according to live actual state, water storage slot part need to be lower than original bottom of gullet, and pump intake and water outlet need basis
The requirement of water pump is mounted on water storage tank liquid outlet or more, below overflow port.Spray tube is mounted at groove body liquid level, and root
Mounting height is adjusted according to actual liquid level.Other component can be installed by real space.
The application method of the overflow spray equipment of cleaning machine described in the utility model is as follows: by each electromagnetism after being installed
Valve access control system actually uses the folding of demand control solenoid valve according to user, and the liquid-level floater inside sink protects water pump
In the case where water storage tank water shortage will not idle running and damage.Each hand-operated valve can be used for selecting to need function to be used,
It is provided simultaneously with the function of regulating pondage.
The utility model has the advantages that the overflow spray equipment of (1) cleaning machine described in the utility model is realized using the mode that multichannel supplies water
Spray condition it is changeable, and reach the can be recycled of ejected wash water；(2) device described in the utility model improves the cleaning of silicon wafer
Effect promotes the quality of product；(3) device described in the utility model can be grafted directly and be used on cleaning machine, and realization is being closed
Key position carries out spray removing to flume surface floating sundries, by the reuse to overflow water, realizes internal circulating water supply and section
About use the purpose of water.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the overflow spray equipment of cleaning machine described in the utility model；
Fig. 2 is the spray pipe structure schematic diagram of the overflow spray equipment of cleaning machine described in the utility model；
Fig. 3 is the structural schematic diagram of the overflow spray equipment of the cleaning machine in embodiment 2；
Fig. 4 is the PLC system control structure schematic diagram of the overflow spray equipment of the cleaning machine in embodiment 3；
Fig. 5 is the perspective view of the overflow spray equipment of cleaning machine of the present invention；
Wherein, 1 is pipe network, and 2 be sink A, and 3 be sink B, and 4 be spray tube, and 5 be solenoid valve A, and 6 be hand-operated valve A, and 7 be hand
Dynamic valve C, 8 be suspended body flowmeter, and 9 be on-line heating device, and 10 be hand-operated valve B, and 11 be solenoid valve B, and 12 be water pump, and 13 be water storage
Slot, 14 be float level meter, and 15 be overflow pipe, and 16 be bracket, and 17 be loose joint, and 18 be water supplying pipe, and 19 be sink C, and 20 be sink
D, 21 be sink E, and 22 be sink F.
Specific embodiment
Following embodiment further illustrates the content of the utility model, but should not be construed as a limitation of the present invention.
Without departing substantially from the spirit of the present invention and essence, to made by the utility model method, step or condition modification and
Replacement, belongs to the scope of the utility model.
Unless otherwise specified, the conventional means that technological means used in embodiment is well known to those skilled in the art.
Embodiment 1
As shown in Figure 1 and Figure 5, the overflow spray equipment of cleaning machine, described device include water system, spray system and overflow
Collection system is flowed, the water of spray system derives from water system or overflow collection system, and the water of overflow collection system is from confession
Water system or spray system；Water system includes pipe network 1 and water supplying pipe 18, and spray system includes spray tube 4 and sink A 2, pipe
Net 1 is connected to spray tube 4 by water supplying pipe 18；Overflow collection system includes overflowing for both sink B 3, water storage tank 13 and connection
Flow tube 15, water storage tank 13 are connect with spray tube 4 and sink B 3 respectively by water pump 12, and pipe network 1 and sink B 3 pass through water supplying pipe
18 connections.
The two-way that the water supplying pipe 18 that pipe network 1 is connected to spray tube 4 divides for parallel connection, two-way is by 5 control switch of solenoid valve A；
It is wherein equipped with hand-operated valve A 6 on the way, is arranged in series hand-operated valve B 10 and on-line heating device 9 in another way.
Hand-operated valve C 7 and suspended body flowmeter 8 are arranged in series on the water supplying pipe 18 of connection pipe network 1 and sink B 3.
Float level meter 14 is equipped in water storage tank 13.
It is in series with solenoid valve B 11 on the water supplying pipe 18 of connection water storage tank 13 and water pump 12, and is in the punishment of solenoid valve B 11
Two-way, wherein being connected to all the way with the bottom of sink B 3, another way is connected to spray tube 4, is equipped on two-way water supplying pipe 18 manually
Valve.
The spray tube 4 is wall thickness 2.5mm or more, stainless steel tube, PPR pipe or the pvc pipe of diameter 16mm.
The hole that diameter is 1mm is uniformly distributed on the spray tube 4.
As shown in Fig. 2, 4 both ends of spray tube, which are equipped between bracket 16, with water supplying pipe 18, uses loose joint 17.
Described device is controlled by PLC system.For this system by touch screen as parameter input window, liquid level sensor is input
Signal, solenoid valve and water pump are output signal.During process flow, the intervention of process requirements this system is set in touch screen
At the beginning of and end time, PLC starting and stopping for battery valve and water pump is realized by programming in logic, if you need to from water storage
Slot is fetched water, and the liquid level sensor high point in water storage tank is the conditioned signal that water pump can star, the liquid level sensor in water storage tank
Low spot is the protective condition signal that water pump can not start.
The installation method of the overflow spray equipment of cleaning machine described in the present embodiment is as follows: present apparatus pipeline portions can basis
Live actual state is constructed, and water storage slot part need to be lower than original bottom of gullet, and pump intake and water outlet need to be according to water
The requirement of pump is mounted on water storage tank liquid outlet or more, below overflow port.Spray tube is mounted at groove body liquid level, and according to
Actual liquid level adjusts mounting height.Other component can be installed by real space.
The application method of the overflow spray equipment of cleaning machine described in the present embodiment is as follows: by each solenoid valve after being installed
Access control system actually uses the folding of demand control solenoid valve according to user, and the liquid-level floater protection water pump inside sink exists
In the case where water storage tank water shortage will not idle running and damage.Each hand-operated valve can be used for selecting to need function to be used, together
When have the function of regulating pondage.
Embodiment 2
As shown in figure 3, the overflow spray equipment of cleaning machine, described device includes that water system, spray system and overflow are received
Collecting system, the water of spray system derive from water system or overflow collection system, and the water of overflow collection system is derived from for water system
System or spray system；Water system includes pipe network 1 and water supplying pipe 18, and spray system includes spray tube 4 and sink A 2,1 He of pipe network
Spray tube 4 is connected to by water supplying pipe 18；Overflow collection system include sink B 3, sink C 19, sink D 20 and water storage tank 13,
And the overflow pipe 15 of each component of connection, water storage tank 13 are connect by water pump 12 with 21 one end sink E, 21 other end of sink E connects
Water storage tank 13 is connect, water storage tank 13 is connect by water pump 12 with sink F 22, to form the overflow collection system of circulation.
The two-way that the water supplying pipe 18 that pipe network 1 is connected to spray tube 4 divides for parallel connection, two-way is by 5 control switch of solenoid valve A；
It is wherein equipped with hand-operated valve A 6 on the way, is arranged in series hand-operated valve B 10 and on-line heating device 9 in another way.
Hand-operated valve C 7 and suspended body flowmeter 8 are arranged in series on the water supplying pipe 18 of connection pipe network 1 and sink B 3.Water storage tank 13
It is interior to be equipped with float level meter 14.Sink B 3, sink C 19, sink are arranged in series between suspended body flowmeter 8 and float level meter 14
D 20, and be connected to by overflow pipe 15.
Be in series with solenoid valve B 11 and hand-operated valve on the water supplying pipe 18 of connection water storage tank 13 and water pump 12, and with spray tube 4
Connection.Water after spray in sink E 21 flows into the water storage tank 13 of the other end through overflow pipe 15, is equipped with float in water storage tank 13
Liquidometer 14.Water storage tank 13 is connected to through water pump 12 with sink F 22, and is equipped with hand-operated valve and suspended body flowmeter 8 therebetween.
The spray tube 4 is wall thickness 2.5mm or more, stainless steel tube, PPR pipe or the pvc pipe of diameter 16mm.
The hole that diameter is 1mm is uniformly distributed on the spray tube 4.
As shown in Fig. 2, 4 both ends of spray tube, which are equipped between bracket 16, with water supplying pipe 18, uses loose joint 17.
Described device is controlled by PLC system.For this system by touch screen as parameter input window, liquid level sensor is input
Signal, solenoid valve and water pump are output signal.During process flow, the intervention of process requirements this system is set in touch screen
At the beginning of and end time, PLC starting and stopping for battery valve and water pump is realized by programming in logic, if you need to from water storage
Slot is fetched water, and the liquid level sensor high point in water storage tank is the conditioned signal that water pump can star, the liquid level sensor in water storage tank
Low spot is the protective condition signal that water pump can not start.
The installation method of the overflow spray equipment of cleaning machine described in the present embodiment is as follows: present apparatus pipeline portions can basis
Live actual state is constructed, and water storage slot part need to be lower than original bottom of gullet, and pump intake and water outlet need to be according to water
The requirement of pump is mounted on water storage tank liquid outlet or more, below overflow port.Spray tube is mounted at groove body liquid level, and according to
Actual liquid level adjusts mounting height.Other component can be installed by real space.
The application method of the overflow spray equipment of cleaning machine described in the present embodiment is as follows: by each solenoid valve after being installed
Access control system actually uses the folding of demand control solenoid valve according to user, and the liquid-level floater protection water pump inside sink exists
In the case where water storage tank water shortage will not idle running and damage.Each hand-operated valve can be used for selecting to need function to be used, together
When have the function of regulating pondage.
Embodiment 3
As shown in figure 4, PLC control system is accessed in the overflow spray equipment of the cleaning machine described in embodiment 2, by sink D
20 supply water, and are connected to by overflow pipe 15 with water storage tank 13, and water storage tank 13 is connect by water pump 12 with 21 one end sink E, sink
21 other end of E connects water storage tank 13, and water storage tank 13 is connect by water pump 12 with sink F 22, so that the overflow for forming circulation is received
Collecting system.When meeting " set on touch screen water pump operation start process time " and " liquid-level floater is upper in sink " simultaneously
When the two conditions, PLC feed pump run signal, water pump starting；When satisfaction " the water pump operation stop process set on touch screen
Any one condition in time " or " liquid-level floater is in bottom in sink ", water pump, that is, out of service.
Claims (9)
1. the overflow spray equipment of cleaning machine, which is characterized in that described device includes water system, spray system and overflow collection
System, the water of spray system derive from water system or overflow collection system, and the water of overflow collection system derives from water system
Or spray system；Water system includes pipe network (1) and water supplying pipe (18), and spray system includes spray tube (4) and sink A (2), pipe
Net (1) is connected to spray tube (4) by water supplying pipe (18)；Overflow collection system includes sink B (3), water storage tank (13) and connection
The overflow pipe (15) of the two, water storage tank (13) are connect with spray tube (4) and sink B (3) respectively by water pump (12), pipe network (1)
It is connected to sink B (3) by water supplying pipe (18).
2. the overflow spray equipment of cleaning machine according to claim 1, which is characterized in that pipe network (1) and spray tube (4) are even
Logical water supplying pipe (18) is divided into two-way in parallel, and two-way is by solenoid valve A (5) control switch；It is wherein equipped with hand-operated valve A on the way
(6), hand-operated valve B (10) and on-line heating device (9) are arranged in series in another way.
3. the overflow spray equipment of cleaning machine according to claim 1, which is characterized in that connection pipe network (1) and sink B
(3) hand-operated valve C (7) and suspended body flowmeter (8) are arranged in series on water supplying pipe (18).
4. the overflow spray equipment of cleaning machine according to claim 1, which is characterized in that be equipped with float in water storage tank (13)
Liquidometer (14).
5. the overflow spray equipment of cleaning machine according to claim 1, which is characterized in that connection water storage tank (13) and water pump
(12) be in series with solenoid valve B (11) on water supplying pipe (18), and solenoid valve B (11) punishment be two-way, wherein all the way with sink B
(3) bottom connection, another way are connected to spray tube (4), and two-way water supplying pipe is equipped with hand-operated valve on (18).
6. the overflow spray equipment of cleaning machine according to claim 1, which is characterized in that the spray tube (4) is wall thickness
Stainless steel tube, PPR pipe or the pvc pipe of 2.5mm or more, diameter 16mm.
7. the overflow spray equipment of cleaning machine according to claim 1 or 6, which is characterized in that on the spray tube (4)
Even distribution diameter is the hole of 1mm.
8. the overflow spray equipment of cleaning machine according to claim 1 or 6, which is characterized in that spray tube (4) both ends
Equipped between bracket (16), with water supplying pipe (18) use loose joint (17).
9. the overflow spray equipment of any cleaning machine according to claim 1~6, which is characterized in that described device is by PLC
System control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821146280.7U CN208712409U (en) | 2018-07-19 | 2018-07-19 | The overflow spray equipment of cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821146280.7U CN208712409U (en) | 2018-07-19 | 2018-07-19 | The overflow spray equipment of cleaning machine |
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| Publication Number | Publication Date |
|---|---|
| CN208712409U true CN208712409U (en) | 2019-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821146280.7U Active CN208712409U (en) | 2018-07-19 | 2018-07-19 | The overflow spray equipment of cleaning machine |
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| Country | Link |
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| CN (1) | CN208712409U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108772375A (en) * | 2018-07-19 | 2018-11-09 | 无锡隆基硅材料有限公司 | The overflow spray equipment of cleaning machine and its application |
-
2018
- 2018-07-19 CN CN201821146280.7U patent/CN208712409U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108772375A (en) * | 2018-07-19 | 2018-11-09 | 无锡隆基硅材料有限公司 | The overflow spray equipment of cleaning machine and its application |
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| GR01 | Patent grant | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20210926 Address after: 651200 No. 1 Jurassic street, Jinshan Town, Lufeng County, Chuxiong Yi Autonomous Prefecture, Yunnan Province Patentee after: Lufeng Longji silicon material Co.,Ltd. Address before: 214029 No. 102, Ximei Road, Wuxi high tech Zone, Wuxi City, Jiangsu Province Patentee before: WUXI LONGI SILICON MATERIALS Corp. |