CN220099260U

CN220099260U - Heavy hammer combination device for single crystal furnace

Info

Publication number: CN220099260U
Application number: CN202321452391.1U
Authority: CN
Inventors: 王艺澄; 严东
Original assignee: Yunnan Meike New Energy Development Co ltd; Baotou Meike Silicon Energy Co Ltd
Current assignee: Yunnan Meike New Energy Development Co ltd; Baotou Meike Silicon Energy Co Ltd
Priority date: 2023-06-08
Filing date: 2023-06-08
Publication date: 2023-11-28
Anticipated expiration: 2033-06-08

Abstract

The utility model provides a heavy hammer combination device for a single crystal furnace, which comprises a heavy hammer body and a heavy hammer disc sleeved on the heavy hammer body, wherein a blind hole with the same shape and size as the head of the heavy hammer body is arranged in the heavy hammer disc, the heavy hammer body is in surface contact with the blind hole in the heavy hammer disc, the center in the heavy hammer body is axially provided with a blind hole and a through hole, the center in the heavy hammer disc is axially provided with the through hole, a tungsten wire rope penetrates through the through hole, the tungsten wire rope comprises a tungsten wire rope end, and the tungsten wire rope end is in contact with the upper part of the blind hole in the heavy hammer body. The outer diameter of the heavy hammer disc is slightly smaller than the inner diameter of the auxiliary chamber of the single crystal furnace. The utility model sets the heavy hammer disc with the outer diameter slightly smaller than the inner diameter of the auxiliary chamber of the single crystal furnace, so that the whole heavy hammer device is subjected to radial constraint, thereby obviously reducing the influence of the crystal shaking phenomenon generated by external factors on the heavy hammer device and effectively improving the quality of the single crystal rod.

Description

Heavy hammer combination device for single crystal furnace

Technical Field

The utility model relates to the technical field of single crystal furnace manufacturing, in particular to a heavy hammer combination device for a single crystal furnace.

Background

In the process of producing monocrystalline silicon by a Czochralski method, the phenomenon of crystal shaking is generated due to the influence of airflow disturbance of a heated field, crystal rotation shaking, mechanical problems of a rotary mechanism of the monocrystalline furnace and external vibration, so that the monocrystalline silicon rod is broken in the processes of seeding, shouldering and the like, and the productivity of the monocrystalline silicon rod is influenced; the existing single crystal furnace is provided with a damping sleeve at the position where the top rotating mechanism is connected with the tungsten wire rope, which has a certain effect on reducing crystal shaking and arcing, but the crystal rotation is still required to be reduced by methods of reducing the crystal rotation, manually stabilizing the heavy hammer and the like in the actual production process, so that the quality and the productivity of the single crystal silicon rod are improved.

The utility model discloses a heavy hammer structure for a single crystal furnace, which is disclosed in the patent with publication number of CN115537910A and named as a heavy hammer structure for the single crystal furnace, and comprises a heavy hammer body, wherein the heavy hammer body comprises an upper connecting piece and a lower connecting piece which are connected through threads, the upper connecting piece is made of stainless steel, and the lower connecting piece is made of molybdenum. The weight structure adopts the components of a whole that can function independently form, and partly adopts stainless steel material, and partly adopts molybdenum material, and it is convenient to dismantle, and single part can change alone after impaired, and the structure is compared wholly to adopt molybdenum material to make the low price, and the easy lathe work of stainless steel material's last connecting piece. However, the heavy hammer with the structure cannot solve the crystal shaking phenomenon caused by the air flow disturbance of the thermal field and the like, and cannot meet the existing requirements.

The utility model patent with the bulletin number of CN103590098B named as a single crystal furnace heavy hammer, a single crystal furnace, a silicon single crystal Czochralski method and a silicon single crystal discloses a single crystal furnace heavy hammer, which comprises a heavy hammer body and a shielding sheet; wherein, the heavy hammer body is provided with a seed crystal connecting end; the shielding plate is fixedly arranged on the heavy hammer body near the seed crystal connecting end of the heavy hammer body and is driven by the heavy hammer body. The shielding sheet is annular and sleeved on the heavy hammer body, and the shielding sheet and the heavy hammer body are coaxially arranged. The patent also discloses a single crystal furnace, which comprises a furnace barrel and a heavy hammer which is arranged in the furnace barrel and is movable relative to the furnace barrel, wherein the heavy hammer is the heavy hammer of the single crystal furnace. The distance between the shielding piece of the heavy hammer of the single crystal furnace and the inner wall of the furnace barrel is more than or equal to 15mm. The heavy hammer can effectively slow down the heat dissipation speed of the surface of the silicon melt, so that the heat convection speed is slowed down, the conveying speed of the silicon melt to oxygen atoms in the quartz crucible is further slowed down, various defects of the head of the silicon single crystal caused by the oxygen atoms are finally reduced, and the photoelectric conversion efficiency of the head of the silicon single crystal is ensured. However, the heavy hammer with the structure still cannot solve the crystal shaking phenomenon caused by the air flow disturbance of the thermal field and the like, and cannot meet the existing requirements.

The utility model patent with the bulletin number of CN211947286U named as a heavy hammer for a photovoltaic single crystal furnace discloses a heavy hammer for the photovoltaic single crystal furnace, which is shown in figure 1 and comprises a hemispherical heavy hammer body, wherein the hemispherical heavy hammer body is arranged at the end part of a tungsten wire rope through a ball head connecting mechanism; the top end of the ball head connecting mechanism is connected with the tungsten wire rope, the ball head part at the bottom end is clamped in the weight body, and when the hemispherical weight body is hung, the ball head part at the bottom end of the ball head connecting mechanism is in surface contact fit with the hemispherical weight body. The ball head connecting mechanism comprises a cylinder and a ball head arranged at the end part of the cylinder, wherein a mounting groove is formed in the hemispherical heavy hammer body, the cylinder is in clearance fit with the mounting groove, and the ball head is in tight fit with the mounting groove. The weight of structure is connected with the hemispherical weight body and the tungsten wire rope through setting up bulb coupling mechanism to with bulb coupling mechanism's bottom card and in hemispherical weight body, when hemispherical weight body hung, bulb coupling mechanism's bottom bulb part has realized the face-to-face contact cooperation with hemispherical weight body, produces relative slip and finds the focus, realizes that weight and tungsten wire rope focus are coaxial, in long brilliant rotatory in-process, automatic the centering in real time, effectively reduced the offset of centre of gravity axis and rocked, effectively solved and shaked and draw brilliant skew problem because weight and tungsten wire rope point contact fit are bad. However, the heavy hammer with the structure still cannot solve the crystal shaking phenomenon generated by the reasons of airflow disturbance of a thermal field, external vibration and the like, and cannot meet the existing requirements.

Disclosure of Invention

In order to solve the problem that the heavy hammer device in the prior art cannot avoid the crystal shaking phenomenon, the quality of the produced single crystal rod is low.

The utility model provides a heavy hammer combination device for a single crystal furnace. The utility model is realized by the following technical scheme:

the heavy hammer is characterized in that a heavy hammer body is arranged, a heavy hammer disc sleeved on the heavy hammer body is arranged in the heavy hammer disc, blind holes with the same shape and size as those of the head of the heavy hammer body are formed in the heavy hammer disc, the heavy hammer body is in surface contact with the blind holes in the heavy hammer disc, the center of the interior of the heavy hammer body is axially provided with the blind holes and the through holes, the center of the interior of the heavy hammer disc is axially provided with the through holes, a tungsten wire rope penetrates through the through holes, a plurality of air holes are formed in the heavy hammer disc in the vertical direction, the tungsten wire rope comprises tungsten wire rope end parts, and the tungsten wire rope end parts are in contact with the hollowed top ends in the heavy hammer body. The outer diameter of the heavy hammer disc is smaller than the inner diameter of the auxiliary chamber of the single crystal furnace by 1mm. The center lines of the heavy hammer disc, the blind holes and the through holes in the heavy hammer disc, the heavy hammer body, the blind holes and the through holes in the heavy hammer body, the tungsten wire rope and the end parts of the tungsten wire rope are coaxial.

Furthermore, the end part of the tungsten wire rope and the upper part of the blind hole in the heavy hammer body are conical, the upper part of the cone is a small end, the lower part of the cone is a large end, and the end part of the tungsten wire rope is in surface contact fit with the surface of the hollowed-out top part in the heavy hammer body.

Further, the weight body is arranged to be two sections echelonment, and first ladder is located weight body upper portion, first ladder upper portion sets up to coniform, and coniform upper portion is the tip, and the lower part is the big end, and the second ladder is located weight body middle part, the second ladder external diameter is greater than first ladder external diameter, it is excessive to adopt the chamfer between first ladder and the second ladder, chamfer angle is unanimous with first ladder upper portion coniform angle.

Further, the upper cone angle of the weight body is preferably 90 °.

Furthermore, the heavy hammer body further comprises a mounting chuck which is positioned at the lower part of the heavy hammer body.

Furthermore, the upper part of the heavy hammer disc is in a cone shape, the upper part of the cone is a small end, and the lower part of the cone is a large end.

Further, the upper cone angle of the weight disc is preferably 150 °.

Further, the total cross-sectional area of the air holes accounts for 20% -30% of the cross-sectional area of the heavy hammer disc.

Further, the air holes are circumferentially arranged, and each row is six, and two rows are formed.

Further, the ratio of the outer diameter of the large circle of the weight body to the outer diameter of the weight disk is set to 1: and 3, the whole heavy hammer device is more stable.

According to the utility model, the heavy hammer disc with the outer diameter smaller than the inner diameter of the auxiliary chamber by 1mm is arranged, so that the whole heavy hammer device is subjected to radial constraint, the influence of the crystal shaking phenomenon generated by external factors on the heavy hammer device is obviously reduced, and the beneficial effect of improving the quality of the single crystal rod is achieved.

Advantages and features of the utility model will be illustrated and explained by the following non-limiting description of preferred embodiments, given by way of example only with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic diagram of the overall structure of the prior art.

Fig. 2 is a schematic diagram of the overall structure of the present utility model.

Fig. 3 is a cross-sectional view of fig. 2 A-A.

FIG. 4 is a schematic diagram of the heavy punch assembly of the present utility model in a main chamber.

FIG. 5 is a schematic drawing showing the weight combination device of the present utility model in the auxiliary chamber.

The figures indicate:

1. a weight disc; 11. air holes; 2. a weight body; 21. mounting a chuck; 3. tungsten wire rope; 31. an end of a tungsten wire rope; 4. a sub-chamber; the method comprises the steps of carrying out a first treatment on the surface of the 5. A valve bin; 6. a main chamber.

Detailed Description

The utility model is further described below with reference to the drawings and examples.

As shown in fig. 2 and 3, the utility model comprises a weight body 2, a weight disc 1 sleeved on the weight body 2, wherein the weight body 2 and the weight disc 1 are cylindrical integrally, through holes are formed in the circle center positions of the weight body 2 and the weight disc 1, blind holes are formed in the weight body 2, a tungsten wire rope 3 penetrates through the through holes and the blind holes and is movably connected with the weight body 2, blind holes with the same shape and size as the head of the weight body 2 are formed in the weight disc 1, the blind holes in the weight disc 1 are in surface-to-surface contact with the weight body 2, the tungsten wire rope 3 comprises a tungsten wire rope end 31, the tungsten wire rope end 31 is in contact with the upper part of the blind holes in the weight body 2, and the diameter of the blind holes in the weight body 2 is larger than the maximum outer diameter of the tungsten wire rope end 31. The tungsten wire rope tip 31 is preferably conical, the upper portion of tungsten wire rope tip 31 is the circular cone tip, and the lower part is the circular cone tip, the inside blind hole upper portion of weight body 2 is conical, the inside blind hole upper portion circular cone tip of weight body 2 is upwards, and the tip is down, the circular cone angle of tungsten wire rope tip 31 with the circular cone angle of the inside blind hole upper portion of weight body 2 is unanimous, is convenient for increase area of contact makes whole device more stable. When the weight body 2 is hung, the end 31 of the tungsten wire rope is in surface contact fit with the top end face of the blind hole in the weight body 2. The outer diameter of the heavy hammer disc 2 is slightly smaller than the inner diameter of the auxiliary chamber 4 of the single crystal furnace, and the value of the outer diameter of the heavy hammer disc 2 smaller than the inner diameter of the auxiliary chamber 4 is preferably 1mm. The center lines of the heavy hammer disc 1, the blind hole and the through hole in the heavy hammer disc 1, the heavy hammer body 2, the blind hole and the through hole in the heavy hammer body 2, the tungsten wire rope 3 and the end 31 of the tungsten wire rope are coaxial. In order to prevent argon flow in the whole thermal field environment, a plurality of air holes 11 are required to be formed in the weight disc 1 along the vertical direction. Preferably, the total cross-sectional area of the air holes 11 is 20% -30% of the cross-sectional area of the weight disc 1, and preferably, the air holes 11 are circumferentially arranged, and each row is six, and the total number of the air holes is two.

Preferably, the weight body 2 is configured as two steps, the first step is located on the upper portion of the weight body 2, the upper portion of the first step is configured as a cone, the upper portion of the cone is a small end, the lower portion of the cone is a large end, the first step has a certain guiding effect, the second step is configured to increase the contact area between the weight body 2 and the weight disc 1, so that the weight is more stable, the second step is located in the middle of the weight body 2, the outer diameter of the second step is greater than that of the first step, the first step and the second step are excessively chamfered, and the chamfer angle is consistent with the taper angle of the head of the first step. Through the twice direction for tungsten wire rope is more steady in the in-process of carrying and pulling, thereby promotes the crystal bar quality. The upper cone angle of the weight body 2 is preferably 90 °.

The weight body 2 further comprises a mounting chuck 21, and the mounting chuck 21 is positioned at the lower part of the weight body 2 and is used for mounting a crystal seed so as to enable the crystal rod to grow.

Preferably, the head of the weight disc 1 is provided with a cone shape, the upper part of the cone is a small end, and the lower part of the cone is a large end, so that the weight disc 1 plays a guiding role and can be lifted along the direction of the auxiliary chamber 4. The angle of the head cone of the weight disc 1 is preferably 150 °.

Preferably, the ratio of the outer diameter of the large circle of the weight body 2 to the outer diameter of the weight disc 1 is 1:3.

fig. 4 is a schematic diagram of the crystallization of the heavy punch body 2 in the main chamber of the single crystal furnace at the initial stage of the production process according to the present utility model. In the initial stage, a heavy hammer combination device is assembled outside the single crystal furnace, the heavy hammer body 2 is arranged downwards, the tungsten wire rope 3 is slowly moved downwards, and when the heavy hammer disc 1 is contacted with the bottom of the valve bin 5, the heavy hammer body 2 is separated from the heavy hammer disc, and the heavy hammer body 2 continuously enters the main chamber downwards. After the crystal bar is initially formed, slowly lifting the tungsten wire rope 3 so that the crystal bar grows in the vertical direction. When the upper conical surface of the heavy hammer body 2 contacts the bottom surface of the heavy hammer disc 1, the heavy hammer body 2 slowly slides into the blind hole in the heavy hammer disc 1 along the upper conical surface under the lifting action of the tungsten wire rope 3 until the heavy hammer body and the tungsten wire rope are completely overlapped. The tungsten wire rope 3 is continuously pulled, so that the heavy hammer disc 1 and the heavy hammer body 2 integrally move upwards. After the conical surface at the upper part of the heavy hammer disc 1 is contacted with the bottom of the auxiliary chamber, the tungsten wire rope 3 is continuously pulled, and the heavy hammer combination device slowly slides into the auxiliary chamber 4 along the conical surface due to the guiding function of the conical surface. Under the radial constraint action of the inner wall of the auxiliary chamber 4, the whole heavy hammer combination device translates upwards until the heavy hammer combination device moves out of the single crystal furnace to detach the single crystal rod. As shown in FIG. 5, the whole weight combination device is positioned in the auxiliary chamber 4, and in the upward pulling process, the radial displacement of the weight disc 1 is obviously reduced due to the radial constraint action of the inner wall of the auxiliary chamber 4 on the weight disc 1, so that the influence of external vibration, airflow disturbance of a thermal field in the single crystal furnace and mechanical vibration of the single crystal furnace on the weight is reduced. In addition to the above embodiments, other embodiments of the present utility model are possible, and all technical solutions formed by equivalent substitution or equivalent transformation are within the scope of the present utility model.

Claims

1. The utility model provides a weight composite set for single crystal growing furnace, includes weight body (2), its characterized in that still includes the cover and establishes weight disc (1) on weight body (2), weight disc (1) inside set up with the blind hole of weight body (2) head the same shape and size, weight body (2) and the inside blind hole face contact of weight disc (1), weight body (2) inside central axial sets up blind hole and runs through the through-hole, weight disc (1) inside central axial sets up runs through the through-hole, offer a plurality of gas pockets (11) on weight disc (1) along vertical direction, tungsten wire rope (3) pass through the through-hole, tungsten wire rope (3) contain tungsten wire rope tip (31), tungsten wire rope tip (31) and weight body (2) inside blind hole upper portion contact, disc (1) external diameter is less than single crystal growing furnace auxiliary chamber (4) internal diameter 1mm, weight (1) inside blind hole and through-hole, weight body (2), tungsten wire rope (3) inside blind hole and through-hole and wire rope (31) coaxial center line (31).

2. The weight assembly for a single crystal furnace of claim 1, wherein: the tungsten wire rope end (31) and the hollow top inside the heavy hammer body (2) are conical, the upper part of the cone is a small end, the lower part of the cone is a large end, and the tungsten wire rope end (31) is in surface contact fit with the upper part of the blind hole inside the heavy hammer body (2).

3. The weight assembly for a single crystal furnace of claim 1, wherein: the heavy hammer is characterized in that the heavy hammer body (2) is in a two-section ladder shape, a first ladder is positioned on the upper portion of the heavy hammer body (2), the upper portion of the first ladder is conical, the upper portion of the cone is a small end, the lower portion of the cone is a large end, a second ladder is positioned in the middle of the heavy hammer body (2), the outer diameter of the second ladder is larger than that of the first ladder, chamfering is adopted between the first ladder and the second ladder excessively, and the chamfering angle is consistent with the conical angle on the upper portion of the first ladder.

4. The weight assembly for a single crystal furnace of claim 3, wherein: the upper conical angle of the heavy hammer body (2) is 90 degrees.

5. The weight assembly for a single crystal furnace of claim 1, wherein: the heavy hammer body (2) further comprises a mounting chuck (21), and the mounting chuck (21) is positioned at the lower part of the heavy hammer body (2).

6. The weight assembly for a single crystal furnace of claim 1, wherein: the upper part of the heavy hammer disc (1) is cone-shaped, the upper part of the cone is a small end, and the lower part of the cone is a large end.

7. The weight assembly for a single crystal furnace of claim 6, wherein: the upper cone angle of the heavy hammer disc (1) is 150 degrees.

8. The weight assembly for a single crystal furnace of claim 1, wherein: the total cross-sectional area of the air holes (11) accounts for 20% -30% of the cross-sectional area of the heavy hammer disc (1).

9. The weight assembly for a single crystal furnace of claim 8, wherein: the air holes (11) are circumferentially arranged, and each row is six and two rows are formed.

10. The weight assembly for a single crystal furnace according to any one of claims 1 to 9, wherein: the ratio of the outer diameter of the large circle of the heavy hammer body (2) to the outer diameter of the heavy hammer disc (1) is 1:3.