CN214142608U - Suspension assembly for doping czochralski monocrystalline silicon - Google Patents
Suspension assembly for doping czochralski monocrystalline silicon Download PDFInfo
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- CN214142608U CN214142608U CN202023040912.1U CN202023040912U CN214142608U CN 214142608 U CN214142608 U CN 214142608U CN 202023040912 U CN202023040912 U CN 202023040912U CN 214142608 U CN214142608 U CN 214142608U
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Abstract
The utility model discloses a suspension component for doping czochralski silicon, which can suspend a dopant connected with the suspension component on an upper shaft heavy hammer, the suspension component comprises a U-shaped frame, a cross beam and a hanging part, the cross beam vertically penetrates through two parallel side walls of the opening end of the U-shaped frame, the hanging part is connected with the bottom wall of the U-shaped frame, the hanging part comprises a connecting part, intermediate part and supporting part, the intermediate part is the semicircle annulus, the internal diameter of intermediate part is not less than the maximum diameter of back taper head, the middle part of supporting part is equipped with the back taper groove along its axial, intermediate part and back taper groove communicate with each other, the supporting part is not sheltered from half the middle part and is equipped with the bar opening along its axial, the bracing piece passes the bar opening and can take the back taper head to the intermediate part in when moving to the back taper groove, the back taper head of arranging in the intermediate part can block in the back taper groove at the whereabouts in-process. The hanging component can be used for hanging and taking the doping device conveniently, and is simple to operate, safe and efficient.
Description
Technical Field
The utility model relates to a vertical pulling monocrystalline silicon preparation is with auxiliary fixtures field, specific vertical pulling monocrystalline silicon doping is with hanging subassembly that says so.
Background
The Czochralski (Czochralski) method is the most widely used production method in the manufacture of semiconductor materials at present, and comprises the steps of heating polycrystalline silicon by a heater system to melt the polycrystalline silicon, immersing a seed crystal with a fixed crystal orientation into a melt, and crystallizing and growing the melt by taking the seed crystal as a crystallization nucleus by gradually reducing the temperature of the melt, and controlling the rotation speed, the pulling speed and the temperature of the seed crystal and the melt to obtain the monocrystalline silicon crystal meeting the requirements.
The growth of heavily doped single crystals requires the addition of a doping process to the growth process. The specific operation is as follows: during charging, a dopant containing the dopant is hung on a heavy hammer on an upper shaft of a single crystal furnace in advance, the temperature is stabilized to the seeding temperature after the polycrystalline material is melted, the upper shaft is rapidly lowered to enable the dopant to be in contact with the liquid level, and the dopant is gasified and absorbed by the melt under the heat radiation of the silicon melt to achieve the purpose of doping.
The current practice for suspending the dopant on the upper shaft is: a suspension component is added between the quartz doping device and the upper shaft heavy hammer, and the head of the doping device is connected with the suspension component in a pin mode. And (4) hanging the suspension assembly on the upper shaft during charging, and removing the suspension assembly after the doping is finished and the doping device is taken down.
To avoid contamination, the doper head and suspension assembly are typically made of molybdenum alloy. The doping is carried out in a temperature environment of 1400 ℃, and the suspension component and the doping device are difficult to disassemble after the doping is finished due to the thermal expansion of the molybdenum alloy, so that the operation difficulty is increased and great safety risk exists. If knock-down occurs, damage to the dopant can occur, affecting the service life.
SUMMERY OF THE UTILITY MODEL
In order to solve the not enough among the prior art, the utility model provides a czochralski silicon mixes with suspension assembly, suspension assembly is used for between doper and the upper shaft weight, can make the doper hang through this suspension assembly and get the convenience, easy operation, and is safe high-efficient.
In order to achieve the above object, the utility model discloses a concrete scheme does:
a suspension assembly for doping czochralski monocrystalline silicon can suspend a dopant connected with the suspension assembly on an upper shaft heavy hammer through the suspension assembly, wherein the dopant comprises an inverted cone-shaped head, a support rod and a bearing piece for containing a dopant from top to bottom, and the suspension assembly comprises a U-shaped frame, a cross beam capable of being connected with the upper shaft heavy hammer and a hanging piece for clamping the inverted cone-shaped head;
the cross beam vertically penetrates through the two parallel side walls of the opening end of the U-shaped frame;
hang and get and be connected bottom the U-shaped frame diapire, hang and get from last to including connecting portion, intermediate part and supporting part down in proper order, the intermediate part is the semicircle ring form, and the internal diameter of intermediate part is not less than the maximum diameter of back taper head, and the middle part of supporting part is equipped with the big end down little back taper groove in the upper end that is used for supporting the back taper head along its axial, the concentric intercommunication in intermediate part and back taper groove, the supporting part are not sheltered from half the middle part and are equipped with the bar opening along its axial, and the bracing piece of doping ware can be taken the back taper head to the intermediate part in when passing the bar opening and moving to the back taper groove, and the back taper head of arranging in the intermediate part can block in the back taper groove at the whereabouts in-process.
Furthermore, the free end of the cross beam with the handle at one end is provided with a rotary buckle which can prevent the suspension assembly from falling off.
Further, a gap exists between the inner wall of the inverted cone-shaped groove and the outer wall of the inverted cone-shaped head.
Further, the diameter of the large-diameter end of the inverted conical groove is not larger than the inner diameter of the middle part.
Further, the suspension assembly is machined from a molybdenum material by cutting and welding.
Further, the whole hanging part is cylindrical.
Has the advantages that:
1. the utility model discloses well hang the subassembly and include the U-shaped frame, crossbeam and piece of hanging, it includes connecting portion to hang the piece of getting, intermediate part and supporting part, the concentric intercommunication of back taper groove at intermediate part and supporting part middle part, the bracing piece of dope ware passes bar opening on the supporting part and can take the back taper head to the intermediate part in moving to the back taper groove in, the back taper head of arranging in the intermediate part can block in the back taper groove at the whereabouts in-process, the back taper head forms stable connection with hanging the subassembly under the action of gravity, after doping, after pulling up the dope ware translation can take out the dope ware smoothly from hanging the subassembly, the dope ware is hung and is got conveniently, and the operation is simple, safety and high efficiency, the effectual not enough that have solved current connection method and exist.
2. The utility model discloses well back taper head uses with the cooperation of back taper groove, has the clearance between back taper inslot wall and the back taper head outer wall, effectively solves the problem that is difficult to the dismantlement after the thermal expansion.
The present invention will be described in further detail with reference to the drawings and specific examples.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a suspension assembly of the present invention.
Fig. 2 is a schematic view of the suspension assembly in connection with the doper.
Fig. 3 is a schematic diagram of a structure of a dopant.
The device comprises a drawing mark 1, a cross beam 2, a rotary buckle 3, a U-shaped frame 4, a hanging part 401, a connecting part 402, an intermediate part 403, a supporting part 5, a dopant 501, an inverted cone head 502, a supporting rod 503 and a bearing part.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following specific embodiments, and it should be understood that the described embodiments are only some embodiments, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The utility model discloses a to the subassembly that hangs between quartz doping ware and the upper shaft weight design, solve the potential safety hazard that exists when present doping ware is hung and is got and possible easy operation, safe high-efficient.
A kind of vertical pulling monocrystalline silicon mixes and uses the suspension assembly, the suspension assembly is used between weight of dopant 4 and upper shaft weight, can hang the dopant 5 connected with it on the weight of upper shaft through the suspension assembly, please refer to fig. 3, the said dopant 5 includes the head 501 of the back taper, support bar 502 and bearing part 503 used for holding dopant from top to bottom, please refer to fig. 1 and fig. 2, the said suspension assembly includes the U-shaped shelf 3, can be connected with the cross beam 1 of the weight of upper shaft and used for clamping the hanging part 4 of the head 501 of the back taper; the beam 1 vertically penetrates through two parallel side walls of the opening end of the U-shaped frame 3; the hanging part 4 is connected with the bottom of the bottom wall of the U-shaped frame 3, the hanging part 4 sequentially comprises a connecting part 401, an intermediate part 402 and a supporting part 403 from top to bottom, the intermediate part 402 is in a semicircular ring shape, the inner diameter of the intermediate part 402 is not smaller than the maximum diameter of the inverted cone head part 501, the middle part of the supporting part 403 is provided with an inverted cone groove for supporting the inverted cone head part 501 with a large upper end and a small lower end along the axial direction, the intermediate part 402 and the inverted cone groove are concentrically communicated, the middle part of the supporting part 403 which is not shielded by a half is provided with a strip-shaped opening along the axial direction, when the hanging component is used, a supporting rod 502 of the doping device 5 passes through the strip-shaped opening to move into the inverted cone groove and simultaneously can bring the inverted cone head part 501 into the intermediate part 402, the inverted cone head part 501 arranged in the intermediate part 402 can be clamped in the inverted cone groove in the falling process, after doping, the dopant 5 is pulled upwards and then translated, and the dopant 5 can be taken out smoothly.
Referring to fig. 1 and 2, the free end of the beam 1 with a handle at one end is provided with a rotary buckle 2 capable of preventing the suspension assembly from falling off from the seed chuck.
In detail, a gap exists between the inner wall of the inverted cone-shaped groove and the outer wall of the inverted cone-shaped head 501, and the problem that the doping device 5 is difficult to disassemble after being heated and expanded is effectively solved.
Specifically, the large diameter end diameter of the inverted tapered slot is no greater than the inner diameter of the intermediate portion 402.
The suspension assembly is formed by machining and welding a molybdenum material.
Wherein, the external shape of the hanging part 4 is not limited, and can be rectangular or cylindrical, in detail, please refer to fig. 1 and 2, the whole hanging part 4 of the utility model is a cylinder.
The utility model provides a hang subassembly simple structure, convenient operation, safe and reliable, the effectual problem of hanging between dopant ware and the hang subassembly and get the difficulty among the prior art of having solved.
The above is to the utility model provides a czochralski silicon is doped with suspension assembly introduces in detail, and it is right to have used specific individual example herein the principle and the concrete implementation of the utility model to explain, and above-mentioned embodiment only is used for helping understanding the utility model's method and core thought. It should be noted that any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are within the scope of the present invention for those skilled in the art.
Claims (6)
1. The utility model provides a czochralski silicon is suspension assembly for doping, can hang on upper shaft weight with its connected dope ware (5) through suspension assembly, dope ware (5) from last to including back taper head (501), bracing piece (502) and be used for splendid attire dopant carrier (503) down, its characterized in that: the suspension assembly comprises a U-shaped frame (3), a cross beam (1) capable of being connected with an upper shaft heavy hammer and a hanging part (4) for clamping and connecting the inverted cone-shaped head (501);
the cross beam (1) vertically penetrates through two parallel side walls of the opening end of the U-shaped frame (3);
the hanging part (4) is connected with the bottom of the bottom wall of the U-shaped frame (3), the hanging part (4) sequentially comprises a connecting part (401), a middle part (402) and a supporting part (403) from top to bottom, the middle part (402) is in a semicircular ring shape, the inner diameter of the middle part (402) is not less than the maximum diameter of the inverted cone-shaped head part (501), the middle part of the supporting part (403) is provided with an inverted cone-shaped groove which is used for supporting the large upper end and the small lower end of the inverted cone-shaped head part (501) along the axial direction, the middle part (402) and the inverted cone-shaped groove are communicated concentrically, the middle part of the supporting part (403) which is not shielded by a half is provided with a strip-shaped opening along the axial direction, the supporting rod (502) of the doping device (5) penetrates through the strip-shaped opening to move to the inverted cone-shaped groove and can bring the inverted cone-shaped head (501) to the middle part (402), and the inverted cone-shaped head (501) arranged in the middle part (402) can be clamped in the inverted cone-shaped groove in the falling process.
2. The suspension assembly of claim 1 wherein: the free end of the beam (1) with a handle at one end is provided with a rotary buckle (2) which can prevent the suspension assembly from falling off.
3. The suspension assembly of claim 1 wherein: and a gap is reserved between the inner wall of the inverted cone-shaped groove and the outer wall of the inverted cone-shaped head (501).
4. The suspension assembly of claim 1 wherein: the large diameter end of the inverted tapered slot has a diameter no greater than the inner diameter of the intermediate portion (402).
5. The suspension assembly of claim 1 wherein: the suspension assembly is formed by machining and welding a molybdenum material.
6. The suspension assembly of claim 1 wherein: the hanging part (4) is integrally cylindrical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023040912.1U CN214142608U (en) | 2020-12-17 | 2020-12-17 | Suspension assembly for doping czochralski monocrystalline silicon |
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| CN202023040912.1U CN214142608U (en) | 2020-12-17 | 2020-12-17 | Suspension assembly for doping czochralski monocrystalline silicon |
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| CN214142608U true CN214142608U (en) | 2021-09-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115406801A (en) * | 2022-08-30 | 2022-11-29 | 烟台卓明仪器设备有限公司 | Absolute density measuring device and using method thereof |
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2020
- 2020-12-17 CN CN202023040912.1U patent/CN214142608U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115406801A (en) * | 2022-08-30 | 2022-11-29 | 烟台卓明仪器设备有限公司 | Absolute density measuring device and using method thereof |
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