CN207072979U - A kind of monocrystalline silicon guide shell - Google Patents
A kind of monocrystalline silicon guide shell Download PDFInfo
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- CN207072979U CN207072979U CN201720917473.7U CN201720917473U CN207072979U CN 207072979 U CN207072979 U CN 207072979U CN 201720917473 U CN201720917473 U CN 201720917473U CN 207072979 U CN207072979 U CN 207072979U
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- Prior art keywords
- guide shell
- monocrystalline silicon
- molybdenum
- external toothing
- inner cylinder
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Abstract
The utility model provides a kind of monocrystalline silicon guide shell, including molybdenum inner cylinder, graphite outer barrel and drive device, and molybdenum inner cylinder is up big and down small thin wall hollow cone cylinder；Graphite outer barrel is coaxially set in outside molybdenum inner cylinder, is hollow and thin-walled rotary body；Drive device, including external toothing, little gear and bearing；External toothing is fixed and is set in graphite outer barrel upper end；Little gear is driven by motor, is arranged on external toothing side, and setting is engaged with external toothing；Bearing is fixedly connected with external toothing and graphite outer barrel upper end.The utility model has the advantage of using molybdenum guide shell, reduce the pollution to silicon single crystal rod during monocrystalline silicon growing；Existing graphite material guide shell is changed insufficient in toughness the shortcomings that, reduce the risk of thermal field damage and contamination of raw material because caused by guide shell ruptures, come off, molybdenum guide shell can be rotated by drive device, making up molybdenum guide shell, caused slight temperature is poor everywhere, avoids monocrystalline silicon in the uneven phenomenon of each position quality of same diameter.
Description
Technical field
It the utility model is related to monocrystalline silicon manufacturing technology field, more particularly to a kind of monocrystalline silicon guide shell.
Background technology
The fast development of photovoltaic industry, to the quality requirement more and more higher of monocrystalline silicon, enterprise needs constantly to enter
Row technological innovation, go to improve monocrystalline quality and yield, the warp of maximum could be brought to enterprise by reducing the production cost of crystal-pulling
Ji income.Vertical pulling silicon single crystal growing furnace is the capital equipment for preparing silicon single crystal material, and its internal graphite field ensure that silicon
The stable growth of monocrystalline, guide shell is the part for forming graphite field, is served during silicon monocrystal growth extremely important
Effect.Argon gas is from top to bottom imported inside thermal field by guide shell, can effectively take away the SiO of silicon superjacent,
And silicon single crystal rod is cooled, increase its longitudinal temperature gradient, make monocrystalline fast-growth.
In existing production, led in graphite guide shell and use graphite material, the graphite material during monocrystalline silicon growing
Pollution of the impurity to silicon single crystal rod in material, and influence product quality；The shortcomings that insufficient in inducement toughness in graphite guide shell rupture,
The risk of thermal field damage and contamination of raw material caused by coming off；It is can not being released in crystal pulling process heat for thermal conductivity to be led in graphite
Put, and influence isometrical pulling rate, cost is declined hindered.
Because guide shell can not possibly be accomplished definitely smooth, in production, the thermal field of its various places inside can also produce permanent trickle
Difference, equal quality can not be reached in each orientation of monocrystalline silicon for causing to produce.
Therefore, how for present in above-mentioned prior art the shortcomings that, carries out research and development improvement, is actually exerted needed for relevant industry
In view of this target of power research and development, the utility model designer, are the idea of think of and creation, set then with experience for many years
Meter, through inquiring into many ways and studying sampling test, and repeatedly amendment improvement, it is to release the utility model.
Utility model content
(1) technical problems to be solved
In view of above-mentioned technical problem, the utility model provides a kind of inner draft tube that increases to external radiation and reflection heat
Monocrystalline silicon guide shell.
(2) technical scheme
The utility model provides a kind of monocrystalline silicon guide shell, including：
Molybdenum inner cylinder, it is up big and down small thin wall hollow cone cylinder；
Graphite outer barrel, coaxially it is set in outside molybdenum inner cylinder, is hollow and thin-walled rotary body；
Drive device, including：
External toothing, fixation are set in graphite outer barrel upper end；
Little gear, driven by motor, be arranged on external toothing side, and setting is engaged with external toothing；
Bearing, it is fixedly connected with external toothing and graphite outer barrel upper end.
In some embodiments of the utility model, a circle installing plate is also equipped with the bearing, on the installing plate
Also there is uniform ring to be provided with some mounting holes.
In some embodiments of the utility model, there is inner liner on the molybdenum inner cylinder inwall.
In some embodiments of the utility model, the inner liner is tantalum layer.
In some embodiments of the utility model, the inner liner includes：
Strip lining, is vertically arranged, and has several, and is looped around molybdenum inner cylinder upper inside wall evenly and at intervals；
Ring-type lining, covering molybdenum inner cylinder bottom one are enclosed.
In some embodiments of the utility model, the strip lining is to become narrow gradually from bottom to top.
In some embodiments of the utility model, there is a ring cavity, institute between the molybdenum inner cylinder and graphite outer barrel
Stating in ring cavity has insulation material.
In some embodiments of the utility model, the insulation material is graphite soft felt.
In some embodiments of the utility model, the external toothing is integrally formed in molybdenum outer ring upper end.
In some embodiments of the utility model, the bearing is arranged on below external toothing.
(3) beneficial effect
It can be seen from the above technical proposal that the utility model at least has the advantages that one of them：
(1) molybdenum guide shell is used, by the replacing of machining based conception and material to inner draft tube, in monocrystalline silicon growing process
Pollution of the middle reduction to silicon single crystal rod；Existing graphite material guide shell is changed insufficient in toughness the shortcomings that, is reduced because of water conservancy diversion
Cylinder rupture, come off caused by thermal field damage and contamination of raw material risk；
(2) molybdenum materials matter inner draft tube is changed to, product service life can be lifted；And it can effectively reduce table in guide shell
The temperature in face, because concavo-convex molybdenum guide shell has the function of reflection heat, increase inner draft tube adds to external radiation and reflection heat
Fast crystal bar latent heat release, improves isometrical pulling rate, while reduces heat absorption, reduces graphite external flow guiding cylinder temperature, increase crystalline substance
Body surface surface radiation radiates, and improves pulling rate, reduces power consumption, improves efficiency, cost-effective；
(3) molybdenum guide shell can be rotated by drive device, and making up molybdenum guide shell, caused slight temperature is poor everywhere,
Monocrystalline silicon is avoided in the uneven phenomenon of each position quality of same diameter；
(4) surface of molybdenum inner cylinder is more smooth, plates inner liner in this technology, forms minute surface, have very strong light and energy
The reflection function of amount, using metal tantalum as coated metal, the physical property of itself determine its have stronger bending resistance and
The capacity of heat transmission；The molybdenum inner cylinder of plated tantalum not only can reflected energy, moreover it is possible to resists high temperature；
(5) between molybdenum inner cylinder and outer barrel using graphite soft felt isolate, make molybdenum inner cylinder be unlikely to be deformed at high temperature and
High temperature at left and right sides of graphite soft felt is separated.
Brief description of the drawings
Fig. 1 is the sectional view of the utility model embodiment.
Fig. 2 is the top view of the utility model embodiment.
【The utility model main element symbol description】
1st, graphite outer barrel；2nd, molybdenum inner cylinder；3rd, drive device；
31st, external toothing；32nd, little gear；33rd, bearing；
4th, installing plate；41st, mounting hole；5th, graphite soft felt；
6th, inner liner；61st, strip lining；62nd, ring-type lining.
Embodiment
The utility model provides a kind of monocrystalline silicon guide shell.The utility model by the machining based conception to inner draft tube and
The replacing of material, the pollution to silicon single crystal rod is reduced during monocrystalline silicon growing；Existing graphite material guide shell is changed to exist
The shortcomings that insufficient in toughness, reduce the risk of thermal field damage and contamination of raw material because caused by guide shell ruptures, come off.
In an exemplary embodiment of the present utility model, there is provided a kind of monocrystalline silicon guide shell.Institute as shown in Figure 1, Figure 2
Showing, the utility model includes molybdenum inner cylinder 2, graphite outer barrel 1 and drive device, and the guide shell is rotatable under drive device driving,
Reach the purpose of temperature equalization in cylinder.
Each part of the present embodiment is described in detail individually below.
Molybdenum inner cylinder 2, it is up big and down small thin wall hollow cone cylinder；
Graphite outer barrel 1, coaxially it is set in outside molybdenum inner cylinder 2, is hollow and thin-walled rotary body；
Drive device, including：
External toothing 31, fixation are set in the upper end of graphite outer barrel 1；
Little gear 32, is driven by motor, is arranged on the side of external toothing 31, and engage setting with external toothing 31；
Bearing 33, it is fixedly connected with external toothing 31 and the upper end of graphite outer barrel 1.
A circle installing plate 4 is also equipped with bearing 33, also there is uniform ring to be provided with some mounting holes 41 on installing plate 4.
Guide shell is arranged on single crystal growing furnace by the mounting hole 41 on installing plate 4, and graphite outer barrel 1, molybdenum inner cylinder 2 are fixed as one
Body, under the driving of drive device, motor powered little gear 32, little gear 32 drives external toothing 31, and external toothing 31 drives and led again
Flow cartridge is overall, can produce integral-rotation, ensure the uniform of temperature so that the uniform quality of the same radial direction of monocrystalline silicon everywhere.
There is inner liner on molybdenum inner cylinder inwall, plate inner liner, form minute surface, the reflection work(with very strong light and energy
Can, using metal tantalum as coated metal, the physical property of itself determines that it has stronger bending resistance and the capacity of heat transmission；
The molybdenum inner cylinder of plated tantalum not only can reflected energy, moreover it is possible to resists high temperature, so that during equipment is run, will not ftracture, no
It can come off and fall into crucible or thermal field, growth apparatus or environment are destroyed so as to avoid.
Inner liner includes strip lining 61 and ring-type lining 62；Strip lining 61 is vertically arranged, and is become narrow gradually from bottom to top,
With several, and the upper inside wall of molybdenum inner cylinder 2 is looped around evenly and at intervals；Ring-type lining 62, the bottom one of covering molybdenum inner cylinder 2 are enclosed.
With the rotation of guide shell, and in the presence of two linings, the thermal field in guide shell forms the state gradually weakened from bottom to top
Gesture, meet monocrystalline silicon and progressively stretch until the thermal field during coming out of the stove is slowly varying.
There is a ring cavity between molybdenum inner cylinder 2 and graphite outer barrel 1, there is insulation material, insulation material in ring cavity
For graphite soft felt 5, graphite soft felt 5 is formed to molybdenum inner cylinder 2 and supported, and makes it be unlikely to be deformed at high temperature and by graphite soft felt
The high temperature of 5 left and right sides separates.
External toothing 31 is integrally formed in the upper end of graphite outer barrel 1, facilitates processing and installation.
Bearing 33 is arranged on the lower section of external toothing 31, is set in the upper port of graphite outer barrel 1, installation that will not be to remaining equipment and
Operation produces interference.
Under existence conditions, the current isometrical average pull rate 0.82mm/min of 24 inch thermal field graphite inner draft tube, graphite
Inner draft tube upgrades to molybdenum guide shell of the present utility model, and isometrical average pull rate is promoted to 1.1mm/min from 0.85mm/min.
Single stove total run time reduces 10h on the basis of molybdenum guide shell, then the raising of isometrical pulling rate, so as to which monocrystalline production capacity also obtains
To raising, decline cost.
Shorten silica crucible run time while by improving pulling rate, so as to play the maximum operation of silica crucible
Time draws more rods, and improving production capacity reduces cost.
So far, the present embodiment is described in detail combined accompanying drawing.According to above description, those skilled in the art
There should be clear understanding to the utility model.
It should be noted that in accompanying drawing or specification text, the implementation that does not illustrate or describe is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously
It is not limited only to various concrete structures, shape or the mode mentioned in embodiment.
It should also be noted that, the demonstration of the parameter comprising particular value can be provided herein, but these parameters are without definite etc.
In corresponding value, but analog value can be similar in acceptable error margin or design constraint.The side mentioned in embodiment
To term, such as " on ", " under ", "front", "rear", "left", "right" etc., only it is the direction of refer to the attached drawing, is not used for limiting this
The protection domain of utility model.In addition, unless specifically described or the step of must sequentially occur, the order of above-mentioned steps is simultaneously unlimited
Be formed on it is listed above, and can according to it is required design and change or rearrange.And above-described embodiment can be based on design and reliable
The consideration of degree, the collocation that is mixed with each other use using or with other embodiment mix and match, i.e., the technical characteristic in different embodiments
More embodiments can be freely formed.
Particular embodiments described above, the purpose of this utility model, technical scheme and beneficial effect are carried out to enter one
Step describes in detail, should be understood that and the foregoing is only specific embodiment of the utility model, is not limited to this
Utility model, it is all within the spirit and principles of the utility model, any modification, equivalent substitution and improvements done etc., it all should wrap
It is contained within the scope of protection of the utility model.
Claims (10)
- A kind of 1. monocrystalline silicon guide shell, it is characterised in that including：Molybdenum inner cylinder, it is up big and down small thin wall hollow cone cylinder；Graphite outer barrel, coaxially it is set in outside molybdenum inner cylinder, is hollow and thin-walled rotary body；Drive device, including：External toothing, fixation are set in graphite outer barrel upper end；Little gear, driven by motor, be arranged on external toothing side, and setting is engaged with external toothing；Bearing, it is fixedly connected with external toothing and graphite outer barrel upper end.
- 2. monocrystalline silicon guide shell according to claim 1, it is characterised in that circle installation is also equipped with the bearing Plate, also there is uniform ring to be provided with some mounting holes on the installing plate.
- 3. monocrystalline silicon guide shell according to claim 1, it is characterised in that there is inner liner on the molybdenum inner cylinder inwall.
- 4. monocrystalline silicon guide shell according to claim 3, it is characterised in that the inner liner is tantalum layer.
- 5. monocrystalline silicon guide shell according to claim 3, it is characterised in that the inner liner includes：Strip lining, is vertically arranged, and has several, and is looped around molybdenum inner cylinder upper inside wall evenly and at intervals；Ring-type lining, covering molybdenum inner cylinder bottom one are enclosed.
- 6. monocrystalline silicon guide shell according to claim 5, it is characterised in that the strip lining is gradually change from bottom to top It is narrow.
- 7. monocrystalline silicon guide shell according to claim 1, it is characterised in that have between the molybdenum inner cylinder and graphite outer barrel One ring cavity, the ring cavity is interior to have insulation material.
- 8. monocrystalline silicon guide shell according to claim 7, it is characterised in that the insulation material is graphite soft felt.
- 9. monocrystalline silicon guide shell according to claim 1, it is characterised in that the external toothing is integrally formed on molybdenum outer ring End.
- 10. monocrystalline silicon guide shell according to claim 1, it is characterised in that the bearing is arranged on below external toothing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720917473.7U CN207072979U (en) | 2017-07-26 | 2017-07-26 | A kind of monocrystalline silicon guide shell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720917473.7U CN207072979U (en) | 2017-07-26 | 2017-07-26 | A kind of monocrystalline silicon guide shell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207072979U true CN207072979U (en) | 2018-03-06 |
Family
ID=61522953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720917473.7U Expired - Fee Related CN207072979U (en) | 2017-07-26 | 2017-07-26 | A kind of monocrystalline silicon guide shell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207072979U (en) |
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2017
- 2017-07-26 CN CN201720917473.7U patent/CN207072979U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180306 Termination date: 20190726 |